AU1738600A - Detection system for nanometer scale topographic measurements of reflective surfaces - Google Patents

Detection system for nanometer scale topographic measurements of reflective surfaces

Info

Publication number
AU1738600A
AU1738600A AU17386/00A AU1738600A AU1738600A AU 1738600 A AU1738600 A AU 1738600A AU 17386/00 A AU17386/00 A AU 17386/00A AU 1738600 A AU1738600 A AU 1738600A AU 1738600 A AU1738600 A AU 1738600A
Authority
AU
Australia
Prior art keywords
detection system
reflective surfaces
nanometer scale
topographic measurements
scale topographic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU17386/00A
Other languages
English (en)
Inventor
Lionel Kuhlmann
Heinrik K. Neilsen
Mark Nokes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of AU1738600A publication Critical patent/AU1738600A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AU17386/00A 1998-11-18 1999-11-18 Detection system for nanometer scale topographic measurements of reflective surfaces Abandoned AU1738600A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/195,533 US6999183B2 (en) 1998-11-18 1998-11-18 Detection system for nanometer scale topographic measurements of reflective surfaces
US09195533 1998-11-18
PCT/US1999/027464 WO2000029807A2 (en) 1998-11-18 1999-11-18 Detection system for nanometer scale topographic measurements of reflective surfaces

Publications (1)

Publication Number Publication Date
AU1738600A true AU1738600A (en) 2000-06-05

Family

ID=22721777

Family Applications (1)

Application Number Title Priority Date Filing Date
AU17386/00A Abandoned AU1738600A (en) 1998-11-18 1999-11-18 Detection system for nanometer scale topographic measurements of reflective surfaces

Country Status (6)

Country Link
US (3) US6999183B2 (enExample)
EP (1) EP1131623B1 (enExample)
JP (1) JP2002530631A (enExample)
AU (1) AU1738600A (enExample)
DE (1) DE69940702D1 (enExample)
WO (1) WO2000029807A2 (enExample)

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Also Published As

Publication number Publication date
WO2000029807A3 (en) 2000-11-23
WO2000029807A2 (en) 2000-05-25
US20010013936A1 (en) 2001-08-16
US20080225275A1 (en) 2008-09-18
JP2002530631A (ja) 2002-09-17
US20060092427A1 (en) 2006-05-04
US7342672B2 (en) 2008-03-11
EP1131623A2 (en) 2001-09-12
EP1131623B1 (en) 2009-04-08
DE69940702D1 (de) 2009-05-20
US6999183B2 (en) 2006-02-14
US8384903B2 (en) 2013-02-26

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase