ATE510042T1 - Verfahren und system zur kontinuierlichen oder halbkontinuierlichen laserunterstützen abscheidung - Google Patents

Verfahren und system zur kontinuierlichen oder halbkontinuierlichen laserunterstützen abscheidung

Info

Publication number
ATE510042T1
ATE510042T1 AT07121181T AT07121181T ATE510042T1 AT E510042 T1 ATE510042 T1 AT E510042T1 AT 07121181 T AT07121181 T AT 07121181T AT 07121181 T AT07121181 T AT 07121181T AT E510042 T1 ATE510042 T1 AT E510042T1
Authority
AT
Austria
Prior art keywords
continuous
laser
semi
assisted deposition
continuous laser
Prior art date
Application number
AT07121181T
Other languages
English (en)
Inventor
Franciscus Cornelius Dings
Woutherus Johannes Maria Brok
Original Assignee
Otb Solar Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otb Solar Bv filed Critical Otb Solar Bv
Application granted granted Critical
Publication of ATE510042T1 publication Critical patent/ATE510042T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
AT07121181T 2007-11-21 2007-11-21 Verfahren und system zur kontinuierlichen oder halbkontinuierlichen laserunterstützen abscheidung ATE510042T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07121181A EP2065485B1 (de) 2007-11-21 2007-11-21 Verfahren und System zur kontinuierlichen oder halbkontinuierlichen Laserunterstützen Abscheidung

Publications (1)

Publication Number Publication Date
ATE510042T1 true ATE510042T1 (de) 2011-06-15

Family

ID=38885305

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07121181T ATE510042T1 (de) 2007-11-21 2007-11-21 Verfahren und system zur kontinuierlichen oder halbkontinuierlichen laserunterstützen abscheidung

Country Status (6)

Country Link
US (1) US20100310788A1 (de)
EP (1) EP2065485B1 (de)
KR (1) KR20100100889A (de)
CN (1) CN101910452A (de)
AT (1) ATE510042T1 (de)
WO (1) WO2009067008A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9246299B2 (en) * 2011-08-04 2016-01-26 Martin A. Stuart Slab laser and amplifier
US10364489B2 (en) 2016-09-15 2019-07-30 The Regents Of The University Of California Apparatus and methods for deposition of materials on interior surfaces of hollow components
CN108342697A (zh) * 2018-01-11 2018-07-31 中国科学院微电子研究所 一种脉冲激光沉积装置及其方法
EP3540090A1 (de) * 2018-03-12 2019-09-18 Solmates B.V. Verfahren zur gepulsten laserabscheidung
DE102018127262A1 (de) * 2018-10-31 2020-04-30 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Beschichtungsvorrichtung sowie Verfahren zum Beschichten eines Substrats
CN109862684B (zh) * 2018-12-21 2020-07-10 南京大学 单一尺寸强流团簇脉冲束产生方法
TWI719516B (zh) * 2019-06-26 2021-02-21 馗鼎奈米科技股份有限公司 大氣沉積方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5019552A (en) * 1990-02-20 1991-05-28 The United States Of America As Represented By The United States Department Of Energy Long-laser-pulse method of producing thin films
US5304281A (en) 1992-10-23 1994-04-19 Alfred University Laser deposition of cubic cadmium sulfide films
US6503578B1 (en) * 2000-05-05 2003-01-07 National Science Council Method for preparing ZnSe thin films by ion-assisted continuous wave CO2 laser deposition
AUPR026100A0 (en) * 2000-09-20 2000-10-12 Tamanyan, Astghik Deposition of thin films by laser ablation

Also Published As

Publication number Publication date
CN101910452A (zh) 2010-12-08
EP2065485A1 (de) 2009-06-03
EP2065485B1 (de) 2011-05-18
KR20100100889A (ko) 2010-09-15
US20100310788A1 (en) 2010-12-09
WO2009067008A1 (en) 2009-05-28

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