EP0498931B1 - Lochplatte aus monokristallinem Silizium - Google Patents

Lochplatte aus monokristallinem Silizium Download PDF

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Publication number
EP0498931B1
EP0498931B1 EP91119200A EP91119200A EP0498931B1 EP 0498931 B1 EP0498931 B1 EP 0498931B1 EP 91119200 A EP91119200 A EP 91119200A EP 91119200 A EP91119200 A EP 91119200A EP 0498931 B1 EP0498931 B1 EP 0498931B1
Authority
EP
European Patent Office
Prior art keywords
perforated plate
recess
opening
atomization
atomization opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91119200A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0498931A1 (de
Inventor
Jiri Dr.-Ing. Marek
Martin Dipl.-Ing. Maier
Hans-Peter Dipl.-Min. Trah
Juergen Dipl.-Ing. Buchholz (Fh)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP0498931A1 publication Critical patent/EP0498931A1/de
Application granted granted Critical
Publication of EP0498931B1 publication Critical patent/EP0498931B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/048—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like having a flow conduit with, immediately behind the outlet orifice, an elongated cross section, e.g. of oval or elliptic form, of which the major axis is perpendicular to the plane of the jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/042—Outlets having two planes of symmetry perpendicular to each other, one of them defining the plane of the jet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/166—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
    • F02M61/1853—Orifice plates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S239/00—Fluid sprinkling, spraying, and diffusing
    • Y10S239/19—Nozzle materials

Definitions

  • the invention is based on a perforated plate of the type described in EP-A-328281.
  • EP-A-328 281 is a perforated plate made of monocrystalline silicon, which has an etching-shaped recess in its upper end face with a square cross section parallel to the upper end face and two atomizing openings in the lower end face, which partially overlap from edge regions of the recess and form two flow openings, the hole axes of which are inclined with respect to the end faces.
  • the recess is not designed so that it has a direct guiding function for the liquid towards the flow openings in order to achieve better liquid atomization by forming flat jets.
  • a perforated plate made of monocrystalline silicon which has an elongated recess formed by etching with two parallel longitudinal surfaces but without transverse surfaces in an upper end face, wherein the recess intersects two spray openings extending to the lower end face.
  • the aim is to achieve a sharp, non-scattering ink jet.
  • a perforated plate made of monocrystalline silicon is known from the IBM Technical Disclosure Bulletin, Volume 19, No. 6, November 1976, pages 2311 to 2312, which has an elongated recess with transverse surfaces formed by etching in the upper end face, but the recess has several adjoining spray orifices intersect, the cross section of which narrows towards the lower end face in order to produce sharp-edged, little scattering ink jets.
  • the perforated plate according to the invention with the features of independent claim 1 has the advantage, on the other hand, of enabling the formation of flat jets due to the at least one elongated recess of the perforated plate opening into a metering opening and thus achieving a substantially better atomization of the fuel dispensed.
  • the formation of the elongated recesses and the atomization openings in the silicon perforated plate by etching enables high manufacturing accuracy.
  • the perforated plate according to the invention can be produced in a simple and inexpensive manner, since the production outlay is low even with the required narrow manufacturing tolerances. In the manufacturing process commonly used in semiconductor technology, the batch process, many perforated plates can be produced at the same time.
  • the size of the jet and atomization angle can be influenced by changing the cross sections and / or the etching depths of the elongate recesses and the atomization openings.
  • a fuel injector with such a perforated plate has the advantage of dispensing the fuel in a particularly finely atomized manner and thus making it possible to form a particularly homogeneous fuel-air mixture.
  • the longitudinal axis of the elongated recess runs parallel to a diagonal of the square-shaped atomizing opening connecting two opposite corners of the atomizing opening.
  • the two opposing longitudinal surfaces of the elongated recess run parallel to one another and perpendicular to the upper end face of the perforated plate and the longitudinal edges of the two longitudinal surfaces have the greatest length of all the edges of the elongated recess formed with the upper end face of the perforated plate.
  • the perforated plate has two elongated recesses arranged next to one another, each with an atomizing opening.
  • Such a perforated plate is particularly well suited for fuel injection valves for fuel injection systems of internal combustion engines with two intake valves.
  • FIG. 1 shows a partially illustrated fuel injector with a perforated plate designed according to a first embodiment
  • FIG. 2 shows a plan view of the perforated plate according to the first embodiment in the direction of arrow X in FIG. 1
  • FIG. 3 shows a section along the line III-III in FIG. 2
  • FIG 4 shows a plan view of a perforated plate according to a second exemplary embodiment
  • FIG. 5 shows a section along the line VV
  • FIG. 6 shows a section along the line VI-VI in FIG. 4, the flow course of the fuel and the jet formation being indicated in FIGS.
  • FIG. 4 to 6, 7 shows a plan view of a perforated plate according to a third exemplary embodiment, in which the flow pattern and the jet formation of the fuel are indicated
  • FIG. 8 shows a section along the line VIII-VIII in FIG. 7
  • FIG. 9 shows a plan view of a perforated plate according to a fourth exemplary embodiment
  • FIG. 10 a section along the line XX in Figure 9
  • Fig 11 shows a section along the line XI-XI in FIG. 9
  • FIG. 12 shows a section along the line XII-XII in FIG. 9
  • FIG. 13 shows a section along the line XIII-XIII in FIG.
  • FIG. 1 shows a partially illustrated fuel injector with a perforated plate according to a first exemplary embodiment, which can be used, for example, for injection systems of mixed-compression spark-ignition internal combustion engines.
  • a nozzle body 3 of the fuel injector Concentric to a longitudinal valve axis 1, a nozzle body 3 of the fuel injector has a stepped through opening 7.
  • a valve closing body 9 is arranged in the through opening 7. With its downstream end, which, for example, tapers conically downstream Sealing area 11 is formed, the valve closing body 9 interacts with a valve seat surface 13 of the stepped through opening 7 of the nozzle body 3, which tapers conically in the flow direction, for example.
  • a guide section 15 of the through opening 7 formed upstream of the valve seat surface serves to guide the valve closing body 9 on its at least one guide region 16.
  • valve closing body 9 The axial movement of the valve closing body 9 and thus the opening and closing of the valve takes place, for example, mechanically or electromagnetically in a known manner.
  • the valve seat surface 13 is connected in the downstream direction, e.g. cylindrical flow section 17, a transition section 19 widening radially outward in the flow direction and a receiving section 21 of the through opening 7, the wall of which runs parallel to the longitudinal valve axis 1.
  • a perforated plate 23 is arranged so that the perforated plate 23 is closely surrounded by the wall of the receiving section 21.
  • a protective cap 25 is arranged at the downstream end of the nozzle body 3, which surrounds the circumference of the nozzle body 3 in the region of its downstream end with a cylinder section 27 and with a radial section pointing radially inward downstream of the perforated plate 23 29 rests on a lower end face 31 of the perforated plate 23 facing away from the valve seat surface 13.
  • the protective cap 25 is held on the circumference of the nozzle body 3 by a snap connection 33.
  • a metal protective cap 25 it is also possible for a metal protective cap 25 to be attached to the circumference of the nozzle body 3 by means of laser welding.
  • the perforated plate 23 With its upper end face 35 facing the valve seat surface 13, the perforated plate 23 bears against a holding shoulder 37 of the stepped through opening 7 of the nozzle body 3, which, in the radial direction, extends from the receiving section 21 and faces the perforated plate.
  • the perforated plate 23 is made of monocrystalline silicon.
  • FIG. 2 shows a top view of the perforated plate 23 in the direction of the arrow X in FIG. 1 and FIG. 3 shows a section along the line III-III in FIG. 2.
  • the elongated recess 39 for example, partially overlaps with an atomizing opening 41, which extends to the lower end face 31 of the perforated plate 23, so that the recess 39 and the atomizing opening 41 together form a flow channel penetrating the perforated plate 23.
  • the atomization opening 41 is formed, for example, starting from the lower end face 31 of the perforated plate 23 by anisotropic etching. To reduce the manufacturing costs of such a perforated plate 23, it is possible to form the elongate recess 39 and the atomization opening 41 in a common operation by anisotropic etching on both sides. This results in identical etching depths for the elongated recess 39 and for the atomization opening 41 and thus identical extensions in the direction of the longitudinal valve axis 1.
  • the elongated recess 39 has a rectangular opening cross section on the upper end 35, which tapers towards the lower end 31 of the perforated plate 23 and tapers to the bottom 43 of the elongated recess 39.
  • the wall of the elongated recess 39 is formed in each case by two longitudinal surfaces 45 and transverse surfaces 47 which are inclined to the longitudinal axis 1 of the valve.
  • the longitudinal surfaces 45 each form a longitudinal edge 49 and the transverse surfaces 47 each form a transverse edge 51 with the upper end face 35 of the perforated plate 23, the two longitudinal edges 49 running parallel to one another and the two transverse edges 51 running parallel to one another.
  • the longitudinal edges 49 have a greater edge length than the transverse edges 51 of the elongated recess 39.
  • the elongated recess 39 has a longitudinal axis 53 and perpendicular to it a parallel to the transverse edges 51 extending transverse axis 55, both the longitudinal axis 53 and the transverse axis 55 running like axes of symmetry of the elongated recess and the longitudinal axis 53 and the transverse axis 55 intersect, for example, at a point on the valve longitudinal axis 1.
  • the, for example, rectangular atomizing opening 41 extends, for example, concentrically to the elongated recess 39 in the direction of the lower end face 31 of the perforated plate 23.
  • the cross section of the atomizing opening 41 widens in the direction of flow.
  • the atomization opening 41 has two mutually opposite longitudinal surfaces 58 which each form a longitudinal edge 57 with the lower end face 31 of the perforated plate 23.
  • the longitudinal edges 57 of the atomizing opening 41 run parallel to the longitudinal axis 53 of the elongated recess 39 and have a substantially shorter edge length than the longitudinal edges 49 of the elongated recess 39, the ratio of the edge lengths of the longitudinal edges 49 of the elongated recess 39 to the longitudinal edges 57 of the atomizing opening 41 is approximately 1.5: 1 to 10: 1.
  • a transverse edge 60 of a transverse surface 61 of the atomizing opening 41 formed with the lower end face 31 runs perpendicular to the longitudinal edges 57.
  • the transverse edges 60 also have a slightly longer edge length than the transverse edges 51 of the elongated recess 39 for manufacturing reasons, for example, by 5 to 30.
  • the transverse edges 60 of the atomization opening 41 can have an edge length that is up to twice as long as the transverse edges 51.
  • FIGS. 4 to 6 show a second exemplary embodiment according to the invention, in which the same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 3.
  • the perforated plate 23 has two elongated recesses 39 which are spaced apart from one another and which are each partially with a Overlap atomization opening 41.
  • the two elongated recesses 39 are arranged so that their two longitudinal axes 53 run parallel to one another on a common line.
  • the elongated recesses 39 and the atomizing openings 41 are designed in exactly the same way as in the first exemplary embodiment illustrated in FIGS. 1 to 3.
  • the flow pattern of the fuel is indicated by arrows 56 in order to clarify the functioning of the perforated plate according to the invention.
  • the geometry of the elongated recess 39 and the atomization opening 41, as shown in FIGS. 4 to 6, causes a deflection of the flow 56 of the fuel.
  • the flow 56 is deflected in the direction of the bottom 43, so that two flow halves of the fuel, which flow towards one another in the direction of the longitudinal axis 53, collide with one another via the atomization opening 41.
  • the fuel flow 56 is expanded and atomized in the form of a flat jet in the direction of the transverse axis 55 when it emerges from the atomizing opening 41, as indicated by dashed line 59.
  • This fuel stream which is indicated by the dashed line 59 and is emitted in a flat jet, has the advantage of particularly fine atomization.
  • the shape of the flat jet identified by the broken line 59 and the size of the atomizing angle can be influenced.
  • the width 65 of the flat jet identified by the broken line 59 also changes in the direction of the transverse axis 55 of the perforated plate 23 and thus the size of the atomization angle.
  • the perforated plate shown in FIGS. 4 to 6 according to the second exemplary embodiment is particularly suitable for use in fuel injection valves for internal combustion engines with two intake valves per cylinder, each flat jet being assigned an intake valve in accordance with the broken line 59.
  • the perforated plate 23 according to the third exemplary embodiment shown in FIGS. 7 and 8, which shows a section along the line VIII-VIII in FIG. 7, as well as the perforated plate according to the second exemplary embodiment, has two rectangular elongate recesses 39 lying next to one another, each of which is partially with a rectangular atomizing opening 41.
  • the same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 6.
  • the elongated recess 39 and the atomizing opening 41 are not formed concentrically with one another.
  • the atomization opening 41 of the left elongate recess 39 is shifted to the left and the atomization opening 41 of the right elongate recess 39 to the right.
  • the flat jet is deflected away from the transverse axis 55 towards the side of the elongated recess 39, towards which the atomizing opening 41 is displaced along the longitudinal axis 53.
  • This embodiment with the two diverging flat jets has proven to be advantageous since mixing of the two flat jets of fuel and thus mutual influencing is effectively avoided.
  • FIGS. 9 to 13 A fourth exemplary embodiment of a perforated plate according to the invention is shown in FIGS. 9 to 13.
  • the same and equivalent parts are identified by the same reference numerals as in FIGS. 1 to 8.
  • FIG. 9 shows a perforated plate 23 made of monocrystalline silicon with, for example, two geometrically identical elongate recesses 39, which are spaced apart and the lower end face 31 of FIG Perforated plate 23 facing each other partially overlap with a rectangular atomizing opening 41, the two atomizing openings 41 also having geometrically identical dimensions.
  • Figure 10 shows a section along the line XX in Figure 9
  • Figure 11 shows a section along the line XI-XI in Figure 9
  • Figure 12 shows a section along the line XII-XII in Figure 9
  • the figure 13 shows a section along the line XIII-XIII in FIG. 9.
  • the two elongate recesses 39 have a hexagonal opening cross section on the upper end face 35, which crosses in the direction of the bottom 43 tapers towards the elongated recess 39 of the lower end face 31 of the perforated plate 23.
  • the wall of the elongated recess 39 is formed by two longitudinal surfaces 45 running perpendicular to the upper end face 35 of the perforated plate 23 and four transverse surfaces 47 inclined to the longitudinal axis 1 of the valve, two transverse surfaces 47 adjoining each other.
  • the longitudinal surfaces 45 each form a longitudinal edge 49 with the upper end face 35 of the perforated plate 23 and the transverse surfaces 47 each form a transverse edge 51.
  • the two longitudinal edges 49 and two opposite transverse edges 51 each run parallel to one another.
  • the longitudinal edges 49 have a substantially longer edge length than the transverse edges 51.
  • the two transverse edges 51 of the mutually adjoining transverse surfaces 47 form a right angle to one another and have the same length.
  • transverse edges 51 are at an obtuse angle to the longitudinal edges 49 of the elongated recess 39.
  • the elongated recesses 39 Parallel to the longitudinal edges 49, the elongated recesses 39 have a longitudinal axis 53 and perpendicular to them a transverse axis 55 which run like axes of symmetry of the elongated recess 39.
  • the longitudinal axis 53 and the transverse axis 55 intersect at the center of the elongated recess 39.
  • the square, for example rectangular or square, atomizing opening 41 extends concentrically to the elongated recess 39 in the direction of the lower end face 31 of the perforated plate 23.
  • the cross section of the atomizing opening 41 widens in the direction of flow.
  • the elongated recess 39 and the atomizing opening 41 are arranged so that the longitudinal axis 53 of the elongated recess 39 runs parallel to and, for example, congruently with a diagonal 67 of the square atomizing opening 41 connecting two opposite corners of the atomizing opening 41.
  • the design of the elongated recess 39 and the atomization opening 41 causes a deflection of the fuel flow on the oblique transverse surfaces 47 and the bottom 43.
  • two deflection halves of the fuel flowing towards one another in the direction of the longitudinal axis 53 collide with one another due to the deflection at the bottom 43.
  • the shape and direction of the flat jet and the size of the atomizing angle of the fuel can also be influenced in the fourth exemplary embodiment by changing the geometry of the elongated recesses 39 and the atomizing openings 41 and their position relative to one another.
  • the perforated plate 23 according to the invention or the fuel injection valve with a perforated plate 23 according to the invention enables the dispensed fuel to be atomized very finely. Through the formation of the elongated recess 39 and the atomization opening 41 in the silicon perforated plate by etching, high manufacturing accuracy is achieved with little manufacturing effort.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fuel-Injection Apparatus (AREA)
EP91119200A 1991-02-09 1991-11-12 Lochplatte aus monokristallinem Silizium Expired - Lifetime EP0498931B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4104019A DE4104019C1 (pt) 1991-02-09 1991-02-09
DE4104019 1991-02-09

Publications (2)

Publication Number Publication Date
EP0498931A1 EP0498931A1 (de) 1992-08-19
EP0498931B1 true EP0498931B1 (de) 1995-09-20

Family

ID=6424758

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91119200A Expired - Lifetime EP0498931B1 (de) 1991-02-09 1991-11-12 Lochplatte aus monokristallinem Silizium

Country Status (7)

Country Link
US (1) US5244154A (pt)
EP (1) EP0498931B1 (pt)
JP (1) JPH04303172A (pt)
KR (1) KR100235126B1 (pt)
BR (1) BR9200428A (pt)
DE (2) DE4104019C1 (pt)
ES (1) ES2077767T3 (pt)

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KR100235126B1 (ko) 1999-12-15
KR920016149A (ko) 1992-09-24
DE4104019C1 (pt) 1992-04-23
JPH04303172A (ja) 1992-10-27
BR9200428A (pt) 1992-10-13
EP0498931A1 (de) 1992-08-19
US5244154A (en) 1993-09-14
DE59106545D1 (de) 1995-10-26
ES2077767T3 (es) 1995-12-01

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