DE69841617D1 - Piezoelektrisches Ventil - Google Patents

Piezoelektrisches Ventil

Info

Publication number
DE69841617D1
DE69841617D1 DE69841617T DE69841617T DE69841617D1 DE 69841617 D1 DE69841617 D1 DE 69841617D1 DE 69841617 T DE69841617 T DE 69841617T DE 69841617 T DE69841617 T DE 69841617T DE 69841617 D1 DE69841617 D1 DE 69841617D1
Authority
DE
Germany
Prior art keywords
piezoelectric valve
piezoelectric
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69841617T
Other languages
English (en)
Inventor
Shinji Miyazoe
Makoto Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Application granted granted Critical
Publication of DE69841617D1 publication Critical patent/DE69841617D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezo-electric benders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/18—Check valves with actuating mechanism; Combined check valves and actuated valves
    • F16K15/182—Check valves with actuating mechanism; Combined check valves and actuated valves with actuating mechanism
    • F16K15/1825—Check valves with actuating mechanism; Combined check valves and actuated valves with actuating mechanism for check valves with flexible valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87708—With common valve operator
    • Y10T137/87716—For valve having a flexible diaphragm valving member
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets
DE69841617T 1997-12-12 1998-12-11 Piezoelektrisches Ventil Expired - Lifetime DE69841617D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP34334697 1997-12-12
JP989798 1998-01-21

Publications (1)

Publication Number Publication Date
DE69841617D1 true DE69841617D1 (de) 2010-05-27

Family

ID=26344712

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69841617T Expired - Lifetime DE69841617D1 (de) 1997-12-12 1998-12-11 Piezoelektrisches Ventil
DE69841980T Expired - Lifetime DE69841980D1 (de) 1997-12-12 1998-12-11 Piezoelektrisches ventil

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69841980T Expired - Lifetime DE69841980D1 (de) 1997-12-12 1998-12-11 Piezoelektrisches ventil

Country Status (8)

Country Link
US (2) US6189858B1 (de)
EP (2) EP0961062B1 (de)
JP (2) JP3496020B2 (de)
KR (1) KR100352781B1 (de)
CN (1) CN1129727C (de)
DE (2) DE69841617D1 (de)
TW (1) TW392048B (de)
WO (1) WO1999031420A1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
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DE19939477A1 (de) * 1999-08-20 2001-03-22 Bosch Gmbh Robert Ventil zum Steuern von Flüssigkeiten
EP1139450A4 (de) * 1999-10-01 2007-04-04 Ngk Insulators Ltd Piezoelektrisches / elektrostriktives bauelement
JP3845543B2 (ja) * 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
JP3845544B2 (ja) * 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US7198250B2 (en) * 2000-09-18 2007-04-03 Par Technologies, Llc Piezoelectric actuator and pump using same
US6340149B1 (en) * 2000-11-27 2002-01-22 Xerox Corporation Tethered fluid valve apparatus
JP4822198B2 (ja) 2001-02-21 2011-11-24 並木精密宝石株式会社 空気強制供給用アクチュエータ装置並びに空気強制供給型空気電池
DE10161888A1 (de) 2001-08-14 2003-02-27 Continental Teves Ag & Co Ohg Piezoelektrisch betätigtes Fluidventil
DE10202996A1 (de) * 2002-01-26 2003-08-14 Eppendorf Ag Piezoelektrisch steuerbare Mikrofluidaktorik
TW553734B (en) * 2002-11-18 2003-09-21 Rossmax Int Ltd Air pressure adjustment device
US20060232166A1 (en) 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
US7594502B1 (en) 2005-12-07 2009-09-29 Anderson Joel A Projectile loading, firing and warning system
JP4933936B2 (ja) * 2007-03-30 2012-05-16 株式会社フジキン 圧電素子駆動式制御弁
JP5119899B2 (ja) * 2007-12-13 2013-01-16 ソニー株式会社 燃料カートリッジ、燃料電池および発電方法
TW201011954A (en) * 2008-09-15 2010-03-16 Micro Base Technology Corp Conduction wire structure applied to the inner of micro piezoelectric pump
KR20100085698A (ko) * 2009-01-21 2010-07-29 삼성전기주식회사 잉크젯 헤드
DE102009007317A1 (de) * 2009-02-03 2010-08-12 Continental Automotive Gmbh Ventil
CN101555957B (zh) * 2009-05-22 2011-06-15 合肥美亚光电技术有限责任公司 一种压电陶瓷喷阀
CN102449363B (zh) * 2009-05-25 2015-02-04 株式会社村田制作所 阀、流体装置及流体供给装置
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
US8388116B2 (en) * 2009-10-30 2013-03-05 Hewlett-Packard Development Company, L.P. Printhead unit
KR101142430B1 (ko) * 2010-01-20 2012-05-08 포항공과대학교 산학협력단 마이크로 펌프 및 이의 작동 방법
JP5631631B2 (ja) * 2010-05-21 2014-11-26 株式会社サタケ 圧電式バルブ及び該圧電式バルブを利用する光学式粒状物選別機
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
US9228671B2 (en) * 2011-02-10 2016-01-05 Fluid Automation Systems S.A. Electrically actuated valve with a sealing ball
JP5764049B2 (ja) * 2011-12-13 2015-08-12 株式会社サタケ 圧電式バルブ及び該圧電式バルブを利用した噴風手段を備える光学式粒状物選別機
ITTO20130447A1 (it) * 2013-05-31 2014-12-01 St Microelectronics Srl Valvola microfluidica a membrana e procedimento per fabbricare una valvola microfluidica a membrana
JP2015170185A (ja) * 2014-03-07 2015-09-28 愛三工業株式会社 減圧弁及び圧力調整装置
JP1525031S (de) * 2014-08-07 2015-06-01
JP6304548B2 (ja) * 2014-09-16 2018-04-04 Smc株式会社 スナップ・フィット式バルブ
DE102014114212A1 (de) * 2014-09-30 2016-03-31 Bürkert Werke GmbH Membranventil
KR101793225B1 (ko) * 2015-06-10 2017-11-03 한국과학기술연구원 곡면형 압전장치
CN107924199A (zh) 2015-07-10 2018-04-17 关键系统公司 用于气体流量控制的方法和设备
DE102016217435B4 (de) * 2016-09-13 2018-08-02 Albert-Ludwigs-Universität Freiburg Fluidpumpe und Verfahren zum Betreiben einer Fluidpumpe
TWI689665B (zh) 2017-09-15 2020-04-01 研能科技股份有限公司 氣體輸送裝置
TWI683960B (zh) * 2017-09-15 2020-02-01 研能科技股份有限公司 氣體輸送裝置
TWI652408B (zh) 2017-09-15 2019-03-01 研能科技股份有限公司 氣體輸送裝置
TWI653395B (zh) 2017-09-29 2019-03-11 研能科技股份有限公司 流體系統
TWI650483B (zh) * 2017-09-29 2019-02-11 研能科技股份有限公司 流體系統
TWI654375B (zh) 2017-09-29 2019-03-21 研能科技股份有限公司 流體系統
TWI653394B (zh) 2017-09-29 2019-03-11 研能科技股份有限公司 流體系統
JP6937417B1 (ja) * 2020-10-07 2021-09-22 株式会社Taiyo 流体制御弁

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048643B2 (ja) * 1976-12-04 1985-10-29 アルバ−ト・フレデリツク・ハンセン ダイヤフラムバルブ装置
JPS5843626Y2 (ja) * 1978-07-25 1983-10-03 アイシン精機株式会社 集積型バルブセツト装置
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve
JPS6228585A (ja) * 1985-07-30 1987-02-06 Hitachi Metals Ltd 圧電駆動式弁
JPS62224780A (ja) * 1986-03-26 1987-10-02 Hitachi Metals Ltd 圧電駆動式弁
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US4903732A (en) * 1989-01-19 1990-02-27 A. K. Allen Company Piezoelectric valve
JPH03223580A (ja) * 1990-01-25 1991-10-02 Mitsubishi Kasei Corp 圧電型弁装置
JP3223580B2 (ja) * 1992-05-29 2001-10-29 ソニー株式会社 画像作成装置
US5628411A (en) * 1994-12-01 1997-05-13 Sortex Limited Valve devices for use in sorting apparatus ejectors
DE19526897A1 (de) * 1995-07-22 1997-01-23 Bosch Gmbh Robert Mikroventil mit verbundenen Schichten und Verfahren zur Herstellung eines Mikroventils
JPH0979408A (ja) * 1995-09-19 1997-03-25 Samii:Kk 流量調節装置及びその製造方法
US5638862A (en) * 1995-10-20 1997-06-17 Vemco Corporation Diaphragm valve
US5810325A (en) * 1996-06-25 1998-09-22 Bcam International, Inc. Microvalve
US6086041A (en) * 1997-04-07 2000-07-11 Mccord Winn Textron Inc. Multi-valve module having a ceramic piezoelectric actuator

Also Published As

Publication number Publication date
JP3900112B2 (ja) 2007-04-04
KR20000071173A (ko) 2000-11-25
KR100352781B1 (ko) 2002-09-16
EP1510741B1 (de) 2010-04-14
EP0961062A4 (de) 2006-01-04
JP3496020B2 (ja) 2004-02-09
EP1510741A3 (de) 2007-07-18
EP0961062B1 (de) 2010-11-03
EP1510741A2 (de) 2005-03-02
EP0961062A1 (de) 1999-12-01
TW392048B (en) 2000-06-01
CN1247593A (zh) 2000-03-15
WO1999031420A1 (en) 1999-06-24
CN1129727C (zh) 2003-12-03
US6189858B1 (en) 2001-02-20
DE69841980D1 (de) 2010-12-16
JP2003329156A (ja) 2003-11-19
US6267146B1 (en) 2001-07-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition