EP0205054B1 - Dispositif de commande de la pression de travail sur des machines de rodage, de honage ou de polissage - Google Patents

Dispositif de commande de la pression de travail sur des machines de rodage, de honage ou de polissage Download PDF

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Publication number
EP0205054B1
EP0205054B1 EP86107366A EP86107366A EP0205054B1 EP 0205054 B1 EP0205054 B1 EP 0205054B1 EP 86107366 A EP86107366 A EP 86107366A EP 86107366 A EP86107366 A EP 86107366A EP 0205054 B1 EP0205054 B1 EP 0205054B1
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EP
European Patent Office
Prior art keywords
pressure
tool
control valve
control
adjusting device
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Expired - Lifetime
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EP86107366A
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German (de)
English (en)
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EP0205054A3 (en
EP0205054A2 (fr
Inventor
Gerhard Wittstock
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Peter Wolters AG
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Peter Wolters AG
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Publication of EP0205054A3 publication Critical patent/EP0205054A3/de
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/005Control means for lapping machines or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the invention relates to a control device for the processing pressure on lapping, honing and polishing machines according to the preamble of claim 1.
  • the aim of machines for surface finishing is not to build up the processing pressure suddenly, but gradually, while avoiding hard contact; Only after a certain time should the tool, such as the lapping disk, rest on the workpiece with nominal pressure. On the other hand, should the build-up of processing pressure is done as quickly as possible to reduce production time.
  • DE-B-1 114 108 From DE-B-1 114 108 it has become known to produce the machining pressure by means of a hydraulic drive. Furthermore, an intercept switch has become known from this document, which emits a signal for the purpose of delaying the lowering speed when the tool has approached the workpiece to a predetermined extent.
  • the known interception switch is a drag switch having a control curve, which interacts with a contactor. In order to take into account the different workpiece thickness or the wear of the tool, the contact assigned to the control cam must be adjusted accordingly. This is done manually.
  • the invention has for its object to provide a control device for the machining pressure on lapping, honing and polishing machines, with which the delivery of the tool and the build-up of the machining pressure takes place automatically within the shortest possible time while adapting to the workpiece thickness and the wear of the Tool.
  • the tool is first lowered onto the workpiece without being driven in the direction of rotation.
  • the actuator on the retainer is in the retracted position.
  • the holding member which can be moved freely on the actuating rod, lies on the stop fixed to the frame.
  • the holding member is clamped before the tool is moved back in.
  • the actuator is extended and actuates the switch just before the stop is reached.
  • the preferably adjustable stop is selected so that the interception switch is actuated by the extended actuator when the tool is at a minimum distance from the workpiece, which is preferably very small.
  • a force sensor measuring the machining pressure sends actual pressure signals to a force control unit which, depending on the time, compares the actual pressure signals with a respectively valid target pressure signal and generates control signals for the adjusting devices from the comparison that two pneumatic adjusting devices are provided That the first pneumatic adjusting device counteracting the dead weight of the tool is connected via a control valve to the compressed gas source and to a throttle arrangement which can be controlled via further control valves, that the program control gives control signals to these control valves for venting the first adjusting device and that the second adjusting device is connected via a control valve the gas pressure source connected and an additional control valve with an adjustable Throttle is connected.
  • the pneumatic adjustment devices are designed so that the maximum working pressure is applied when the first adjustment device is completely vented.
  • the weight of the tool for example the lapping disc, must be taken into account.
  • a lapping disk usually weighs more than is necessary to apply the maximum machining pressure. In such a case, the first adjustment device must not be completely vented to atmospheric pressure.
  • the pressure in the adjusting device can be reduced to specific values. Since pneumatic adjustment devices work almost friction-free, no bumps occur when the tool is delivered. Rather, the tool can be brought into the working position smoothly and with smooth transitions at the desired speed. As a result of the negligible friction properties, almost any hysteresis is eliminated, so that the pressure builds up with every repeated operation done with the same values.
  • the control device enables surface processing with repeatable quality.
  • the program control can be used to specify the time intervals within which which desired pressure must be reached.
  • the force sensor constantly supplies the machining pressure, which is compared in the program control with the respective target pressure.
  • the ventilation of the pneumatic adjusting device can be achieved via the gas pressure source or the throttle arrangement.
  • the program control can contain a timer in order to determine whether the desired machining pressure has been reached at certain time intervals. Alternatively, the time required to build up certain machining pressures can be set via the throttle arrangements. In this case, the program control only determines when the actual pressure reaches a predetermined target pressure.
  • the time required for this is set by selecting appropriate throttle cross sections, which determine the infeed speed. If a change in the course of the pressure increase is subsequently desired, the program control gives now another constellation for the throttle arrangement, ie a different machining pressure curve is driven up to a further desired pressure value.
  • the desired curve for the machining pressure can be realized with respectively changed values for the setpoints and feed speeds which are below the operating pressure.
  • This throttle can then also ensure a smooth build-up of the processing pressure in the first phase. However, further throttles can be provided in order to give the desired direction to the course of the pressure build-up. If the desired final pressure corresponding to the operating pressure is determined by the force sensor, the venting of the pneumatic adjusting device is ended, then the machining pressure remains constant over the desired time.
  • both spring means are each formed by at least one pneumatic adjusting device and the second pneumatic adjusting device is connected to a preferably adjustable throttle via a control valve.
  • both spring means are each formed by at least one pneumatic adjusting device and the second pneumatic adjusting device is connected to a preferably adjustable throttle via a control valve.
  • two finely adjustable springs on the bearing component work against each other; they are essentially free of friction, so that recurring values for the machining pressure are obtained.
  • Pneumatic adjusting cylinders, bellows cylinders and similar pneumatic adjusting elements can serve as pneumatic adjusting devices.
  • the interposition of a lever according to an embodiment of the invention has the advantage that a desired transmission ratio can be selected. This can also compensate for a relatively small effective adjustment path. It goes without saying that the attachment of the pneumatic adjustment device to the lever is such that only negligible friction occurs. The attachment of the other lever arm to the bearing component must of course take into account that the articulation point shifts during the vertical movement of the bearing component. For example, an elongated hole can be provided in the lever, in which a pin of the bearing component engages.
  • the force sensor is preferably arranged between the pneumatic adjusting device and the lever.
  • the force between the upper penumatic adjustment device and the lever arm is always a measure of the machining pressure as long as it is below the weight of the tool. If, on the other hand, the tool is additionally pressed on, the weight of the tool must be added when determining the machining pressure, provided the pressure in the upper pneumatic adjustment device is zero.
  • the use of the interception switch is not only an advantage when the spindle is in the lever position.
  • the interception switch can also be used for conventional tool holders.
  • a further embodiment of the invention provides that for lowering the spindle or the tool until shortly before the tool is placed on the workpieces, the upper adjusting device is vented via the control valve and the throttle arrangement, that when this position is reached the control valve of the upper adjustment device is closed and the control valve is opened to ventilate the lower adjustment device, and that when a predetermined loading pressure is reached, both control valves are closed.
  • a desired pressure build-up can be obtained by appropriately pressurizing the lower adjusting device.
  • the aim is to reach the minimum load pressure in a relatively short time.
  • the build-up of the final load pressure from the higher load pressure can also take place very quickly.
  • the optionally adjustable pressure build-up between the lower and the higher loading pressure can be done by opening the assigned control valve for a predetermined duration.
  • a different opening time leads to a different duration and size of the loading pressure - a predetermined flow cross-section of a throttle arranged between the control valve and the adjusting device provided. Only by changing the throttle cross-section can a different linear characteristic be achieved with the same opening times.
  • different volumes in the lower adjusting device require different switch-on times of the control valve in order to obtain the same build-up of the loading pressure.
  • the volume of the lower adjusting device can increase considerably due to wear of the tool, so that the duration of the delivery time is also increased considerably.
  • Another embodiment of the invention therefore provides that the control valve between the lower and the higher loading pressure with the help of clock pulses of the program control is opened in cycles, the intervals of the clock pulses being changeable. Larger intervals of the clock pulses mean that a lower pressure is built up within a given time interval than with shorter intervals of the clock pulses. With the help of changed clock pulse intervals, a desired pressure build-up can be achieved. The course of the pressure build-up need not be linear, ie it can be progressive or degressive, for example.
  • the clock pulses with an optionally changed interval are supplied by the program control and can therefore be programmed into a memory of the program control.
  • one embodiment of the invention provides that a tool is assigned to the tool, the bearing component or the spindle, which extends the travel of the tool caused by wear for placing on the workpieces or until the interception switch is activated and the intervals of the clock pulses are changed as a function of the path extension.
  • a lengthening of the path due to wear causes an increase in volume in the lower adjusting device; this therefore requires a larger amount of air to achieve a desired pressure in the adjusting device.
  • the interval between the clock pulses must therefore be shortened so that the pressure build-up to the desired loading pressure is achieved within the same period.
  • the program control is otherwise designed so that the motor for the spindle is switched on when the lower loading pressure has been reached. This ensures that the tool, for example a Working disc, evenly on all workpieces before it is set in motion.
  • the two-disc lapping machine shown in FIGS. 1 and 2 which rests on a foundation 1, is subdivided into an upper part 2 with a hood 3 and a lower part 4 with a control cabinet 5.
  • the lower part 4 has a frame 6 in which the lower lapping disc 7 does not have its own drive shown is mounted.
  • the control cabinet 5 and a column stand 8 for the upper part 2 are seated on the frame 6.
  • the upper part 2 is pivotably mounted on the column stand 8 in bearings 9.1 and 9.2.
  • a double-armed lever 10 is arranged, which is pivotably mounted in the side walls 2.1 and 2.2 of the upper part 2 by means of pivot bearings 11.1 and 11.2 (see FIG. 2).
  • elongated holes 10.1 are formed, in which roller journals 12.1, 12.2 of a quill 12 are received.
  • the quill 12 supports a work spindle 13, with the help of an upper and a lower ball bearing, which are not shown in detail.
  • the sleeve 12 is in turn centered in slide bearings 6.2, 6.3 of the upper part 2 and guided axially. It stands down over the top.
  • the quill 12 carries a drive consisting of a gear 15 and a motor 16.
  • an upper lapping disk 27 is articulated in a known manner. Workpieces 28 are machined between disks 7 and 27 in a known manner.
  • brackets 6.4 and 6.5 are formed opposite each other, on each of which a pneumatic adjusting element (for example adjusting cylinder or a bellows made of a suitable polymeric or metallic material) is supported.
  • the upper adjusting element is designated 17 and the lower one with 18.
  • At the other end of the pneumatic adjusting members 17, 18, mounting plates 20, 21 are attached, which are connected to pivot pins 22, 23 by screws 24.
  • At least one pivot bearing, for example the one belonging to the pivot pin 23, is designed as a force sensor.
  • a compressed air source 40 is connected to the upper pneumatic adjusting element 17 via a pressure regulator 41 with a manometer 30, a control valve 24.1 and a throttle 26.1.
  • the compressed air source 40 is also connected to the lower adjusting member 18 via a control valve 24.6 and a throttle 26.6.
  • Control valves 24.2, 24.3 and 24.4 are also connected in parallel to the upper adjusting member 17, to which valves 26.2, 26.3 and 26.4 are in turn connected.
  • the throttle cross sections are adjustable.
  • a control valve 24.5, which is connected to a throttle 26.5, is also connected to the lower adjusting member 18.
  • the chokes 26.2 to 26.5 are due to atmosphere.
  • an intercept switch 43 is arranged in the upper part 2 and is actuated by an actuating rod 44 which is connected to the disk 14a.
  • the structure of the interception switch 43 is shown in FIGS. 4 to 6.
  • the actuating rod 44 connected to the disc 14a extends through the lower wall of the upper part 2 and through a support sleeve 46 which is arranged in the bore of the upper part 2.
  • a widening 47 at the upper end of the support sleeve 46 carries an electrical switch 48 and on the opposite side an adjustable stop 49.
  • a holding block 50 is slid onto the actuating rod 44.
  • an adjusting cylinder is seated in the holding block 50, the piston rod 52 of which cooperates with a clamping wedge 53a which is seated in an axially parallel longitudinal groove 54 in the actuating rod 44 which is rectangular in cross section. If the adjusting cylinder 51 is actuated, the holding block 50 and the actuating rod 44 are clamped.
  • a switching cylinder 52a On the holding block 50 there is also a switching cylinder 52a, the piston rod of which carries a switching cam 53.
  • the switch cam In Figs. 4, 6a and 6b the switch cam is shown in the retracted position, while in FIG. 6c it is shown in the extended position. Is the holding block 50 at the stop 49 and the switch cam 53 is retracted, the switch 48 is not actuated.
  • the adjustment cylinders 51 and 52a are connected to a suitable hydraulic or pneumatic source, as indicated at 55 and 56, respectively.
  • the lapping machine shown is controlled by a program controller (see FIG. 7).
  • the individual processing steps are stored in the program control, in particular the speed when the upper lapping disk 27 is delivered, its processing pressure as a function of time, the processing time, the possible reworking time and the automatic resetting of the lapping disk for removing the workpieces and loading them with new workpieces.
  • the program control receives the signals from the interception switch 43, from the force sensor 23 and a displacement sensor 60 arranged fixed to the frame, which interacts with the lever 10.
  • the program control receives the signals from the interception switch 43, from the force sensor 23 and a displacement sensor 60 arranged fixed to the frame, which interacts with the lever 10.
  • he does not measure the entire adjustment path of the lever, but only approximately the distance which the working disk 27 travels compared to the position in which it is new, i.e. in the unworn state, engages with the workpieces.
  • Fig. 3 two force-time diagrams are shown, the Reproduce the machining pressure as exerted by the lapping disk 27 on the workpieces 28 over time.
  • the lapping disk 27 is put on and the machining pressure is gradually applied during three linear phases.
  • the actual machining process takes place with the desired operating pressure.
  • the operating pressure is reduced more or less abruptly to a predetermined percentage. Accordingly, the machining takes place in the time t2 to t3 with reduced machining pressure.
  • the processing pressure is released at time t3.
  • the delivery of the lapping disk 27, which is in the uppermost position, begins, as indicated in FIG. 1 at 25 and indirectly in FIG. 6b shown.
  • the upper adjusting member 17 is connected to the pressure source 40 via the open control valve 24.1.
  • the control valve 24.5 is also open, so that the lower adjusting member 18 is vented.
  • the other valves are closed. Is in given the program control (see FIG. 7) the switching command ON, the control valve 24.1 closes and the control valve 24.2 is opened by the program control.
  • the upper adjusting member 17 is quickly vented via the throttle 26.2, which is of relatively large cross section, so that the upper lapping disk 27 can lower relatively quickly due to its own weight.
  • the valves 24.3 and 24.4 can also be open, so that their throttles 26.3 and 26.4, which are located in parallel, ensure even faster ventilation.
  • the lowering process and the build-up of pressure are normally completely automatic via the program control. 3, the first lower pressure value F'01 is obtained relatively quickly when the curve is steep.
  • the lower pressure value is, for example, 250 N.
  • the disc 27 is placed softly on the workpieces 28 by hand control until the lapping disc 27 rests with a slight pressure, which is indicated by the force sensor.
  • the holding block 50 is displaceably mounted on the actuating rod 44 by corresponding actuation of the adjusting cylinder 51, and the adjusting cylinder 52a holds the switch cam 53 in the retracted position.
  • the holding block 50 therefore rests on the adjustable stop 49.
  • the holding block 50 is then attached to the actuating rod 44 clamped and the lapping wheel raised again over the interception point. The actuation of the individual control valves when starting up is discussed below.
  • the lapping disk 27 is now fed in again, the holding block 50 being seated firmly on the actuating rod 44 and the switching cam 53 being extended.
  • the stroke of the switching cam 53 and the position of the contact of the switch 48 is such that the switch 48 is actuated shortly before the holding block 50 hits the stop 49. This position is shown in Fig. 6c.
  • the lapping disk 27 is lowered at a relatively high speed in the manner described above.
  • the switch signal is used in the program control to close the control valve 24.2 and to open the control valve 24.3.
  • the effective cross section of the throttle 26.3 is considerably smaller than that of the throttle 26.2, so that the venting of the upper adjusting member 17 is now correspondingly slower and the lowering speed of the lapping disk 27 is therefore very low.
  • the lapping disk 27 is therefore placed very gently on the workpieces 28.
  • the signal from the switch 48 is also used to release the holding block 50 from the clamping engagement with the actuating rod 44 and to move the switching cam 53 back into the retracted position (see FIG. 6a). The holding block 50 thus comes back to the stop 49 lie.
  • the distance of the lapping disk 27 from the workpiece 28, from which the lowering of the disk 27 takes place at a lower speed is independent of the amount by which the lapping disk 27 is worn.
  • the size of the distance can be adjusted by the adjustable stop 49.
  • the increasing venting of the upper adjustment gear 17 via the throttle 26.3 leads to an increase in the machining pressure along the first section of the increase curve according to FIG. 3 to Fol or F'01.
  • the slope of this section is determined by the opening cross section of the throttle 26.3, which can be changed. If pressure Fo1 is reached on the solid curve, which is transmitted via the force sensor to the program control, this ensures that valve 24.3 closes and valve 24.4 opens.
  • the associated throttle 26.4 has a larger cross section than the throttle 26.3, so that the increase in the machining pressure takes place along a steeper curve section. If the force sensor reports the pressure Fo2 to the program control, the valve 24.6 is opened so that the lower adjusting member 18 is ventilated. This causes a steep increase in pressure.
  • the program control closes all control valves and ensures that the pressure F1 is maintained over the period t1 to t2.
  • the drive motor 16 for the spindle 13 is only switched on when the force sensor reports a minimum pressure to the program control, for example Fo1. This ensures that the lapping disk 27 fits snugly on the workpieces 28 before it is rotated. This minimum pressure can be 250 N, for example. Only when this pressure has been reached is the motor 16 switched on and the lapping disk 27 begins to rotate.
  • the differential pressure prevailing between the adjusting members 17, 18 is proportional to the machining pressure.
  • the weight of the lapping disk 27 changes significantly over time due to wear.
  • a corresponding correction must therefore be made for program control.
  • the weight of the lapping wheel is measured again with each machining process. This happens shortly before the lapping disk 27 touches the workpieces 28.
  • the pressure prevailing in the upper adjusting member 17 is proportional to the force acting on the other lever arm. Since all the parts to be carried by the lever 10 remain the same in weight except for the lapping disk, the force measured at a particular point on the adjusting member 17 represents a measure of the weight of the lapping disk 27.
  • the corresponding values in FIG the program control is always corrected and brought up to date. The The lapping disk 27 is tared automatically, so that intervention by the operating personnel is not necessary.
  • the processing pressure can also be built up in a modified manner. It is to be explained using the dash-dotted curve according to FIG. 3.
  • the lapping disk 27 is lowered before being placed on the workpiece in the manner described above.
  • the lapping disk is put on and the machining pressure is raised to a minimum load pressure F'01 in a relatively short time.
  • the control valve 24.1 is closed shortly before it is put on and the lower adjusting member 18 is placed on the pressure source 40 via the control valve 24.6. This is done in such a way that the control valve 24.6 is clocked via the program control, ie it is switched on or off in pulses.
  • the distance between the clock pulses determines the amount of air that flows into the adjusting element 21 at the given pressure of the pressure source 40.
  • This amount of air and thus the pressure build-up in the adjusting member 18 can be controlled in any way.
  • the load pressure of the lapping disk 27 can therefore be built up in any manner between the pressure values F'01 and F'02. It is understood that the loading pressure F'02 can also take other absolute values.
  • the control valve 24.6 is opened continuously.
  • the control valve 24.2 is opened in order to vent the upper adjusting element 17. In this way there is a rapid increase in pressure up to the final loading pressure F'1. Due to the rapid increase, there may be slight deviations in the load due to the inertia of the valves. Therefore, with the help of the program control, the setpoint F'1 is re-clocked again.
  • the wear of the lapping disk 27 increases its path, which also increases the volume of the adjusting member 18. If there were no change in the compressed air supply to the adjusting element, wear leads to a changed course of the load curve, in particular between points F'01 and F'02. However, the travel sensor determines the travel change due to wear and the program control compensates for this travel change by changing the pulse intervals for the clock pulses for controlling the control valve 24.6. The wear is completely compensated in this way, so that an always repeatable load pressure build-up is achieved.
  • valves 24.1 and 24.5 are opened. This means that a pressure is built up in the adjusting member 17 via the throttle 26.1, while the lower adjusting member 18 is vented via the throttle 26.5. This process takes place relatively quickly.
  • the valves close again. The post-processing takes place during the time t2 to t3.
  • the valves 24.1 and 24.5 are then opened again and the lapping disk 27 moves to its uppermost position (see also FIG. 6b).
  • the upper part 2 can now be pivoted and allow removal and insertion of the workpieces.
  • the new manufacturing process then runs as described.
  • the device described was only explained in more detail for a double-disc lapping machine. It goes without saying that, for example, a single-disc lapping machine can also be controlled analogously. Furthermore, the control device can also be used on honing and polishing machines. Finally, the advantageous structure of the interception switch 43 is not limited to the actuation of the sleeve by the adjusting members 17, 18, but can also be used for other feed devices in which wear is to be compensated for.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Claims (10)

  1. Dispositif de commande de la pression de travail des machines de rodage, de honage et de polissage, pour lequel l'outil (27) présente une surface de travail disposée horizontalement et est entraîné par un moteur par l'intermédiaire d'une broche verticale (13), qui, de son côté, est montée tournante, mais fixe axialement, dans une pièce de palier (12), mobile suivant la direction de l'axe de la broche (13),
    dispositif de commande dans lequel, de plus, des dispositifs de positionnement (17, 18), actionnés par un fluide, agissent sur la pièce de palier (12), dans les deux sens opposés, pour abaisser l'outil (27) sur la pièce à usiner (28) maintenue dans une fixation, ainsi que pour relever l'outil (27) de la pièce à usiner (28),
    et dans lequel il est prévu un interrupteur (43), solidaire du bâti et actionné par la pièce de palier (12) et par l'outil (27), et qui émet un signal dans le but de ralentir la vitesse d'abaissement quand l'outil (27) s'est approché de la pièce à usiner (28) dans une mesure prédéterminée,
    caractérisé en ce qu'à la pièce de palier (12) est reliée une tige de commande (44), sur laquelle est monté, coulissant axialement, un organe d'arrêt (50) qui, de son côté peut s'ajuster et se bloquer sur la tige de commande (44) grâce à un mécanisme de blocage (51) raccordé à la commande de programme,
    en ce que l'organe d'arrêt (50) présente un organe de commande (52a) pour un contacteur (48), organe qui est réglable en position et raccordé à la commande de programme,
    en ce que l'organe d'arrêt (50) a une action conjuguée avec une butée (49), fixe par rapport au bâti, et en ce que, lorsque l'organe d'arrêt (50) est au contact avec la butée (49), le contacteur (48) n'est actionné que si l'organe de commande (52a) est en position sortie.
  2. Dispositif suivant la revendication 1, caractérisé en ce qu'un capteur d'effort (23), mesurant la pression de travail, émet des signaux, correspondant à la valeur réelle mesurée, vers une unité de commande de programme qui, en fonction du temps, compare les signaux correspondant à la valeur réelle avec un signal de consigne en vigueur pour le cas concerné et, à partir de cette comparaison, émet un signal de commande pour les dispositifs de positionnement (17, 18),
    en ce que deux dispositifs pneumatiques de positionnement (17, 18) sont prévus,
    en ce que le premier de ceux-ci, (17), agissant en sens inverse du poids propre de l'outil (27), est relié, par l'intermédiaire d'une soupape de commande (24.1) à une source de gaz comprimé (40) et à un dispositif d'étranglement commandé par d'autres soupapes de commande (24.2, 24.3, 24.4),
    en ce que la commande de programme émet des signaux de réglage vers ces soupapes de commande pour purger le premier dispositif de positionnement (17),
    et en ce que le deuxième dispositif de positionnement (18) est raccordé, par l'intermédiaire d'une soupape de commande (24.6), à la source de gaz comprimé (40) et, par l'intermédiaire d'une autre soupape de commande (24.5), à un étranglement réglable (26.5).
  3. Dispositif suivant la revendication 2, caractérisé en ce qu'au premier dispositif de positionnement (17), sont reliés au moins deux étranglements, de préférence réglables (26.2, 26.3) par l'intermédiaire de soupapes de commande (24.2, 24.3) et constituent ainsi le dispositif d'étranglement.
  4. Dispositif suivant la revendication 2 ou la revendication 3, caractérisé en ce que la pièce de palier (12) est suspendue à un bras d'un levier à double bras (10) et le dispositif pneumatique de positionnement agit sur l'autre bras du levier.
  5. Dispositif suivant la revendication 4, caractérisé en ce que le capteur d'effort est disposé entre le dispositif de positionnement (17) et le levier (10).
  6. Dispositif suivant l'une quelconque des revendications 1 à 5, caractérisé en ce que, pour abaisser la broche (13), ou l'outil (27), tout juste avant l'appui de l'outil (27) sur les pièces à usiner, le dispositif de positionnement supérieur (17) est purgé par l'intermédiaire de la soupape de commande (24.2) et du dispositif d'étranglement, mais qu'ensuite la soupape de commande (24.1) pour le dispositif de positionnement supérieur (17), est fermée et la soupape de commande (24.6) pour la purge du dispositif de positionnement inférieur (18) est ouverte,
    et en ce que, de plus, lorsqu'a été atteinte une pression de charge plus élevée (F02, F'02), la soupape de commande (24.2) est ouverte pour la purge du dispositif de positionnement (17) et, lorsqu'a été atteinte une pression supérieure prédéterminée (F1, F'1), pour la charge finale, les deux soupapes de commande (24.6 et 24.2) sont fermées.
  7. Dispositif suivant la revendication 6, caractérisé en ce que la soupape de commande (24.6) s'ouvre, cycliquement entre les pressions inférieure et supérieure de charge (respectivement F01, F'01 et F02, F'02) grâce à des impulsions cycliques de commande de la commande de programme, avec possibilité de modifier les écarts des impulsions de commande.
  8. Dispositif suivant la revendication 7, caractérisé en ce qu'à l'outil (27), à la pièce de palier (10) ou à la broche (12) est associé un indicateur de course (60), qui détermine l'allongement, provoqué par l'usure, de la course de l'outil (27), jusqu'au contact avec les pièces à usiner ou jusqu'à la réponse de l'interrupteur d'arrêt (43), et en ce que les écarts des impulsions de commande sont modifiés en fonction de l'allongement de la course.
  9. Dispositif suivant la revendication 7 ou la revendication 8, caractérisé en ce qu'au cas où la pression finale de charge (F1, F'1) s'écarte de la valeur de consigne après la fermeture des soupapes de commande (24.2, 24.6), la soupape de commande (24.6) s'ouvre cycliquement, sous l'effet des impulsions cycliques de commande, assez longtemps pour que la pression finale de charge (F1, F'1) ait définitivement atteint la valeur de consigne.
  10. Dispositif suivant l'une quelconque des revendications 6 à 9, caractérisé en ce que la commande de programme enclenche le moteur (16) pour la broche (13) quand la pression inférieure de charge (F01, F'01) a été atteinte.
EP86107366A 1985-06-10 1986-05-30 Dispositif de commande de la pression de travail sur des machines de rodage, de honage ou de polissage Expired - Lifetime EP0205054B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3520713 1985-06-10
DE19853520713 DE3520713A1 (de) 1985-06-10 1985-06-10 Steuervorrichtung fuer den bearbeitungsdruck an laepp-, hon- und poliermaschinen

Publications (3)

Publication Number Publication Date
EP0205054A2 EP0205054A2 (fr) 1986-12-17
EP0205054A3 EP0205054A3 (en) 1989-05-03
EP0205054B1 true EP0205054B1 (fr) 1992-07-29

Family

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Application Number Title Priority Date Filing Date
EP86107366A Expired - Lifetime EP0205054B1 (fr) 1985-06-10 1986-05-30 Dispositif de commande de la pression de travail sur des machines de rodage, de honage ou de polissage

Country Status (3)

Country Link
US (1) US4742651A (fr)
EP (1) EP0205054B1 (fr)
DE (2) DE3520713A1 (fr)

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DE3803855C1 (fr) * 1988-02-09 1989-03-16 Wilhelm 8372 Zwiesel De Koenig
CH684321A5 (de) * 1988-04-07 1994-08-31 Arthur Werner Staehli Einrichtung an einer Zweischeibenläppmaschine.
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
DE8916001U1 (fr) * 1989-09-12 1992-10-29 Supfina Maschinenfabrik Hentzen Gmbh & Co Kg, 5630 Remscheid, De
FR2677291B1 (fr) * 1991-06-06 1995-12-15 Commissariat Energie Atomique Machine de polissage a controle de pression.
US5538463A (en) * 1992-11-26 1996-07-23 Shin-Etsu Handotai Co., Ltd. Apparatus for bevelling wafer-edge
DE4302475A1 (de) * 1993-01-29 1994-08-04 Nagel Masch Werkzeug Verfahren zum Honen von Oberflächen
JPH07285069A (ja) * 1994-04-18 1995-10-31 Shin Etsu Handotai Co Ltd 枚葉式研磨におけるウェーハのテーパ自動除去研磨方法と装置
DE19606145B4 (de) * 1996-02-20 2004-10-28 Nagel Maschinen- Und Werkzeugfabrik Gmbh Vorrichtung zur Aufweitung eines Honwerkzeugs
US5910041A (en) * 1997-03-06 1999-06-08 Keltech Engineering Lapping apparatus and process with raised edge on platen
US5967882A (en) * 1997-03-06 1999-10-19 Keltech Engineering Lapping apparatus and process with two opposed lapping platens
US6149506A (en) * 1998-10-07 2000-11-21 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US6120352A (en) * 1997-03-06 2000-09-19 Keltech Engineering Lapping apparatus and lapping method using abrasive sheets
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
US6102777A (en) * 1998-03-06 2000-08-15 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
JP2977807B1 (ja) * 1998-07-15 1999-11-15 システム精工株式会社 研磨方法および研磨装置
JP2002154049A (ja) * 2000-11-15 2002-05-28 Fujikoshi Mach Corp 研磨方法
DE10356883A1 (de) * 2003-12-03 2005-06-30 Grob-Werke Burkhart Grob E.K. Verfahren zur Auflagekontrolle bei Werkzeugmaschinen und Auflagekontrollvorrichtung
US8696405B2 (en) * 2010-03-12 2014-04-15 Wayne O. Duescher Pivot-balanced floating platen lapping machine
CN102133732B (zh) * 2011-01-06 2013-04-03 清华大学 一种用于cmp抛光头的气路正压通路系统

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Also Published As

Publication number Publication date
EP0205054A3 (en) 1989-05-03
DE3520713C2 (fr) 1989-06-15
EP0205054A2 (fr) 1986-12-17
DE3520713A1 (de) 1986-12-11
DE3686205D1 (de) 1992-09-03
US4742651A (en) 1988-05-10

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