DE69914554D1 - Verfahren und Vorrichtung zum Spenden flüssiger Chemikalien - Google Patents

Verfahren und Vorrichtung zum Spenden flüssiger Chemikalien

Info

Publication number
DE69914554D1
DE69914554D1 DE69914554T DE69914554T DE69914554D1 DE 69914554 D1 DE69914554 D1 DE 69914554D1 DE 69914554 T DE69914554 T DE 69914554T DE 69914554 T DE69914554 T DE 69914554T DE 69914554 D1 DE69914554 D1 DE 69914554D1
Authority
DE
Germany
Prior art keywords
dispensing liquid
liquid chemicals
chemicals
dispensing
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69914554T
Other languages
English (en)
Other versions
DE69914554T2 (de
Inventor
Mindi Xu
Xavier Vigor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE69914554D1 publication Critical patent/DE69914554D1/de
Application granted granted Critical
Publication of DE69914554T2 publication Critical patent/DE69914554T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00—Arrangements for supervising or controlling working operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0244—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags
    • B67D7/025—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D1/00—Apparatus or devices for dispensing beverages on draught
    • B67D1/04—Apparatus utilising compressed air or other gas acting directly or indirectly on beverages in storage containers
    • B67D1/045—Apparatus utilising compressed air or other gas acting directly or indirectly on beverages in storage containers using elastic bags and pistons actuated by air or other gas
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/34—Hydrogen distribution

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
DE69914554T 1998-09-22 1999-08-25 Verfahren und Vorrichtung zum Spenden flüssiger Chemikalien Expired - Fee Related DE69914554T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US158740 1998-09-22
US09/158,740 US6168048B1 (en) 1998-09-22 1998-09-22 Methods and systems for distributing liquid chemicals

Publications (2)

Publication Number Publication Date
DE69914554D1 true DE69914554D1 (de) 2004-03-11
DE69914554T2 DE69914554T2 (de) 2004-12-23

Family

ID=22569479

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69914554T Expired - Fee Related DE69914554T2 (de) 1998-09-22 1999-08-25 Verfahren und Vorrichtung zum Spenden flüssiger Chemikalien

Country Status (8)

Country Link
US (1) US6168048B1 (de)
EP (1) EP0989090B1 (de)
JP (1) JP2000109195A (de)
KR (1) KR20000023360A (de)
CN (1) CN1256241A (de)
DE (1) DE69914554T2 (de)
SG (1) SG73671A1 (de)
TW (1) TW396257B (de)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6237363B1 (en) * 1998-09-30 2001-05-29 Medi-Physics, Inc. Hyperpolarized noble gas extraction methods masking methods and associated transport containers
US6527007B2 (en) * 1998-12-16 2003-03-04 Carl Cheung Tung Kong Fluid transfer system
US20030010792A1 (en) * 1998-12-30 2003-01-16 Randy Forshey Chemical mix and delivery systems and methods thereof
US6616014B1 (en) * 2000-02-25 2003-09-09 The Boc Group, Inc. Precision liquid mixing apparatus and method
EP1093854B1 (de) * 2000-08-03 2008-07-02 Koninklijke Philips Electronics N.V. Fluid-Transport durch Druckvariation zur Analyse biologischer Flüssigkeiten
US6460404B1 (en) * 2000-10-12 2002-10-08 Chartered Semiconductor Manufacturing Ltd. Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool
JP2002136936A (ja) * 2000-11-02 2002-05-14 Ecolab Kk 洗浄処理方法およびシステム、情報記憶媒体
US6581801B2 (en) * 2001-02-20 2003-06-24 Sloan Valve Company Single soap pump for use with water displacement soap containers and peristaltic pump
US7334708B2 (en) * 2001-07-16 2008-02-26 L'air Liquide, Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical
US6783429B2 (en) * 2001-08-17 2004-08-31 The Boc Group, Inc. Apparatus and method for sampling a chemical-mechanical polishing slurry
WO2003024555A2 (en) * 2001-09-18 2003-03-27 Mykrolis Corporation Process for controlling the hydraulic chamber pressure of a diaphragm pump
CN1561313A (zh) 2001-10-01 2005-01-05 Fsi国际公司 流体分配装置
US20030098069A1 (en) 2001-11-26 2003-05-29 Sund Wesley E. High purity fluid delivery system
JP4578103B2 (ja) * 2002-02-07 2010-11-10 ポール・コーポレーション フォトレジストを供給するために用いられるシステム及びフォトレジストを供給する方法
US6979397B2 (en) * 2002-03-19 2005-12-27 Schroeder Industries, Llc Dynamic particle removing flushing system
US20030185690A1 (en) * 2002-03-28 2003-10-02 Mindi Xu Systems and methods for transferring and delivering a liquid chemical from a source to an end use station
US6698619B2 (en) * 2002-05-03 2004-03-02 Advanced Technology Materials, Inc. Returnable and reusable, bag-in-drum fluid storage and dispensing container system
US6848599B2 (en) * 2002-08-22 2005-02-01 Illinois Tool Works Inc. Adhesive container and method of filling
KR100627510B1 (ko) * 2002-12-30 2006-09-22 주식회사 하이닉스반도체 나이트라이드용 ｃｍｐ 슬러리
US7086566B2 (en) * 2003-07-03 2006-08-08 Creamiser Products Corporation Under counter dispenser
US7871319B2 (en) * 2004-11-03 2011-01-18 Hewlett-Packard Development Company, L.P. Computer thermal dissipation system and method
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
CN101193815B (zh) * 2005-03-04 2012-03-28 液化空气电子美国有限公司 容积流体输送系统中的流体状态的控制
KR101312237B1 (ko) 2005-04-25 2013-09-26 도쿄엘렉트론가부시키가이샤 비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및분배 시스템
KR20080009136A (ko) * 2005-04-25 2008-01-24 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 화학 시약 및 조성물을 저장 및 분배하는 장치 및 방법
TWI391301B (zh) * 2005-04-25 2013-04-01 Advanced Tech Materials 物料儲存及配送包裝及方法
JP2006336574A (ja) * 2005-06-03 2006-12-14 Anest Iwata Corp 不活性ガス昇圧送給方法および装置
SG162759A1 (en) * 2005-06-06 2010-07-29 Advanced Tech Materials Fluid storage and dispensing systems and processes
US20070215639A1 (en) * 2006-02-15 2007-09-20 Roberts Benjamin R Method and Apparatus for Dispensing Liquid with Precise Control
US20070205214A1 (en) * 2006-03-03 2007-09-06 Roberts Benjamin R Liquid dispense system
KR101357961B1 (ko) * 2006-06-13 2014-02-04 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 가스 제거를 수행하는 액체 분배 시스템
DE102007031961A1 (de) * 2007-07-10 2009-01-15 Krones Ag Behälterbehandlungsmaschine und Förderleitungsabschnitt
JP5341427B2 (ja) * 2008-08-20 2013-11-13 東京エレクトロン株式会社 基板処理装置、基板処理方法、基板処理プログラム、及び基板処理プログラムを記録したコンピュータ読み取り可能な記録媒体
US8561627B1 (en) * 2008-09-26 2013-10-22 Intermolecular, Inc. Calibration of a chemical dispense system
US8234012B1 (en) * 2008-09-26 2012-07-31 Intermolecular, Inc. Preparing a chemical delivery line of a chemical dispense system for delivery
SG176676A1 (en) * 2009-06-10 2012-01-30 Advanced Tech Materials Fluid processing systems and methods
EP2376346B3 (de) 2009-07-09 2016-01-13 Advanced Technology Materials, Inc. Aufbewahrungssystem mit starrer Innenauskleidung sowie Verfahren zur Ausgabe eines Fluidums
JP5474666B2 (ja) * 2009-07-31 2014-04-16 東京エレクトロン株式会社 液処理装置、液処理方法、プログラムおよびプログラム記録媒体
WO2011046802A2 (en) * 2009-10-14 2011-04-21 Advanced Technology Materials, Inc. Material storage and dispensing system and method with degassing assembly
CN102740975B (zh) * 2009-11-24 2015-11-25 欧普科诊断有限责任公司 微流体系统中的流体混合和递送
US20120291627A1 (en) 2010-01-06 2012-11-22 Advanced Technology Materials, Inc. Liquid dispensing systems with gas removal and sensing capabilities
BR112013022316A2 (pt) 2011-03-01 2017-05-30 Advanced Tech Materials sistema baseado em revestimento interno, e, método para prover um sistema baseado em revestimento interno
US8627835B2 (en) 2011-04-13 2014-01-14 Intermolecular, Inc. In-situ cleaning assembly
US8974606B2 (en) 2011-05-09 2015-03-10 Intermolecular, Inc. Ex-situ cleaning assembly
KR101304226B1 (ko) * 2011-11-02 2013-09-05 포이스주식회사 반도체 제조용 화학약품 공급시스템
US8850830B2 (en) * 2012-06-12 2014-10-07 Hamilton Sundstrand Corporation Temperature compensation system and method
CN103727389B (zh) * 2012-10-16 2016-05-25 沈阳芯源微电子设备有限公司 一种生产使用过程中化学品自动供给的管路系统
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
US10043681B2 (en) * 2013-07-23 2018-08-07 Taiwan Semiconductor Manufacturing Company, Ltd. Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipment
ES2527968B1 (es) * 2013-08-02 2016-02-26 Eulen, S.A. Equipo de trasvase de lodos, de ciclo continuo de trabajo.
US20150321859A1 (en) * 2014-05-06 2015-11-12 Air Liquide Large Industries U.S. Lp Method And Apparatus For Providing Over-Pressure Protection For An Underground Storage Cavern
KR102013906B1 (ko) 2014-10-08 2019-08-23 버슘머트리얼즈 유에스, 엘엘씨 저압 요동 유동 제어 장치 및 방법
US9815682B2 (en) * 2014-11-13 2017-11-14 Heartland Industrial Services, LLC Discharge system and methods of discharging a chemical
CN104436815B (zh) * 2014-12-20 2016-08-17 应跃斌 气动恒压的液体连续送料装置及方法
CN105174187B (zh) * 2015-09-30 2018-01-05 鲁西化工集团股份有限公司 一种现场跑冒滴漏废液回收系统
NL2016048B1 (nl) * 2015-12-29 2017-07-06 Holding Krulstaart B V Inrichting en werkwijze voor distributie van een vloeibare substantie, zoals vloeibaar veevoer, en stal voorzien van een dergelijke inrichting.
ES2629485B1 (es) * 2016-02-09 2018-05-16 Giorgio Maracchi Estación de regulación y medición para suministro de gas
CN106764441B (zh) * 2016-12-14 2019-03-05 云南科威液态金属谷研发有限公司 一种液体输送系统
WO2020005657A1 (en) * 2018-06-29 2020-01-02 Applied Materials, Inc. Liquid lithium supply and regulation
US10954929B2 (en) * 2018-09-19 2021-03-23 Mueller International, Llc Material dispensing system with gas removal
JP7310373B2 (ja) * 2019-07-03 2023-07-19 住友電気工業株式会社 ガラス原料供給装置およびガラス原料供給装置のフィルタ交換方法
CN111981319A (zh) * 2020-07-10 2020-11-24 珠海醋酸纤维有限公司 一种二氧化钛悬浮液输送系统
KR20220167698A (ko) * 2021-06-14 2022-12-21 삼성전자주식회사 유체 공급 장치 및 이를 포함하는 기판 처리 장치
CN116534787A (zh) * 2022-01-26 2023-08-04 长鑫存储技术有限公司 供液装置及供液方法
CN115432657B (zh) * 2022-09-28 2023-03-31 湖北兴福电子材料股份有限公司 一种电子级硫酸槽车灌装装置及使用方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB429612A (en) 1933-12-04 1935-06-04 Eric Mayland Francis Improvements in and relating to means for dispensing fluids
IT1172131B (it) 1981-12-04 1987-06-18 Colgate Palmolive Spa Dispositivo selettore dosatore ed erogatore di liquidi in particolare liquidi trattamento per lavatrichi industriali
SE451295B (sv) 1985-03-27 1987-09-28 Fagersta El & Diesel Ab Ogondusch
AU2134988A (en) 1987-07-23 1989-03-01 Rosaria Bongiorno Pneumatic device for withdrawing/dispensing fluids
US5148945B1 (en) 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5370269A (en) 1990-09-17 1994-12-06 Applied Chemical Solutions Process and apparatus for precise volumetric diluting/mixing of chemicals
US5417346A (en) 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5411179A (en) * 1993-08-31 1995-05-02 S.O.B. Partnership Self-contained beverage dispensing system
US5722447A (en) 1994-04-29 1998-03-03 Texas Instruments Incorporated Continuous recirculation fluid delivery system and method
JPH0824619A (ja) 1994-07-14 1996-01-30 Japan Storage Battery Co Ltd 流体供給装置及びその製造方法
US5499758A (en) 1994-08-19 1996-03-19 Mccann's Engineering & Manufacturing Co. Liquid dispenser for use with containers
US5609191A (en) * 1995-02-06 1997-03-11 Henkel Corporation Liquid transfer apparatus
US5641895A (en) 1995-05-01 1997-06-24 Fsi International, Inc. Dynamic contaminant extraction measurement for chemical distribution systems
US5570815A (en) 1995-06-06 1996-11-05 International Business Machine Corp. Chemical delivery system
US5678771A (en) 1996-04-19 1997-10-21 Valmont Industries, Inc. Chemical distribution system
WO1997046446A1 (en) 1996-06-07 1997-12-11 Litto Claude R Preservation and dispensation by volumetric displacement
US5899367A (en) * 1996-07-31 1999-05-04 Mcdonnell Douglas Corporation Automated dispenser
US5887752A (en) * 1996-08-27 1999-03-30 Chrysler Corporation Method and apparatus for extracting excess material from containers

Also Published As

Publication number Publication date
TW396257B (en) 2000-07-01
DE69914554T2 (de) 2004-12-23
KR20000023360A (ko) 2000-04-25
CN1256241A (zh) 2000-06-14
SG73671A1 (en) 2000-06-20
JP2000109195A (ja) 2000-04-18
US6168048B1 (en) 2001-01-02
EP0989090B1 (de) 2004-02-04
EP0989090A1 (de) 2000-03-29

Similar Documents

Publication Publication Date Title
DE69914554D1 (de) Verfahren und Vorrichtung zum Spenden flüssiger Chemikalien
DE69632506D1 (de) Verfahren und Vorrichtung zum Aufsaugen und Abgeben von Probenflüssigkeiten
DE60043891D1 (de) Verbessertes verfahren und vorrichtung zum ansaugen und verteilen von flüssigkeiten
DE69724871D1 (de) Verfahren und Vorrichtung zum Ausstossen von Flüssigkeit
DE69902089T2 (de) Vorrichtung und verfahren zum auftragen von viskoser flüssigkeit
DE69917433D1 (de) Verfahren und vorrichtung zum herstellen von flüssigdispersen systemen in flüssigkeiten
DE69929654D1 (de) Verfahren und Vorrichtung zum Schweissen
DE69630519D1 (de) Vorrichtung und verfahren zum reinigen
DE69727113D1 (de) Vorrichtung und Verfahren zum Reinigen
DE69836827D1 (de) Verfahren und vorrichtung zum reibruehrschweissen
ATA92182000A (de) Verfahren und vorrichtung zum mischen fliessfähiger stoffe
DE69938068D1 (de) Vorrichtung zur Zerstäubung von Flüssigkeiten und Verfahren zum Schneiden
DE69927892D1 (de) Vorrichtung und Verfahren zum Reinigen
DE60101866D1 (de) Vorrichtung und Verfahren zum Abgeben von Pulvern
DE69715254T2 (de) Vorrichtung und Verfahren zum Reinigen
DE69733980D1 (de) Verfahren und Vorrichtung zum Ausstossen von Flüssigkeit
ATE280518T1 (de) Verfahren zum rasieren und abgabevorrichtung dafür
DE69818487D1 (de) Vorrichtung und verfahren zum reinigen von zitzen
DE69823669D1 (de) Verfahren und vorrichtung zum sterilisieren von flaschen
DE69427954D1 (de) Verfahren und vorrichtung zum flüssigkeitsauftrag
DE69836692D1 (de) Verfahren und vorrichtung zum rührgaren
DE69925564D1 (de) Verfahren und Vorrichtung zum Schweissen
DE69922448D1 (de) Vorrichtung und Verfahren zum Verpacken
DE59904156D1 (de) Verfahren und vorrichtung zum füllen von kartons
DE69824796D1 (de) Verfahren und Vorrichtung zum Ausstossen von Flüssigkeit

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee