EP0230348A2 - Testsonde - Google Patents

Testsonde Download PDF

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Publication number
EP0230348A2
EP0230348A2 EP19870300110 EP87300110A EP0230348A2 EP 0230348 A2 EP0230348 A2 EP 0230348A2 EP 19870300110 EP19870300110 EP 19870300110 EP 87300110 A EP87300110 A EP 87300110A EP 0230348 A2 EP0230348 A2 EP 0230348A2
Authority
EP
European Patent Office
Prior art keywords
test probe
flexible membrane
contact
leads
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19870300110
Other languages
English (en)
French (fr)
Inventor
Garrett A. Garrettson
Clinton C. Chao
Armand P. Neukermans
Brian C. Leslie
Jack D. Foster
Michael Greenstein
Farid Matta
Robert Joly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of EP0230348A2 publication Critical patent/EP0230348A2/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film

Definitions

  • This invention relates to a test probe for making contact with a plurality of input/output pads of an integrated circuit to be tested.
  • Prior art integrated circuit test probes have several significant limitations. They access a limited number of input/output pads on integrated circuits and they use low frequency signals for testing the integrated circuits.
  • Prior-art integrated circuit test probes have typically individual tungsten wires for each input/output pad on an integrated circuit. The sharp points on the end of the test wires dig into the input/output pads on the integrated circuit in order to make a low impedance electrical contact. These prior-art test probes work well when integrated circuits contain less than one hundred input/output pads. However, prior art test probes containing more than 150 test point wires have proven to be unwieldy and impractical.
  • Integrated circuits may contain more than 150 input/output pads. In addition, these pads may be located all over the surface of the chip, not just around the perimeter. Therefore, test probes for these chips must contain a corresponding number of test wires arranged to probe the entire surface of the chip.
  • Integrated circuits operate at speeds up to 100 MHz or more. Prior-art test probes severely distort such high frequency signals. This deficiency restricts testing to low frequency signals, and means that testing at operational speed must be deferred until the device is packaged.
  • the packaging typically costs three to four times the amount of the integrated circuit itself, so discarding a faulty integrated circuit at this point is costly.
  • the cost burden becomes even more oppressive when the integrated circuit is mounted on a multi-chip carrier using surface mounting techniques.
  • a surface mounted device cannot generally be tested until it is integrated into a second level package such as a multi-chip carrier with other surface mounted devices. Failures detected at this point result in expensive reworking. To avoid this, integrated circuits, to be mounted as surface mounted devices, should be tested at their operating speed on the water.
  • the invention propose a test probe for making contact with multiple contact points of an integrated circuit, having a plurality of contacts on a contact member, each contact being connected by a lead to an output terminal, wherein the contact member is a flexible membrane carrying a plurality of leads connected to a plurality of contact pads, and in that deflection means are provided for the flexible membrane.
  • Such a test probe is capable of accessing thousands of "r,put/output pads on an integrated circuit, and can also conduct high frequency tests on pre-packaged integrated circuits.
  • the invention uses integrated circuit lithography to construct leads and contact pads on the flexible membrane.
  • This invention provides versatile, relatively inexpensive and accurate contact to hundreds or thousands of input/output pads on an integrated circuit. Since the density of contact pads on the test probe is limited only by integrated circuit lithography techniques, the contact pad density of the test probe can always correspond to the transistor density of the integrated circuits.
  • Integrated circuit lithographic technology can place contact pads accurately and in complex patterns.
  • the leads which connect to the contact pads can be formed as transmission lines meeting exact specifications. Transmission line parameters can be chosen to reduce signal or voltage reflection between the leads and the tester's driving circuitry and also to reduce crosstalk between adjacent leads.
  • the flexible membrane has several advantages. Impedance matching devices and bypass capacitors can be located closer to the device under test (DUT). Also, the flexible membrane can deform to compensate for the lack of coplanarity between the DUT and the test probe.
  • the input impedance of the DUT can vary significantly from the output impedance of the leads and the tester's driving circuitry. This can be remedied by a impedance matching device located near the DUT. This will minimize distortion and maximize power transfer between the transmission line and the DUT.
  • the flexible membrane also permits a power line bypass capacitor to be located near the DUT. The proximity of these capacitors to the DUT provides a minimum inductance path between the DUT and the capacitor which stabilizes the voltage of the power supply.
  • the pressure applied to the flexible membrane forces the contact pads against the input/output pads of the DUT.
  • the pressure is applied by a spring device such as a polymeric spring.
  • the dimensions of the polymeric spring are chosen to induce a scrubbing action between the contact pads of the flexible membrane and the input/output pads of the DUT when the contact pads are forced against the DUT.
  • the contact pads of the flexible membrane can be a hard, non-oxidizing conductor or an electroplated contact coated with a hard conductor if desired.
  • the invention also provides a method of making a test probe comprising the steps of: providing a conductor pattern on one surface of a flexible membrane; providing a plurality of contact pads at appropriate spacings and each in contact with a conductor of said pattern; mounting said membrane in a frame; causing said conductor pattern to contact a further conductor pattern leading to output terminals on said frame.
  • the invention provides a method of conducting tests on integrated circuits comprising bringing a flexible membrane carrying a conductor pattern into registration with an integrated circuit to be tested; clamping the membrane in relation to the integrated circuit; and causing pressure to be applied between contact pads of said conductor pattern and contact points of the integrated circuit, during which the membrane deflects.
  • the test probe invention can be used to test the high- density substrates of multi-chip carriers. These substrates contain thousands of leads and contact pads. Money and time can be spared by testing these substrates before integrated circuits are installed on them.
  • the DUT may be an integrated circuit, substrate of a multi-chip carrier, or other device with a multiplicity of input/output pads.
  • Figure 1 is a section through a test probe 10, in which flexible membrane 1 is clamped to a printed circuit board 3 by a clamp 7.
  • the clamp 7 also guides a polymeric spring 9 against flexible membrane 1.
  • Surface mounted devices 5 used for example to match the impedance between the device under test, DUT (not shown) and leads 15 are mounted on the printed circuit board 3. However, the surface mounted devices 5 could also be mounted on the flexible membrane 1.
  • FIG 2 is a top view of the test probe 10.
  • the printed circuit board 3 in the preferred embodiment is annular. External contact pads 13 along the perimeter facilitate the mounting of the test probe 10 in a testing instrument.
  • the clamp 7 which holds the membrane on the printed circuit board is annular in shape.
  • the clamp 7 has an opening in the centre to allow alignment of the test probe 10 with the DUT.
  • the cut away, drawing of the clamp 7 in Figure 2 exposes the flexible membrane 1.
  • the flexible membrane 1 is a transparent dielectric film 21.
  • the polymeric spring 9 and the window 11 are also transparent. This facilitates the alignment of the test probe 10 with the DUT.
  • Leads 15 on the flexible membrane 1 conduct signals to and from the DUT through contact pads 17 (Fig.3).
  • Contact pads may be formed by attaching a contact to a lead 15 by soldering, as shown in Figure 7, or the contact pad 17 can be formed by a plating process.
  • FIG 3 is an enlarged drawing of the flexible membrane l.
  • the leads 15 are on a dielectric film 21.
  • a ground (earth) plane 19 is located on the other side of the dielectric membrane 21 from the leads 15.
  • the ground plane 19 does not cover the dielectric membrane 21 underneath the polymeric spring 9 and the window 11.
  • the contact pads 17 shown are formed by a plating process, but could alternatively be formed by evaporation techniques or sputtering techniques and extend through holes in the film 21 to contact the leads 15.
  • the polymeric spring 9 resides on top of the flexible membrane 1 touching the leads 15 mostly and extending into voids slightly. It provides a spring force between the leads 15 and the window 11.
  • the test probe 10 is aligned with a DUT 53 so that the contact pads 17 of the test probe 10 connect with input/output pads 55 of the DUT 53 being tested.
  • the flexible membrane 1 can have several layers of leads 15 and polyimide films 21.
  • the contact pads 17 would be on the outside surface of the flexible membrane 1. In order for contact pads 17 to reach leads several layers away from the surface, holes must be formed through the appropriate layers.
  • FIG. 4A shows the raw material from which the flexible membrane 1 is formed.
  • This material which can be purchased from a variety of vendors, has a transparent dielectric layer 21 and a conducting layer 25.
  • the dielectric layer is made out of polyimide, but many different flexible and insulating materials could be used.
  • Figure 4B shows a top view of the flexible membrane 1 after the leads 15 have been formed. Using lithographic technology, leads 15 are patterned onto the conducting layer 25, and appropriate areas etched away, for example. After the leads 15 are formed, a ground plane 19 is deposited onto the reverse surface of the polyimide layer 21 as shown in Figure 5A.
  • a variety of techniques can be used to form the ground plane 19, including a sputtering technique. Additional shielding for the leads 15 can be obtained by constructing grounded conductors on either side of the leads 15.
  • Multi-layer, flexible membranes 1 are constructed in a similar manner.
  • the flexible membrane 1 is then connected to a multilayer printed circuit board 3 as shown in Figure 6A.
  • the leads 15 are connected to their respective circuit board conductors 29 in the printed circuit board 3.
  • the connection is formed by drilling holes 31 through the polyimide layer 21 and filling these holes with a conducting material.
  • the circuit board conductors 29 are connected to an external contact pad 13 to which the tester connects.
  • Surface mounted devices 5 are placed on printed circuit board 3 and connected to the circuit board conductor 29 which connects to the leads 15.
  • the test probe contact pads 17 scrub the surface of the input/output pads 55 when forced onto them. This feature, designed into the test probe 10, removes the oxide and dirt from the input/output pads 55 so that good electrical contact is formed between them.
  • the strain parameter of the polyimide layer 21 is chosen so that the contact pads 17 will be forced sideways as they are pushed down on the input/output pads 55. Also, the parameters of the polymeric spring 9 are chosen so that it pushes the contact pads 17 sideways as it pushes the polymeric spring 9 down.
  • a clamp 7 fastens the printed circuit board 3 and the flexible membrane 1 together as shown in Figure 6B to form a low impedance connection between lead 15 and the printed circuit board conductor 29.
  • the last step in construction of the test probe 10 adds the polymeric spring 9 and the transparent window 11 shown in Figure 1.
  • the combination of the hole in the centre of the clamp 7, the window 11, the transparent polymeric spring 9, and the transparent polyimide layer 21 permits one to visually align the contact pads 17 with the input/output pads 55 of the DUT 51.
  • FIG. 7 shows an alternative embodiment of the invention.
  • the leads 15 are on the bottom side of the flexible membrane 1.
  • the contact pads 17 have one half of a ball 63 attached to them.
  • the ball 63 is constructed from a hard conductor which does not oxidize,. such as tungsten carbide.
  • Another set of holes 61 are drilled through the polyimide layer 21, ground shield 19, and printed circuit board 3 to bring the signals from lead 15 to the top surface of the printed circuit board 3 to facilitate connection to the tester.
  • the other set of holes 65 connect the ground shield 19 to the top side of the printed circuit board 3.
  • the balls 63 are forced against the DUT by pressure from a sealed chamber 67.
  • the sealed chamber 67 can be filled with a gas or with a liquid which is then pressurized to deflect the flexible membrane 1 outward. This pressurization can occur by the addition of gas or a liquid through a nozzle 73.
  • pressurization can be obtained by moving a wall of the chamber 67 inward. Since liquids are incompressible, the flexible membrane 1 will be forced outwards.
  • the alignment windows 69 and 71 are transparent so that the contact pads 17 can be aligned with the input/output pads of the DUT.
  • FIG. 8B shows a section on B-B in Figure 8A. A laser removes parts 81 of the flexible membrane 1 near the contact pads 17 and leads 15.
  • test probe 10 When using a test probe 10 to test an integrated circuit, the following steps are done.
  • the contact pads 17 are constructed on the flexible membrane 1 to match the input/output pads 55 of the DUT 53.
  • the test probe 10 is assembled with the flexible membrane 1.
  • the test probe 10 is connected to a tester through the external contact pads 13.
  • the test probe 10 is aligned with the DUT 53 so that the contact pads 17 on the flexible membrane 1 are aligned with the input/output pads 55 on the DUT 53.
  • the test probe 10 is lowered onto the DUT 53. Tester conducts tests.
  • the test probe 10 is removed from the DUT 53.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
EP19870300110 1986-01-07 1987-01-07 Testsonde Withdrawn EP0230348A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US81666686A 1986-01-07 1986-01-07
US816666 1986-01-07

Publications (1)

Publication Number Publication Date
EP0230348A2 true EP0230348A2 (de) 1987-07-29

Family

ID=25221311

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19870300110 Withdrawn EP0230348A2 (de) 1986-01-07 1987-01-07 Testsonde

Country Status (2)

Country Link
EP (1) EP0230348A2 (de)
JP (1) JPH0833413B2 (de)

Cited By (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0259161A3 (de) * 1986-09-05 1989-05-10 Tektronix, Inc. Vielfachsonde mit Leiter für integrierte Schaltkreise eines Wafers
EP0276900A3 (en) * 1987-01-30 1989-10-18 Hewlett-Packard Company Apparatus and method for aligning two surfaces
EP0361779A1 (de) * 1988-09-26 1990-04-04 Hewlett-Packard Company Mikrostreifenarchitektur für Membrantestsonde
EP0294939A3 (de) * 1987-06-09 1990-05-09 Tektronix Inc. Vielfachsonde für integrierte Schaltkreise in Scheibenform
EP0298219A3 (de) * 1987-06-08 1990-08-01 Tektronix Inc. Methode und Vorrichtung zum Prüfen von nicht-gekapselten integrierten Schaltkreisen in einem hybriden Schaltkreis
EP0304868A3 (de) * 1987-08-28 1990-10-10 Tektronix Inc. Vielfachsonde für integrierte Schaltungen in Scheibenform
EP0360396A3 (de) * 1988-09-23 1991-02-06 Hewlett-Packard Company Kraftübertragungssystem für eine Präzisions-Membran-Sonde
US5090118A (en) * 1990-07-31 1992-02-25 Texas Instruments Incorporated High performance test head and method of making
EP0508707A1 (de) * 1991-04-12 1992-10-14 Texas Instruments Incorporated Anordnung zum Testen von Schaltungen auf dem Wafer
EP0484141A3 (en) * 1990-10-31 1992-12-16 Hughes Aircraft Company Method and apparatus for testing integrated circuits
EP0629867A1 (de) * 1993-06-16 1994-12-21 Nitto Denko Corporation Sondenkonstruktion
US5512397A (en) * 1988-05-16 1996-04-30 Leedy; Glenn J. Stepper scanner discretionary lithography and common mask discretionary lithography for integrated circuits
US5621333A (en) * 1995-05-19 1997-04-15 Microconnect, Inc. Contact device for making connection to an electronic circuit device
US5623214A (en) * 1994-10-14 1997-04-22 Hughes Aircraft Company Multiport membrane probe for full-wafer testing
EP0772049A2 (de) * 1995-10-30 1997-05-07 Nitto Denko Corporation Sensorfabrikationsverfahren
US5642054A (en) * 1995-08-08 1997-06-24 Hughes Aircraft Company Active circuit multi-port membrane probe for full wafer testing
US5914613A (en) * 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6046599A (en) * 1996-05-20 2000-04-04 Microconnect, Inc. Method and device for making connection
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6343369B1 (en) 1998-09-15 2002-01-29 Microconnect, Inc. Methods for making contact device for making connection to an electronic circuit device and methods of using the same
US6496026B1 (en) 2000-02-25 2002-12-17 Microconnect, Inc. Method of manufacturing and testing an electronic device using a contact device having fingers and a mechanical ground
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
WO2003062836A1 (en) * 2002-01-22 2003-07-31 Tokyo Electron Limited Probe with trapezoidal contactor and device based on application thereof, and method of producing them
US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US7042241B2 (en) 1997-06-10 2006-05-09 Cascade Microtech, Inc. Low-current pogo probe card
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7071718B2 (en) 1995-12-01 2006-07-04 Gascade Microtech, Inc. Low-current probe card
US7075320B2 (en) 2002-11-13 2006-07-11 Cascade Microtech, Inc. Probe for combined signals
US7161363B2 (en) 2002-05-23 2007-01-09 Cascade Microtech, Inc. Probe for testing a device under test
WO2007023422A3 (en) * 2005-08-26 2007-05-31 Philips Intellectual Property Inspection method and inspection device for substrates
US7233160B2 (en) 2000-12-04 2007-06-19 Cascade Microtech, Inc. Wafer probe
US7355420B2 (en) * 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
US7368927B2 (en) 2004-07-07 2008-05-06 Cascade Microtech, Inc. Probe head having a membrane suspended probe
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7427868B2 (en) 2003-12-24 2008-09-23 Cascade Microtech, Inc. Active wafer probe
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
US7504842B2 (en) 1997-05-28 2009-03-17 Cascade Microtech, Inc. Probe holder for testing of a test device
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7619419B2 (en) 2005-06-13 2009-11-17 Cascade Microtech, Inc. Wideband active-passive differential signal probe
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
JP2017058201A (ja) * 2015-09-15 2017-03-23 株式会社ヨコオ コンタクトユニット及び検査治具
US9702906B2 (en) 2015-06-26 2017-07-11 International Business Machines Corporation Non-permanent termination structure for microprobe measurements
CN113721127A (zh) * 2021-08-18 2021-11-30 荣耀终端有限公司 一种电路板及检测系统
IT202200012032A1 (it) * 2022-06-07 2023-12-07 Technoprobe Spa Sistema di misura perfezionato per il test di dispositivi ad elevata frequenza

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JPH0252048U (de) * 1988-10-11 1990-04-13
JPH02293670A (ja) * 1989-04-14 1990-12-04 Tektronix Inc 回路基板用プローブ装置
JP2585811B2 (ja) * 1989-10-02 1997-02-26 日本電子材料株式会社 プロ―ブカ―ド
JPH0782031B2 (ja) * 1989-11-16 1995-09-06 日本電子材料株式会社 プローブカード
US5461326A (en) * 1993-02-25 1995-10-24 Hughes Aircraft Company Self leveling and self tensioning membrane test probe
JPH0763788A (ja) * 1993-08-21 1995-03-10 Hewlett Packard Co <Hp> プローブおよび電気部品／回路検査装置ならびに電気部品／回路検査方法
WO1996013728A1 (en) * 1994-10-28 1996-05-09 Nitto Denko Corporation Probe structure

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CA893307A (en) * 1972-02-15 International Business Machines Corporation Test probing methods and apparatus
JPS60260861A (ja) * 1984-06-08 1985-12-24 Hitachi Ltd プロ−ブ

Cited By (114)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0259161A3 (de) * 1986-09-05 1989-05-10 Tektronix, Inc. Vielfachsonde mit Leiter für integrierte Schaltkreise eines Wafers
EP0276900A3 (en) * 1987-01-30 1989-10-18 Hewlett-Packard Company Apparatus and method for aligning two surfaces
EP0298219A3 (de) * 1987-06-08 1990-08-01 Tektronix Inc. Methode und Vorrichtung zum Prüfen von nicht-gekapselten integrierten Schaltkreisen in einem hybriden Schaltkreis
EP0294939A3 (de) * 1987-06-09 1990-05-09 Tektronix Inc. Vielfachsonde für integrierte Schaltkreise in Scheibenform
EP0304868A3 (de) * 1987-08-28 1990-10-10 Tektronix Inc. Vielfachsonde für integrierte Schaltungen in Scheibenform
US5512397A (en) * 1988-05-16 1996-04-30 Leedy; Glenn J. Stepper scanner discretionary lithography and common mask discretionary lithography for integrated circuits
EP0360396A3 (de) * 1988-09-23 1991-02-06 Hewlett-Packard Company Kraftübertragungssystem für eine Präzisions-Membran-Sonde
EP0361779A1 (de) * 1988-09-26 1990-04-04 Hewlett-Packard Company Mikrostreifenarchitektur für Membrantestsonde
US5090118A (en) * 1990-07-31 1992-02-25 Texas Instruments Incorporated High performance test head and method of making
EP0484141A3 (en) * 1990-10-31 1992-12-16 Hughes Aircraft Company Method and apparatus for testing integrated circuits
US5313157A (en) * 1990-10-31 1994-05-17 Hughes Aircraft Company Probe for jesting an electrical circuit chip
US5872459A (en) * 1990-10-31 1999-02-16 Hughes Aircraft Company Method of testing integrated circuits
EP0508707A1 (de) * 1991-04-12 1992-10-14 Texas Instruments Incorporated Anordnung zum Testen von Schaltungen auf dem Wafer
US5576630A (en) * 1993-06-16 1996-11-19 Nitto Denko Corporation Probe structure for measuring electric characteristics of a semiconductor element
EP0629867A1 (de) * 1993-06-16 1994-12-21 Nitto Denko Corporation Sondenkonstruktion
US5623214A (en) * 1994-10-14 1997-04-22 Hughes Aircraft Company Multiport membrane probe for full-wafer testing
US5621333A (en) * 1995-05-19 1997-04-15 Microconnect, Inc. Contact device for making connection to an electronic circuit device
US6091256A (en) * 1995-05-19 2000-07-18 Microconnect, Inc. Contact device for making connection to an electronic circuit device
US5642054A (en) * 1995-08-08 1997-06-24 Hughes Aircraft Company Active circuit multi-port membrane probe for full wafer testing
EP0772049A2 (de) * 1995-10-30 1997-05-07 Nitto Denko Corporation Sensorfabrikationsverfahren
US7071718B2 (en) 1995-12-01 2006-07-04 Gascade Microtech, Inc. Low-current probe card
US6046599A (en) * 1996-05-20 2000-04-04 Microconnect, Inc. Method and device for making connection
US6307387B1 (en) 1996-08-08 2001-10-23 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6927585B2 (en) 1996-08-08 2005-08-09 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6437584B1 (en) 1996-08-08 2002-08-20 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US7541821B2 (en) 1996-08-08 2009-06-02 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US7893704B2 (en) 1996-08-08 2011-02-22 Cascade Microtech, Inc. Membrane probing structure with laterally scrubbing contacts
US7109731B2 (en) 1996-08-08 2006-09-19 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US5914613A (en) * 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US7504842B2 (en) 1997-05-28 2009-03-17 Cascade Microtech, Inc. Probe holder for testing of a test device
US7148714B2 (en) 1997-06-10 2006-12-12 Cascade Microtech, Inc. POGO probe card for low current measurements
US7068057B2 (en) 1997-06-10 2006-06-27 Cascade Microtech, Inc. Low-current pogo probe card
US7042241B2 (en) 1997-06-10 2006-05-09 Cascade Microtech, Inc. Low-current pogo probe card
US6825677B2 (en) 1998-07-14 2004-11-30 Cascade Microtech, Inc. Membrane probing system
US7761986B2 (en) 1998-07-14 2010-07-27 Cascade Microtech, Inc. Membrane probing method using improved contact
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US7400155B2 (en) 1998-07-14 2008-07-15 Cascade Microtech, Inc. Membrane probing system
US6860009B2 (en) 1998-07-14 2005-03-01 Cascade Microtech, Inc. Probe construction using a recess
US8451017B2 (en) 1998-07-14 2013-05-28 Cascade Microtech, Inc. Membrane probing method using improved contact
US7681312B2 (en) 1998-07-14 2010-03-23 Cascade Microtech, Inc. Membrane probing system
US6708386B2 (en) 1998-07-14 2004-03-23 Cascade Microtech, Inc. Method for probing an electrical device having a layer of oxide thereon
US7266889B2 (en) 1998-07-14 2007-09-11 Cascade Microtech, Inc. Membrane probing system
US6343369B1 (en) 1998-09-15 2002-01-29 Microconnect, Inc. Methods for making contact device for making connection to an electronic circuit device and methods of using the same
US6622289B2 (en) 1998-09-15 2003-09-16 Microconnect, Llc Methods for making contact device for making connection to an electronic circuit device and methods of using the same
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