DE69840184D1 - Verfahren zur Behandlung eines Dielektrikums zur Verwendung von Halbleitervorrichtungen - Google Patents
Verfahren zur Behandlung eines Dielektrikums zur Verwendung von HalbleitervorrichtungenInfo
- Publication number
- DE69840184D1 DE69840184D1 DE69840184T DE69840184T DE69840184D1 DE 69840184 D1 DE69840184 D1 DE 69840184D1 DE 69840184 T DE69840184 T DE 69840184T DE 69840184 T DE69840184 T DE 69840184T DE 69840184 D1 DE69840184 D1 DE 69840184D1
- Authority
- DE
- Germany
- Prior art keywords
- dielectric
- treatment
- semiconductor devices
- dielectric layer
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 239000003990 capacitor Substances 0.000 abstract 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
- H01L28/91—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by depositing layers, e.g. by depositing alternating conductive and insulating layers
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Formation Of Insulating Films (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US3648197P | 1997-01-31 | 1997-01-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69840184D1 true DE69840184D1 (de) | 2008-12-18 |
Family
ID=21888830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69840184T Expired - Lifetime DE69840184D1 (de) | 1997-01-31 | 1998-02-02 | Verfahren zur Behandlung eines Dielektrikums zur Verwendung von Halbleitervorrichtungen |
Country Status (6)
Country | Link |
---|---|
US (1) | US6096597A (de) |
EP (1) | EP0860868B1 (de) |
JP (1) | JPH10223865A (de) |
KR (1) | KR19980070915A (de) |
AT (1) | ATE413690T1 (de) |
DE (1) | DE69840184D1 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6555394B2 (en) * | 1995-11-28 | 2003-04-29 | Samsung Electronics Co., Ltd. | Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure |
TW463288B (en) * | 1997-05-20 | 2001-11-11 | Nanya Technology Corp | Manufacturing method for cup-like capacitor |
US5910880A (en) | 1997-08-20 | 1999-06-08 | Micron Technology, Inc. | Semiconductor circuit components and capacitors |
TW411615B (en) * | 1997-12-04 | 2000-11-11 | Fujitsu Ltd | Semiconductor device and method of manufacturing the same |
US6191443B1 (en) | 1998-02-28 | 2001-02-20 | Micron Technology, Inc. | Capacitors, methods of forming capacitors, and DRAM memory cells |
US6730559B2 (en) * | 1998-04-10 | 2004-05-04 | Micron Technology, Inc. | Capacitors and methods of forming capacitors |
US6475912B1 (en) * | 1998-06-01 | 2002-11-05 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method and apparatus for fabricating the same while minimizing operating failures and optimizing yield |
TW386307B (en) * | 1998-09-11 | 2000-04-01 | United Microelectronics Corp | Method of producing DRAM capacitor |
US6204203B1 (en) * | 1998-10-14 | 2001-03-20 | Applied Materials, Inc. | Post deposition treatment of dielectric films for interface control |
KR20000042480A (ko) * | 1998-12-24 | 2000-07-15 | 김영환 | 반도체소자의 캐패시터 형성방법 |
US6387748B1 (en) * | 1999-02-16 | 2002-05-14 | Micron Technology, Inc. | Semiconductor circuit constructions, capacitor constructions, and methods of forming semiconductor circuit constructions and capacitor constructions |
FR2797999B1 (fr) | 1999-08-31 | 2003-08-08 | St Microelectronics Sa | Procede de fabrication d'une capacite integree sur un substrat de silicium |
KR20010061314A (ko) * | 1999-12-28 | 2001-07-07 | 박종섭 | 반도체 소자의 강유전체 캐패시터 형성방법 |
KR100555494B1 (ko) * | 2000-02-21 | 2006-03-03 | 삼성전자주식회사 | 오존 어닐링 공정을 이용한 반도체 장치의 커패시터제조방법 |
US7005695B1 (en) * | 2000-02-23 | 2006-02-28 | Micron Technology, Inc. | Integrated circuitry including a capacitor with an amorphous and a crystalline high K capacitor dielectric region |
DE10008617A1 (de) | 2000-02-24 | 2001-09-06 | Infineon Technologies Ag | Verfahren zur Herstellung einer ferroelektrischen Schicht |
US6686298B1 (en) | 2000-06-22 | 2004-02-03 | Micron Technology, Inc. | Methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates |
US6660657B1 (en) | 2000-08-07 | 2003-12-09 | Micron Technology, Inc. | Methods of incorporating nitrogen into silicon-oxide-containing layers |
US6555487B1 (en) | 2000-08-31 | 2003-04-29 | Micron Technology, Inc. | Method of selective oxidation conditions for dielectric conditioning |
US6930041B2 (en) * | 2000-12-07 | 2005-08-16 | Micron Technology, Inc. | Photo-assisted method for semiconductor fabrication |
US6576564B2 (en) | 2000-12-07 | 2003-06-10 | Micron Technology, Inc. | Photo-assisted remote plasma apparatus and method |
KR100399075B1 (ko) * | 2000-12-08 | 2003-09-26 | 주식회사 하이닉스반도체 | 반도체 소자의 강유전체 캐패시터 형성방법 |
KR100379526B1 (ko) * | 2000-12-21 | 2003-04-10 | 주식회사 하이닉스반도체 | 반도체소자의 커패시터 제조방법 |
KR100476374B1 (ko) * | 2000-12-26 | 2005-03-16 | 주식회사 하이닉스반도체 | 반도체소자 제조 방법 |
KR100400246B1 (ko) * | 2000-12-29 | 2003-10-01 | 주식회사 하이닉스반도체 | 고집적 디램용 셀 커패시터의 제조방법 |
US6524908B2 (en) * | 2001-06-01 | 2003-02-25 | International Business Machines Corporation | Method for forming refractory metal-silicon-nitrogen capacitors and structures formed |
US6878585B2 (en) * | 2001-08-29 | 2005-04-12 | Micron Technology, Inc. | Methods of forming capacitors |
US6797557B2 (en) * | 2001-10-11 | 2004-09-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Methods and systems for forming embedded DRAM for an MIM capacitor |
US6723599B2 (en) * | 2001-12-03 | 2004-04-20 | Micron Technology, Inc. | Methods of forming capacitors and methods of forming capacitor dielectric layers |
KR101153978B1 (ko) | 2002-03-26 | 2012-06-14 | 카부시키카이샤 시.브이.리서어치 | 비결정질 금속 산화막의 제조 방법 및 비결정질 금속산화막을 가지는 커패시턴스 소자와 반도체 장치를제조하는 방법 |
US6841824B2 (en) * | 2002-09-04 | 2005-01-11 | Infineon Technologies Ag | Flash memory cell and the method of making separate sidewall oxidation |
US6649456B1 (en) * | 2002-10-16 | 2003-11-18 | Taiwan Semiconductor Manufacturing Company | SRAM cell design for soft error rate immunity |
US6821868B2 (en) * | 2002-12-27 | 2004-11-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of forming nitrogen enriched gate dielectric with low effective oxide thickness |
US6720232B1 (en) * | 2003-04-10 | 2004-04-13 | Taiwan Semiconductor Manufacturing Company | Method of fabricating an embedded DRAM for metal-insulator-metal (MIM) capacitor structure |
KR100552701B1 (ko) * | 2003-11-24 | 2006-02-20 | 삼성전자주식회사 | 전하-쌍극자가 결합된 정보 저장 매체 및 그 제조 방법 |
US7271083B2 (en) * | 2004-07-22 | 2007-09-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | One-transistor random access memory technology compatible with metal gate process |
US7679130B2 (en) * | 2005-05-10 | 2010-03-16 | Infineon Technologies Ag | Deep trench isolation structures and methods of formation thereof |
KR100646524B1 (ko) * | 2005-12-28 | 2006-11-15 | 동부일렉트로닉스 주식회사 | 반도체 장치 제조 방법 |
US8813325B2 (en) | 2011-04-12 | 2014-08-26 | Intermolecular, Inc. | Method for fabricating a DRAM capacitor |
US8815677B2 (en) | 2011-06-14 | 2014-08-26 | Intermolecular, Inc. | Method of processing MIM capacitors to reduce leakage current |
US9871044B2 (en) * | 2015-11-06 | 2018-01-16 | Micron Technology, Inc. | Enhanced charge storage materials, related semiconductor memory cells and semiconductor devices, and related systems and methods |
US9530834B1 (en) | 2015-12-13 | 2016-12-27 | United Microelectronics Corp. | Capacitor and method for fabricating the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4201798A (en) * | 1976-11-10 | 1980-05-06 | Solarex Corporation | Method of applying an antireflective coating to a solar cell |
US5142438A (en) * | 1991-11-15 | 1992-08-25 | Micron Technology, Inc. | Dram cell having a stacked capacitor with a tantalum lower plate, a tantalum oxide dielectric layer, and a silicide buried contact |
JPH07161931A (ja) * | 1993-12-02 | 1995-06-23 | Nec Corp | 半導体装置の製造方法 |
JP2679599B2 (ja) * | 1993-12-02 | 1997-11-19 | 日本電気株式会社 | 半導体装置の製造方法 |
US5468687A (en) * | 1994-07-27 | 1995-11-21 | International Business Machines Corporation | Method of making TA2 O5 thin film by low temperature ozone plasma annealing (oxidation) |
KR100360468B1 (ko) * | 1995-03-20 | 2003-01-24 | 삼성전자 주식회사 | 강유전성박막제조방법및이를적용한캐패시터및그제조방법 |
JP2741745B2 (ja) * | 1995-03-24 | 1998-04-22 | 工業技術院長 | 半導体電極形成方法および装置 |
KR0183732B1 (ko) * | 1995-09-01 | 1999-03-20 | 김광호 | 반도체 장치의 캐패시터 제작방법 |
KR0155879B1 (ko) * | 1995-09-13 | 1998-12-01 | 김광호 | 오산화 이탄탈륨 유전막 커패시터 제조방법 |
-
1998
- 1998-01-28 US US09/014,204 patent/US6096597A/en not_active Expired - Lifetime
- 1998-01-30 KR KR1019980002497A patent/KR19980070915A/ko not_active Application Discontinuation
- 1998-02-02 DE DE69840184T patent/DE69840184D1/de not_active Expired - Lifetime
- 1998-02-02 EP EP98300746A patent/EP0860868B1/de not_active Expired - Lifetime
- 1998-02-02 JP JP10021287A patent/JPH10223865A/ja active Pending
- 1998-02-02 AT AT98300746T patent/ATE413690T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR19980070915A (ko) | 1998-10-26 |
JPH10223865A (ja) | 1998-08-21 |
US6096597A (en) | 2000-08-01 |
EP0860868B1 (de) | 2008-11-05 |
EP0860868A3 (de) | 2000-05-10 |
EP0860868A2 (de) | 1998-08-26 |
ATE413690T1 (de) | 2008-11-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |