EA200300390A1 - Способ осаждения тонких пленок посредством лазерной абляции - Google Patents
Способ осаждения тонких пленок посредством лазерной абляцииInfo
- Publication number
- EA200300390A1 EA200300390A1 EA200300390A EA200300390A EA200300390A1 EA 200300390 A1 EA200300390 A1 EA 200300390A1 EA 200300390 A EA200300390 A EA 200300390A EA 200300390 A EA200300390 A EA 200300390A EA 200300390 A1 EA200300390 A1 EA 200300390A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- target
- deposition
- particles
- jet
- evaporated
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
- C23C14/0611—Diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Способ осаждения тонкой пленки на подложку (2), согласно которому осуществляют абляцию мишени (16) лазерным пучком (12) для создания струи (19) частиц испаряемого вещества, проходящей в направлении распространения от поверхности (17) мишени. Лазерный пучок фокусируют на конечном расстоянии (d) перед поверхностью (17) мишени и внутри струи (19), тем самым сообщая дополнительную энергию частицам испаряемого вещества в струе (19). Мишень можно также вращать с высокой скоростью, чтобы сообщать частицам испаряемого вещества предварительно определенную составляющую скорости, которая обуславливает отклонение более медленно движущихся частиц испаряемого вещества и препятствует их осаждению на подложке. Способ предназначен для формирования алмазной пленки и применяется в изготовлении микросхем, устройствах визуального отображения, преобразования солнечной энергии, оптики, фотоники, защитных поверхностях, медицине и инструментах для резки и сверления.Международная заявка была опубликована вместе с отчетом о международном поиске.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPR0261A AUPR026100A0 (en) | 2000-09-20 | 2000-09-20 | Deposition of thin films by laser ablation |
PCT/AU2001/001179 WO2002024972A1 (en) | 2000-09-20 | 2001-09-20 | Deposition of thin films by laser ablation |
Publications (2)
Publication Number | Publication Date |
---|---|
EA200300390A1 true EA200300390A1 (ru) | 2003-10-30 |
EA006092B1 EA006092B1 (ru) | 2005-08-25 |
Family
ID=3824329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EA200300390A EA006092B1 (ru) | 2000-09-20 | 2001-09-20 | Способ осаждения тонких пленок посредством лазерной абляции |
Country Status (14)
Country | Link |
---|---|
US (1) | US20040033702A1 (ru) |
EP (1) | EP1332239A4 (ru) |
JP (1) | JP2004509233A (ru) |
KR (1) | KR20030045082A (ru) |
CN (1) | CN1291059C (ru) |
AU (1) | AUPR026100A0 (ru) |
CA (1) | CA2456871A1 (ru) |
EA (1) | EA006092B1 (ru) |
HK (1) | HK1060158A1 (ru) |
IL (1) | IL154914A0 (ru) |
MX (1) | MXPA03002387A (ru) |
MY (1) | MY134928A (ru) |
TW (1) | TW574399B (ru) |
WO (1) | WO2002024972A1 (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2685665C1 (ru) * | 2017-11-17 | 2019-04-22 | федеральное государственное бюджетное образовательное учреждение высшего образования "Алтайский государственный университет" | Способ получения тонких алмазных пленок |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
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US20050067389A1 (en) * | 2003-09-25 | 2005-03-31 | Greer James A. | Target manipulation for pulsed laser deposition |
US20080160217A1 (en) * | 2005-02-23 | 2008-07-03 | Pintavision Oy | Pulsed Laser Deposition Method |
CN1316058C (zh) * | 2005-03-24 | 2007-05-16 | 上海交通大学 | 溅射TiO2使聚合物微流芯片表面改性的方法 |
JP4500941B2 (ja) * | 2005-03-24 | 2010-07-14 | 独立行政法人産業技術総合研究所 | クラスター膜製造方法および製造装置 |
JP5163920B2 (ja) * | 2005-03-28 | 2013-03-13 | 住友電気工業株式会社 | ダイヤモンド単結晶基板の製造方法及びダイヤモンド単結晶基板 |
FI20060178L (fi) * | 2006-02-23 | 2007-08-24 | Picodeon Ltd Oy | Pinnoitusmenetelmä |
RU2467092C2 (ru) * | 2006-02-23 | 2012-11-20 | Пикодеон Лтд Ой | Способ нанесения покрытия и металлическое изделие, снабженное покрытием |
WO2007096460A2 (en) * | 2006-02-23 | 2007-08-30 | Picodeon Ltd Oy | Surface treatment technique and surface treatment apparatus associated with ablation technology |
FI20060177L (fi) * | 2006-02-23 | 2007-08-24 | Picodeon Ltd Oy | Menetelmä tuottaa hyvälaatuisia pintoja ja hyvälaatuisen pinnan omaava tuote |
FI20060181L (fi) * | 2006-02-23 | 2007-08-24 | Picodeon Ltd Oy | Menetelmä tuottaa pintoja ja materiaalia laserablaation avulla |
US7608308B2 (en) * | 2006-04-17 | 2009-10-27 | Imra America, Inc. | P-type semiconductor zinc oxide films process for preparation thereof, and pulsed laser deposition method using transparent substrates |
RU2316612C1 (ru) * | 2006-06-15 | 2008-02-10 | ООО "Объединенный центр исследований и разработок" | Способ получения пленочных покрытий посредством лазерной абляции |
ATE510042T1 (de) * | 2007-11-21 | 2011-06-15 | Otb Solar Bv | Verfahren und system zur kontinuierlichen oder halbkontinuierlichen laserunterstützen abscheidung |
PL2159300T3 (pl) * | 2008-08-25 | 2012-06-29 | Solmates Bv | Sposób osadzania materiału |
CN107149689A (zh) | 2009-11-10 | 2017-09-12 | 免疫之光有限责任公司 | 对可辐射固化介质进行固化的系统和产生光的方法 |
CN103014631B (zh) * | 2012-12-19 | 2014-08-20 | 河北师范大学 | 一种彩色Pr(Sr0.1Ca0.9)2Mn2O7薄膜的制备方法 |
RU2527113C1 (ru) * | 2013-03-04 | 2014-08-27 | Игорь Валерьевич Белашов | Способ нанесения аморфного алмазоподобного покрытия на лезвия хирургических скальпелей |
CN103196774B (zh) * | 2013-04-03 | 2015-02-18 | 大连理工大学 | 一种测量材料耐烧蚀特性的装置 |
US20150017758A1 (en) * | 2013-07-11 | 2015-01-15 | Mikhael Reginevich | Systems, methods, and media for laser deposition |
CN103668085A (zh) * | 2013-11-29 | 2014-03-26 | 武汉理工大学 | 脉冲激光沉积装置 |
EP2910664B1 (en) * | 2014-02-21 | 2019-04-03 | Solmates B.V. | Device for depositing a material by pulsed laser deposition and a method for depositing a material with the device |
FI126769B (en) * | 2014-12-23 | 2017-05-15 | Picodeon Ltd Oy | Lighthouse type scanner with a rotating mirror and a circular target |
WO2016205750A1 (en) * | 2015-06-18 | 2016-12-22 | Kevin Kremeyer | Directed energy deposition to facilitate high speed applications |
RU2614330C1 (ru) * | 2015-11-09 | 2017-03-24 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Алтайский государственный университет" | Способ получения тонкой наноалмазной пленки на стеклянной подложке |
CN113369695B (zh) | 2017-11-15 | 2024-01-23 | 格拉纳特研究有限公司 | 金属熔滴喷射系统 |
CN108342697A (zh) * | 2018-01-11 | 2018-07-31 | 中国科学院微电子研究所 | 一种脉冲激光沉积装置及其方法 |
GB2585621B (en) * | 2018-09-24 | 2022-11-16 | Plasma App Ltd | Carbon materials |
RU197802U1 (ru) * | 2019-05-06 | 2020-05-28 | Федор Владимирович Кашаев | Устройство для формирования наночастиц методом импульсной лазерной абляции мишени в жидкости |
CN114311356A (zh) * | 2021-12-31 | 2022-04-12 | 华侨大学 | 动能辅助激光诱导等离子体加工装置及方法 |
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JPS63227766A (ja) * | 1986-10-27 | 1988-09-22 | Hitachi Ltd | 超微粒子膜の形成方法 |
US4987007A (en) * | 1988-04-18 | 1991-01-22 | Board Of Regents, The University Of Texas System | Method and apparatus for producing a layer of material from a laser ion source |
DD274451A1 (de) * | 1988-07-29 | 1989-12-20 | Hochvakuum Dresden Veb | Verfahren zur aufloesung bzw. entfernung von droplets aus dem plasmastrom einer lasergezuendeten vakuum-bogenentladung |
US4981717A (en) * | 1989-02-24 | 1991-01-01 | Mcdonnell Douglas Corporation | Diamond like coating and method of forming |
DE3914476C1 (ru) * | 1989-05-02 | 1990-06-21 | Forschungszentrum Juelich Gmbh, 5170 Juelich, De | |
JP3255469B2 (ja) * | 1992-11-30 | 2002-02-12 | 三菱電機株式会社 | レーザ薄膜形成装置 |
WO1994026425A1 (en) * | 1993-05-17 | 1994-11-24 | Mcdonnell Douglas Corporation | Laser absorption wave deposition process |
JPH07166333A (ja) * | 1993-12-16 | 1995-06-27 | Matsushita Electric Ind Co Ltd | レーザ・アブレーション装置 |
US5411772A (en) * | 1994-01-25 | 1995-05-02 | Rockwell International Corporation | Method of laser ablation for uniform thin film deposition |
US5660746A (en) * | 1994-10-24 | 1997-08-26 | University Of South Florida | Dual-laser process for film deposition |
US5747120A (en) * | 1996-03-29 | 1998-05-05 | Regents Of The University Of California | Laser ablated hard coating for microtools |
US5858478A (en) * | 1997-12-02 | 1999-01-12 | The Aerospace Corporation | Magnetic field pulsed laser deposition of thin films |
AU6431199A (en) * | 1998-10-12 | 2000-05-01 | Regents Of The University Of California, The | Laser deposition of thin films |
-
2000
- 2000-09-20 AU AUPR0261A patent/AUPR026100A0/en not_active Abandoned
-
2001
- 2001-09-20 US US10/380,843 patent/US20040033702A1/en not_active Abandoned
- 2001-09-20 KR KR10-2003-7004078A patent/KR20030045082A/ko active IP Right Grant
- 2001-09-20 CA CA002456871A patent/CA2456871A1/en not_active Abandoned
- 2001-09-20 IL IL15491401A patent/IL154914A0/xx not_active IP Right Cessation
- 2001-09-20 MX MXPA03002387A patent/MXPA03002387A/es active IP Right Grant
- 2001-09-20 MY MYPI20014414A patent/MY134928A/en unknown
- 2001-09-20 TW TW90123241A patent/TW574399B/zh not_active IP Right Cessation
- 2001-09-20 EA EA200300390A patent/EA006092B1/ru not_active IP Right Cessation
- 2001-09-20 CN CNB018160085A patent/CN1291059C/zh not_active Expired - Fee Related
- 2001-09-20 EP EP01971485A patent/EP1332239A4/en not_active Withdrawn
- 2001-09-20 JP JP2002529562A patent/JP2004509233A/ja active Pending
- 2001-09-20 WO PCT/AU2001/001179 patent/WO2002024972A1/en active IP Right Grant
-
2004
- 2004-04-22 HK HK04102851A patent/HK1060158A1/xx not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2685665C1 (ru) * | 2017-11-17 | 2019-04-22 | федеральное государственное бюджетное образовательное учреждение высшего образования "Алтайский государственный университет" | Способ получения тонких алмазных пленок |
Also Published As
Publication number | Publication date |
---|---|
MXPA03002387A (es) | 2003-10-14 |
WO2002024972A1 (en) | 2002-03-28 |
US20040033702A1 (en) | 2004-02-19 |
EP1332239A1 (en) | 2003-08-06 |
EA006092B1 (ru) | 2005-08-25 |
TW574399B (en) | 2004-02-01 |
CA2456871A1 (en) | 2002-03-28 |
HK1060158A1 (en) | 2004-07-30 |
AUPR026100A0 (en) | 2000-10-12 |
EP1332239A4 (en) | 2007-01-10 |
CN1461355A (zh) | 2003-12-10 |
CN1291059C (zh) | 2006-12-20 |
IL154914A0 (en) | 2003-10-31 |
JP2004509233A (ja) | 2004-03-25 |
MY134928A (en) | 2008-01-31 |
KR20030045082A (ko) | 2003-06-09 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): AM AZ BY KZ KG MD TJ TM |
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TC4A | Change in name of a patent proprietor in a eurasian patent |
Designated state(s): AM AZ BY KZ KG MD TJ TM |
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MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
Designated state(s): RU |