EP0286133B1 - Einkristallstab, Verfahren und Vorrichtung zu seiner Ziehung aus einer Schmelze - Google Patents

Einkristallstab, Verfahren und Vorrichtung zu seiner Ziehung aus einer Schmelze Download PDF

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Publication number
EP0286133B1
EP0286133B1 EP88105661A EP88105661A EP0286133B1 EP 0286133 B1 EP0286133 B1 EP 0286133B1 EP 88105661 A EP88105661 A EP 88105661A EP 88105661 A EP88105661 A EP 88105661A EP 0286133 B1 EP0286133 B1 EP 0286133B1
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EP
European Patent Office
Prior art keywords
section
rod
diameter
melt
seed crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP88105661A
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English (en)
French (fr)
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EP0286133A1 (de
Inventor
Michio Kida
Kensho Sahira
Akikuni Nozoe
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Publication of EP0286133A1 publication Critical patent/EP0286133A1/de
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/2973—Particular cross section
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/2973—Particular cross section
    • Y10T428/2976—Longitudinally varying
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/298—Physical dimension

Definitions

  • This invention relates to a monocrystal rod which is utilized for producing semiconductor device, solar cell or the like as well as a method of making such a rod by pulling from a melt.
  • Examples of methods extensively used for preparing a monocrystal rod such as a silicon semiconductor or compounds semiconductor include a Czochralski method, which comprises a step of pulling a seed crystal upwards from a melt in a crucible while rotating the seed crystal and the crucible in the same or opposite direction.
  • Fig. 1 shows an example of a monocrystal rod which is prepared by the method above.
  • Numeral 1 denotes a seed crystal
  • numeral 2 denotes a monocrystal rod which has a circular cross section.
  • the monocrystal rod 2 includes a neck section 3 which is smaller in diameter than the seed crystal 1, a main rod section 4 which is cylindrical and whose diameter is the largest in the rod 2 and is equal to the diameter of the required rod, and a shoulder section 5 which is tapered for linking continuously the neck section 3 to the main rod section 4.
  • Numeral 6 denotes a bottom section of the main rod section 4 which is tapered. Only the main rod section 4 in the rod 2 can be used for producing the semiconductor chips or the like, and its diameter is determined depending on the diameter of the required rod.
  • the diameter of the main rod section 4 generally varies slightly depending on the exactness or precision of techniques of controlling the size thereof. Therefore, it is preferably similar to the diameter of the required rod, and the variation in the diameter should be as small as possible in order to efficiently prepare the main rod section 4.
  • the neck section 3 is provided so as to reduce the dislocation density of the seed crystal 1 prior to pulling up the seed crystal 1 with a predetermined diameter and thus increase the completeness thereof.
  • the neck section 3 is about 3 to 4 millimeters in diameter and about several ten millimeters in length.
  • the tensile strength of the neck section 3 is at most about 100 kgw.
  • the neck section 3 will often be damaged, with the result that ultimately the rod 2 will fall down when the rod 2 is twisted, or when force is exerted on the rod 2 in its transverse direction.
  • the apparatus for pulling the rod 2 is damaged fatally, and moreover a security problem comes about because the rod 2 fallen is very heavy and hot. Therefore, the step of pulling the rod 2 needs to be concluded before the weight of the rod 2 grows too heavy for the neck section 3 to endure the breakage or before the tensile strength caused by the weight of the rod 2 becomes close to or above to such an extent that its maximal tensile strength of the neck section 3.
  • the rod 2 is pulled with care so that the weight of the rod 2 will remain at a value considerably below the weight at which the neck section 3 has the maximal tensile strength.
  • the pulling operation is stopped and the thus-obtained rod 2 is cut out from the seed crystal 1, and then another rod 2 is pulled upward again with the seed crystal 1.
  • the rod 2 is pulled upward while feeding a limited amount of starting silicon material into a melt in a crucible from the beginning with view to avoiding the above-described difficulty.
  • the lower portion of the expensive apparatus which includes a crucible for containing a melt, a susceptor for surrounding the crucible, heating means for heating the crucible through the susceptor, and a cylinder for keeping warmth of the crucible and the susceptor together will be destroyed.
  • Another object of the present invention is to provide a monocrystal rod having a stopper section for preventing it from falling, even though force is exerted on the rod in its transverse direction by earthquakes, mechanical shocks and the like, and for preventing the lower portion of an apparatus for preparing the rod from being destroyed.
  • a further object of the present invention is to provide an apparatus for preparing the monocrystal rod above with elevated availablility.
  • Yet another object of the present invention it to provide a method of preparing the monocrystal rod above with elevated productivity.
  • a monocrystal rod pulled from a melt having a circular cross section, including a neck section which is smaller in diameter than a seed crystal, a main rod which is formed integrally with the neck section and is larger in diameter than said neck section and a shoulder section which is tapered for linking said neck section to said main rod section and has the same diameter as that of said neck section on one end and has the same diameter as that of said main rod on the other end, characterized in that said main rod section has a stopper section provided at said top portion of said main rod section, said stopper section being larger in diameter than said main rod section.
  • an apparatus for preparing a monocrystal rod having a stopper section for preventing said monocrystal rod from falling comprising a crucible for containing a melt, heating means for heating said crucible, supporting means for supporting a seed crystal and an elevator for elevating said supporting means, characterized in that said elevator includes an outer member having safety means for supporting the rod at the stopper if the rod falls and an inner member holding said supporting means.
  • a method of preparing a monocrystal rod having a stopper section for preventing said monocrystal rod from falling, using an apparatus providing safety means comprising:
  • the monocrystal rod 10 made of silicon has a circular cross section, and comprises a neck section 3 which is slender, a main rod section 4 which is cylindrical and is equal in diameter to the required rod, and a shoulder section 5 which is tapered for linking the neck section 3 to the main rod section 4.
  • the tapered bottom section 6 is formed at the bottom portion of the main rod section 4.
  • a stopper section 11, which is formed at the top portion of the main rod section 4, is larger in diameter than the rod section 4, and prevents the rod 10 from falling, or thereby preventing either the breakage of the rod itself or the lower portion of the apparatus for preparing the rod 10 due to shock given by the falling rod 10.
  • the reason why the stopper section 11 is formed at the top portion of the main rod section 4 is that the stopper section 11 having a larger diameter cannot be easily formed at the middle or the bottom portion of the main rod section 4 since in a step of pulling the main rod section 4, the speed of pulling the main rod section 4 and its temperature need to be kept constant in order to maintain the character and the diameter of the main rod section 4 uniform.
  • the main rod section 4 having the stopper section 11 at the top portion thereof, the main rod section 4 can if it happens to fall down be supported stably and safely by means of the stopper section 11 and a safety section of an apparatus, because the center of gravity of the rod 10 is situated at a position lower than the stopper section 11 and therefore the tilting of the top of the rod will be minimized, if any.
  • the above construction is advantageous in that when the main rod section 4 is being prepared, the stopper section 11 is cooled already, because the stopper section 11 is prepared before the step of pulling the main rod section 4 and therefore its mechanical strength is elevated to a level high enough to support the rod upon its falling.
  • the diameter of the stopper section 11 is set in the range from 6 mm to 6 mm plus the radius of the main rod section 4 larger than the diameter of the main rod section 4.
  • the reason why the diameter of the stopper section 11 is set up so as to be by at least 6 mm larger than the diameter of the main rod section 4 is that when the main rod section 4 is grown until the length of the main rod section 4 becomes 0 to 100 mm, the deviation between the crystallographic axis of the main rod section 4 and the ideal axis thereof often becomes about 1 to 2 mm, and moreover variation in the diameter of the main rod section 4 often becomes about 1 to 2 mm, and that there need be a gap or clearance defined between the safety section and the supporting means of the apparatus to such an extent that the main rod section 4 can be prepared, well and efficiently.
  • the reason why the diameter of the stopper section 11 is set up so as to be by 6 mm plus the radius of the main rod section 4 larger than the diameter of the main rod section 4 is that while the stopper section 11 needs to scale up with increase in the weight of the main rod section 4 corresponding the mechanical strength of the stopper section 11 on the occasion where the larger-diameter rod is prepared, the productivity when the stopper section 11 is large is decreased accordingly because the stopper section 11 cannot be utilized for producing the semiconductor chips or the like.
  • FIG. 3 there is illustrated an apparatus for preparing the rod 10, as aforementioned, as shown in Fig. 2.
  • Reference numeral 20 denotes an apparatus comprising a quartz crucible 21 which contains a melt 22 made of silicon, a susceptor 23 made of graphite housed in a furnace (not shown) in which houses the crucible 21, heating means 24 such as a resistance heater disposed so as to surround the susceptor 23, supporting means 25 which supports the seed crystal 1, and an elevator 26 including a pair of outer members or shafts 27 and 27 which moves in vertical direction while rotating itself and an inner member or a wire 28 made of metal which moves in vertical direction in a narrow space defined between the shafts 27 and 27.
  • the wire 28 is a member for holding the supporting means 25.
  • the safety means or safety sections 29 and 29 having a substantially U-shaped cross section are mounted on an inner surface of the shafts 27 and 27.
  • the safety sections 29 and 29 are members for surrounding the rod 4 while pulling it and for supporting the rod upwards at the lower end of the stopper section 11 when the neck section 3 is damaged or is cut.
  • the crucible 21 and the seed crystal 1 are rotated in reverse direction.
  • the clamp means 30 includes a pair of arcuate clamp members 31 and 31 connected to each other through a hinge 32, and drive means (not shown) for actuating the clamp members 31 and 31 either so as to be opened for disengagement as shown in Fig. 4 or so as to be shut for clamping the main rod section 4 therewith as shown in Fig. 5 corresponding to the progress of step of pulling the rod 10.
  • the hinge 32 is fixedly secured to at least one of the respective inner surfaces of the shafts 27 and 27.
  • the shaft 27 having the clamp means 30 is preferably moved downwardly so that the clamp means 30 can be situated at a position lower than the stopper section 11, and then the clamp means 30 is elevated upwards with a speed corresponding to a speed of elevating the shaft 27.
  • FIG. 6 there is illustrated a method of preparing the rod 10 as described above in Fig. 2, using the apparatus shown in Fig. 3.
  • the crucible 21 is filled with a silicon material in the form of lumps, and the crucible 21 is heated by the resistance heater 24 to a melting point of the silicon material or beyond that temperature.
  • the material contained in the crucible 21 becomes molten when heated, and the melt 22 is heated continually so as not to be cooled.
  • the seed crystal 1 is supported through the supporting means 25 by the wire 28 as shown in Fig. 6.
  • the wire 28 is moved downwardly until the lower end of the seed crystal 1 is dipped into the melt 22, and then the wire 28 is gradually elevated upwards while rotating it, so that the lower end of the seed crystal 1 is pulled out from the surface of the melt 22.
  • the speed of the pulling the seed crystal 1 is increased while maintaining the temperature of the melt 22 at a constant level, so that the neck section 3 following the lower end of the seed crystal 1 is grown so as to be smaller in diameter than the seed crystal 1 as shown in Fig. 7.
  • the speed and temperature of the melt 22 are gradually decreased, so that the shoulder section 5 following the neck section 3 is grown so as to be larger in diameter gradually.
  • the crystal growth under the condition above is continued until the diameter of the rod is sufficiently larger than the required diameter.
  • the stopper section 11 is formed at the lower portion of the shoulder section 5 in Fig. 8.
  • the speed is increased again, so that the diameter of the portion is similar to the required diameter.
  • the speed is decreased from the high level to the low level, and the low speed is maintained in order to keep the diameter of the rod 4 constant.
  • FIG. 9 there is illustrated another preferred method according to the present invention.
  • the rod 4 can be pulled upwards with supporting the seed crystal 1 and the stopper section 11 together. Namely, the seed crystal 1 is supported by the wire 28, and the stopper section 11 is directly supported by the safety sections 29 and 29 of the shafts 27 and 27, since the shaft 27 and the wire 28 are elevated upwards with the same speed together.
  • the rod 10 which is heavier and longer than even can be pulled continuously.
  • the wire 28 was moved downwardly until the lower end of the seed crystal 1 was dipped into the melt 22. Then the wire 28 was elevated upwards at a rate of 3 to 4 millimeters a minute while rotating it at 20 rpm, so that the the seed crystal 1 could be pulled out from the surface of the melt 22. Also, the crucible 21 was rotated at 10 rpm. The crucible 21 and the seed crystal 1 were rotated in opposite direction to each other. Thus, the neck section 3 was formed 1 mm in diameter and 30 mm in length.
  • the speed of pulling the seed crystal 1 was gradually decreased to a rate of 0.3 mm a minute and also the temperature of the melt 22 was decreased to a lower level in order to grow the shoulder section 5 following the neck section 3. This step was continued until the diameter of the lower end of the shoulder section 5 become by 10mm larger in diameter than 100 mm.
  • the pulling speed was increased again to a rate of 3 to 4 mm a minute so as to prevent further increase in the diameter of the rod 4, so that the diameter of the portion was similar to 100 mm.
  • the speed was decreased again to a rate of about 1.5 mm a minute.
  • the stopper section 11 was formed at the lower end of the shoulder section 5, and the shoulder section 5 formed was 8 mm in length.
  • the pulling speed was kept in order to grow the rod section 4 following the stopper section 11, and the pulling operation was continued until the main rod 4 section of 100 mm in diameter was 500 mm in length.
  • the safety sections 29 and 29 of the shafts 27 and 27 were situated by 30 mm below the stopper section 11 so as to surround the rod 10, and then the shafts 27 and 27 were elevated upwards with the same speed as the speed of elevating the wire 28.
  • the rod 10 was grown to about 720 mm in length, the neck section 3 was damaged, and then the rod 10 was fallen downwardly.
  • the rod 10 fallen was stopped by the stopper section 11, and accordingly the lower portion of the apparatus 20 including the crucible 21 made of quartz, the susceptor 23 made of graphite, the wire (not shown) disposed in the lower the apparatus, and the resistance heater 24 made of graphite or the like was not destroyed entirely.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Claims (7)

  1. Aus einer Schmelze (22) gezogener Einkristallstab, der einen kreisförmigen Querschnitt aufweist, mit einem Halsabschnitt (3), dessen Durchmesser kleiner als ein Keimkristall (1) ist, einen Hauptstab (4), der integral mit dem Halsabschnitt (3) gebildet ist und dessen Durchmesser größer als der des Halsabschnitts (3) ist, und einem Schulterabschnitt (5), der sich verjüngt, um den Halsabschnitt (3) mit dem Hauptstababschnitt (4) zu verbinden und dessen eines Ende denselben Durchmesser wie der des Halsabschnitts (3) aufweist und dessen anderes Ende denselben Durchmesser wie der des Hauptstabes (4) aufweist,
    dadurch gekennzeichnet, daß
    der Hauptstababschnitt (4) einen Halteabschnitt (11) aufweist, der an dem oberen Abschnitt des Hauptstababschnitts (4) vorgesehen ist, wobei der Durchmesser des Halteabschnitts (11) größer ist als der des Hauptstababschnitts (4).
  2. Einkristallstab nach Anspruch 1,
    dadurch gekennzeichnet, daß der Durchmesser des Halteabschnitts (11) im Bereich von 6 mm größer als bis 6 mm plus dem Radius des Hauptstababschnitts größer als der Durchmesser des Hauptstababschnitts (4).
  3. Vorrichtung zur Herstellung eines Einkristallstabs (10), der einen Halteabschnitt (11) aufweist, um das Fallen des Einkristallstabs (10) zu verhindern, mit einem Schmelztopf (21) zur Aufnahme einer Schmelze (22), einer Heizeinrichtung (24), um den Schmelztopf (21) aufzuheizen, einer Halteeinrichtung (25), um ein Keimkristall (1) zu halten, und einem Aufzug (26), um die Halteeinrichtung (25) hochzuziehen,
    dadurch gekennzeichnet, daß
    der Aufzug (26) ein äußeres Element (27) enthält, das eine Sicherungseinrichtung (29, 30) aufweist, um den Stab (10) an dem Halteabschnitt (11) zu halten, wenn der Stab (10) fällt, und ein inneres Element (28), um die Halteeinrichtung (25) zu halten.
  4. Vorrichtung (20) nach Anspruch 3,
    dadurch gekennzeichnet, daß die Sicherungseinrichtung (29, 30) im wesentlichen einen U-förmigen Querschnitt aufweist.
  5. Vorrichtung nach Anspruch 3,
    dadurch gekennzeichnet, daß die Sicherungseinrichtung (29, 30) eine Klemmeinrichtung (30) aufweist, um einen Abschnitt unterhalb des Halteabschnitts (11) des Einkristallstabs (10) einzuklemmen.
  6. Verfahren zur Herstellung eines Einkristallstabs (10), der einen Halteabschnitt (11) aufweist, um das Fallen des Einkristallstabs (10) unter Verwendung einer Vorrichtung (20) zu verhindern, die eine Sicherungseinrichtung (29) bereitstellt, mit den folgenden Schritten:
    (a) Ziehen des unteren Endes des Keimkristalls (1) aus einer Schmelze (22) in einem Schmelztopf (21), wobei der Keimkristall (1) und der Schmelztopf (21) gedreht wird;
    (b) Erhöhen einer Ziehgeschwindigkeit des Keimkristalls (1), während die Temperatur die Schmelze (22) auf einem vorgegebenen Wert gehalten wird;
    (c) langsames Erniedrigen der Ziehgeschwindigkeit und der Temperatur der Schmelze (22),
    (d) nochmaliges Vergrößern der Ziehgeschwindigkeit, so daß ein Durchmesser des Einkristallstabs (10) ähnlich einem geforderten Durchmesser wird;
    (e) nochmaliges Erniedrigen der Ziehgeschwindigkeit, nachdem der Durchmesser des Stabs (10) gleich dem geforderten Durchmesser ist.
    dadurch gekennzeichnet, daß
    der Schritt (c) das langsame Erniedrigen der Ziehgeschwindigkeit und der Temperatur der Schmelze (22) umfaßt, bis der Durchmesser des Stabs (10) größer wird als der geforderte Durchmesser.
  7. Verfahren nach Anspruch 6,
    dadurch gekennzeichnet, daß der Keimkristall (1) gezogen wird, während der Halteabschnitt (11) des Einkristallstabs (10) durch die Sicherungseinrichtung (29) unten gehalten wird.
EP88105661A 1987-04-09 1988-04-08 Einkristallstab, Verfahren und Vorrichtung zu seiner Ziehung aus einer Schmelze Expired - Lifetime EP0286133B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP87463/87 1987-04-09
JP62087463A JPS63252991A (ja) 1987-04-09 1987-04-09 落下防止保持部を有するｃｚ単結晶

Publications (2)

Publication Number Publication Date
EP0286133A1 EP0286133A1 (de) 1988-10-12
EP0286133B1 true EP0286133B1 (de) 1992-07-15

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EP88105661A Expired - Lifetime EP0286133B1 (de) 1987-04-09 1988-04-08 Einkristallstab, Verfahren und Vorrichtung zu seiner Ziehung aus einer Schmelze

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US (1) US4973518A (de)
EP (1) EP0286133B1 (de)
JP (1) JPS63252991A (de)
DE (1) DE3872745T2 (de)

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EP0449260B1 (de) * 1990-03-30 1995-08-30 Shin-Etsu Handotai Company Limited Vorrichtung zur Herstellung von Monokristallen nach dem Czochralski-Verfahren
AU8287591A (en) * 1990-06-18 1992-01-07 Charles Machine Works, Inc., The Angle sensor for a steerable boring tool
US5487355A (en) * 1995-03-03 1996-01-30 Motorola, Inc. Semiconductor crystal growth method
JP3402012B2 (ja) * 1995-04-21 2003-04-28 信越半導体株式会社 単結晶の成長方法及び装置
JP2716023B2 (ja) * 1995-11-22 1998-02-18 日本電気株式会社 シリコン単結晶育成装置
JP3402040B2 (ja) * 1995-12-27 2003-04-28 信越半導体株式会社 単結晶保持装置
JP3528448B2 (ja) * 1996-07-23 2004-05-17 信越半導体株式会社 単結晶の引上げ方法及び装置
JP3449128B2 (ja) * 1996-08-30 2003-09-22 信越半導体株式会社 単結晶成長方法
TW541365B (en) * 1996-08-30 2003-07-11 Sumitomo Sitix Corp Single crystal pulling method and single crystal pulling device
JP3478021B2 (ja) * 1996-09-18 2003-12-10 信越半導体株式会社 結晶保持装置
JP3718921B2 (ja) * 1996-09-18 2005-11-24 信越半導体株式会社 単結晶保持方法および単結晶成長方法
JP3596226B2 (ja) * 1997-03-17 2004-12-02 信越半導体株式会社 単結晶保持装置
KR19980079891A (ko) * 1997-03-27 1998-11-25 모리 레이자로 단결정 성장장치 및 단결정 성장방법
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US4973518A (en) 1990-11-27
EP0286133A1 (de) 1988-10-12
DE3872745D1 (de) 1992-08-20
JPS63252991A (ja) 1988-10-20
DE3872745T2 (de) 1993-01-07

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