DE69941195D1 - Beschleunigungs- und Bremsmethode mit einem piezoelektrischen Motor - Google Patents

Beschleunigungs- und Bremsmethode mit einem piezoelektrischen Motor

Info

Publication number
DE69941195D1
DE69941195D1 DE69941195T DE69941195T DE69941195D1 DE 69941195 D1 DE69941195 D1 DE 69941195D1 DE 69941195 T DE69941195 T DE 69941195T DE 69941195 T DE69941195 T DE 69941195T DE 69941195 D1 DE69941195 D1 DE 69941195D1
Authority
DE
Germany
Prior art keywords
acceleration
piezoelectric motor
braking method
braking
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69941195T
Other languages
English (en)
Inventor
Ze Ev Ganor
Izhak Rafaeli
Lior Shiv
Nir Karasikov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanomotion Ltd
Original Assignee
Nanomotion Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanomotion Ltd filed Critical Nanomotion Ltd
Application granted granted Critical
Publication of DE69941195D1 publication Critical patent/DE69941195D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/003Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004Rectangular vibrators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075Electrical details, e.g. drive or control circuits or methods
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
DE69941195T 1999-05-31 1999-05-31 Beschleunigungs- und Bremsmethode mit einem piezoelektrischen Motor Expired - Lifetime DE69941195D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IL1999/000288 WO2000074153A1 (en) 1999-05-31 1999-05-31 Multilayer piezoelectric motor

Publications (1)

Publication Number Publication Date
DE69941195D1 true DE69941195D1 (de) 2009-09-10

Family

ID=11062720

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69941195T Expired - Lifetime DE69941195D1 (de) 1999-05-31 1999-05-31 Beschleunigungs- und Bremsmethode mit einem piezoelektrischen Motor
DE69932359T Expired - Lifetime DE69932359T2 (de) 1999-05-31 1999-05-31 Vielschicht piezoelektrischer motor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69932359T Expired - Lifetime DE69932359T2 (de) 1999-05-31 1999-05-31 Vielschicht piezoelektrischer motor

Country Status (7)

Country Link
US (2) US7075211B1 (de)
EP (2) EP1186063B1 (de)
JP (1) JP4813708B2 (de)
AU (1) AU4056799A (de)
DE (2) DE69941195D1 (de)
DK (2) DK1186063T3 (de)
WO (1) WO2000074153A1 (de)

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KR100817470B1 (ko) * 2006-10-24 2008-03-31 한국과학기술연구원 압전 선형 모터
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JP5144097B2 (ja) * 2007-03-23 2013-02-13 太平洋セメント株式会社 超音波モータ装置
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JP5127293B2 (ja) * 2007-05-07 2013-01-23 パナソニック株式会社 駆動装置
AU2008251612A1 (en) * 2007-05-09 2008-11-20 Nanoink, Inc. Compact nanofabrication apparatus
WO2009072302A1 (ja) 2007-12-06 2009-06-11 Panasonic Corporation 超音波アクチュエータ
WO2009072301A1 (ja) * 2007-12-07 2009-06-11 Panasonic Corporation 駆動装置
GB2458146B (en) * 2008-03-06 2013-02-13 Nanomotion Ltd Ball-mounted mirror moved by piezoelectric motor
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JP5277010B2 (ja) * 2009-02-09 2013-08-28 パナソニック株式会社 駆動装置
JP5382320B2 (ja) * 2009-03-26 2014-01-08 セイコーエプソン株式会社 圧電モーター、液体噴射装置及び時計
JP2010233339A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧電モーター、液体噴射装置及び時計
JP2011015552A (ja) * 2009-07-02 2011-01-20 Panasonic Corp 駆動装置
JP4830165B2 (ja) * 2010-01-27 2011-12-07 石川県 超音波モータ用振動子
JP5506552B2 (ja) * 2010-06-07 2014-05-28 キヤノン株式会社 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法
JP2012029478A (ja) * 2010-07-23 2012-02-09 Olympus Corp 振動体及び超音波モータ
JP5852822B2 (ja) * 2011-01-07 2016-02-03 学校法人 関西大学 アクチュエータ及びアクチュエータの駆動方法
WO2012117831A1 (ja) * 2011-03-01 2012-09-07 株式会社村田製作所 圧電素子およびこれを用いた圧電装置
CN102185096B (zh) * 2011-04-02 2013-11-06 北京大学 压电驱动器及直线压电马达
JP6019545B2 (ja) * 2011-06-20 2016-11-02 セイコーエプソン株式会社 圧電アクチュエーター、駆動ユニット、及び、圧電アクチュエーターの駆動方法
JP5760748B2 (ja) * 2011-06-29 2015-08-12 セイコーエプソン株式会社 圧電アクチュエーターの駆動方法、及び、駆動ユニット
US9705425B2 (en) * 2012-07-03 2017-07-11 Discovery Technology International, Inc. Piezoelectric linear motor
US10432112B2 (en) * 2014-07-23 2019-10-01 Physik Instrumente (Pi) Gmbh &. Co. Kg Ultrasonic motor
DE102014225154B3 (de) * 2014-12-08 2016-03-03 Physik Instrumente (Pi) Gmbh & Co. Kg Verfahren und Vorrichtung zur Ansteuerung eines piezoelektrischen Motors
CN107771361B (zh) * 2015-06-03 2022-01-25 皇家飞利浦有限公司 基于电活性聚合物的致动器设备
JP2017184297A (ja) * 2016-03-28 2017-10-05 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ
DE102017107275A1 (de) * 2017-04-05 2018-10-11 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
DE102018104928B3 (de) * 2018-03-05 2019-05-29 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
FR3095910A1 (fr) 2019-05-06 2020-11-13 Telemaq Moteur piézoélectrique à onde progressive à résolution micrométrique
JP7092182B2 (ja) * 2020-12-25 2022-06-28 Tdk株式会社 圧電アクチュエータ
JP2022178836A (ja) 2021-05-21 2022-12-02 セイコーエプソン株式会社 圧電振動子および駆動装置

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Also Published As

Publication number Publication date
DE69932359D1 (de) 2006-08-24
WO2000074153A1 (en) 2000-12-07
US7211929B2 (en) 2007-05-01
DE69932359T2 (de) 2007-07-19
JP2003501988A (ja) 2003-01-14
US7075211B1 (en) 2006-07-11
EP1577961B1 (de) 2009-07-29
JP4813708B2 (ja) 2011-11-09
DK1186063T3 (da) 2006-11-13
DK1577961T3 (da) 2009-11-30
US20060175930A1 (en) 2006-08-10
EP1186063B1 (de) 2006-07-12
EP1186063A1 (de) 2002-03-13
EP1577961A1 (de) 2005-09-21
AU4056799A (en) 2000-12-18

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