DK1348553T3 - Ink-jet registreringshovedet og ink-jet printer - Google Patents

Ink-jet registreringshovedet og ink-jet printer

Info

Publication number
DK1348553T3
DK1348553T3 DK03006728T DK03006728T DK1348553T3 DK 1348553 T3 DK1348553 T3 DK 1348553T3 DK 03006728 T DK03006728 T DK 03006728T DK 03006728 T DK03006728 T DK 03006728T DK 1348553 T3 DK1348553 T3 DK 1348553T3
Authority
DK
Denmark
Prior art keywords
electronic device
ink
buffer layer
jet
layer
Prior art date
Application number
DK03006728T
Other languages
Danish (da)
English (en)
Inventor
Takamitsu Higuchi
Setsuya Iwashita
Hiromu Miyazawa
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DK1348553T3 publication Critical patent/DK1348553T3/da

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B53/00Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/07Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/704Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/03Specific materials used
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877Conductive materials
    • H10N30/878Conductive materials the principal material being non-metallic, e.g. oxide or carbon based

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Semiconductor Memories (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ink Jet Recording Methods And Recording Media Thereof (AREA)
  • Ink Jet (AREA)
  • Liquid Crystal (AREA)
DK03006728T 2002-03-25 2003-03-25 Ink-jet registreringshovedet og ink-jet printer DK1348553T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002084327 2002-03-25
JP2003044370A JP4859333B2 (ja) 2002-03-25 2003-02-21 電子デバイス用基板の製造方法

Publications (1)

Publication Number Publication Date
DK1348553T3 true DK1348553T3 (da) 2007-12-17

Family

ID=27807011

Family Applications (1)

Application Number Title Priority Date Filing Date
DK03006728T DK1348553T3 (da) 2002-03-25 2003-03-25 Ink-jet registreringshovedet og ink-jet printer

Country Status (10)

Country Link
US (1) US6984843B2 (ja)
EP (1) EP1348553B1 (ja)
JP (1) JP4859333B2 (ja)
CN (1) CN1238193C (ja)
AT (1) ATE369986T1 (ja)
CY (1) CY1106880T1 (ja)
DE (1) DE60315535T2 (ja)
DK (1) DK1348553T3 (ja)
ES (1) ES2289198T3 (ja)
PT (1) PT1348553E (ja)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3902023B2 (ja) * 2002-02-19 2007-04-04 セイコーエプソン株式会社 圧電アクチュエータ、液滴噴射ヘッド、およびそれを用いた液滴噴射装置
JP4120589B2 (ja) * 2004-01-13 2008-07-16 セイコーエプソン株式会社 磁気抵抗効果素子及び磁気メモリ装置
WO2005104257A1 (en) * 2004-04-23 2005-11-03 Agency For Science, Technology And Research Micro-electromechanical device
CN101652505B (zh) * 2007-03-29 2012-05-30 株式会社藤仓 多晶薄膜和其制造方法及氧化物超导导体
US8097175B2 (en) * 2008-10-28 2012-01-17 Micron Technology, Inc. Method for selectively permeating a self-assembled block copolymer, method for forming metal oxide structures, method for forming a metal oxide pattern, and method for patterning a semiconductor structure
US8404124B2 (en) 2007-06-12 2013-03-26 Micron Technology, Inc. Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces
US20090152684A1 (en) * 2007-12-18 2009-06-18 Li-Peng Wang Manufacture-friendly buffer layer for ferroelectric media
US8999492B2 (en) 2008-02-05 2015-04-07 Micron Technology, Inc. Method to produce nanometer-sized features with directed assembly of block copolymers
JP2009208243A (ja) * 2008-02-29 2009-09-17 Seiko Epson Corp 圧電装置およびその製造方法、液体噴射ヘッド、並びに、プリンタ
JP4977640B2 (ja) * 2008-03-03 2012-07-18 富士フイルム株式会社 機能性酸化物構造体、及び機能性酸化物構造体の製造方法
JP4977641B2 (ja) * 2008-03-03 2012-07-18 富士フイルム株式会社 機能性酸化物構造体
US8426313B2 (en) 2008-03-21 2013-04-23 Micron Technology, Inc. Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference
US8425982B2 (en) 2008-03-21 2013-04-23 Micron Technology, Inc. Methods of improving long range order in self-assembly of block copolymer films with ionic liquids
WO2010097862A1 (ja) 2009-02-24 2010-09-02 パナソニック株式会社 半導体メモリセル及びその製造方法並びに半導体記憶装置
JP5491757B2 (ja) * 2009-03-27 2014-05-14 株式会社東芝 磁気抵抗素子および磁気メモリ
JP2011086903A (ja) * 2009-09-15 2011-04-28 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置及び圧電素子
EP2617076B1 (en) * 2010-09-15 2014-12-10 Ricoh Company, Limited Electromechanical transducing device and manufacturing method thereof
US8900963B2 (en) 2011-11-02 2014-12-02 Micron Technology, Inc. Methods of forming semiconductor device structures, and related structures
TWI431641B (zh) * 2011-12-16 2014-03-21 Juant Technology Co Ltd 被動元件之結構
US10141497B2 (en) * 2012-07-31 2018-11-27 Hewlett-Packard Development Company, L.P. Thin film stack
JP2014154632A (ja) * 2013-02-06 2014-08-25 Rohm Co Ltd 多層構造体、コンデンサ素子およびその製造方法
US9229328B2 (en) 2013-05-02 2016-01-05 Micron Technology, Inc. Methods of forming semiconductor device structures, and related semiconductor device structures
US9177795B2 (en) 2013-09-27 2015-11-03 Micron Technology, Inc. Methods of forming nanostructures including metal oxides
JP6244865B2 (ja) * 2013-12-09 2017-12-13 船井電機株式会社 振動ミラー素子
JP6618168B2 (ja) * 2015-02-13 2019-12-11 新科實業有限公司SAE Magnetics(H.K.)Ltd. 薄膜圧電体基板、薄膜圧電体素子およびその製造方法
JP6910631B2 (ja) * 2016-11-15 2021-07-28 アドバンストマテリアルテクノロジーズ株式会社 膜構造体及びその製造方法
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
JP6859805B2 (ja) * 2017-03-30 2021-04-14 Tdk株式会社 積層体、熱電変換素子
JP2019041054A (ja) * 2017-08-28 2019-03-14 東芝メモリ株式会社 半導体装置
JP7363067B2 (ja) * 2019-03-19 2023-10-18 株式会社リコー 圧電体薄膜素子、液体吐出ヘッド、ヘッドモジュール、液体吐出ユニット、液体を吐出する装置及び圧電体薄膜素子の製造方法
JP2022057129A (ja) * 2020-09-30 2022-04-11 株式会社リコー アクチュエータ、液体吐出ヘッド及び液体吐出装置

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2670391B2 (ja) 1991-04-30 1997-10-29 株式会社フジクラ 多結晶薄膜の製造装置
JP2614948B2 (ja) 1991-04-30 1997-05-28 株式会社フジクラ 多結晶薄膜
US5650378A (en) * 1992-10-02 1997-07-22 Fujikura Ltd. Method of making polycrystalline thin film and superconducting oxide body
JP2996568B2 (ja) 1992-10-30 2000-01-11 株式会社フジクラ 多結晶薄膜の製造方法および酸化物超電導導体の製造方法
JP3415888B2 (ja) 1993-08-25 2003-06-09 株式会社フジクラ 多結晶薄膜の製造装置と製造方法および酸化物超電導導体の製造方法
JPH07286897A (ja) 1994-04-16 1995-10-31 Horiba Ltd 焦電型赤外線素子およびその製造方法
WO1997001854A1 (en) * 1995-06-28 1997-01-16 Bell Communication Research, Inc. Barrier layer for ferroelectric capacitor integrated on silicon
US5753934A (en) * 1995-08-04 1998-05-19 Tok Corporation Multilayer thin film, substrate for electronic device, electronic device, and preparation of multilayer oxide thin film
JPH09256152A (ja) 1996-03-19 1997-09-30 Mitsuba Corp 整列イオンビームアシスト成膜法
JP3856878B2 (ja) 1996-10-15 2006-12-13 株式会社フジクラ 多結晶薄膜の製造方法
JP4059963B2 (ja) 1996-10-23 2008-03-12 株式会社フジクラ 酸化物超電導導体の製造方法
DE19750598A1 (de) * 1996-12-18 1998-06-25 Siemens Ag Erzeugnis mit einem Substrat aus einem teilstabilisierten Zirkonoxid und einer Pufferschicht aus einem vollstabilisierten Zirkonoxid sowie Verfahren zu seiner Herstellung
JPH1149599A (ja) 1997-08-01 1999-02-23 Fujikura Ltd 多結晶薄膜とその製造方法および酸化物超電導導体とその製造方法
JP3771027B2 (ja) 1997-12-25 2006-04-26 株式会社フジクラ 配向制御多結晶薄膜の蒸着方法及び蒸着装置
JP2000203836A (ja) 1999-01-11 2000-07-25 Fujikura Ltd 酸化物超電導導体の製造方法
US6303042B1 (en) * 1999-03-02 2001-10-16 Eastman Kodak Company Making ink jet nozzle plates
JP4131771B2 (ja) 1999-10-18 2008-08-13 株式会社フジクラ 多結晶薄膜とその製造方法および酸化物超電導導体
US6537689B2 (en) * 1999-11-18 2003-03-25 American Superconductor Corporation Multi-layer superconductor having buffer layer with oriented termination plane
JP3901894B2 (ja) 1999-11-29 2007-04-04 株式会社フジクラ 多結晶薄膜とその製造方法およびこれを用いた酸化物超電導導体
US6555946B1 (en) * 2000-07-24 2003-04-29 Motorola, Inc. Acoustic wave device and process for forming the same
EP1199171A3 (en) * 2000-10-16 2003-04-09 Seiko Epson Corporation Ink-jet recording head and ink-jet recording apparatus
US6563118B2 (en) * 2000-12-08 2003-05-13 Motorola, Inc. Pyroelectric device on a monocrystalline semiconductor substrate and process for fabricating same
JP4058971B2 (ja) * 2001-03-26 2008-03-12 セイコーエプソン株式会社 強誘電体メモリ及び電子機器
JP2003142479A (ja) * 2001-11-02 2003-05-16 Fujitsu Ltd 半導体装置、エピタキシャル膜の製造方法、およびレーザアブレーション装置

Also Published As

Publication number Publication date
ES2289198T3 (es) 2008-02-01
CN1238193C (zh) 2006-01-25
JP2004002150A (ja) 2004-01-08
JP4859333B2 (ja) 2012-01-25
DE60315535T2 (de) 2008-05-21
CN1446690A (zh) 2003-10-08
US20030218644A1 (en) 2003-11-27
ATE369986T1 (de) 2007-09-15
DE60315535D1 (de) 2007-09-27
CY1106880T1 (el) 2012-09-26
US6984843B2 (en) 2006-01-10
EP1348553A1 (en) 2003-10-01
EP1348553B1 (en) 2007-08-15
PT1348553E (pt) 2007-10-23

Similar Documents

Publication Publication Date Title
DK1348553T3 (da) Ink-jet registreringshovedet og ink-jet printer
EP1376711A3 (en) Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
EP1726050A4 (en) PIEZOELECTRIC THIN FILM, METHOD FOR MANUFACTURING PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ELEMENT, AND INKJET RECORDING HEAD
EP1329895A3 (en) High-density magnetic random access memory device and method of operating the same
EP1741557A3 (en) Actuator device, liquid-jet head and liquid-jet apparatus
MY139501A (en) Electronic component mounting apparatus and electronic component mounting method
EP1343134A4 (en) TIME CONTROL GENERATION CIRCUIT FOR A DISPLAY AND DISPLAY THEREOF
EP1435661A3 (en) Thin film transistor with protective cap over flexible substrate, electronic device using the same, and manufacturing method thereof
GB2425177A (en) High temperature imaging device
CA2151063A1 (en) C-Axis Perovskite Thin Films Grown on Silicon Dioxide
JP2005508516A5 (ja)
EP1253652A3 (en) Semiconductor memory device including memory cell portion and peripheral circuit portion
DE69420999T2 (de) Druckverfahren und -Vorrichtung
ATE407010T1 (de) Träger, tintenstrahldruckkopf mit träger, und herstellungsverfaren von tintenstrahldruckkopf mit träger
TW200908835A (en) Method of printing smooth micro-scale features
DE60210853D1 (de) Datenblatt
WO2003033404A1 (en) Silicon plate, method for producing silicon plate, and solar cell
WO2004006349A3 (en) Temperature compensating insert for a mechanically leveraged smart material actuator
EP1662551A3 (en) Capacitor insulating film for a semiconductor memory device and method for fabricating the same
EP1434269A3 (en) Semiconductor device assembly having wiring layers and semiconductor thin films, and optical print head
JP2000052571A5 (ja)
JP4058971B2 (ja) 強誘電体メモリ及び電子機器
EP1630855A3 (en) Semiconductor device and method for manufacturing the same
EP1403911A3 (en) Thin film device and its fabrication method
DE60217945D1 (de) Piezoelektrische Vorrichtung und diese enthaltende Tintenpatrone