DE69937695D1 - Verfahren und Apparat zum Herstellen einer Plasma-Anzeigevorrichtung - Google Patents
Verfahren und Apparat zum Herstellen einer Plasma-AnzeigevorrichtungInfo
- Publication number
- DE69937695D1 DE69937695D1 DE69937695T DE69937695T DE69937695D1 DE 69937695 D1 DE69937695 D1 DE 69937695D1 DE 69937695 T DE69937695 T DE 69937695T DE 69937695 T DE69937695 T DE 69937695T DE 69937695 D1 DE69937695 D1 DE 69937695D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- display device
- plasma display
- plasma
- display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
- H01J11/12—AC-PDPs with at least one main electrode being out of contact with the plasma with main electrodes provided on both sides of the discharge space
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
- H01J11/36—Spacers, barriers, ribs, partitions or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
- H01J11/42—Fluorescent layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/48—Sealing, e.g. seals specially adapted for leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/54—Means for exhausting the gas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
- H01J9/261—Sealing together parts of vessels the vessel being for a flat panel display
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/385—Exhausting vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2211/00—Plasma display panels with alternate current induction of the discharge, e.g. AC-PDPs
- H01J2211/20—Constructional details
- H01J2211/48—Sealing, e.g. seals specially adapted for leading-in conductors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Applications Claiming Priority (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16662098 | 1998-06-15 | ||
JP16662098 | 1998-06-15 | ||
JP18375898 | 1998-06-30 | ||
JP18375898 | 1998-06-30 | ||
JP21726098 | 1998-07-31 | ||
JP21726098 | 1998-07-31 | ||
JP22298798 | 1998-08-06 | ||
JP22298798 | 1998-08-06 | ||
JP3928099 | 1999-02-17 | ||
JP3928099 | 1999-02-17 | ||
JP13776399 | 1999-05-18 | ||
JP13776499 | 1999-05-18 | ||
JP13776399 | 1999-05-18 | ||
JP13776499 | 1999-05-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69937695D1 true DE69937695D1 (de) | 2008-01-17 |
DE69937695T2 DE69937695T2 (de) | 2008-04-30 |
Family
ID=27564488
Family Applications (7)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69934521T Expired - Lifetime DE69934521T2 (de) | 1998-06-15 | 1999-06-15 | Plasma-Anzeigevorrichtung mit verbesserten Lichtemissionseigenschaften |
DE69910573T Expired - Lifetime DE69910573T2 (de) | 1998-06-15 | 1999-06-15 | Plasma-anzeigevorrichtung mit guten licht-emissionseigenschaften, und verfahren und vorrichtung zu deren herstellung |
DE69917081T Expired - Lifetime DE69917081T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren zur Herstellung einer Plasma-Anzeigevorrichtung mit guten Emissionseigenschaften |
DE69926812T Expired - Lifetime DE69926812T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren zur Herstellung einer Plasma-Anzeigevorrichtung mit verbesserten Lichtemissionseigenschaften |
DE69927305T Expired - Lifetime DE69927305T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren zur Herstellung einer Plasma-Anzeigevorrichtung mit verbesserten Lichtemissionseigenschaften |
DE69926811T Expired - Lifetime DE69926811T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren zur Herstellung einer Plasma-Anzeigevorrichtung mit guten Licht-Emissionseigenschaften |
DE69937695T Expired - Lifetime DE69937695T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren und Apparat zum Herstellen einer Plasma-Anzeigevorrichtung |
Family Applications Before (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69934521T Expired - Lifetime DE69934521T2 (de) | 1998-06-15 | 1999-06-15 | Plasma-Anzeigevorrichtung mit verbesserten Lichtemissionseigenschaften |
DE69910573T Expired - Lifetime DE69910573T2 (de) | 1998-06-15 | 1999-06-15 | Plasma-anzeigevorrichtung mit guten licht-emissionseigenschaften, und verfahren und vorrichtung zu deren herstellung |
DE69917081T Expired - Lifetime DE69917081T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren zur Herstellung einer Plasma-Anzeigevorrichtung mit guten Emissionseigenschaften |
DE69926812T Expired - Lifetime DE69926812T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren zur Herstellung einer Plasma-Anzeigevorrichtung mit verbesserten Lichtemissionseigenschaften |
DE69927305T Expired - Lifetime DE69927305T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren zur Herstellung einer Plasma-Anzeigevorrichtung mit verbesserten Lichtemissionseigenschaften |
DE69926811T Expired - Lifetime DE69926811T2 (de) | 1998-06-15 | 1999-06-15 | Verfahren zur Herstellung einer Plasma-Anzeigevorrichtung mit guten Licht-Emissionseigenschaften |
Country Status (6)
Country | Link |
---|---|
US (6) | US6984159B1 (de) |
EP (7) | EP1088323B1 (de) |
KR (3) | KR100742855B1 (de) |
CN (1) | CN1296957C (de) |
DE (7) | DE69934521T2 (de) |
WO (1) | WO1999066525A1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001056053A1 (fr) * | 2000-01-26 | 2001-08-02 | Matsushita Electric Industrial Co., Ltd. | Dispositif electroluminescent a decharge et son procede de fabrication |
CN100336157C (zh) * | 2000-03-31 | 2007-09-05 | 松下电器产业株式会社 | 等离子体显示面板的制造方法 |
EP1361593A4 (de) * | 2001-01-17 | 2008-06-04 | Matsushita Electric Ind Co Ltd | Plasmaanzeigetafel und verfahren zu ihrer herstellung |
KR100404191B1 (ko) * | 2001-04-04 | 2003-11-03 | 엘지전자 주식회사 | 플라즈마 디스플레이 패널과 그 제조설비 및 제조공정 |
KR100756157B1 (ko) | 2001-12-25 | 2007-09-05 | 마쯔시다덴기산교 가부시키가이샤 | 플라즈마 디스플레이 패널 및 그 제조 방법 |
US7592980B2 (en) | 2002-06-05 | 2009-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20040005769A1 (en) * | 2002-07-03 | 2004-01-08 | Cabot Microelectronics Corp. | Method and apparatus for endpoint detection |
KR100563048B1 (ko) * | 2003-09-25 | 2006-03-24 | 삼성에스디아이 주식회사 | 플라즈마 표시장치 조립체 |
JP5068924B2 (ja) | 2004-02-20 | 2012-11-07 | 中外炉工業株式会社 | ガラスパネル組立体の連続封着処理炉および封着処理方法 |
JP2005317507A (ja) * | 2004-03-30 | 2005-11-10 | Sanyo Electric Co Ltd | 有機エレクトロルミネッセンス装置 |
US20060042316A1 (en) * | 2004-08-24 | 2006-03-02 | Canon Kabushiki Kaisha | Method of manufacturing hermetically sealed container and image display apparatus |
KR100590043B1 (ko) * | 2004-09-24 | 2006-06-14 | 삼성에스디아이 주식회사 | 플라즈마 디스플레이 패널 |
US7830077B2 (en) * | 2005-04-07 | 2010-11-09 | Panasonic Corporation | Light-emitting device configured to emit light by a creeping discharge of an emitter |
KR100637238B1 (ko) * | 2005-08-27 | 2006-10-23 | 삼성에스디아이 주식회사 | 플라즈마 디스플레이 패널과, 이의 제조 방법 |
US8460048B2 (en) * | 2007-06-15 | 2013-06-11 | Ulvac, Inc. | Method and apparatus for manufacturing plasma display panel |
JP4579318B2 (ja) * | 2008-07-18 | 2010-11-10 | パナソニック株式会社 | プラズマディスプレイパネルの製造方法 |
JP2010118153A (ja) * | 2008-11-11 | 2010-05-27 | Panasonic Corp | プラズマディスプレイパネルの製造方法 |
JP5090401B2 (ja) * | 2009-05-13 | 2012-12-05 | パナソニック株式会社 | プラズマディスプレイパネルの製造方法 |
JP5240532B2 (ja) * | 2010-06-08 | 2013-07-17 | 住友金属鉱山株式会社 | 金属酸化物膜の製造方法 |
JP5947098B2 (ja) | 2011-05-13 | 2016-07-06 | 株式会社半導体エネルギー研究所 | ガラス封止体の作製方法および発光装置の作製方法 |
KR102038844B1 (ko) | 2011-06-16 | 2019-10-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 밀봉체의 제작 방법 및 밀봉체, 그리고 발광 장치의 제작 방법 및 발광 장치 |
JP6111022B2 (ja) | 2011-06-17 | 2017-04-05 | 株式会社半導体エネルギー研究所 | 封止体の作製方法および発光装置の作製方法 |
WO2013031509A1 (en) | 2011-08-26 | 2013-03-07 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device, electronic device, lighting device, and method for manufacturing the light-emitting device |
US9472776B2 (en) | 2011-10-14 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing sealed structure including welded glass frits |
JP2013101923A (ja) | 2011-10-21 | 2013-05-23 | Semiconductor Energy Lab Co Ltd | 分散組成物の加熱方法、及びガラスパターンの形成方法 |
KR102058387B1 (ko) | 2011-11-28 | 2019-12-24 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 유리 패턴 및 그 형성 방법, 밀봉체 및 그 제작 방법, 및 발광 장치 |
TWI569490B (zh) | 2011-11-28 | 2017-02-01 | 半導體能源研究所股份有限公司 | 密封體,發光模組,及製造密封體之方法 |
KR102001815B1 (ko) | 2011-11-29 | 2019-07-19 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 밀봉체의 제작 방법 및 발광 장치의 제작 방법 |
CN102436994B (zh) * | 2011-12-14 | 2014-12-10 | 四川虹欧显示器件有限公司 | 等离子显示屏的封接方法 |
CN102748714B (zh) * | 2012-06-28 | 2013-12-11 | 深圳市华星光电技术有限公司 | 荧光粉基板的制作方法及用该荧光粉基板的液晶模组 |
KR20140016170A (ko) | 2012-07-30 | 2014-02-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 밀봉체 및 유기 전계 발광 장치 |
US9362522B2 (en) | 2012-10-26 | 2016-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for bonding substrates, method for manufacturing sealing structure, and method for manufacturing light-emitting device |
CN110908152A (zh) * | 2019-11-08 | 2020-03-24 | 深圳市华星光电半导体显示技术有限公司 | 基板组立机台及基板组立成盒的方法 |
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US3944868A (en) * | 1974-07-30 | 1976-03-16 | Panel Technology, Inc. | Segmented gas discharge display panel device |
US4018490A (en) | 1975-07-07 | 1977-04-19 | International Business Machines Corporation | Gas discharge display panel fabrication |
JPS60193229A (ja) | 1984-03-15 | 1985-10-01 | Nec Corp | プラズマデイスプレイパネルの製造方法 |
JPH0218834A (ja) * | 1988-07-05 | 1990-01-23 | Nec Kansai Ltd | 蛍光膜形成方法 |
JPH0523412A (ja) * | 1991-07-23 | 1993-02-02 | Furukawa Electric Co Ltd:The | 人工スキー場用滑走マツト |
US5330941A (en) * | 1991-07-24 | 1994-07-19 | Asahi Glass Company Ltd. | Quartz glass substrate for polysilicon thin film transistor liquid crystal display |
DE69318196T2 (de) * | 1992-01-28 | 1998-08-27 | Fujitsu Ltd | Plasma Farbanzeige-Vorrichtung von Oberflächenentladungs-Typ |
JPH05234512A (ja) * | 1992-02-21 | 1993-09-10 | Nec Corp | ガス放電表示パネルの製造方法 |
JP3236665B2 (ja) | 1992-06-05 | 2001-12-10 | 富士通株式会社 | Ac型プラズマディスプレイパネルのエージング方法 |
JPH0762339A (ja) | 1993-08-30 | 1995-03-07 | Fuji Xerox Co Ltd | 蛍光体膜およびその作製方法 |
JP3476234B2 (ja) | 1993-12-16 | 2003-12-10 | 富士通株式会社 | プラズマディスプレイパネル及び駆動方法 |
JPH08115673A (ja) * | 1994-10-17 | 1996-05-07 | Kasei Optonix Co Ltd | 真空紫外線励起発光素子 |
JP3212837B2 (ja) | 1995-06-30 | 2001-09-25 | 富士通株式会社 | プラズマディスプレイパネル及びその製造方法 |
JP3763028B2 (ja) | 1995-11-15 | 2006-04-05 | 化成オプトニクス株式会社 | 蛍光膜及びその製造方法 |
JP3554432B2 (ja) | 1996-01-11 | 2004-08-18 | 中外炉工業株式会社 | プラズマディスプレイパネルの製造方法 |
JP3434416B2 (ja) | 1996-07-10 | 2003-08-11 | 株式会社日立製作所 | プラズマディスプレイパネルの封止構造 |
KR19980017588A (ko) * | 1996-08-31 | 1998-06-05 | 엄길용 | 플라즈마 표시소자의 에이징방법 |
US5951350A (en) * | 1996-09-18 | 1999-09-14 | Matsushita Electric Industrial Co., Ltd. | Production method of plasma display panel suitable for minute cell structure, the plasma panel, and apparatus for displaying the plasma display panel |
JPH10121041A (ja) | 1996-10-15 | 1998-05-12 | Mitsubishi Chem Corp | 映像表示管 |
JP3978867B2 (ja) | 1997-05-29 | 2007-09-19 | 東レ株式会社 | プラズマディスプレイ用基板、プラズマディスプレイ、および、その製造方法 |
JPH11297212A (ja) | 1998-04-15 | 1999-10-29 | Hitachi Ltd | プラズマディスプレイ |
KR100428970B1 (ko) * | 1998-12-15 | 2004-06-16 | 삼성에스디아이 주식회사 | 플라즈마 디스플레이 소자의 제조방법 및 장치 |
CN100380559C (zh) | 1999-05-28 | 2008-04-09 | 松下电器产业株式会社 | 发光特性优异的等离子显示面板的制造方法 |
-
1999
- 1999-06-15 KR KR1020067017294A patent/KR100742855B1/ko not_active IP Right Cessation
- 1999-06-15 EP EP99924032A patent/EP1088323B1/de not_active Expired - Lifetime
- 1999-06-15 DE DE69934521T patent/DE69934521T2/de not_active Expired - Lifetime
- 1999-06-15 DE DE69910573T patent/DE69910573T2/de not_active Expired - Lifetime
- 1999-06-15 DE DE69917081T patent/DE69917081T2/de not_active Expired - Lifetime
- 1999-06-15 DE DE69926812T patent/DE69926812T2/de not_active Expired - Lifetime
- 1999-06-15 KR KR1020007014220A patent/KR100766195B1/ko not_active IP Right Cessation
- 1999-06-15 EP EP02028111A patent/EP1313123B1/de not_active Expired - Lifetime
- 1999-06-15 EP EP02075449A patent/EP1220269B1/de not_active Expired - Lifetime
- 1999-06-15 DE DE69927305T patent/DE69927305T2/de not_active Expired - Lifetime
- 1999-06-15 KR KR1020067017291A patent/KR100742854B1/ko not_active IP Right Cessation
- 1999-06-15 EP EP02075447A patent/EP1223600B1/de not_active Expired - Lifetime
- 1999-06-15 CN CNB998097020A patent/CN1296957C/zh not_active Expired - Fee Related
- 1999-06-15 US US09/719,134 patent/US6984159B1/en not_active Expired - Fee Related
- 1999-06-15 EP EP02075450A patent/EP1220270B1/de not_active Expired - Lifetime
- 1999-06-15 WO PCT/JP1999/003189 patent/WO1999066525A1/en active IP Right Grant
- 1999-06-15 DE DE69926811T patent/DE69926811T2/de not_active Expired - Lifetime
- 1999-06-15 DE DE69937695T patent/DE69937695T2/de not_active Expired - Lifetime
- 1999-06-15 EP EP02075448A patent/EP1223599B1/de not_active Expired - Lifetime
- 1999-06-15 EP EP02075446A patent/EP1223602B1/de not_active Expired - Lifetime
-
2004
- 2004-09-17 US US10/943,374 patent/US7131879B2/en not_active Expired - Fee Related
- 2004-09-17 US US10/943,696 patent/US7040944B2/en not_active Expired - Fee Related
- 2004-09-17 US US10/943,620 patent/US7422502B2/en not_active Expired - Fee Related
- 2004-09-17 US US10/943,643 patent/US7315120B2/en not_active Expired - Lifetime
- 2004-09-17 US US10/943,697 patent/US7172482B2/en not_active Expired - Fee Related
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