DE69941195D1 - Beschleunigungs- und Bremsmethode mit einem piezoelektrischen Motor - Google Patents
Beschleunigungs- und Bremsmethode mit einem piezoelektrischen MotorInfo
- Publication number
- DE69941195D1 DE69941195D1 DE69941195T DE69941195T DE69941195D1 DE 69941195 D1 DE69941195 D1 DE 69941195D1 DE 69941195 T DE69941195 T DE 69941195T DE 69941195 T DE69941195 T DE 69941195T DE 69941195 D1 DE69941195 D1 DE 69941195D1
- Authority
- DE
- Germany
- Prior art keywords
- acceleration
- piezoelectric motor
- braking method
- braking
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
- H02N2/004—Rectangular vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
- H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IL1999/000288 WO2000074153A1 (en) | 1999-05-31 | 1999-05-31 | Multilayer piezoelectric motor |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69941195D1 true DE69941195D1 (de) | 2009-09-10 |
Family
ID=11062720
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69941195T Expired - Lifetime DE69941195D1 (de) | 1999-05-31 | 1999-05-31 | Beschleunigungs- und Bremsmethode mit einem piezoelektrischen Motor |
DE69932359T Expired - Lifetime DE69932359T2 (de) | 1999-05-31 | 1999-05-31 | Vielschicht piezoelektrischer motor |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69932359T Expired - Lifetime DE69932359T2 (de) | 1999-05-31 | 1999-05-31 | Vielschicht piezoelektrischer motor |
Country Status (7)
Country | Link |
---|---|
US (2) | US7075211B1 (de) |
EP (2) | EP1186063B1 (de) |
JP (1) | JP4813708B2 (de) |
AU (1) | AU4056799A (de) |
DE (2) | DE69941195D1 (de) |
DK (2) | DK1186063T3 (de) |
WO (1) | WO2000074153A1 (de) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2568595A3 (de) * | 1998-12-21 | 2013-05-15 | Seiko Epson Corporation | Piezoelektrischer Aktor, Uhrwerk und tragbares Gerät |
IL137206A0 (en) | 1999-10-31 | 2001-07-24 | Nanomotion Ltd | Piezoelectric motors and motor driving configurations |
US6879085B1 (en) | 2000-02-24 | 2005-04-12 | Nanomotion Ltd. | Resonance shifting |
JP2004520733A (ja) | 2000-11-27 | 2004-07-08 | サランドン (2003) リミテッド | 自己整合性光学機械式クロスバースイッチ |
US7061158B2 (en) | 2002-07-25 | 2006-06-13 | Nanomotion Ltd. | High resolution piezoelectric motor |
JP5357127B2 (ja) * | 2003-05-22 | 2013-12-04 | セイコーインスツル株式会社 | 超音波モータ及びそれを用いた電子機器、ステージ |
WO2004107971A2 (en) | 2003-06-09 | 2004-12-16 | Glucon Inc. | Wearable glucometer |
WO2004112158A1 (en) * | 2003-06-13 | 2004-12-23 | Koninklijke Philips Electronics N.V. | Piezoelectric actuator and excitation method |
GB0323920D0 (en) | 2003-10-11 | 2003-11-12 | Johnson Electric Sa | Electric motor |
US7439652B2 (en) * | 2004-02-25 | 2008-10-21 | Nanomotion Ltd. | Multidirectional piezoelectric motor configuration |
KR101245059B1 (ko) | 2004-09-29 | 2013-03-18 | 교세라 가부시키가이샤 | 카메라 모듈 및 이 카메라 모듈을 이용한 휴대 단말기 |
US7777969B2 (en) | 2004-09-29 | 2010-08-17 | Kyocera Corporation | Camera module and portable terminal employing the same |
DE102005039358B4 (de) | 2005-08-19 | 2016-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelektrischer Aktor für einen Ultraschallmotor |
KR100691280B1 (ko) | 2005-09-05 | 2007-03-12 | 삼성전기주식회사 | 압전 진동자, 그 제조방법 및 압전 진동자를 구비하는 선형액추에이터 |
JP2007117668A (ja) * | 2005-10-31 | 2007-05-17 | Toshiba Corp | 超音波プローブおよび超音波診断装置 |
JP4069160B2 (ja) | 2006-01-23 | 2008-04-02 | 松下電器産業株式会社 | 超音波アクチュエータ |
CN101213734B (zh) | 2006-02-07 | 2011-01-12 | 松下电器产业株式会社 | 压电元件与超声波执行机构 |
US9806640B2 (en) | 2006-03-30 | 2017-10-31 | Nanomotion Ltd. | Piezoelectric transmission systems |
KR100759521B1 (ko) | 2006-04-06 | 2007-09-18 | 삼성전기주식회사 | 압전 진동자 |
JP4795162B2 (ja) * | 2006-08-09 | 2011-10-19 | オリンパス株式会社 | 超音波モータ及び超音波モータの振動検出方法 |
KR100818482B1 (ko) * | 2006-10-16 | 2008-04-01 | 삼성전기주식회사 | 압전 모터 |
KR100817470B1 (ko) * | 2006-10-24 | 2008-03-31 | 한국과학기술연구원 | 압전 선형 모터 |
WO2008052541A1 (en) * | 2006-11-03 | 2008-05-08 | Danfoss A/S | A capacitive transducer with cutting areas |
GB2446428B (en) * | 2006-12-02 | 2010-08-04 | Nanomotion Ltd | Controllable coupling force |
DE102007003280A1 (de) * | 2007-01-23 | 2008-07-24 | Epcos Ag | Piezoelektrisches Bauelement |
JP5144097B2 (ja) * | 2007-03-23 | 2013-02-13 | 太平洋セメント株式会社 | 超音波モータ装置 |
US7646136B2 (en) | 2007-05-07 | 2010-01-12 | Panasonic Corporation | Piezoelectric element, vibratory actuator and drive unit |
JP5127293B2 (ja) * | 2007-05-07 | 2013-01-23 | パナソニック株式会社 | 駆動装置 |
AU2008251612A1 (en) * | 2007-05-09 | 2008-11-20 | Nanoink, Inc. | Compact nanofabrication apparatus |
WO2009072302A1 (ja) | 2007-12-06 | 2009-06-11 | Panasonic Corporation | 超音波アクチュエータ |
WO2009072301A1 (ja) * | 2007-12-07 | 2009-06-11 | Panasonic Corporation | 駆動装置 |
GB2458146B (en) * | 2008-03-06 | 2013-02-13 | Nanomotion Ltd | Ball-mounted mirror moved by piezoelectric motor |
DE102008012992A1 (de) | 2008-03-07 | 2009-09-10 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
US7932661B2 (en) * | 2008-09-23 | 2011-04-26 | Nikko Company | Piezoelectric vibrator for ultrasonic motor |
CN102292907A (zh) * | 2008-12-18 | 2011-12-21 | 发现技术国际股份有限公司 | 基于有组合谐振器的声学驻波的压电准谐振电机 |
JP5277010B2 (ja) * | 2009-02-09 | 2013-08-28 | パナソニック株式会社 | 駆動装置 |
JP5382320B2 (ja) * | 2009-03-26 | 2014-01-08 | セイコーエプソン株式会社 | 圧電モーター、液体噴射装置及び時計 |
JP2010233339A (ja) * | 2009-03-26 | 2010-10-14 | Seiko Epson Corp | 圧電モーター、液体噴射装置及び時計 |
JP2011015552A (ja) * | 2009-07-02 | 2011-01-20 | Panasonic Corp | 駆動装置 |
JP4830165B2 (ja) * | 2010-01-27 | 2011-12-07 | 石川県 | 超音波モータ用振動子 |
JP5506552B2 (ja) * | 2010-06-07 | 2014-05-28 | キヤノン株式会社 | 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法 |
JP2012029478A (ja) * | 2010-07-23 | 2012-02-09 | Olympus Corp | 振動体及び超音波モータ |
JP5852822B2 (ja) * | 2011-01-07 | 2016-02-03 | 学校法人 関西大学 | アクチュエータ及びアクチュエータの駆動方法 |
WO2012117831A1 (ja) * | 2011-03-01 | 2012-09-07 | 株式会社村田製作所 | 圧電素子およびこれを用いた圧電装置 |
CN102185096B (zh) * | 2011-04-02 | 2013-11-06 | 北京大学 | 压电驱动器及直线压电马达 |
JP6019545B2 (ja) * | 2011-06-20 | 2016-11-02 | セイコーエプソン株式会社 | 圧電アクチュエーター、駆動ユニット、及び、圧電アクチュエーターの駆動方法 |
JP5760748B2 (ja) * | 2011-06-29 | 2015-08-12 | セイコーエプソン株式会社 | 圧電アクチュエーターの駆動方法、及び、駆動ユニット |
US9705425B2 (en) * | 2012-07-03 | 2017-07-11 | Discovery Technology International, Inc. | Piezoelectric linear motor |
US10432112B2 (en) * | 2014-07-23 | 2019-10-01 | Physik Instrumente (Pi) Gmbh &. Co. Kg | Ultrasonic motor |
DE102014225154B3 (de) * | 2014-12-08 | 2016-03-03 | Physik Instrumente (Pi) Gmbh & Co. Kg | Verfahren und Vorrichtung zur Ansteuerung eines piezoelektrischen Motors |
CN107771361B (zh) * | 2015-06-03 | 2022-01-25 | 皇家飞利浦有限公司 | 基于电活性聚合物的致动器设备 |
JP2017184297A (ja) * | 2016-03-28 | 2017-10-05 | セイコーエプソン株式会社 | 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ |
DE102017107275A1 (de) * | 2017-04-05 | 2018-10-11 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
DE102018104928B3 (de) * | 2018-03-05 | 2019-05-29 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
FR3095910A1 (fr) | 2019-05-06 | 2020-11-13 | Telemaq | Moteur piézoélectrique à onde progressive à résolution micrométrique |
JP7092182B2 (ja) * | 2020-12-25 | 2022-06-28 | Tdk株式会社 | 圧電アクチュエータ |
JP2022178836A (ja) | 2021-05-21 | 2022-12-02 | セイコーエプソン株式会社 | 圧電振動子および駆動装置 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55114015A (en) | 1979-02-23 | 1980-09-03 | Tohoku Metal Ind Ltd | Adjusting method for resonance frequency of piezoelectric ceramic resonator in square plate shape |
US4447753A (en) * | 1981-03-25 | 1984-05-08 | Seiko Instruments & Electronics Ltd. | Miniature GT-cut quartz resonator |
JPH0671188B2 (ja) * | 1985-04-01 | 1994-09-07 | 株式会社村田製作所 | 圧電共振子 |
EP0313072B1 (de) | 1987-10-23 | 1993-05-05 | Hitachi, Ltd. | Verfahren und Vorrichtung zum Fördern eines Gegenstandes mittels Vibration |
US5039899A (en) * | 1989-02-28 | 1991-08-13 | Brother Kogyo Kabushiki Kaisha | Piezoelectric transducer |
US5136200A (en) | 1989-07-27 | 1992-08-04 | Olympus Optical Co., Ltd. | Ultransonic motor |
JP3118252B2 (ja) | 1990-02-27 | 2000-12-18 | ニスカ株式会社 | 超音波振動装置及びその方法並びにこれらを用いた駆動装置及びその方法 |
US5345137A (en) | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
DE4133108A1 (de) * | 1991-10-05 | 1993-04-08 | Philips Patentverwaltung | Elektrischer rotations- oder linearmotor, dessen laeufer mittels ultraschallschwingungen angetrieben wird |
DE69429744T2 (de) * | 1993-07-09 | 2002-08-14 | Nanomotion Ltd | Keramischer Motor |
US5616980A (en) | 1993-07-09 | 1997-04-01 | Nanomotion Ltd. | Ceramic motor |
IL114656A0 (en) | 1995-07-18 | 1995-11-27 | Nanomotion Ltd | Ceramic motor |
US5646339A (en) * | 1994-02-14 | 1997-07-08 | International Business Machines Corporation | Force microscope and method for measuring atomic forces in multiple directions |
EP0674350B1 (de) * | 1994-03-23 | 2000-05-31 | Nikon Corporation | Ultraschallmotor |
JPH07297661A (ja) * | 1994-04-27 | 1995-11-10 | Murata Mfg Co Ltd | 圧電共振子及び圧電共振子の共振周波数調整方法 |
IL113291A0 (en) * | 1995-04-06 | 1995-07-31 | Nanomotion Ltd | A multi-axis rotation device |
JPH0937574A (ja) * | 1995-05-12 | 1997-02-07 | Nikon Corp | 振動アクチュエータ及びその制御方法 |
JPH0965672A (ja) * | 1995-08-28 | 1997-03-07 | Nikon Corp | 振動アクチュエータ |
JP3079970B2 (ja) * | 1995-09-18 | 2000-08-21 | 株式会社村田製作所 | 圧電トランス |
JPH10233538A (ja) * | 1997-02-21 | 1998-09-02 | Matsushita Electric Ind Co Ltd | 積層圧電素子 |
JPH1132491A (ja) * | 1997-05-16 | 1999-02-02 | Seiko Instr Inc | 超音波モータ及び超音波モータ付電子機器 |
JP3792864B2 (ja) * | 1997-10-23 | 2006-07-05 | セイコーインスツル株式会社 | 超音波モータおよび超音波モータ付電子機器 |
DE19757139A1 (de) * | 1997-12-20 | 1999-06-24 | Philips Patentverwaltung | Antriebsvorrichtung für wenigstens zwei Rotationselemente mit wenigstens einem piezoelektrischen Antriebselement |
US5949177A (en) * | 1998-01-07 | 1999-09-07 | Eastman Kodak Company | Linear piezoelectric motor employing internal feedback |
JP4510179B2 (ja) * | 1998-08-07 | 2010-07-21 | セイコーインスツル株式会社 | 超音波モータおよび超音波モータ付電子機器 |
AU9642498A (en) * | 1998-10-25 | 2000-05-15 | Nanomotion Ltd. | Driver for piezoelectric motors |
DE19938954A1 (de) * | 1999-08-17 | 2001-03-08 | Pi Ceramic Gmbh Keramische Tec | Piezoelektrischer Antrieb, insbesondere zur Erzeugung von Rotations- oder Translationsbewegungen, die stetig oder schrittweise erfolgen können |
DE10154526B4 (de) * | 2001-06-12 | 2007-02-08 | Physik Instrumente (Pi) Gmbh & Co | Piezoelektrisches Stellelement |
JP4305623B2 (ja) * | 2002-03-13 | 2009-07-29 | セイコーエプソン株式会社 | 振動子および振動型ジャイロスコープ |
US6707234B1 (en) * | 2002-09-19 | 2004-03-16 | Piedek Technical Laboratory | Quartz crystal unit, its manufacturing method and quartz crystal oscillator |
-
1999
- 1999-05-31 WO PCT/IL1999/000288 patent/WO2000074153A1/en active IP Right Grant
- 1999-05-31 DK DK99923840T patent/DK1186063T3/da active
- 1999-05-31 DE DE69941195T patent/DE69941195D1/de not_active Expired - Lifetime
- 1999-05-31 JP JP2001500350A patent/JP4813708B2/ja not_active Expired - Fee Related
- 1999-05-31 DE DE69932359T patent/DE69932359T2/de not_active Expired - Lifetime
- 1999-05-31 US US09/980,375 patent/US7075211B1/en not_active Expired - Fee Related
- 1999-05-31 EP EP99923840A patent/EP1186063B1/de not_active Expired - Lifetime
- 1999-05-31 EP EP05075767A patent/EP1577961B1/de not_active Expired - Lifetime
- 1999-05-31 DK DK05075767T patent/DK1577961T3/da active
- 1999-05-31 AU AU40567/99A patent/AU4056799A/en not_active Abandoned
-
2006
- 2006-04-04 US US11/397,371 patent/US7211929B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69932359D1 (de) | 2006-08-24 |
WO2000074153A1 (en) | 2000-12-07 |
US7211929B2 (en) | 2007-05-01 |
DE69932359T2 (de) | 2007-07-19 |
JP2003501988A (ja) | 2003-01-14 |
US7075211B1 (en) | 2006-07-11 |
EP1577961B1 (de) | 2009-07-29 |
JP4813708B2 (ja) | 2011-11-09 |
DK1186063T3 (da) | 2006-11-13 |
DK1577961T3 (da) | 2009-11-30 |
US20060175930A1 (en) | 2006-08-10 |
EP1186063B1 (de) | 2006-07-12 |
EP1186063A1 (de) | 2002-03-13 |
EP1577961A1 (de) | 2005-09-21 |
AU4056799A (en) | 2000-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |