DE69937724T2 - Verbesserte optische Übertragungsvorrichtung, die Metallschichten mit Öffnungen und periodischer Oberflächentopographie verwendet - Google Patents

Verbesserte optische Übertragungsvorrichtung, die Metallschichten mit Öffnungen und periodischer Oberflächentopographie verwendet Download PDF

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Publication number
DE69937724T2
DE69937724T2 DE69937724T DE69937724T DE69937724T2 DE 69937724 T2 DE69937724 T2 DE 69937724T2 DE 69937724 T DE69937724 T DE 69937724T DE 69937724 T DE69937724 T DE 69937724T DE 69937724 T2 DE69937724 T2 DE 69937724T2
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DE
Germany
Prior art keywords
light
metal layer
openings
periodic
transmission
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Expired - Lifetime
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DE69937724T
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German (de)
English (en)
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DE69937724D1 (de
Inventor
Thomas W. Ebbesen
Daniel E. Grupp
Tineke Thio
Henri J. Lezec
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NEC Corp
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NEC Corp
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Publication of DE69937724T2 publication Critical patent/DE69937724T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Filters (AREA)
DE69937724T 1998-12-09 1999-08-20 Verbesserte optische Übertragungsvorrichtung, die Metallschichten mit Öffnungen und periodischer Oberflächentopographie verwendet Expired - Lifetime DE69937724T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US208116 1998-12-09
US09/208,116 US6236033B1 (en) 1998-12-09 1998-12-09 Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography

Publications (2)

Publication Number Publication Date
DE69937724D1 DE69937724D1 (de) 2008-01-24
DE69937724T2 true DE69937724T2 (de) 2008-11-27

Family

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Application Number Title Priority Date Filing Date
DE69937724T Expired - Lifetime DE69937724T2 (de) 1998-12-09 1999-08-20 Verbesserte optische Übertragungsvorrichtung, die Metallschichten mit Öffnungen und periodischer Oberflächentopographie verwendet

Country Status (4)

Country Link
US (1) US6236033B1 (enExample)
EP (1) EP1008870B1 (enExample)
JP (2) JP3766238B2 (enExample)
DE (1) DE69937724T2 (enExample)

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