DE69902800D1 - Optische wellenleitervorrichtung - Google Patents

Optische wellenleitervorrichtung

Info

Publication number
DE69902800D1
DE69902800D1 DE69902800T DE69902800T DE69902800D1 DE 69902800 D1 DE69902800 D1 DE 69902800D1 DE 69902800 T DE69902800 T DE 69902800T DE 69902800 T DE69902800 T DE 69902800T DE 69902800 D1 DE69902800 D1 DE 69902800D1
Authority
DE
Germany
Prior art keywords
guide device
wave guide
optical wave
optical
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69902800T
Other languages
English (en)
Other versions
DE69902800T2 (de
Inventor
Peter Bloechl
Gian-Luca Bona
W Germann
Folkert Horst
Illana Massarek
Jan Offrein
L Salemink
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69902800D1 publication Critical patent/DE69902800D1/de
Publication of DE69902800T2 publication Critical patent/DE69902800T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/105—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type having optical polarisation effects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
DE69902800T 1998-10-15 1999-10-01 Optische wellenleitervorrichtung Expired - Lifetime DE69902800T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP98119510 1998-10-15
PCT/IB1999/001612 WO2000022465A1 (en) 1998-10-15 1999-10-01 Optical waveguide device

Publications (2)

Publication Number Publication Date
DE69902800D1 true DE69902800D1 (de) 2002-10-10
DE69902800T2 DE69902800T2 (de) 2003-05-28

Family

ID=8232806

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69902800T Expired - Lifetime DE69902800T2 (de) 1998-10-15 1999-10-01 Optische wellenleitervorrichtung

Country Status (8)

Country Link
US (1) US6678452B1 (de)
EP (1) EP1121611B1 (de)
JP (1) JP3496829B2 (de)
KR (1) KR100446171B1 (de)
CN (1) CN1157611C (de)
DE (1) DE69902800T2 (de)
IL (1) IL141831A0 (de)
WO (1) WO2000022465A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2366394A (en) 2000-08-11 2002-03-06 Kymata Ltd Integrated optical device with cladding having mesa formation
DE10045566A1 (de) * 2000-09-14 2002-03-28 Scc Special Comm Cables Gmbh Optischer Chip und Verfahren zur Herstellung eines strukturverstärkten optischen Chips
US20020048433A1 (en) * 2000-10-10 2002-04-25 Chi Wu Optical component having a protected ridge
WO2002035265A2 (en) * 2000-10-20 2002-05-02 Corning Incorporated Using deuterated source gases to fabricate low loss germanium-doped silicon oxy nitride (gestion-sion)
JP2003121666A (ja) * 2001-10-10 2003-04-23 Nec Corp 導波路型光デバイスおよびその製造方法
US7020374B2 (en) * 2003-02-03 2006-03-28 Freescale Semiconductor, Inc. Optical waveguide structure and method for fabricating the same
JP4626153B2 (ja) * 2004-02-20 2011-02-02 日本電気株式会社 光導波路回路の製造方法
JP4681644B2 (ja) * 2008-11-18 2011-05-11 日本電信電話株式会社 光導波路の作製方法
JP2012068399A (ja) * 2010-09-22 2012-04-05 Nec Corp 光モジュール及びその製造方法
WO2012059779A1 (en) * 2010-11-03 2012-05-10 Empire Technology Development Llc Formation of an optical waveguide
US10191213B2 (en) 2014-01-09 2019-01-29 Globalfoundries Inc. Shielding structures between optical waveguides
CN103760691B (zh) * 2014-01-24 2016-05-11 东南大学 一种偏振态控制的多模干涉型光开关及其制备方法
CN105158858B (zh) * 2015-06-24 2017-01-18 湖南晶图科技有限公司 一种消除成型plc晶圆内部残余应力的方法
WO2017201100A2 (en) * 2016-05-16 2017-11-23 Finisar Corporation Adiabatically coupled optical system
CN109059749B (zh) * 2018-07-09 2019-09-20 清华大学 柔性传感器的制备方法
CN111229336B (zh) * 2020-01-17 2021-11-23 上海新微技术研发中心有限公司 光波导多微流道芯片的制造方法
CN113687530B (zh) * 2021-08-31 2023-12-08 中国科学院半导体研究所 硅基电光调制器及其制备方法
WO2023100343A1 (ja) 2021-12-03 2023-06-08 富士通株式会社 光導波路装置、量子演算装置及び光導波路装置の製造方法
CN115951509B (zh) * 2023-03-13 2023-06-02 济南晶正电子科技有限公司 电光晶体薄膜、制备方法及电子元件

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4358181A (en) 1977-09-29 1982-11-09 Corning Glass Works Gradient index optical waveguide and method of making
US4724316A (en) 1985-07-12 1988-02-09 Eldec Corporation Temperature independent fiber optic sensor
US4781424A (en) 1986-07-28 1988-11-01 Nippon Telegraph And Telephone Corporation Single mode channel optical waveguide with a stress-induced birefringence control region
JPS6399589A (ja) * 1986-10-15 1988-04-30 Mitsubishi Electric Corp 半導体レ−ザ
DE3887567T2 (de) * 1987-05-26 1994-06-01 Toshiba Kawasaki Kk Halbleiterlaservorrichtung und Verfahren zu ihrer Herstellung.
JPS63303305A (ja) * 1987-06-03 1988-12-09 Fujikura Ltd 石英系薄膜導波路
US5467415A (en) * 1994-04-22 1995-11-14 At&T Corp. Method for making polarization independent silica optical circuits
US5483613A (en) 1994-08-16 1996-01-09 At&T Corp. Optical device with substrate and waveguide structure having thermal matching interfaces
KR100303279B1 (ko) * 1994-08-27 2001-12-01 윤종용 반도체레이저다이오드와그제조방법
US5502781A (en) 1995-01-25 1996-03-26 At&T Corp. Integrated optical devices utilizing magnetostrictively, electrostrictively or photostrictively induced stress
US6031858A (en) * 1996-09-09 2000-02-29 Kabushiki Kaisha Toshiba Semiconductor laser and method of fabricating same

Also Published As

Publication number Publication date
JP2002527787A (ja) 2002-08-27
KR20010088825A (ko) 2001-09-28
CN1323404A (zh) 2001-11-21
US6678452B1 (en) 2004-01-13
JP3496829B2 (ja) 2004-02-16
EP1121611B1 (de) 2002-09-04
DE69902800T2 (de) 2003-05-28
KR100446171B1 (ko) 2004-08-30
IL141831A0 (en) 2002-03-10
CN1157611C (zh) 2004-07-14
EP1121611A1 (de) 2001-08-08
WO2000022465A1 (en) 2000-04-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8328 Change in the person/name/address of the agent

Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7