EP0205054A3 - Pressure control means for lapping, honing and polishing machines - Google Patents

Pressure control means for lapping, honing and polishing machines Download PDF

Info

Publication number
EP0205054A3
EP0205054A3 EP86107366A EP86107366A EP0205054A3 EP 0205054 A3 EP0205054 A3 EP 0205054A3 EP 86107366 A EP86107366 A EP 86107366A EP 86107366 A EP86107366 A EP 86107366A EP 0205054 A3 EP0205054 A3 EP 0205054A3
Authority
EP
European Patent Office
Prior art keywords
honing
lapping
control means
pressure control
polishing machines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86107366A
Other languages
German (de)
Other versions
EP0205054B1 (en
EP0205054A2 (en
Inventor
Gerhard Wittstock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peter Wolters AG
Original Assignee
Peter Wolters AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Peter Wolters AG filed Critical Peter Wolters AG
Publication of EP0205054A2 publication Critical patent/EP0205054A2/en
Publication of EP0205054A3 publication Critical patent/EP0205054A3/en
Application granted granted Critical
Publication of EP0205054B1 publication Critical patent/EP0205054B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
EP86107366A 1985-06-10 1986-05-30 Pressure control means for lapping, honing and polishing machines Expired - Lifetime EP0205054B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3520713 1985-06-10
DE19853520713 DE3520713A1 (en) 1985-06-10 1985-06-10 CONTROL DEVICE FOR MACHINING PRESSURE ON LAEPP, HONING AND POLISHING MACHINES

Publications (3)

Publication Number Publication Date
EP0205054A2 EP0205054A2 (en) 1986-12-17
EP0205054A3 true EP0205054A3 (en) 1989-05-03
EP0205054B1 EP0205054B1 (en) 1992-07-29

Family

ID=6272861

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86107366A Expired - Lifetime EP0205054B1 (en) 1985-06-10 1986-05-30 Pressure control means for lapping, honing and polishing machines

Country Status (3)

Country Link
US (1) US4742651A (en)
EP (1) EP0205054B1 (en)
DE (2) DE3520713A1 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3600364A1 (en) * 1986-01-09 1987-07-16 Rexroth Mannesmann Gmbh METHOD AND DEVICE FOR COMPENSATING THE VARIABLE WEIGHT OF A SIZE ACTING ON A HYDRAULIC DRIVE, ESPECIALLY FOR THE RIGHT-STANDING DRIVE CYLINDER OF A LEAPING MACHINE
DE3803855C1 (en) * 1988-02-09 1989-03-16 Wilhelm 8372 Zwiesel De Koenig
CH684321A5 (en) * 1988-04-07 1994-08-31 Arthur Werner Staehli Device on a double disk.
DE3818159A1 (en) * 1988-05-28 1989-11-30 Wolters Peter Fa METHOD AND DEVICE FOR CONTROLLING THE OPERATION OF HONING OR GRINDING MACHINES
DE3930457A1 (en) * 1989-09-12 1991-03-21 Supfina Maschf Hentzen Fine working or micro-finishing method
FR2677291B1 (en) * 1991-06-06 1995-12-15 Commissariat Energie Atomique PRESSURE CONTROL POLISHING MACHINE.
US5538463A (en) * 1992-11-26 1996-07-23 Shin-Etsu Handotai Co., Ltd. Apparatus for bevelling wafer-edge
DE4302475A1 (en) * 1993-01-29 1994-08-04 Nagel Masch Werkzeug Controlling surface finish of honed face
JPH07285069A (en) * 1994-04-18 1995-10-31 Shin Etsu Handotai Co Ltd Automatic taper removal polishing method and device of wafer in sheet type polishing
DE19606145B4 (en) * 1996-02-20 2004-10-28 Nagel Maschinen- Und Werkzeugfabrik Gmbh Device for expanding a honing tool
US5910041A (en) * 1997-03-06 1999-06-08 Keltech Engineering Lapping apparatus and process with raised edge on platen
US6120352A (en) * 1997-03-06 2000-09-19 Keltech Engineering Lapping apparatus and lapping method using abrasive sheets
US6149506A (en) * 1998-10-07 2000-11-21 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US5967882A (en) * 1997-03-06 1999-10-19 Keltech Engineering Lapping apparatus and process with two opposed lapping platens
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
US6102777A (en) * 1998-03-06 2000-08-15 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
JP2977807B1 (en) * 1998-07-15 1999-11-15 システム精工株式会社 Polishing method and polishing apparatus
JP2002154049A (en) 2000-11-15 2002-05-28 Fujikoshi Mach Corp Polishing method
DE10356883A1 (en) * 2003-12-03 2005-06-30 Grob-Werke Burkhart Grob E.K. Method for supporting control of machine tools and support control device
US8696405B2 (en) * 2010-03-12 2014-04-15 Wayne O. Duescher Pivot-balanced floating platen lapping machine
CN102133732B (en) * 2011-01-06 2013-04-03 清华大学 Air course positive pressure access systems for CMP polishing head

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1114108B (en) * 1958-12-22 1961-09-21 Wolters Peter Fa Equipment on lapping machines to initiate the lapping process
US3939610A (en) * 1973-07-30 1976-02-24 Shatai Kogiyo Co. Ltd. Device and method of grinding metallic molds and products automatically
DE2950881A1 (en) * 1979-12-18 1981-06-25 Fa. Peter Wolters, 2370 Rendsburg DEVICE FOR CONTROLLING A MACHINE TOOL, THE TOOL OF WHICH IS ROTATED BY AN AXLE WITH REGARD TO THE WORKPIECE AND WHICH CAN BE ADDRESSED IN THIS AXIS

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2747338A (en) * 1952-09-12 1956-05-29 Newall Eng Machines for lapping and grinding
US3173230A (en) * 1962-12-03 1965-03-16 Wolters Peter Lapping machine
US3665647A (en) * 1970-11-20 1972-05-30 Clair Mfg Co Automatic buff pressure setting
DE2204581B2 (en) * 1972-02-01 1977-12-08 Wolters, Peter, 4020 Mettmann CONTROL DEVICE FOR THE PROCESSING PRESSURE OF A LAEPP OR HONING MACHINE
DE2224459C3 (en) * 1972-05-19 1980-04-10 Henke, August, 4925 Kalletal Control device on a surface grinding machine for fine or regrinding of workpieces made of stone, in particular cast stone, in the flow
JPS5919672A (en) * 1982-07-19 1984-02-01 Toshiba Corp Working pressure control device for polishing apparatus
DE3306841A1 (en) * 1983-02-26 1984-08-30 Mafell Maschinenfabrik Rudolf Mey GmbH & Co KG, 7238 Oberndorf METHOD FOR PROCESSING A MATERIAL OR WORKPIECE BY MEANS OF ULTRASOUND AND DEVICE FOR IMPLEMENTING THE METHOD

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1114108B (en) * 1958-12-22 1961-09-21 Wolters Peter Fa Equipment on lapping machines to initiate the lapping process
US3939610A (en) * 1973-07-30 1976-02-24 Shatai Kogiyo Co. Ltd. Device and method of grinding metallic molds and products automatically
DE2950881A1 (en) * 1979-12-18 1981-06-25 Fa. Peter Wolters, 2370 Rendsburg DEVICE FOR CONTROLLING A MACHINE TOOL, THE TOOL OF WHICH IS ROTATED BY AN AXLE WITH REGARD TO THE WORKPIECE AND WHICH CAN BE ADDRESSED IN THIS AXIS

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 8, Nr. 112 (M-298)[1549], 25. Mai 1984; & JP-A-59 19 672 (TOKYO SHIBAURA DENKI K.K.) 01-02-1984 *

Also Published As

Publication number Publication date
EP0205054B1 (en) 1992-07-29
DE3520713C2 (en) 1989-06-15
US4742651A (en) 1988-05-10
DE3686205D1 (en) 1992-09-03
DE3520713A1 (en) 1986-12-11
EP0205054A2 (en) 1986-12-17

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