JP5027237B2 - 走査型顕微鏡 - Google Patents
走査型顕微鏡 Download PDFInfo
- Publication number
- JP5027237B2 JP5027237B2 JP2009529440A JP2009529440A JP5027237B2 JP 5027237 B2 JP5027237 B2 JP 5027237B2 JP 2009529440 A JP2009529440 A JP 2009529440A JP 2009529440 A JP2009529440 A JP 2009529440A JP 5027237 B2 JP5027237 B2 JP 5027237B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement sample
- magnetic
- flexible member
- measurement
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
- G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Magnetic Variables (AREA)
Description
"Real-time scanning Hall probe microscopy," Appl. Phys. Lett, 69, pp.1324-1326,(1996)
Claims (2)
- 極低温において測定試料の磁気測定を行う走査型顕微鏡であって、
非圧電性の樹脂で形成され且つ片持ち梁状の可撓性部材と、
前記可撓性部材の自由端部に設けられ、少なくとも前記測定試料と接する部位が保護膜でコーティングされたホール素子と、
前記可撓性部材の少なくとも一部に設けられ且つ非圧電素子で形成された歪みゲージと、
前記可撓性部材を駆動する、非圧電素子タイプのみからなる駆動手段と、
前記歪みゲージからの出力信号に基づいて前記駆動手段の駆動を制御する制御手段と、
を備え、
前記駆動手段は、
前記可撓性部材を保持するホルダと、
前記ホルダに連結された可動軸と、
前記可動軸を3次元駆動するステッピングモータと、
を有し、
前記制御手段は、前記歪みゲージからの出力信号に基づいて、前記ホール素子と前記測定試料との当接状態又は離間状態を調節するように前記駆動手段を制御する、
走査型顕微鏡。 - 前記ホール素子が、略短冊放射状に形成された複数のプローブを有する、
請求項1記載の走査型顕微鏡。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2008/056058 WO2009118887A1 (ja) | 2008-03-28 | 2008-03-28 | 磁気センサー及び走査型顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009118887A1 JPWO2009118887A1 (ja) | 2011-07-21 |
JP5027237B2 true JP5027237B2 (ja) | 2012-09-19 |
Family
ID=41113115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009529440A Expired - Fee Related JP5027237B2 (ja) | 2008-03-28 | 2008-03-28 | 走査型顕微鏡 |
Country Status (3)
Country | Link |
---|---|
US (2) | US8104093B2 (ja) |
JP (1) | JP5027237B2 (ja) |
WO (1) | WO2009118887A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5027237B2 (ja) | 2008-03-28 | 2012-09-19 | エンパイア テクノロジー ディベロップメント エルエルシー | 走査型顕微鏡 |
JP4368934B1 (ja) | 2009-02-09 | 2009-11-18 | アイランド ジャイアント デベロップメント エルエルピー | 液体収容システム、液体収容容器、および液体導出制御方法 |
US20110061139A1 (en) * | 2009-09-04 | 2011-03-10 | Ahmet Oral | Method to measure 3 component of the magnetic field vector at nanometer resolution using scanning hall probe microscopy |
FR2951014B1 (fr) * | 2009-10-06 | 2011-11-25 | Commissariat Energie Atomique | Structure d'actionnement piezoelectrique comportant une jauge de contrainte piezoresistive integree et son procede de realisation |
CN103196988B (zh) * | 2013-04-16 | 2014-02-26 | 中南林业科技大学 | 热致磁效应多场耦合综合测试方法 |
CN103235031B (zh) * | 2013-04-16 | 2014-03-12 | 中南林业科技大学 | 基于板材拉伸热致磁效应的五点位三维磁场测量方法 |
CN103235032B (zh) * | 2013-04-16 | 2014-03-12 | 中南林业科技大学 | 热致磁效应多场耦合综合测试系统 |
US9910108B2 (en) * | 2016-06-27 | 2018-03-06 | Daniel Clyde Ross | Real-time magnetic field camera |
US12019096B2 (en) | 2021-04-08 | 2024-06-25 | Infineon Technologies Ag | Sensor-based planar wafer probe alignment |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH041949A (ja) * | 1990-04-18 | 1992-01-07 | Canon Inc | 情報入力及び/または取出し装置 |
JPH07245432A (ja) * | 1994-03-04 | 1995-09-19 | Victor Co Of Japan Ltd | ホール素子及びその製造方法 |
JPH07253456A (ja) * | 1994-03-16 | 1995-10-03 | Nec Corp | 走査型ホール磁気計チップとその製造方法 |
JPH09257810A (ja) * | 1996-03-18 | 1997-10-03 | Kagaku Gijutsu Shinko Jigyodan | 表面力測定装置 |
JPH11101810A (ja) * | 1997-09-29 | 1999-04-13 | Seiko Instruments Inc | カンチレバーユニットおよびそのホルダならびにこれらを装備した走査型プローブ顕微鏡 |
JPH11271345A (ja) * | 1998-01-22 | 1999-10-08 | Matsushita Electric Ind Co Ltd | 微細表面形状測定装置及び触針製造方法 |
JP2001264231A (ja) * | 2000-03-20 | 2001-09-26 | Nec Corp | 走査型acホール顕微鏡とその測定方法 |
JP2004226292A (ja) * | 2003-01-24 | 2004-08-12 | Japan Science & Technology Agency | 走査型ホール・プローブ素子顕微鏡 |
US20060163767A1 (en) * | 2005-01-21 | 2006-07-27 | Wisconsin Alumni Research Foundation | Plastic cantilevers for force microscopy |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7555333B2 (en) * | 2000-06-19 | 2009-06-30 | University Of Washington | Integrated optical scanning image acquisition and display |
JP3527947B2 (ja) * | 2001-03-02 | 2004-05-17 | 北海道大学長 | プローブ及びその製造方法並びにプローブを有する顕微鏡及びテスタ |
ATE514049T1 (de) | 2002-01-15 | 2011-07-15 | Ibm | Mikrostrukturen |
JP4233577B2 (ja) | 2006-06-09 | 2009-03-04 | 旭化成株式会社 | スパッタリング薄膜成膜方法及びスパッタリング薄膜成膜装置。 |
JP5027237B2 (ja) | 2008-03-28 | 2012-09-19 | エンパイア テクノロジー ディベロップメント エルエルシー | 走査型顕微鏡 |
-
2008
- 2008-03-28 JP JP2009529440A patent/JP5027237B2/ja not_active Expired - Fee Related
- 2008-03-28 WO PCT/JP2008/056058 patent/WO2009118887A1/ja active Application Filing
- 2008-03-28 US US12/665,613 patent/US8104093B2/en not_active Expired - Fee Related
-
2011
- 2011-12-08 US US13/314,894 patent/US8631510B2/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH041949A (ja) * | 1990-04-18 | 1992-01-07 | Canon Inc | 情報入力及び/または取出し装置 |
JPH07245432A (ja) * | 1994-03-04 | 1995-09-19 | Victor Co Of Japan Ltd | ホール素子及びその製造方法 |
JPH07253456A (ja) * | 1994-03-16 | 1995-10-03 | Nec Corp | 走査型ホール磁気計チップとその製造方法 |
JPH09257810A (ja) * | 1996-03-18 | 1997-10-03 | Kagaku Gijutsu Shinko Jigyodan | 表面力測定装置 |
JPH11101810A (ja) * | 1997-09-29 | 1999-04-13 | Seiko Instruments Inc | カンチレバーユニットおよびそのホルダならびにこれらを装備した走査型プローブ顕微鏡 |
JPH11271345A (ja) * | 1998-01-22 | 1999-10-08 | Matsushita Electric Ind Co Ltd | 微細表面形状測定装置及び触針製造方法 |
JP2001264231A (ja) * | 2000-03-20 | 2001-09-26 | Nec Corp | 走査型acホール顕微鏡とその測定方法 |
JP2004226292A (ja) * | 2003-01-24 | 2004-08-12 | Japan Science & Technology Agency | 走査型ホール・プローブ素子顕微鏡 |
US20060163767A1 (en) * | 2005-01-21 | 2006-07-27 | Wisconsin Alumni Research Foundation | Plastic cantilevers for force microscopy |
Also Published As
Publication number | Publication date |
---|---|
JPWO2009118887A1 (ja) | 2011-07-21 |
US20120079636A1 (en) | 2012-03-29 |
US8631510B2 (en) | 2014-01-14 |
US8104093B2 (en) | 2012-01-24 |
US20100154088A1 (en) | 2010-06-17 |
WO2009118887A1 (ja) | 2009-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5027237B2 (ja) | 走査型顕微鏡 | |
Jesse et al. | Dynamic behaviour in piezoresponse force microscopy | |
US7434476B2 (en) | Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes | |
US7082838B2 (en) | Extraordinary piezoconductance in inhomogeneous semiconductors | |
US6611140B1 (en) | Magnetic sensing unit for detecting nanometer scale displacements or flections | |
Sulchek et al. | Dual integrated actuators for extended range high speed atomic force microscopy | |
US20060260388A1 (en) | Probe and method for a scanning probe microscope | |
JPH10312592A (ja) | 情報処理装置および情報処理方法 | |
JP5164743B2 (ja) | カンチレバー、カンチレバーシステム及びプローブ顕微鏡並びに吸着質量センサ | |
JP2001124798A (ja) | 微小接触式プローバー | |
JP4498368B2 (ja) | 微小接触式プローバー | |
KR20190107061A (ko) | 캔틸레버 및 프로브 팁을 포함하는 프로브를 사용하여 샘플의 표면 위 또는 아래의 구조를 검출하기 위한 방법 및 시스템 | |
JP3076467B2 (ja) | 面合わせ方法およびそれを用いたトンネル顕微鏡および記録再生装置 | |
WO2004019012A1 (ja) | 探針装置及びその制御方法 | |
JPH06258072A (ja) | 圧電体薄膜評価装置、原子間力顕微鏡 | |
WO2008156722A1 (en) | Material property measurements using multiple frequency atomic forece microsocopy | |
Meier et al. | A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans | |
JP2006284599A (ja) | カンチレバーを用いて試料面の情報を取得する装置 | |
JP3147425B2 (ja) | 走査型半導体プローブ顕微鏡 | |
KR20070011433A (ko) | 마이크로 메카니컬 디바이스 및 나노 메카니컬디바이스에서의 금속 박막 압전 저항형 변환체 및 이변환체에 대한 자체 감지형 spm 프로브에서의 적용 | |
WO2009157055A1 (ja) | 磁気ヘッド、ヘッドアッセンブリ、及び、磁気記録装置 | |
JPH01195301A (ja) | 表面機械特性測定装置 | |
JP4211913B2 (ja) | 半導体力検出装置 | |
JP3084924B2 (ja) | 原子間力顕微鏡 | |
Evans et al. | Characterizing absolute piezoelectric microelectromechanical system displacement using an atomic force microscope |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110217 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110606 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20110609 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20110715 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120426 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120621 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150629 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5027237 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |