FR2677291B1 - PRESSURE CONTROL POLISHING MACHINE. - Google Patents
PRESSURE CONTROL POLISHING MACHINE.Info
- Publication number
- FR2677291B1 FR2677291B1 FR9106867A FR9106867A FR2677291B1 FR 2677291 B1 FR2677291 B1 FR 2677291B1 FR 9106867 A FR9106867 A FR 9106867A FR 9106867 A FR9106867 A FR 9106867A FR 2677291 B1 FR2677291 B1 FR 2677291B1
- Authority
- FR
- France
- Prior art keywords
- pressure control
- polishing machine
- control polishing
- machine
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9106867A FR2677291B1 (en) | 1991-06-06 | 1991-06-06 | PRESSURE CONTROL POLISHING MACHINE. |
EP19920401533 EP0517595B1 (en) | 1991-06-06 | 1992-06-04 | Polishing machine with pressure control |
DE1992604558 DE69204558T2 (en) | 1991-06-06 | 1992-06-04 | Polishing machine with pressure control. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9106867A FR2677291B1 (en) | 1991-06-06 | 1991-06-06 | PRESSURE CONTROL POLISHING MACHINE. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2677291A1 FR2677291A1 (en) | 1992-12-11 |
FR2677291B1 true FR2677291B1 (en) | 1995-12-15 |
Family
ID=9413542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR9106867A Expired - Fee Related FR2677291B1 (en) | 1991-06-06 | 1991-06-06 | PRESSURE CONTROL POLISHING MACHINE. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0517595B1 (en) |
DE (1) | DE69204558T2 (en) |
FR (1) | FR2677291B1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2137459T3 (en) | 1994-08-09 | 1999-12-16 | Ontrak Systems Inc | LINEAR POLISHING AND METHOD FOR PLANNING SEMICONDUCTIVE PILLS. |
US5593344A (en) * | 1994-10-11 | 1997-01-14 | Ontrak Systems, Inc. | Wafer polishing machine with fluid bearings and drive systems |
US6083082A (en) * | 1999-08-30 | 2000-07-04 | Lam Research Corporation | Spindle assembly for force controlled polishing |
CN106475885A (en) * | 2016-10-24 | 2017-03-08 | 无锡市明骥智能机械有限公司 | Workpiece polishing mechanism |
CN107081669B (en) * | 2017-05-22 | 2019-05-24 | 山东鲁发橡塑制品集团有限公司 | A kind of plastic parts burnishing device |
CN112605848A (en) * | 2020-11-29 | 2021-04-06 | 厦门理工学院 | Electromagnetic polishing disk mechanism with adjustable gravity center and polishing method |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2539561A (en) * | 1946-12-13 | 1951-01-30 | John M Wolfskill | Piezoelectric crystal lapping apparatus |
US2799974A (en) * | 1954-05-14 | 1957-07-23 | Corning Glass Works | Polishing apparatus |
JPS6090668A (en) * | 1983-10-19 | 1985-05-21 | Seiko Epson Corp | Mirror surface polishing method |
DE3520713A1 (en) * | 1985-06-10 | 1986-12-11 | Fa. Peter Wolters, 2370 Rendsburg | CONTROL DEVICE FOR MACHINING PRESSURE ON LAEPP, HONING AND POLISHING MACHINES |
US4811522A (en) * | 1987-03-23 | 1989-03-14 | Gill Jr Gerald L | Counterbalanced polishing apparatus |
CH684321A5 (en) * | 1988-04-07 | 1994-08-31 | Arthur Werner Staehli | Device on a double disk. |
JPH01310859A (en) * | 1988-06-09 | 1989-12-14 | Toyoda Mach Works Ltd | Polishing machining device |
-
1991
- 1991-06-06 FR FR9106867A patent/FR2677291B1/en not_active Expired - Fee Related
-
1992
- 1992-06-04 DE DE1992604558 patent/DE69204558T2/en not_active Expired - Fee Related
- 1992-06-04 EP EP19920401533 patent/EP0517595B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69204558T2 (en) | 1996-04-18 |
EP0517595B1 (en) | 1995-09-06 |
FR2677291A1 (en) | 1992-12-11 |
DE69204558D1 (en) | 1995-10-12 |
EP0517595A1 (en) | 1992-12-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse | ||
ST | Notification of lapse |