DE69937724D1 - Verbesserte optische Uebertragungsvorrichtung mittels metallischen Filmen mit Oeffnungen und periodische Oberflaechentopographie - Google Patents

Verbesserte optische Uebertragungsvorrichtung mittels metallischen Filmen mit Oeffnungen und periodische Oberflaechentopographie

Info

Publication number
DE69937724D1
DE69937724D1 DE69937724T DE69937724T DE69937724D1 DE 69937724 D1 DE69937724 D1 DE 69937724D1 DE 69937724 T DE69937724 T DE 69937724T DE 69937724 T DE69937724 T DE 69937724T DE 69937724 D1 DE69937724 D1 DE 69937724D1
Authority
DE
Germany
Prior art keywords
openings
transmission device
optical transmission
metal films
surface topography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69937724T
Other languages
English (en)
Other versions
DE69937724T2 (de
Inventor
Thomas W Ebbesen
Daniel E Grupp
Tineke Thio
Henri J Lezec
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE69937724D1 publication Critical patent/DE69937724D1/de
Publication of DE69937724T2 publication Critical patent/DE69937724T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Biophysics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Filters (AREA)
DE69937724T 1998-12-09 1999-08-20 Verbesserte optische Übertragungsvorrichtung, die Metallschichten mit Öffnungen und periodischer Oberflächentopographie verwendet Expired - Lifetime DE69937724T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/208,116 US6236033B1 (en) 1998-12-09 1998-12-09 Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography
US208116 1998-12-09

Publications (2)

Publication Number Publication Date
DE69937724D1 true DE69937724D1 (de) 2008-01-24
DE69937724T2 DE69937724T2 (de) 2008-11-27

Family

ID=22773246

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69937724T Expired - Lifetime DE69937724T2 (de) 1998-12-09 1999-08-20 Verbesserte optische Übertragungsvorrichtung, die Metallschichten mit Öffnungen und periodischer Oberflächentopographie verwendet

Country Status (4)

Country Link
US (1) US6236033B1 (de)
EP (1) EP1008870B1 (de)
JP (2) JP3766238B2 (de)
DE (1) DE69937724T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110112159A (zh) * 2019-05-13 2019-08-09 德淮半导体有限公司 图像传感器及其形成方法

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