EP0205054A2 - Dispositif de commande de la pression de travail sur des machines de rodage, de honage ou de polissage - Google Patents

Dispositif de commande de la pression de travail sur des machines de rodage, de honage ou de polissage Download PDF

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Publication number
EP0205054A2
EP0205054A2 EP86107366A EP86107366A EP0205054A2 EP 0205054 A2 EP0205054 A2 EP 0205054A2 EP 86107366 A EP86107366 A EP 86107366A EP 86107366 A EP86107366 A EP 86107366A EP 0205054 A2 EP0205054 A2 EP 0205054A2
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EP
European Patent Office
Prior art keywords
pressure
tool
control
adjusting device
control valve
Prior art date
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Granted
Application number
EP86107366A
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German (de)
English (en)
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EP0205054B1 (fr
EP0205054A3 (en
Inventor
Gerhard Wittstock
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Peter Wolters AG
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Peter Wolters AG
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Publication date
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Publication of EP0205054A2 publication Critical patent/EP0205054A2/fr
Publication of EP0205054A3 publication Critical patent/EP0205054A3/de
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the invention relates to a control device for the processing pressure on lapping, honing and polishing machines, in which the tool is motor-driven via a spindle, which in turn is rotatably and essentially axially fixedly mounted in a bearing component movable in the axial direction of the spindle which also acts on a double-acting actuating device via resilient means on the bearing component, and in which finally a force sensor measuring the machining pressure gives actual pressure signals to a program control which, depending on the time, the actual pressure signals with different target values. Comparing pressure signals and generating control signals for the actuating device from the comparison of the pressure signals.
  • a control device of this type is known - (DE-PS 2 950 881).
  • the spindle is rotatably mounted in an axially parallel sleeve, which in turn is mounted in the bearing component for the spindle.
  • the sleeve is elastically deformable in at least one area and carries a strain gauge, the signals of which are compared in a comparing device with target signals.
  • the actual signals reflect the prevailing machining pressure.
  • the bearing component for the spindle is designed as a double-acting hydraulic piston which is displaceably mounted in a cylinder fixed to the frame.
  • the known device has some disadvantages.
  • the force sensor is able to deliver signals that are exactly proportional to the machining pressure, but it is complex to manufacture. Furthermore, the force sensor is not readily accessible and therefore requires complex assembly and, in the case of repairs that are due, complex disassembly. Another disadvantage is that the tool is fed via a hydraulic drive. A hydraulic drive is also relatively expensive. Furthermore, a hydraulic drive is a rigid system that has a relatively rigid characteristic in its effect.
  • the aim in machines for surface finishing is not to build up the processing pressure suddenly, but gradually, while avoiding setting down too hard; Only after a certain time should the tool, for example the lapping wheel, rest on the workpiece with nominal pressure.
  • the build-up of the processing pressure should proceed as quickly as possible in order to reduce the production time.
  • the invention is therefore based on the object of providing a control device for the processing pressure on lapping, honing and polishing machines, in which an exactly reproducible, bumpless and soft structure of the processing pressure can be achieved with simple means, even if the required processing pressure is non-linear Has course.
  • At least the counterweight of the tool resilient means is formed by a pneumatic adjusting device which is connected via a control valve to a pressurized gas source and that an adjustable throttle arrangement is connected to the adjusting device for controlled ventilation of the pneumatic adjusting device depending on control signals from the program control.
  • the spring which can be an air spring, is designed, if possible, in such a way that the maximum working pressure is applied when the pneumatic adjusting device is optionally completely vented.
  • the weight of the tool for example the lapping disc, must be taken into account. In the new condition, a lapping disk usually weighs more than is necessary to apply the maximum machining pressure. In such a case, the pneumatic adjustment device must not be completely vented to atmospheric pressure.
  • the pressure in the pneumatic adjusting device can be reduced to specific values. Since pneumatic adjustment devices work almost friction-free, no bumps occur when the tool is delivered. Rather, the tool can be brought into the working position smoothly and with smooth transitions at the desired speed. Due to the negligible friction properties, almost any hysteresis is eliminated, so that the pressure builds up with the same values with every repeated work process.
  • the control device according to the invention enables surface processing with repeatable quality.
  • the program control can be used to specify the time intervals within which which desired pressure must be reached.
  • the force sensor constantly delivers the actual machining pressure, which is compared in the program control with the respective target pressure.
  • the ventilation of the pneumatic adjustment device can be achieved via the gas pressure source or the throttle arrangement.
  • the program control can contain a timer in order to determine whether the desired machining pressure has been reached at certain time intervals.
  • the time required to build up certain machining pressures can be set via the throttle arrangement.
  • the program control only determines when the actual pressure reaches a predetermined target pressure value. The time required for this is set by selecting appropriate throttle cross sections, which determine the infeed speed. If a changed course of the pressure rise is subsequently desired, the program control - now - specifies a different constellation for the throttle arrangement, i.e. a different machining pressure curve is run up to a further desired pressure value.
  • the desired curve for the machining pressure can be realized with respectively changed values for the setpoint values and feed speeds which are under operating pressure.
  • This throttle can then also ensure a smooth build-up of the processing pressure in the first phase. However, further throttles can be provided in order to give the desired direction to the course of the pressure build-up. If the desired final pressure corresponding to the operating pressure is determined by the force sensor, the venting of the pneumatic adjusting device is ended, then the machining pressure remains constant over the desired time.
  • both spring means are each formed by at least one pneumatic adjusting device and the second pneumatic adjusting device is connected to a preferably adjustable throttle via a control valve.
  • both spring means are each formed by at least one pneumatic adjusting device and the second pneumatic adjusting device is connected to a preferably adjustable throttle via a control valve.
  • two finely adjustable springs on the bearing component work against each other; they are essentially free of friction, so that recurring values for the machining pressure are obtained.
  • Pneumatic adjusting cylinders, bellows cylinders and similar pneumatic adjusting elements can serve as pneumatic adjusting devices.
  • the interposition of a lever according to an embodiment of the invention has the advantage that a desired transmission ratio can be selected. This can also compensate for a relatively small effective adjustment path. It goes without saying that the attachment of the pneumatic adjustment device to the lever is such that only negligible friction occurs. The attachment of the other lever arm to the bearing component must of course take into account that the articulation point shifts during the vertical movement of the bearing component. For example, an elongated hole can be provided in the lever, in which a pin of the bearing component engages.
  • the force sensor is preferably arranged between the pneumatic adjusting device and the lever.
  • the force between the upper penumatic adjustment device and the lever arm is always a measure of the machining pressure as long as it is below the weight of the tool. If, on the other hand, the tool is additionally pressed on, the weight of the tool must be added when determining the machining pressure, provided the pressure in the upper pneumatic adjustment device is zero.
  • the distance from the workpiece, from which a slower infeed occurs is naturally much greater than with an unused tool if the same time intervals are selected in both cases before that a rack-mounted interception switch can be actuated by the bearing component or the tool, which gives a signal to the program control for the purpose of reducing the lowering speed when the tool has approached the workpiece to a predetermined extent. If possible, the interception switch should automatically take the wear of the tool into account.
  • a further embodiment of the invention provides that an actuating rod is connected to the tool or the bearing component, on which a holding member is slidably mounted, which in turn can be optionally clamped to the actuating rod with a locking mechanism connected to the program control and the holding member is on adjustable actuator for the interceptor connected to the program control.
  • the holding member cooperates with a frame-fixed stop in such a way that when the holding member approaches the stop, the interception switch is only actuated when the actuating member is in the extended position. lowered onto the workpiece.
  • the actuator on the retainer is in the retracted position.
  • the holding element which can be moved freely on the actuating rod, lies on the stop fixed to the frame.
  • the holding element is clamped in place before the tool is moved again.
  • the actuator is extended and actuates the switch just before the stop is reached.
  • the preferably adjustable stop is selected so that the interception switch is actuated by the extended actuator when the tool is at a minimum distance from the workpiece, which is preferably very small.
  • the program control ensures that the tool is now delivered at a much lower speed.
  • a signal for the retraction of the actuator and the release of the locking mechanism is given, so that the holding member can lower on the stop. If the tool is raised after the machining process, the locking mechanism is operated again and moved to the raised position. The steps described are repeated in the further processing.
  • the use of the interception switch is not only an advantage when the spindle is in the lever position.
  • the interception switch can also be used for conventional tool holders.
  • a further embodiment of the invention provides that for lowering the spindle or the tool until shortly before the tool is placed on the workpieces, the upper adjusting device via the control valve and. Throttle arrangement is vented that when this position is reached, the control valve of the upper adjusting device is closed and the control valve is opened for ventilation of the lower adjusting device, and that when a predetermined loading pressure is reached, both control valves are closed.
  • a desired pressure build-up can be obtained by appropriate pressurization of the lower adjusting device.
  • the aim is to reach the minimum load pressure in a relatively short time.
  • the build-up of the final load pressure from the higher load pressure can also take place very quickly.
  • the optionally adjustable pressure build-up between the lower and the higher loading pressure can be done by opening the assigned control valve for a predetermined duration.
  • a different opening time leads to a different duration and size of the loading pressure - a predetermined flow cross-section of a throttle arranged between the control valve and the adjusting device provided. Only by changing the throttle cross-section can a different linear characteristic be achieved with the same opening times.
  • different volumes in the lower adjusting device require different switch-on times of the control valve in order to obtain the same build-up of the loading pressure.
  • the volume of the lower adjusting device can increase considerably due to wear of the tool, so that the duration of the delivery time is also increased considerably.
  • Another shape device of the invention therefore provides that the control valve between the lower and the higher loading pressure with the help of clock pulses of the program control is opened intermittently, the intervals of the clock pulses being variable. Larger intervals of the clock pulses cause a lower pressure to be built up within a given time interval than with shorter intervals of the clock pulses. With the help of changed clock pulse intervals, a desired pressure build-up can be achieved. The course of the pressure build-up need not be linear, ie it can be progressive or degressive, for example.
  • the clock pulses with an optionally changed interval are supplied by the program control and can therefore be programmed into a memory of the program control.
  • one embodiment of the invention provides that a tool is assigned to the tool, the bearing component or the spindle, which extends the travel of the tool caused by wear for placing on the workpieces or until the interception switch is activated and the intervals of the clock pulses are changed as a function of the path extension.
  • a lengthening due to wear causes an increase in volume in the lower adjusting device; this therefore requires a larger amount of air to achieve a desired pressure in the adjusting device.
  • the interval between the clock pulses must therefore be shortened so that the pressure build-up to the desired loading pressure is achieved within the same period.
  • the program control is otherwise designed so that the motor for the spindle is switched on when the lower loading pressure has been reached. This ensures that the tool, for example a work wheel, rests evenly on all workpieces before it is set in motion.
  • FIGS. 1 and 2 which rests on a foundation 1, is subdivided into upper part 2 with hood 3 and lower part 4 with control cabinet 5.
  • Lower part 4 has a frame 6 in which the lower lapping disc 7 does not have its own shown drive is mounted.
  • the control cabinet 5 and a column stand 8 for the upper part 2 are seated on the frame 6.
  • the upper part 2 is pivotably mounted on the column stand 8 in bearings 9.1 and 9.2.
  • a double-armed lever 10 is arranged, which is pivotably mounted in the side walls 2.1 and 2.2 of the upper part 2 by means of pivot bearings 11.1 and 11.2 (see FIG. 2).
  • elongated holes 10.1 are formed, in which roller journals 12.1, 12.2 of a quill 12 are received.
  • the quill 12 supports a work spindle 13, with the help of an upper and a lower ball bearing, which are not shown in detail.
  • the sleeve 12 is in turn centered in slide bearings 6.2, 6.3 of the upper part 2 and guided axially. It stands down over the top.
  • a protective bellows 14 which is closed at the bottom by the disk 14a surrounding the sleeve 12 serves to protect the lower bearing 6.3 and the sleeve surface.
  • the quill carries 12 at the upper end a drive consisting of a gear 15 and a motor 16.
  • an upper lapping disk is articulated in a known manner.
  • Workpieces 28 are machined between disks 7 and 27 in a known manner.
  • brackets 6.4 and 6.5 are formed opposite each other, on each of which a pneumatic adjusting element (e.g. adjusting cylinder or a bellows made of a suitable polymeric or metallic material) is supported.
  • the upper adjusting element is designated 17 and the lower one with 18.
  • mounting plates 20, 21 are attached, which are connected to pivot pins 22, 23 via screws 24.
  • At least one pivot bearing, for example that belonging to the pivot pin 23, is designed as a force sensor.
  • a compressed air source 40 is connected to the upper pneumatic adjusting element 17 via a pressure regulator 41 with a manometer 30, a control valve 24.1 and a throttle 26.1.
  • the compressed air source 40 is also connected to the lower adjusting member 18 via a control valve 24.6 and a throttle 26.6.
  • Control valves 24.2, 24.3 and 24.4 are also connected in parallel to the upper adjusting member 17, to which valves 26.2, 26.3 and 26.4 are in turn connected.
  • the throttle cross sections are adjustable.
  • a control valve 24.5 which is connected to a throttle 26.5, is also connected to the lower adjusting member 18.
  • the chokes 26.2 to 26.5 are due to atmosphere.
  • an intercept switch 43 is arranged in the upper part 2 and is actuated by an actuating rod 44 which is connected to the disk 14a.
  • the structure of the interception switch 43 is shown in FIGS. 4 to 6.
  • the actuating rod 44 connected to the disc 14a extends through the lower wall of the upper part 2 and through a support sleeve 46 which is arranged in the bore of the upper part 2.
  • a widening 47 at the upper end of the support sleeve 46 carries an electrical switch 48 and on the opposite side an adjustable stop 49.
  • a holding block 50 is slid onto the actuating rod 44.
  • an adjusting cylinder is seated in the holding block 50, the piston rod 52 of which cooperates with a clamping wedge 53a which is seated in an axially parallel longitudinal groove 54 in the actuating rod 44 which is rectangular in cross section. If the adjusting cylinder 51 is actuated, the holding block 50 is clamped on the actuating rod 44.
  • a switching cylinder 52a On the holding block 50 there is also a switching cylinder 52a, the piston rod of which carries a switching cam 53. 4, 6a and 6b the switch cam is shown in the retracted position, while in FIG. 6c it is shown in the extended position. If the holding block 50 rests on the stop 49 and the switching cam 53 is withdrawn, the switch 48 is not actuated.
  • the adjustment cylinders 51 and 52a are connected to a suitable hydraulic or pneumatic source, as indicated at 55 and 56, respectively.
  • the lapping machine shown is controlled by a program controller (see FIG. 7).
  • the individual processing steps are stored in the program control, in particular the speed when the upper lapping disk 27 is delivered, its processing pressure as a function of time, the processing time, the possible reworking time and the automatic resetting of the lapping disk for removing the workpieces and loading them with new workpieces.
  • the program control receives the signals from the interception switch 43, from the force sensor 23 and a displacement sensor 60 arranged fixed to the frame, which interacts with the lever 10. In the present example, it does not measure the entire adjustment path of the lever, but only approximately the distance that the working disk 27 travels towards the position in which it is new, ie in the unworn state, engages with the workpieces.
  • FIG. 3 shows two force-time diagrams which show the machining pressure as it is exerted on the workpieces 28 by the lapping disk 27 over time.
  • the lapping disk 27 is put on and the machining pressure is gradually applied during three linear phases.
  • the actual machining process takes place with the desired operating pressure.
  • the operating pressure is reduced more or less abruptly to a predetermined percentage. Accordingly, the machining takes place in the time t2 to t3 with reduced machining pressure.
  • the processing pressure is released at time t3.
  • the delivery of the lapping disk 27, which is in the uppermost position, begins, as indicated in FIG. 1 at 25 and indirectly in FIG. 6b shown.
  • the upper adjusting member 17 is connected to the pressure source 40 via the open control valve 24.1.
  • the Control valve 24.5 is also open, so that the lower adjusting member 18 is vented. The other valves are closed. If the switching command ON is given in the program control (see FIG. 7), the control valve 24.1 closes and the control valve 24.2 is opened by the program control.
  • the upper adjusting member 17 is quickly vented via the throttle 26.2, which is of relatively large cross section, so that the upper lapping disk 27 can lower relatively quickly due to its own weight.
  • the valves 24.3 and 24.4 can also be open, so that their throttles 26.3 and 26.4, which are located in parallel, ensure even faster ventilation.
  • the lowering process and the build-up of pressure are normally completely automatic via the program control. 3, the first lower pressure value F'01 is obtained relatively quickly when the curve is steep.
  • the lower pressure value is, for example, 250 N.
  • the disk 27 is placed softly on the workpieces 28 by hand control until the lapping disk 27 rests with a slight pressure, which is indicated by the force sensor.
  • the holding block 50 is displaceably mounted on the actuating rod 44 by corresponding actuation of the adjusting cylinder 51, and the adjusting cylinder 52a holds the switch cam 53 in the retracted position.
  • the holding block 50 therefore rests on the adjustable stop 49.
  • the holding block 50 is then clamped onto the actuating rod 44 and the lapping disk is raised again above the interception point. The actuation of the individual control valves when starting up is discussed below.
  • the lapping disk 27 is now fed in again, the holding block 50 being firmly seated on the actuating rod 44 and the switching cam 53 being extended.
  • the stroke of the switching cam 53 and the position of the contact of the switch 48 is such that the switch 48 is actuated shortly before the holding block 50 hits the stop 49. This position is shown in Fig. 6c.
  • the lapping disk 27 is lowered at a relatively high speed in the manner described above.
  • the switch signal is used in the program control to close the control valve 24.2 and to open the control valve 24.3.
  • the effective cross section of the throttle 26.3 is considerably smaller than that of the throttle 26.2, so that the venting of the upper adjusting member 17 is now correspondingly slower and the lowering speed of the lapping disk 27 is therefore very low.
  • the lapping disk 27 is therefore placed very gently on the workpieces 28.
  • the signal from the switch 48 is also used to release the holding block 50 from the clamping engagement with the actuating rod 44 and to move the switching cam 53 back into the retracted position (see FIG. 6a). The holding block 50 thus comes to rest on the stop 49 again.
  • the distance of the lapping disk 27 from the workpiece 28, from which the lowering of the disk 27 takes place at a lower speed is independent of the amount by which the lapping disk 27 is worn.
  • the size of the distance can be adjusted by the adjustable stop 49.
  • the increasing venting of the upper adjustment gear 17 via the throttle 26.3 leads to an increase in the machining pressure along the first section of the increase curve according to FIGS. 3 to F01 or F'01.
  • the slope of this section is determined by the opening cross section of the throttle 26.3, which can be changed. If the pressure F01 is reached on the solid curve, which is transmitted via the force sensor to the program control, this ensures that the valve 24.3 closes and the valve 24.4 opens.
  • the associated throttle 26.4 has a larger cross section than the throttle 26.3, so that the increase in the machining pressure takes place along a steeper curve section. If the force sensor reports the pressure F02 to the program control, the valve 24.6 is opened, - so that the lower adjusting member 18 is ventilated. This causes a steep increase in pressure.
  • the program control closes all control valves and ensures that the pressure F1 is maintained over the period t1 to t2.
  • a minimum pressure e.g. F01. This ensures that the lapping disk 27 fits snugly on the workpieces 28 before it is rotated.
  • This minimum pressure can be 250 N, for example. Only when this pressure has been reached is the motor 16 switched on and the lapping disk 27 begins to rotate.
  • the differential pressure prevailing between the adjusting members 17, 18 is proportional to the machining pressure.
  • the weight of the lapping disk 27 changes significantly over time due to wear.
  • a corresponding correction must therefore be made for program control.
  • the weight of the lapping wheel is measured again with each machining process. This happens shortly before the lapping disk 27 on the workpieces 28 touches down.
  • the pressure prevailing in the upper adjusting member 17 is proportional to the force acting on the other lever arm. Since all the parts to be carried by the lever 10 remain the same in weight except for the lapping disk, the force measured at a particular point on the adjusting element 17 represents a measure of the weight of the lapping disk 27.
  • the corresponding values in FIG the program control is always corrected and brought up to date.
  • the lapping disk 27 is tared automatically, so that intervention by the operating personnel is not necessary.
  • the processing pressure can also be built up in a modified manner. It is to be explained using the dash-dotted curve according to FIG. 3.
  • the lapping disk 27 is lowered before being placed on the workpiece in the manner described above.
  • the lapping disk is put on and the machining pressure is raised to a minimum load pressure F01 in a relatively short time.
  • control valve 24.1 is closed shortly before it is put on and the lower adjusting member 18 is placed on the pressure source 40 via the control valve 24.6.
  • the spacing of the clock pulses determines for a given interval the amount of air which, at the given pressure of the pressure source 40, flows into the This adjusts the air volume and thus the pressure build-up in the adjustment member 18.
  • the build-up of the load pressure of the lapping disk 27 can therefore be done in any way between the pressure values PO1 and F02 After the higher loading pressure F02 has been reached, the control valve 24.6 is opened continuously, and the control valve 24.2 is opened to vent the upper adjusting member 17.
  • the wear of the lapping disk 27 increases its path, which also increases the volume of the adjusting member 18. If the compressed air supply to the adjusting element were not changed, wear would lead to a change in the course of the load curve, in particular between points F01 and P02. However, the travel sensor determines the travel change due to wear and the program control compensates for this travel change by changing the pulse intervals for the clock pulses for controlling the control valve 24.6. The wear is completely compensated in this way, so that an always repeatable load pressure build-up is achieved.
  • valves 24.1 and 24.5 are opened. This means that a pressure is built up in the adjusting member 17 via the throttle 26.1, while the lower adjusting member 18 is vented via the throttle 26.5. This process takes place relatively quickly.
  • the valves close again.
  • the post-processing takes place during the time t2 to t3.
  • the valves 24.1 and 24.5 are then opened again and the lapping disk 27 moves to its uppermost position (see also FIG. 6b).
  • the upper part 2 can now be pivoted and allow removal and insertion of the workpieces.
  • the new manufacturing process then runs as described.
  • the device described was only explained in more detail for a double-disc lapping machine. It goes without saying that, for example, a single-disc tapping machine can also be controlled analogously. Furthermore, the control device can also be used on honing and polishing machines. Finally, the advantageous construction of the interception switch 43 is not limited to the actuation of the sleeve by the adjusting members 17, 18, but can also be used for other feed devices in which wear is to be compensated for.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
EP86107366A 1985-06-10 1986-05-30 Dispositif de commande de la pression de travail sur des machines de rodage, de honage ou de polissage Expired - Lifetime EP0205054B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19853520713 DE3520713A1 (de) 1985-06-10 1985-06-10 Steuervorrichtung fuer den bearbeitungsdruck an laepp-, hon- und poliermaschinen
DE3520713 1985-06-10

Publications (3)

Publication Number Publication Date
EP0205054A2 true EP0205054A2 (fr) 1986-12-17
EP0205054A3 EP0205054A3 (en) 1989-05-03
EP0205054B1 EP0205054B1 (fr) 1992-07-29

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EP86107366A Expired - Lifetime EP0205054B1 (fr) 1985-06-10 1986-05-30 Dispositif de commande de la pression de travail sur des machines de rodage, de honage ou de polissage

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US (1) US4742651A (fr)
EP (1) EP0205054B1 (fr)
DE (2) DE3520713A1 (fr)

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EP0328107A2 (fr) * 1988-02-09 1989-08-16 Wilhelm König Procédé et dispositif pour le meulage à commande numérique de surfaces décoratives, rainures décoratives ou similaires
WO1989009679A1 (fr) * 1988-04-07 1989-10-19 Staehli Arthur Werner Agencements pour lapidaires a deux disques
EP0344548A2 (fr) * 1988-05-28 1989-12-06 Peter Wolters Ag Méthode et appareillage pour le contrôle fu fonctionnement de machines à rôder ou rectifier
EP0517595A1 (fr) * 1991-06-06 1992-12-09 Commissariat A L'energie Atomique Machine de polissage à contrôle de pression
EP0601748A1 (fr) * 1992-11-26 1994-06-15 Shin-Etsu Handotai Company Limited Machine à biseauter des galettes semi-conductrices

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DE3600364A1 (de) * 1986-01-09 1987-07-16 Rexroth Mannesmann Gmbh Verfahren und vorrichtung zum ausgleich des auf einen hydraulischen antrieb wirkenden veraenderlichen gewichtes einer masse, insbesondere fuer den senkrecht stehenden antriebszylinder einer laeppmaschine
DE8916001U1 (fr) * 1989-09-12 1992-10-29 Supfina Maschinenfabrik Hentzen Gmbh & Co Kg, 5630 Remscheid, De
DE4302475A1 (de) * 1993-01-29 1994-08-04 Nagel Masch Werkzeug Verfahren zum Honen von Oberflächen
JPH07285069A (ja) * 1994-04-18 1995-10-31 Shin Etsu Handotai Co Ltd 枚葉式研磨におけるウェーハのテーパ自動除去研磨方法と装置
DE19606145B4 (de) * 1996-02-20 2004-10-28 Nagel Maschinen- Und Werkzeugfabrik Gmbh Vorrichtung zur Aufweitung eines Honwerkzeugs
US6149506A (en) * 1998-10-07 2000-11-21 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US5910041A (en) * 1997-03-06 1999-06-08 Keltech Engineering Lapping apparatus and process with raised edge on platen
US5967882A (en) * 1997-03-06 1999-10-19 Keltech Engineering Lapping apparatus and process with two opposed lapping platens
US6120352A (en) * 1997-03-06 2000-09-19 Keltech Engineering Lapping apparatus and lapping method using abrasive sheets
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
US6102777A (en) * 1998-03-06 2000-08-15 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
JP2977807B1 (ja) * 1998-07-15 1999-11-15 システム精工株式会社 研磨方法および研磨装置
JP2002154049A (ja) * 2000-11-15 2002-05-28 Fujikoshi Mach Corp 研磨方法
DE10356883A1 (de) * 2003-12-03 2005-06-30 Grob-Werke Burkhart Grob E.K. Verfahren zur Auflagekontrolle bei Werkzeugmaschinen und Auflagekontrollvorrichtung
US8696405B2 (en) * 2010-03-12 2014-04-15 Wayne O. Duescher Pivot-balanced floating platen lapping machine
CN102133732B (zh) * 2011-01-06 2013-04-03 清华大学 一种用于cmp抛光头的气路正压通路系统

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US3939610A (en) * 1973-07-30 1976-02-24 Shatai Kogiyo Co. Ltd. Device and method of grinding metallic molds and products automatically
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US3939610A (en) * 1973-07-30 1976-02-24 Shatai Kogiyo Co. Ltd. Device and method of grinding metallic molds and products automatically
DE2950881A1 (de) * 1979-12-18 1981-06-25 Fa. Peter Wolters, 2370 Rendsburg Vorrichtung zum steuern einer werkzeugmaschine, deren werkzeug gegenueber dem werkstueck um eine achse rotiert und in dieser achse vorschiebbar ist
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Cited By (8)

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Publication number Priority date Publication date Assignee Title
EP0328107A2 (fr) * 1988-02-09 1989-08-16 Wilhelm König Procédé et dispositif pour le meulage à commande numérique de surfaces décoratives, rainures décoratives ou similaires
EP0328107A3 (fr) * 1988-02-09 1990-11-07 Wilhelm König Procédé et dispositif pour le meulage à commande numérique de surfaces décoratives, rainures décoratives ou similaires
WO1989009679A1 (fr) * 1988-04-07 1989-10-19 Staehli Arthur Werner Agencements pour lapidaires a deux disques
EP0344548A2 (fr) * 1988-05-28 1989-12-06 Peter Wolters Ag Méthode et appareillage pour le contrôle fu fonctionnement de machines à rôder ou rectifier
EP0344548A3 (fr) * 1988-05-28 1990-08-16 Peter Wolters Ag Méthode et appareillage pour le contrôle fu fonctionnement de machines à rôder ou rectifier
EP0517595A1 (fr) * 1991-06-06 1992-12-09 Commissariat A L'energie Atomique Machine de polissage à contrôle de pression
FR2677291A1 (fr) * 1991-06-06 1992-12-11 Commissariat Energie Atomique Machine de polissage a controle de pression.
EP0601748A1 (fr) * 1992-11-26 1994-06-15 Shin-Etsu Handotai Company Limited Machine à biseauter des galettes semi-conductrices

Also Published As

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US4742651A (en) 1988-05-10
DE3520713C2 (fr) 1989-06-15
EP0205054B1 (fr) 1992-07-29
DE3520713A1 (de) 1986-12-11
EP0205054A3 (en) 1989-05-03
DE3686205D1 (de) 1992-09-03

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