DE69940702D1 - Nachweissystem für nanometer genaue topographische messung reflektiver oberflächen - Google Patents

Nachweissystem für nanometer genaue topographische messung reflektiver oberflächen

Info

Publication number
DE69940702D1
DE69940702D1 DE69940702T DE69940702T DE69940702D1 DE 69940702 D1 DE69940702 D1 DE 69940702D1 DE 69940702 T DE69940702 T DE 69940702T DE 69940702 T DE69940702 T DE 69940702T DE 69940702 D1 DE69940702 D1 DE 69940702D1
Authority
DE
Germany
Prior art keywords
nachometer
nanometers
reflective surfaces
topographic measurement
exact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69940702T
Other languages
German (de)
English (en)
Inventor
Heinrik K Neilsen
Lionel Kuhlmann
Mark Nokes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Application granted granted Critical
Publication of DE69940702D1 publication Critical patent/DE69940702D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69940702T 1998-11-18 1999-11-18 Nachweissystem für nanometer genaue topographische messung reflektiver oberflächen Expired - Lifetime DE69940702D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/195,533 US6999183B2 (en) 1998-11-18 1998-11-18 Detection system for nanometer scale topographic measurements of reflective surfaces
PCT/US1999/027464 WO2000029807A2 (en) 1998-11-18 1999-11-18 Detection system for nanometer scale topographic measurements of reflective surfaces

Publications (1)

Publication Number Publication Date
DE69940702D1 true DE69940702D1 (de) 2009-05-20

Family

ID=22721777

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69940702T Expired - Lifetime DE69940702D1 (de) 1998-11-18 1999-11-18 Nachweissystem für nanometer genaue topographische messung reflektiver oberflächen

Country Status (6)

Country Link
US (3) US6999183B2 (enExample)
EP (1) EP1131623B1 (enExample)
JP (1) JP2002530631A (enExample)
AU (1) AU1738600A (enExample)
DE (1) DE69940702D1 (enExample)
WO (1) WO2000029807A2 (enExample)

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Also Published As

Publication number Publication date
WO2000029807A3 (en) 2000-11-23
WO2000029807A2 (en) 2000-05-25
US20010013936A1 (en) 2001-08-16
US20080225275A1 (en) 2008-09-18
JP2002530631A (ja) 2002-09-17
US20060092427A1 (en) 2006-05-04
US7342672B2 (en) 2008-03-11
EP1131623A2 (en) 2001-09-12
EP1131623B1 (en) 2009-04-08
US6999183B2 (en) 2006-02-14
US8384903B2 (en) 2013-02-26
AU1738600A (en) 2000-06-05

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