DE69906835D1 - Apparat zur Vermessung von Mikrooberflächen - Google Patents

Apparat zur Vermessung von Mikrooberflächen

Info

Publication number
DE69906835D1
DE69906835D1 DE69906835T DE69906835T DE69906835D1 DE 69906835 D1 DE69906835 D1 DE 69906835D1 DE 69906835 T DE69906835 T DE 69906835T DE 69906835 T DE69906835 T DE 69906835T DE 69906835 D1 DE69906835 D1 DE 69906835D1
Authority
DE
Germany
Prior art keywords
measuring micro
micro surfaces
measuring
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69906835T
Other languages
English (en)
Other versions
DE69906835T2 (de
Inventor
Masaki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26345455&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69906835(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69906835D1 publication Critical patent/DE69906835D1/de
Application granted granted Critical
Publication of DE69906835T2 publication Critical patent/DE69906835T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
DE69906835T 1998-01-22 1999-01-21 Apparat zur Vermessung von Mikrooberflächen Expired - Fee Related DE69906835T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1021998 1998-01-22
JP30816498A JP3309816B2 (ja) 1998-01-22 1998-10-29 微細表面形状測定装置及び触針製造方法

Publications (2)

Publication Number Publication Date
DE69906835D1 true DE69906835D1 (de) 2003-05-22
DE69906835T2 DE69906835T2 (de) 2004-01-29

Family

ID=26345455

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69906835T Expired - Fee Related DE69906835T2 (de) 1998-01-22 1999-01-21 Apparat zur Vermessung von Mikrooberflächen

Country Status (4)

Country Link
US (2) US6365895B1 (de)
EP (1) EP0932020B1 (de)
JP (1) JP3309816B2 (de)
DE (1) DE69906835T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100576899B1 (ko) * 2001-01-29 2006-05-03 스미토모덴키고교가부시키가이샤 콘택트프로브 및 그 제조방법 및 검사장치 및 검사방법
JP3481213B2 (ja) * 2001-03-22 2003-12-22 日本電子株式会社 原子間力顕微鏡における試料観察方法および原子間力顕微鏡
JP2004161444A (ja) * 2002-11-14 2004-06-10 Canon Inc シート材判別装置
EP1530220A1 (de) * 2003-11-04 2005-05-11 SwissProbe AG Ausleger Anordnung
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
US7571638B1 (en) 2005-05-10 2009-08-11 Kley Victor B Tool tips with scanning probe microscopy and/or atomic force microscopy applications
US9423693B1 (en) 2005-05-10 2016-08-23 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate
US7185440B2 (en) * 2005-07-18 2007-03-06 Seagate Technology Llc Sensing contact probe
US7395698B2 (en) * 2005-10-25 2008-07-08 Georgia Institute Of Technology Three-dimensional nanoscale metrology using FIRAT probe
JP2007322558A (ja) 2006-05-30 2007-12-13 Canon Inc 水分量推定装置、シート材処理装置、水分量推定方法、及びシート材処理方法
US7784107B2 (en) 2006-06-02 2010-08-24 Victor B. Kley High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
US8481335B2 (en) * 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
EP2100125A4 (de) * 2006-11-28 2012-02-15 Univ Drexel Piezoelektrische mikrocantilever-sensoren für biosensorik
US7992431B2 (en) * 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
US8456150B2 (en) * 2007-02-01 2013-06-04 Drexel University Hand-held phase-shift detector for sensor applications
EP1970714A1 (de) * 2007-03-12 2008-09-17 Capres Aps Vorrichtung mit Kontaktdetektor
JP4937849B2 (ja) 2007-07-03 2012-05-23 株式会社ミツトヨ ステム製造方法およびステム製造装置
KR100868029B1 (ko) * 2007-07-10 2008-11-11 한국과학기술연구원 질감 측정 장치 및 그 방법
JP5032235B2 (ja) * 2007-08-02 2012-09-26 株式会社ミツトヨ 共振センサの測定位置検出方法及び装置
US8241569B2 (en) 2007-11-23 2012-08-14 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
WO2009126378A2 (en) 2008-03-11 2009-10-15 Drexel University Enhanced detection sensitivity with piezoelectric microcantilever sensors
EP2101181A1 (de) 2008-03-12 2009-09-16 Capres A/S Vorrichtung mit Kontaktdetektor
JP5027237B2 (ja) * 2008-03-28 2012-09-19 エンパイア テクノロジー ディベロップメント エルエルシー 走査型顕微鏡
CN102066928B (zh) 2008-05-16 2015-08-05 德瑞索大学 评估组织的系统和方法
US8722427B2 (en) * 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US20110086368A1 (en) * 2009-10-08 2011-04-14 Drexel University Method for immune response detection
JP5703155B2 (ja) * 2011-07-14 2015-04-15 株式会社ミツトヨ 接触式プローブおよびその製造方法
US9778572B1 (en) 2013-03-15 2017-10-03 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate
JP2019100874A (ja) * 2017-12-04 2019-06-24 株式会社ミツトヨ 形状測定装置
CN112964910A (zh) * 2020-09-16 2021-06-15 中国科学院沈阳自动化研究所 原子力显微镜一体化双探针快速原位切换测量方法与装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5266801A (en) * 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
US5403373A (en) 1991-05-31 1995-04-04 Sumitomo Electric Industries, Ltd. Hard sintered component and method of manufacturing such a component
JPH0569324A (ja) 1991-09-12 1993-03-23 Mitsubishi Heavy Ind Ltd 放電加工変質層の除去方法
JP3261544B2 (ja) * 1991-10-03 2002-03-04 キヤノン株式会社 カンチレバー駆動機構の製造方法、プローブ駆動機構の製造方法、カンチレバー駆動機構、プローブ駆動機構、及びこれを用いたマルチプローブ駆動機構、走査型トンネル顕微鏡、情報処理装置
JP3069931B2 (ja) 1992-03-16 2000-07-24 科学技術振興事業団 表面形状測定方法及び装置
US5412980A (en) 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
JP3131517B2 (ja) 1992-12-25 2001-02-05 オリンパス光学工業株式会社 走査型プローブ顕微鏡装置
JPH06323845A (ja) 1993-03-19 1994-11-25 Tadatomo Suga 走査型力顕微鏡用薄膜式力検出プローブ
US5559330A (en) * 1993-12-20 1996-09-24 Nippon Telegraph And Telephone Corporation Scanning tunneling microscope
JPH08285512A (ja) 1995-04-12 1996-11-01 Matsushita Electric Ind Co Ltd 微細表面形状測定装置
JP3070499B2 (ja) * 1996-11-26 2000-07-31 富士ゼロックス株式会社 微細切削方法および微細切削装置

Also Published As

Publication number Publication date
JPH11271345A (ja) 1999-10-08
EP0932020B1 (de) 2003-04-16
US6365895B1 (en) 2002-04-02
DE69906835T2 (de) 2004-01-29
EP0932020A1 (de) 1999-07-28
JP3309816B2 (ja) 2002-07-29
US6621080B2 (en) 2003-09-16

Similar Documents

Publication Publication Date Title
DE69906835T2 (de) Apparat zur Vermessung von Mikrooberflächen
DE69934270D1 (de) Hochpräziser kryochirurgischer Apparat
DE69931690D1 (de) Lithographischer Apparat
DE69816115D1 (de) Oberflächenmessapparat
DE59812896D1 (de) Vorrichtung zum optischen prüfen von oberflächen
DE59901950D1 (de) Vorrichtung zur spannungsmessung
DE69819008D1 (de) Mikroskop zur nachgiebigkeitsmessung
FI20000282A (fi) Menetelmä ja laite päällysteen mittaamiseksi
DE69938885D1 (de) Lithographischer Apparat
DE69832471D1 (de) Verfahren und apparat zur messung von fluidischen drücken
DE59707541D1 (de) Messeinrichtung zur Vermessung von Werkstücken
DE69714174D1 (de) Apparat zur Messung der Kurvenlänge
DE69924190D1 (de) Messapparat
DE29716475U1 (de) Vorrichtung zur Viskositätsmessung
FI981058A0 (fi) Menetelmä ja laite paperiradan mittaamiseksi
DK9800173U4 (da) Apparat
SE9803578D0 (sv) Apparat
SE9800602D0 (sv) Apparat
SE9800821D0 (sv) Apparat
SE9803534D0 (sv) Apparat
SE9800227D0 (sv) Apparat
SE9800305D0 (sv) Apparat
SE9800433D0 (sv) Apparat
SE9803977D0 (sv) Apparat
SE9801962D0 (sv) Apparat

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee