FR2677291B1 - polishing machine pressure control. - Google Patents

polishing machine pressure control.

Info

Publication number
FR2677291B1
FR2677291B1 FR9106867A FR9106867A FR2677291B1 FR 2677291 B1 FR2677291 B1 FR 2677291B1 FR 9106867 A FR9106867 A FR 9106867A FR 9106867 A FR9106867 A FR 9106867A FR 2677291 B1 FR2677291 B1 FR 2677291B1
Authority
FR
Grant status
Grant
Patent type
Prior art keywords
pressure control
polishing machine
machine pressure
electromagnet
bracket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9106867A
Other languages
French (fr)
Other versions
FR2677291A1 (en )
Inventor
Andre Baldy
Gerard Barrois
Henri Blanc
Marcel Dominiak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a l'Energie Atomique et aux Energies Alternatives
Original Assignee
Commissariat a l'Energie Atomique et aux Energies Alternatives
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/30Work carriers for single side lapping of plane surfaces

Abstract

The machine of the invention comprises a bracket (50) supporting an electromagnet (56), an articulated arm (70) with a specimen holder head (86) and a pressure sensor (62). Application to the production of magnetic read and write heads. <IMAGE>
FR9106867A 1991-06-06 1991-06-06 polishing machine pressure control. Expired - Fee Related FR2677291B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9106867A FR2677291B1 (en) 1991-06-06 1991-06-06 polishing machine pressure control.

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
FR9106867A FR2677291B1 (en) 1991-06-06 1991-06-06 polishing machine pressure control.
DE1992604558 DE69204558T2 (en) 1991-06-06 1992-06-04 Polishing machine with pressure force control.
EP19920401533 EP0517595B1 (en) 1991-06-06 1992-06-04 Polishing machine with pressure control
DE1992604558 DE69204558D1 (en) 1991-06-06 1992-06-04 Polishing machine with pressure force control.

Publications (2)

Publication Number Publication Date
FR2677291A1 true FR2677291A1 (en) 1992-12-11
FR2677291B1 true FR2677291B1 (en) 1995-12-15

Family

ID=9413542

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9106867A Expired - Fee Related FR2677291B1 (en) 1991-06-06 1991-06-06 polishing machine pressure control.

Country Status (3)

Country Link
EP (1) EP0517595B1 (en)
DE (2) DE69204558T2 (en)
FR (1) FR2677291B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2137459T3 (en) 1994-08-09 1999-12-16 Ontrak Systems Inc Polished linear method for the planarization of semiconductor wafers.
US5593344A (en) * 1994-10-11 1997-01-14 Ontrak Systems, Inc. Wafer polishing machine with fluid bearings and drive systems
US6083082A (en) * 1999-08-30 2000-07-04 Lam Research Corporation Spindle assembly for force controlled polishing
CN106475885A (en) * 2016-10-24 2017-03-08 无锡市明骥智能机械有限公司 Workpiece polishing mechanism

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2539561A (en) * 1946-12-13 1951-01-30 John M Wolfskill Piezoelectric crystal lapping apparatus
US2799974A (en) * 1954-05-14 1957-07-23 Corning Glass Works Polishing apparatus
JPS6090668A (en) * 1983-10-19 1985-05-21 Seiko Epson Corp Mirror surface polishing method
DE3520713C2 (en) * 1985-06-10 1989-06-15 Peter Wolters Ag, 2370 Rendsburg, De
US4811522A (en) * 1987-03-23 1989-03-14 Gill Jr Gerald L Counterbalanced polishing apparatus
WO1989009679A1 (en) * 1988-04-07 1989-10-19 Staehli Arthur Werner Device for a twin-disk lapping machine
JPH01310859A (en) * 1988-06-09 1989-12-14 Toyoda Mach Works Ltd Polishing machining device

Also Published As

Publication number Publication date Type
DE69204558T2 (en) 1996-04-18 grant
DE69204558D1 (en) 1995-10-12 grant
FR2677291A1 (en) 1992-12-11 application
EP0517595B1 (en) 1995-09-06 grant
EP0517595A1 (en) 1992-12-09 application

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Legal Events

Date Code Title Description
ST Notification of lapse
ST Notification of lapse