WO2009072302A1 - 超音波アクチュエータ - Google Patents

超音波アクチュエータ Download PDF

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Publication number
WO2009072302A1
WO2009072302A1 PCT/JP2008/003629 JP2008003629W WO2009072302A1 WO 2009072302 A1 WO2009072302 A1 WO 2009072302A1 JP 2008003629 W JP2008003629 W JP 2008003629W WO 2009072302 A1 WO2009072302 A1 WO 2009072302A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
feeding
piezoelectric element
flexible cable
opposed
Prior art date
Application number
PCT/JP2008/003629
Other languages
English (en)
French (fr)
Inventor
Yusuke Adachi
Hironori Honsho
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to JP2009527639A priority Critical patent/JP4564582B2/ja
Publication of WO2009072302A1 publication Critical patent/WO2009072302A1/ja
Priority to US12/794,076 priority patent/US8004150B2/en
Priority to US13/152,642 priority patent/US8076823B2/en
Priority to US13/181,096 priority patent/US8159113B2/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　圧電素子の電極と導電部材との接続面の応力の発生を抑制した超音波アクチュエータを提供する。 　超音波アクチュエータは、圧電素子（Ｐ１）と、フレキシブルケーブル（Ｆ１）とを備える。圧電素子（Ｐ１）は、圧電体層（１）と、圧電体層（１）の主面に設けられた給電電極（２）と、圧電体層（１）を挟んで給電電極（２）と対向して設けられた対向電極（３）と、圧電素子（Ｐ１）の短辺側面に設けられ給電電極（２）と接続された給電外部電極（４）と、圧電素子（Ｐ１）の短辺側面に設けられ対向電極（３）と接続された対向外部電極（５）とを有している。フレキシブルケーブル（Ｆ１）は、給電外部電極（４）に接続される第１フレキシブルケーブル（Ｆ１１）と、対向外部電極（５）に接続される第２フレキシブルケーブル（Ｆ１２）とを有する。
PCT/JP2008/003629 2007-12-06 2008-12-05 超音波アクチュエータ WO2009072302A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009527639A JP4564582B2 (ja) 2007-12-06 2008-12-05 超音波アクチュエータ
US12/794,076 US8004150B2 (en) 2007-12-06 2010-06-04 Ultrasonic actuator with flexible cable connection member
US13/152,642 US8076823B2 (en) 2007-12-06 2011-06-03 Ultrasonic actuator
US13/181,096 US8159113B2 (en) 2007-12-06 2011-07-12 Ultrasonic actuator with power supply electrode arrangement

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007315630 2007-12-06
JP2007-315630 2007-12-06

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/794,076 Continuation US8004150B2 (en) 2007-12-06 2010-06-04 Ultrasonic actuator with flexible cable connection member

Publications (1)

Publication Number Publication Date
WO2009072302A1 true WO2009072302A1 (ja) 2009-06-11

Family

ID=40717484

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/003629 WO2009072302A1 (ja) 2007-12-06 2008-12-05 超音波アクチュエータ

Country Status (3)

Country Link
US (3) US8004150B2 (ja)
JP (1) JP4564582B2 (ja)
WO (1) WO2009072302A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011135711A (ja) * 2009-12-25 2011-07-07 Panasonic Corp 振動型アクチュエータ
JP2020072532A (ja) * 2018-10-30 2020-05-07 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター
JP2020526073A (ja) * 2017-06-19 2020-08-27 マイクロファイン マテリアルズ テクノロジーズ ピーティーイー リミテッドＭｉｃｒｏｆｉｎｅ Ｍａｔｅｒｉａｌｓ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｐｔｅ Ｌｔｄ 対角線共振の音波及び超音波トランスデューサー

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5404970B1 (ja) * 2012-03-26 2014-02-05 京セラ株式会社 圧電振動部品および携帯端末
US10833608B2 (en) * 2016-08-03 2020-11-10 Canon Kabushiki Kaisha Vibration actuator and electronic apparatus using vibration actuator
TWI658566B (zh) 2018-05-25 2019-05-01 財團法人工業技術研究院 靜電防護複合結構、靜電防護元件及其製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007300798A (ja) * 2006-02-07 2007-11-15 Matsushita Electric Ind Co Ltd 圧電素子及び超音波アクチュエータ
JP2007306800A (ja) * 2006-01-12 2007-11-22 Matsushita Electric Ind Co Ltd 超音波アクチュエータ
JP2007312600A (ja) * 2006-01-23 2007-11-29 Matsushita Electric Ind Co Ltd 圧電素子及び超音波アクチュエータ

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
JPH1132491A (ja) 1997-05-16 1999-02-02 Seiko Instr Inc 超音波モータ及び超音波モータ付電子機器
JP4376943B2 (ja) 1997-05-16 2009-12-02 セイコーインスツル株式会社 超音波モータ及び超音波モータ付電子機器
JP4406952B2 (ja) 1999-04-08 2010-02-03 株式会社ニコン 振動アクチュエータ
WO2000074153A1 (en) 1999-05-31 2000-12-07 Nanomotion Ltd. Multilayer piezoelectric motor
JP4328113B2 (ja) * 2003-03-13 2009-09-09 オリンパス株式会社 超音波モータ
JP4485238B2 (ja) 2004-03-31 2010-06-16 セイコーインスツル株式会社 超音波モータおよび超音波モータ付き電子機器
JP4794897B2 (ja) * 2005-04-26 2011-10-19 オリンパス株式会社 超音波モータ
JP2007006596A (ja) * 2005-06-23 2007-01-11 Olympus Corp 超音波モータの駆動方法及びその装置
WO2007066633A1 (ja) 2005-12-05 2007-06-14 Matsushita Electric Industrial Co., Ltd. 超音波アクチュエータ
JP2007318997A (ja) * 2005-12-05 2007-12-06 Matsushita Electric Ind Co Ltd 超音波アクチュエータ
JP2007173456A (ja) 2005-12-21 2007-07-05 Nec Tokin Corp 積層型圧電バイモルフ素子およびその製造方法
JP4035158B2 (ja) 2006-01-12 2008-01-16 松下電器産業株式会社 超音波アクチュエータ
JP4069160B2 (ja) 2006-01-23 2008-04-02 松下電器産業株式会社 超音波アクチュエータ
CN101213734B (zh) 2006-02-07 2011-01-12 松下电器产业株式会社 压电元件与超声波执行机构
JP4795162B2 (ja) * 2006-08-09 2011-10-19 オリンパス株式会社 超音波モータ及び超音波モータの振動検出方法
JP2008136318A (ja) * 2006-11-29 2008-06-12 Olympus Corp 超音波モータ及び顕微鏡ステージ
JP2008220030A (ja) 2007-03-02 2008-09-18 Olympus Imaging Corp 駆動装置および撮像装置
US7646136B2 (en) * 2007-05-07 2010-01-12 Panasonic Corporation Piezoelectric element, vibratory actuator and drive unit
JP2010130889A (ja) * 2008-12-01 2010-06-10 Olympus Corp リニア駆動型超音波モータ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007306800A (ja) * 2006-01-12 2007-11-22 Matsushita Electric Ind Co Ltd 超音波アクチュエータ
JP2007312600A (ja) * 2006-01-23 2007-11-29 Matsushita Electric Ind Co Ltd 圧電素子及び超音波アクチュエータ
JP2007300798A (ja) * 2006-02-07 2007-11-15 Matsushita Electric Ind Co Ltd 圧電素子及び超音波アクチュエータ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011135711A (ja) * 2009-12-25 2011-07-07 Panasonic Corp 振動型アクチュエータ
JP2020526073A (ja) * 2017-06-19 2020-08-27 マイクロファイン マテリアルズ テクノロジーズ ピーティーイー リミテッドＭｉｃｒｏｆｉｎｅ Ｍａｔｅｒｉａｌｓ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｐｔｅ Ｌｔｄ 対角線共振の音波及び超音波トランスデューサー
JP2020072532A (ja) * 2018-10-30 2020-05-07 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター
JP7205162B2 (ja) 2018-10-30 2023-01-17 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター

Also Published As

Publication number Publication date
US20100237743A1 (en) 2010-09-23
US8159113B2 (en) 2012-04-17
JPWO2009072302A1 (ja) 2011-04-21
US20110254407A1 (en) 2011-10-20
US8004150B2 (en) 2011-08-23
JP4564582B2 (ja) 2010-10-20
US20110266921A1 (en) 2011-11-03
US8076823B2 (en) 2011-12-13

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