DE69723110D1 - Verlaufgitter für Beugungsentfernungsmessung - Google Patents

Verlaufgitter für Beugungsentfernungsmessung

Info

Publication number
DE69723110D1
DE69723110D1 DE69723110T DE69723110T DE69723110D1 DE 69723110 D1 DE69723110 D1 DE 69723110D1 DE 69723110 T DE69723110 T DE 69723110T DE 69723110 T DE69723110 T DE 69723110T DE 69723110 D1 DE69723110 D1 DE 69723110D1
Authority
DE
Germany
Prior art keywords
distance measurement
diffraction distance
graduated
grating
graduated grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69723110T
Other languages
English (en)
Other versions
DE69723110T2 (de
Inventor
Thomas D Ditto
Douglas A Lyon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69723110D1 publication Critical patent/DE69723110D1/de
Publication of DE69723110T2 publication Critical patent/DE69723110T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S11/00—Systems for determining distance or velocity not using reflection or reradiation
    • G01S11/12—Systems for determining distance or velocity not using reflection or reradiation using electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electron Beam Exposure (AREA)
DE69723110T 1996-12-30 1997-12-29 Verlaufgitter für Beugungsentfernungsmessung Expired - Lifetime DE69723110T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US3411296P 1996-12-30 1996-12-30
US34112P 1996-12-30
PCT/US1997/023841 WO1999044013A1 (en) 1996-12-30 1997-12-29 Variable pitch grating for diffraction range finding system

Publications (2)

Publication Number Publication Date
DE69723110D1 true DE69723110D1 (de) 2003-07-31
DE69723110T2 DE69723110T2 (de) 2004-05-06

Family

ID=21874378

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69723110T Expired - Lifetime DE69723110T2 (de) 1996-12-30 1997-12-29 Verlaufgitter für Beugungsentfernungsmessung

Country Status (7)

Country Link
US (1) US6490028B1 (de)
EP (1) EP0963541B1 (de)
JP (1) JP3902796B2 (de)
CA (1) CA2277211C (de)
DE (1) DE69723110T2 (de)
ES (1) ES2196397T3 (de)
WO (1) WO1999044013A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6603561B2 (en) 2001-02-20 2003-08-05 Thomas D. Ditto Chromatic diffraction range finder
US20030002043A1 (en) 2001-04-10 2003-01-02 Kla-Tencor Corporation Periodic patterns and technique to control misalignment
US20060056028A1 (en) * 2004-09-13 2006-03-16 Wildnauer Kenneth R Apodized diffraction grating with improved dynamic range
CA2613993C (en) * 2005-07-13 2014-06-17 Venkata Guruprasad Distance-dependent spectra with uniform sampling spectrometry
US8520191B2 (en) * 2008-09-05 2013-08-27 3Dewitt, Llc Slit aperture for diffraction range finding system
US20100110445A1 (en) * 2008-09-05 2010-05-06 3Dewitt, Llc Slit aperture for diffraction range finding system and method for using the slit aperture to form a focused image
TW201115183A (en) * 2009-10-20 2011-05-01 Ind Tech Res Inst Stereovision system and calculation method for the distance between object and diffractive optical element
TW201132932A (en) * 2010-03-26 2011-10-01 Ind Tech Res Inst Adjustable range finder and the method thereof
CN102221340A (zh) * 2010-04-19 2011-10-19 财团法人工业技术研究院 可调式影像判距装置及方法
WO2012063463A1 (ja) * 2010-11-09 2012-05-18 パナソニック株式会社 距離計測装置および距離計測方法
CN106104318B (zh) * 2014-04-09 2019-05-03 拉姆伯斯公司 低功率图像改变检测器
JP2016150081A (ja) * 2015-02-17 2016-08-22 ソニー株式会社 光学ユニット、測定システムおよび測定方法
GB201610647D0 (en) 2016-06-17 2016-08-03 Univ York Improved sensor and associated methods
US10021372B2 (en) 2016-09-16 2018-07-10 Qualcomm Incorporated Systems and methods for improved depth sensing
CN110118971B (zh) * 2019-04-26 2020-12-18 华中科技大学 基于光栅多级衍射ccd分段复用的激光三角测距装置及方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4678324A (en) * 1985-12-04 1987-07-07 Thomas De Witt Range finding by diffraction
JP2619566B2 (ja) * 1990-11-20 1997-06-11 オ−クマ株式会社 光学式位置検出器
US5227625A (en) * 1992-09-16 1993-07-13 International Business Machines Corporation Retro-reflective variable-pitch diffraction grating for use in a rotary actuator disk file
US5422723A (en) * 1992-09-21 1995-06-06 Texas Instruments Incorporated Diffraction gratings for submicron linewidth measurement
US5349183A (en) * 1993-07-12 1994-09-20 Rockwell International Corporation Diffraction grating rotary speed sensor having a circumferentially variable pitch diffraction grating

Also Published As

Publication number Publication date
EP0963541A1 (de) 1999-12-15
EP0963541A4 (de) 2001-07-25
JP3902796B2 (ja) 2007-04-11
DE69723110T2 (de) 2004-05-06
EP0963541B1 (de) 2003-06-25
US6490028B1 (en) 2002-12-03
WO1999044013A1 (en) 1999-09-02
CA2277211A1 (en) 1999-09-02
JP2001513899A (ja) 2001-09-04
ES2196397T3 (es) 2003-12-16
CA2277211C (en) 2008-10-07

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Legal Events

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