DE69925358T2 - Verfahren zur herstellung einer strahlungsempfindlichen zusammensetzung - Google Patents

Verfahren zur herstellung einer strahlungsempfindlichen zusammensetzung Download PDF

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Publication number
DE69925358T2
DE69925358T2 DE69925358T DE69925358T DE69925358T2 DE 69925358 T2 DE69925358 T2 DE 69925358T2 DE 69925358 T DE69925358 T DE 69925358T DE 69925358 T DE69925358 T DE 69925358T DE 69925358 T2 DE69925358 T2 DE 69925358T2
Authority
DE
Germany
Prior art keywords
polymer
mwco
radiation
fraction
molecular weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69925358T
Other languages
German (de)
English (en)
Other versions
DE69925358D1 (de
Inventor
Sanjay Malik
J. Andrew BLAKENEY
J. Joseph SIZENSKY
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arch Specialty Chemicals Inc
Original Assignee
Arch Specialty Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arch Specialty Chemicals Inc filed Critical Arch Specialty Chemicals Inc
Application granted granted Critical
Publication of DE69925358D1 publication Critical patent/DE69925358D1/de
Publication of DE69925358T2 publication Critical patent/DE69925358T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE69925358T 1998-01-16 1999-01-13 Verfahren zur herstellung einer strahlungsempfindlichen zusammensetzung Expired - Fee Related DE69925358T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/008,671 US6027853A (en) 1998-01-16 1998-01-16 Process for preparing a radiation-sensitive composition
US8671 1998-01-16
PCT/US1999/000719 WO1999036831A1 (en) 1998-01-16 1999-01-13 Process for preparing a radiation-sensitive composition

Publications (2)

Publication Number Publication Date
DE69925358D1 DE69925358D1 (de) 2005-06-23
DE69925358T2 true DE69925358T2 (de) 2006-01-12

Family

ID=21732997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69925358T Expired - Fee Related DE69925358T2 (de) 1998-01-16 1999-01-13 Verfahren zur herstellung einer strahlungsempfindlichen zusammensetzung

Country Status (7)

Country Link
US (1) US6027853A (enExample)
EP (1) EP1044394B1 (enExample)
JP (1) JP2002509290A (enExample)
KR (1) KR100576534B1 (enExample)
DE (1) DE69925358T2 (enExample)
TW (1) TWI242110B (enExample)
WO (1) WO1999036831A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6359114B1 (en) * 1995-06-07 2002-03-19 Aphton Corp. System for method for the modification and purification of proteins
US6506831B2 (en) * 1998-12-20 2003-01-14 Honeywell International Inc. Novolac polymer planarization films with high temperature stability
US6414110B1 (en) * 1999-11-12 2002-07-02 Triquest Lp Purification means
US6461717B1 (en) * 2000-04-24 2002-10-08 Shipley Company, L.L.C. Aperture fill
US20040192876A1 (en) * 2002-11-18 2004-09-30 Nigel Hacker Novolac polymer planarization films with high temparature stability
CN100367113C (zh) * 2002-12-11 2008-02-06 三星电子株式会社 用于形成共轭聚合物图案的组合物和使用该组合物形成共轭聚合物图案的方法
US7910223B2 (en) * 2003-07-17 2011-03-22 Honeywell International Inc. Planarization films for advanced microelectronic applications and devices and methods of production thereof
US20070248913A1 (en) * 2006-04-24 2007-10-25 Rahman M Dalil Process for producing film forming resins for photoresist compositions

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159821A (en) * 1981-03-30 1982-10-02 Fujitsu Ltd Production of photopolymer
JPS6097347A (ja) * 1983-11-01 1985-05-31 Hitachi Chem Co Ltd 画像形成性感光性組成物
JP2590342B2 (ja) * 1986-11-08 1997-03-12 住友化学工業株式会社 ポジ型フォトレジスト用ノボラック樹脂及びそれを含有するポジ型フォトレジスト組成物
US4921778A (en) * 1988-07-29 1990-05-01 Shipley Company Inc. Photoresist pattern fabrication employing chemically amplified metalized material
FR2658092B1 (fr) * 1990-02-13 1992-05-15 Atochem Procede de purification de solutions de polyorganophosphazene par membranes.
US5171767A (en) * 1991-05-06 1992-12-15 Rohm And Haas Company Utrafiltration process for the recovery of polymeric latices from whitewater
TW267219B (enExample) * 1991-12-27 1996-01-01 Sumitomo Chemical Co
US5527161A (en) * 1992-02-13 1996-06-18 Cybor Corporation Filtering and dispensing system
US5571657A (en) * 1993-09-30 1996-11-05 Shipley Company, Inc. Modified cation exhange process
US5462675A (en) * 1994-07-15 1995-10-31 Pall Corporation Filter assembly and method of reducing hold-up in a filter assembly
JP3278306B2 (ja) * 1994-10-31 2002-04-30 富士写真フイルム株式会社 ポジ型フォトレジスト組成物
JP3330254B2 (ja) * 1995-04-19 2002-09-30 東京応化工業株式会社 ネガ型レジスト組成物
JP3467118B2 (ja) * 1995-05-24 2003-11-17 富士写真フイルム株式会社 ポジ型フォトレジスト組成物
US5618655A (en) * 1995-07-17 1997-04-08 Olin Corporation Process of reducing trace levels of metal impurities from resist components
JP3589365B2 (ja) * 1996-02-02 2004-11-17 富士写真フイルム株式会社 ポジ画像形成組成物

Also Published As

Publication number Publication date
TWI242110B (en) 2005-10-21
EP1044394A4 (en) 2001-04-04
WO1999036831A1 (en) 1999-07-22
WO1999036831A9 (en) 1999-10-07
KR20010040340A (ko) 2001-05-15
EP1044394A1 (en) 2000-10-18
EP1044394B1 (en) 2005-05-18
DE69925358D1 (de) 2005-06-23
KR100576534B1 (ko) 2006-05-08
US6027853A (en) 2000-02-22
JP2002509290A (ja) 2002-03-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee