SG73671A1 - Methods and systems for distributing liquid chemicals - Google Patents
Methods and systems for distributing liquid chemicalsInfo
- Publication number
- SG73671A1 SG73671A1 SG1999004626A SG1999004626A SG73671A1 SG 73671 A1 SG73671 A1 SG 73671A1 SG 1999004626 A SG1999004626 A SG 1999004626A SG 1999004626 A SG1999004626 A SG 1999004626A SG 73671 A1 SG73671 A1 SG 73671A1
- Authority
- SG
- Singapore
- Prior art keywords
- systems
- methods
- liquid chemicals
- distributing liquid
- distributing
- Prior art date
Links
- 239000007788 liquid Substances 0.000 title 1
- 239000000126 substance Substances 0.000 title 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
- B67D7/0244—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags
- B67D7/025—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D1/00—Apparatus or devices for dispensing beverages on draught
- B67D1/04—Apparatus utilising compressed air or other gas acting directly or indirectly on beverages in storage containers
- B67D1/045—Apparatus utilising compressed air or other gas acting directly or indirectly on beverages in storage containers using elastic bags and pistons actuated by air or other gas
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/34—Hydrogen distribution
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/158,740 US6168048B1 (en) | 1998-09-22 | 1998-09-22 | Methods and systems for distributing liquid chemicals |
Publications (1)
Publication Number | Publication Date |
---|---|
SG73671A1 true SG73671A1 (en) | 2000-06-20 |
Family
ID=22569479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1999004626A SG73671A1 (en) | 1998-09-22 | 1999-09-21 | Methods and systems for distributing liquid chemicals |
Country Status (8)
Country | Link |
---|---|
US (1) | US6168048B1 (de) |
EP (1) | EP0989090B1 (de) |
JP (1) | JP2000109195A (de) |
KR (1) | KR20000023360A (de) |
CN (1) | CN1256241A (de) |
DE (1) | DE69914554T2 (de) |
SG (1) | SG73671A1 (de) |
TW (1) | TW396257B (de) |
Families Citing this family (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6237363B1 (en) * | 1998-09-30 | 2001-05-29 | Medi-Physics, Inc. | Hyperpolarized noble gas extraction methods masking methods and associated transport containers |
US6527007B2 (en) * | 1998-12-16 | 2003-03-04 | Carl Cheung Tung Kong | Fluid transfer system |
US20030010792A1 (en) * | 1998-12-30 | 2003-01-16 | Randy Forshey | Chemical mix and delivery systems and methods thereof |
US6616014B1 (en) * | 2000-02-25 | 2003-09-09 | The Boc Group, Inc. | Precision liquid mixing apparatus and method |
EP1093854B1 (de) * | 2000-08-03 | 2008-07-02 | Koninklijke Philips Electronics N.V. | Fluid-Transport durch Druckvariation zur Analyse biologischer Flüssigkeiten |
US6460404B1 (en) * | 2000-10-12 | 2002-10-08 | Chartered Semiconductor Manufacturing Ltd. | Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool |
JP2002136936A (ja) * | 2000-11-02 | 2002-05-14 | Ecolab Kk | 洗浄処理方法およびシステム、情報記憶媒体 |
US6581801B2 (en) * | 2001-02-20 | 2003-06-24 | Sloan Valve Company | Single soap pump for use with water displacement soap containers and peristaltic pump |
US7334708B2 (en) * | 2001-07-16 | 2008-02-26 | L'air Liquide, Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude | Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical |
US6783429B2 (en) * | 2001-08-17 | 2004-08-31 | The Boc Group, Inc. | Apparatus and method for sampling a chemical-mechanical polishing slurry |
WO2003024555A2 (en) * | 2001-09-18 | 2003-03-27 | Mykrolis Corporation | Process for controlling the hydraulic chamber pressure of a diaphragm pump |
CN1561313A (zh) | 2001-10-01 | 2005-01-05 | Fsi国际公司 | 流体分配装置 |
US20030098069A1 (en) | 2001-11-26 | 2003-05-29 | Sund Wesley E. | High purity fluid delivery system |
JP4578103B2 (ja) * | 2002-02-07 | 2010-11-10 | ポール・コーポレーション | フォトレジストを供給するために用いられるシステム及びフォトレジストを供給する方法 |
US6979397B2 (en) * | 2002-03-19 | 2005-12-27 | Schroeder Industries, Llc | Dynamic particle removing flushing system |
US20030185690A1 (en) * | 2002-03-28 | 2003-10-02 | Mindi Xu | Systems and methods for transferring and delivering a liquid chemical from a source to an end use station |
US6698619B2 (en) * | 2002-05-03 | 2004-03-02 | Advanced Technology Materials, Inc. | Returnable and reusable, bag-in-drum fluid storage and dispensing container system |
US6848599B2 (en) * | 2002-08-22 | 2005-02-01 | Illinois Tool Works Inc. | Adhesive container and method of filling |
KR100627510B1 (ko) * | 2002-12-30 | 2006-09-22 | 주식회사 하이닉스반도체 | 나이트라이드용 cmp 슬러리 |
US7086566B2 (en) * | 2003-07-03 | 2006-08-08 | Creamiser Products Corporation | Under counter dispenser |
US7871319B2 (en) * | 2004-11-03 | 2011-01-18 | Hewlett-Packard Development Company, L.P. | Computer thermal dissipation system and method |
US7172096B2 (en) * | 2004-11-15 | 2007-02-06 | Advanced Technology Materials, Inc. | Liquid dispensing system |
CN101193815B (zh) * | 2005-03-04 | 2012-03-28 | 液化空气电子美国有限公司 | 容积流体输送系统中的流体状态的控制 |
KR101312237B1 (ko) | 2005-04-25 | 2013-09-26 | 도쿄엘렉트론가부시키가이샤 | 비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및분배 시스템 |
KR20080009136A (ko) * | 2005-04-25 | 2008-01-24 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 화학 시약 및 조성물을 저장 및 분배하는 장치 및 방법 |
TWI391301B (zh) * | 2005-04-25 | 2013-04-01 | Advanced Tech Materials | 物料儲存及配送包裝及方法 |
JP2006336574A (ja) * | 2005-06-03 | 2006-12-14 | Anest Iwata Corp | 不活性ガス昇圧送給方法および装置 |
SG162759A1 (en) * | 2005-06-06 | 2010-07-29 | Advanced Tech Materials | Fluid storage and dispensing systems and processes |
US20070215639A1 (en) * | 2006-02-15 | 2007-09-20 | Roberts Benjamin R | Method and Apparatus for Dispensing Liquid with Precise Control |
US20070205214A1 (en) * | 2006-03-03 | 2007-09-06 | Roberts Benjamin R | Liquid dispense system |
KR101357961B1 (ko) * | 2006-06-13 | 2014-02-04 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 가스 제거를 수행하는 액체 분배 시스템 |
DE102007031961A1 (de) * | 2007-07-10 | 2009-01-15 | Krones Ag | Behälterbehandlungsmaschine und Förderleitungsabschnitt |
JP5341427B2 (ja) * | 2008-08-20 | 2013-11-13 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法、基板処理プログラム、及び基板処理プログラムを記録したコンピュータ読み取り可能な記録媒体 |
US8561627B1 (en) * | 2008-09-26 | 2013-10-22 | Intermolecular, Inc. | Calibration of a chemical dispense system |
US8234012B1 (en) * | 2008-09-26 | 2012-07-31 | Intermolecular, Inc. | Preparing a chemical delivery line of a chemical dispense system for delivery |
SG176676A1 (en) * | 2009-06-10 | 2012-01-30 | Advanced Tech Materials | Fluid processing systems and methods |
EP2376346B3 (de) | 2009-07-09 | 2016-01-13 | Advanced Technology Materials, Inc. | Aufbewahrungssystem mit starrer Innenauskleidung sowie Verfahren zur Ausgabe eines Fluidums |
JP5474666B2 (ja) * | 2009-07-31 | 2014-04-16 | 東京エレクトロン株式会社 | 液処理装置、液処理方法、プログラムおよびプログラム記録媒体 |
WO2011046802A2 (en) * | 2009-10-14 | 2011-04-21 | Advanced Technology Materials, Inc. | Material storage and dispensing system and method with degassing assembly |
CN102740975B (zh) * | 2009-11-24 | 2015-11-25 | 欧普科诊断有限责任公司 | 微流体系统中的流体混合和递送 |
US20120291627A1 (en) | 2010-01-06 | 2012-11-22 | Advanced Technology Materials, Inc. | Liquid dispensing systems with gas removal and sensing capabilities |
BR112013022316A2 (pt) | 2011-03-01 | 2017-05-30 | Advanced Tech Materials | sistema baseado em revestimento interno, e, método para prover um sistema baseado em revestimento interno |
US8627835B2 (en) | 2011-04-13 | 2014-01-14 | Intermolecular, Inc. | In-situ cleaning assembly |
US8974606B2 (en) | 2011-05-09 | 2015-03-10 | Intermolecular, Inc. | Ex-situ cleaning assembly |
KR101304226B1 (ko) * | 2011-11-02 | 2013-09-05 | 포이스주식회사 | 반도체 제조용 화학약품 공급시스템 |
US8850830B2 (en) * | 2012-06-12 | 2014-10-07 | Hamilton Sundstrand Corporation | Temperature compensation system and method |
CN103727389B (zh) * | 2012-10-16 | 2016-05-25 | 沈阳芯源微电子设备有限公司 | 一种生产使用过程中化学品自动供给的管路系统 |
US9770804B2 (en) | 2013-03-18 | 2017-09-26 | Versum Materials Us, Llc | Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture |
US10043681B2 (en) * | 2013-07-23 | 2018-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipment |
ES2527968B1 (es) * | 2013-08-02 | 2016-02-26 | Eulen, S.A. | Equipo de trasvase de lodos, de ciclo continuo de trabajo. |
US20150321859A1 (en) * | 2014-05-06 | 2015-11-12 | Air Liquide Large Industries U.S. Lp | Method And Apparatus For Providing Over-Pressure Protection For An Underground Storage Cavern |
KR102013906B1 (ko) | 2014-10-08 | 2019-08-23 | 버슘머트리얼즈 유에스, 엘엘씨 | 저압 요동 유동 제어 장치 및 방법 |
US9815682B2 (en) * | 2014-11-13 | 2017-11-14 | Heartland Industrial Services, LLC | Discharge system and methods of discharging a chemical |
CN104436815B (zh) * | 2014-12-20 | 2016-08-17 | 应跃斌 | 气动恒压的液体连续送料装置及方法 |
CN105174187B (zh) * | 2015-09-30 | 2018-01-05 | 鲁西化工集团股份有限公司 | 一种现场跑冒滴漏废液回收系统 |
NL2016048B1 (nl) * | 2015-12-29 | 2017-07-06 | Holding Krulstaart B V | Inrichting en werkwijze voor distributie van een vloeibare substantie, zoals vloeibaar veevoer, en stal voorzien van een dergelijke inrichting. |
ES2629485B1 (es) * | 2016-02-09 | 2018-05-16 | Giorgio Maracchi | Estación de regulación y medición para suministro de gas |
CN106764441B (zh) * | 2016-12-14 | 2019-03-05 | 云南科威液态金属谷研发有限公司 | 一种液体输送系统 |
WO2020005657A1 (en) * | 2018-06-29 | 2020-01-02 | Applied Materials, Inc. | Liquid lithium supply and regulation |
US10954929B2 (en) * | 2018-09-19 | 2021-03-23 | Mueller International, Llc | Material dispensing system with gas removal |
JP7310373B2 (ja) * | 2019-07-03 | 2023-07-19 | 住友電気工業株式会社 | ガラス原料供給装置およびガラス原料供給装置のフィルタ交換方法 |
CN111981319A (zh) * | 2020-07-10 | 2020-11-24 | 珠海醋酸纤维有限公司 | 一种二氧化钛悬浮液输送系统 |
KR20220167698A (ko) * | 2021-06-14 | 2022-12-21 | 삼성전자주식회사 | 유체 공급 장치 및 이를 포함하는 기판 처리 장치 |
CN116534787A (zh) * | 2022-01-26 | 2023-08-04 | 长鑫存储技术有限公司 | 供液装置及供液方法 |
CN115432657B (zh) * | 2022-09-28 | 2023-03-31 | 湖北兴福电子材料股份有限公司 | 一种电子级硫酸槽车灌装装置及使用方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB429612A (en) | 1933-12-04 | 1935-06-04 | Eric Mayland Francis | Improvements in and relating to means for dispensing fluids |
IT1172131B (it) | 1981-12-04 | 1987-06-18 | Colgate Palmolive Spa | Dispositivo selettore dosatore ed erogatore di liquidi in particolare liquidi trattamento per lavatrichi industriali |
SE451295B (sv) | 1985-03-27 | 1987-09-28 | Fagersta El & Diesel Ab | Ogondusch |
AU2134988A (en) | 1987-07-23 | 1989-03-01 | Rosaria Bongiorno | Pneumatic device for withdrawing/dispensing fluids |
US5148945B1 (en) | 1990-09-17 | 1996-07-02 | Applied Chemical Solutions | Apparatus and method for the transfer and delivery of high purity chemicals |
US5370269A (en) | 1990-09-17 | 1994-12-06 | Applied Chemical Solutions | Process and apparatus for precise volumetric diluting/mixing of chemicals |
US5417346A (en) | 1990-09-17 | 1995-05-23 | Applied Chemical Solutions | Process and apparatus for electronic control of the transfer and delivery of high purity chemicals |
US5411179A (en) * | 1993-08-31 | 1995-05-02 | S.O.B. Partnership | Self-contained beverage dispensing system |
US5722447A (en) | 1994-04-29 | 1998-03-03 | Texas Instruments Incorporated | Continuous recirculation fluid delivery system and method |
JPH0824619A (ja) | 1994-07-14 | 1996-01-30 | Japan Storage Battery Co Ltd | 流体供給装置及びその製造方法 |
US5499758A (en) | 1994-08-19 | 1996-03-19 | Mccann's Engineering & Manufacturing Co. | Liquid dispenser for use with containers |
US5609191A (en) * | 1995-02-06 | 1997-03-11 | Henkel Corporation | Liquid transfer apparatus |
US5641895A (en) | 1995-05-01 | 1997-06-24 | Fsi International, Inc. | Dynamic contaminant extraction measurement for chemical distribution systems |
US5570815A (en) | 1995-06-06 | 1996-11-05 | International Business Machine Corp. | Chemical delivery system |
US5678771A (en) | 1996-04-19 | 1997-10-21 | Valmont Industries, Inc. | Chemical distribution system |
WO1997046446A1 (en) | 1996-06-07 | 1997-12-11 | Litto Claude R | Preservation and dispensation by volumetric displacement |
US5899367A (en) * | 1996-07-31 | 1999-05-04 | Mcdonnell Douglas Corporation | Automated dispenser |
US5887752A (en) * | 1996-08-27 | 1999-03-30 | Chrysler Corporation | Method and apparatus for extracting excess material from containers |
-
1998
- 1998-09-22 US US09/158,740 patent/US6168048B1/en not_active Expired - Fee Related
-
1999
- 1999-08-25 DE DE69914554T patent/DE69914554T2/de not_active Expired - Fee Related
- 1999-08-25 EP EP99402118A patent/EP0989090B1/de not_active Expired - Lifetime
- 1999-09-21 SG SG1999004626A patent/SG73671A1/en unknown
- 1999-09-21 KR KR1019990040793A patent/KR20000023360A/ko not_active Application Discontinuation
- 1999-09-21 JP JP11267241A patent/JP2000109195A/ja active Pending
- 1999-09-22 TW TW088116262A patent/TW396257B/zh not_active IP Right Cessation
- 1999-09-22 CN CN99123898A patent/CN1256241A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
TW396257B (en) | 2000-07-01 |
DE69914554D1 (de) | 2004-03-11 |
DE69914554T2 (de) | 2004-12-23 |
KR20000023360A (ko) | 2000-04-25 |
CN1256241A (zh) | 2000-06-14 |
JP2000109195A (ja) | 2000-04-18 |
US6168048B1 (en) | 2001-01-02 |
EP0989090B1 (de) | 2004-02-04 |
EP0989090A1 (de) | 2000-03-29 |
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