DE69816758D1 - Synthetisches quarzglas zur verwendung in uv-strahlung und verfahren zu seiner herstellung - Google Patents
Synthetisches quarzglas zur verwendung in uv-strahlung und verfahren zu seiner herstellungInfo
- Publication number
- DE69816758D1 DE69816758D1 DE69816758T DE69816758T DE69816758D1 DE 69816758 D1 DE69816758 D1 DE 69816758D1 DE 69816758 T DE69816758 T DE 69816758T DE 69816758 T DE69816758 T DE 69816758T DE 69816758 D1 DE69816758 D1 DE 69816758D1
- Authority
- DE
- Germany
- Prior art keywords
- radiation
- production
- quartz glass
- synthetic quartz
- synthetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/047—Re-forming tubes or rods by drawing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/07—Impurity concentration specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/07—Impurity concentration specified
- C03B2201/075—Hydroxyl ion (OH)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/21—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with molecular hydrogen
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
- C03B2207/32—Non-halide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/08—Doped silica-based glasses containing boron or halide
- C03C2201/11—Doped silica-based glasses containing boron or halide containing chlorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
- C03C2201/21—Doped silica-based glasses containing non-metals other than boron or halide containing molecular hydrogen
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
- C03C2201/23—Doped silica-based glasses containing non-metals other than boron or halide containing hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/50—After-treatment
- C03C2203/52—Heat-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14593897A JP3403317B2 (ja) | 1997-05-20 | 1997-05-20 | 高出力真空紫外線用合成シリカガラス光学材料およびその製造方法 |
JP14593897 | 1997-05-20 | ||
JP22445097 | 1997-08-07 | ||
JP22445097A JP3630533B2 (ja) | 1997-08-07 | 1997-08-07 | 高出力真空紫外線用合成シリカガラス大型板材およびその製造方法 |
PCT/EP1998/002965 WO1998052879A1 (en) | 1997-05-20 | 1998-05-20 | Synthetic silica glass used with uv-rays and method producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69816758D1 true DE69816758D1 (de) | 2003-09-04 |
DE69816758T2 DE69816758T2 (de) | 2004-06-03 |
Family
ID=26476916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69816758T Expired - Lifetime DE69816758T2 (de) | 1997-05-20 | 1998-05-20 | Synthetisches quarzglas zur verwendung in uv-strahlung und verfahren zu seiner herstellung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6143676A (de) |
EP (1) | EP0917523B1 (de) |
DE (1) | DE69816758T2 (de) |
WO (1) | WO1998052879A1 (de) |
Families Citing this family (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100554091B1 (ko) * | 1997-12-08 | 2006-05-16 | 가부시키가이샤 니콘 | 엑시머레이저내성을향상시킨석영글래스의제조방법및석영글래스부재 |
US6376401B1 (en) * | 1998-09-07 | 2002-04-23 | Tosoh Corporation | Ultraviolet ray-transparent optical glass material and method of producing same |
WO2000039040A1 (fr) * | 1998-12-25 | 2000-07-06 | Asahi Glass Company, Limited | Verre de quartz synthetique et procede de preparation associe |
US6265115B1 (en) | 1999-03-15 | 2001-07-24 | Corning Incorporated | Projection lithography photomask blanks, preforms and methods of making |
US6682859B2 (en) | 1999-02-12 | 2004-01-27 | Corning Incorporated | Vacuum ultraviolet trasmitting silicon oxyfluoride lithography glass |
US6319634B1 (en) | 1999-03-12 | 2001-11-20 | Corning Incorporated | Projection lithography photomasks and methods of making |
US6782716B2 (en) | 1999-02-12 | 2004-08-31 | Corning Incorporated | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass |
US6783898B2 (en) | 1999-02-12 | 2004-08-31 | Corning Incorporated | Projection lithography photomask blanks, preforms and method of making |
US6242136B1 (en) | 1999-02-12 | 2001-06-05 | Corning Incorporated | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass |
JP4601022B2 (ja) * | 1999-03-04 | 2010-12-22 | 信越石英株式会社 | ArFエキシマレーザーリソグラフィー用合成石英ガラス部材 |
KR100694554B1 (ko) * | 1999-03-25 | 2007-03-13 | 아사히 가라스 가부시키가이샤 | 광학부재용 합성석영유리와 그 제조방법 및 사용방법 |
EP1114802A4 (de) * | 1999-04-21 | 2008-12-31 | Nikon Corp | Quartzglas-element, verfahren zur herstellung und projektionsausrichteinrichtung, das dieses verwendet |
KR100662319B1 (ko) | 1999-07-05 | 2006-12-28 | 가부시키가이샤 니콘 | 석영글래스 부재의 제조방법 및 그 방법에 의해 얻어지는석영글래스 부재 |
JP2001019465A (ja) * | 1999-07-07 | 2001-01-23 | Shin Etsu Chem Co Ltd | エキシマレーザ用合成石英ガラス部材及びその製造方法 |
EP1134197B1 (de) * | 1999-08-12 | 2014-05-07 | Nikon Corporation | Verfahren zur herstellung von synthetischem, glasförmigem siliciumdioxid |
DE60016185T2 (de) * | 1999-09-13 | 2006-03-02 | Asahi Glass Co., Ltd. | Abdeckung |
JP2001270731A (ja) * | 2000-03-28 | 2001-10-02 | Nikon Corp | 合成石英ガラス部材及びこれを用いた光リソグラフィー装置 |
US6844277B2 (en) * | 2000-07-31 | 2005-01-18 | Corning Incorporated | UV photosensitive melted glasses |
US6828262B2 (en) * | 2000-07-31 | 2004-12-07 | Corning Incorporated | UV photosensitive melted glasses |
US20020122902A1 (en) * | 2000-11-30 | 2002-09-05 | Tetsuji Ueda | Blank for an optical member as well as vessel and method of producing the same |
US7797966B2 (en) * | 2000-12-29 | 2010-09-21 | Single Crystal Technologies, Inc. | Hot substrate deposition of fused silica |
US20020083740A1 (en) * | 2000-12-29 | 2002-07-04 | Pandelisev Kiril A. | Process and apparatus for production of silica grain having desired properties and their fiber optic and semiconductor application |
US20020083739A1 (en) * | 2000-12-29 | 2002-07-04 | Pandelisev Kiril A. | Hot substrate deposition fiber optic preforms and preform components process and apparatus |
ATE324355T1 (de) * | 2001-08-15 | 2006-05-15 | Schott Ag | Quarzglasplatte sowie verfahren und vorrichtung zur herstellung von optischen bauteilen |
EP1288169A1 (de) * | 2001-08-30 | 2003-03-05 | Schott Glas | Verfahren zur Wasserstoffbeladung von Quarzglaskörpern zur Verbesserung der Brechzahlhomogenität und der Laserfestigkeit bei gleichzeitiger Einhaltung einer vorgegebenen Spannungsdoppelbrechung und danach hergestellte Quarzglaskörper |
US20040162211A1 (en) * | 2001-09-27 | 2004-08-19 | Domey Jeffrey J. | Fused silica having high internal transmission and low birefringence |
CN1558875A (zh) * | 2001-09-27 | 2004-12-29 | 康宁股份有限公司 | 内透射率高并且双折射低的熔凝硅石 |
DE10159962A1 (de) | 2001-12-06 | 2003-07-03 | Heraeus Quarzglas | Quarzglasrohling für ein optisches Bauteil sowie Verfahren zur Herstellung und Verwendung desselben |
DE10159959A1 (de) * | 2001-12-06 | 2003-06-26 | Heraeus Quarzglas | Quarzglasrohling für ein optisches Bauteil und Verwendung desselben |
DE10159961C2 (de) | 2001-12-06 | 2003-12-24 | Heraeus Quarzglas | Quarzglasrohling für ein optisches Bauteil sowie Verfahren zur Herstellung und Verwendung desselben |
JP4104338B2 (ja) * | 2002-01-31 | 2008-06-18 | 信越石英株式会社 | ArF露光装置用合成石英ガラス素材 |
JP4107905B2 (ja) * | 2002-07-31 | 2008-06-25 | 信越石英株式会社 | Yagレーザー高調波用合成石英ガラス光学材料 |
JP4403082B2 (ja) * | 2002-11-29 | 2010-01-20 | 信越石英株式会社 | 合成石英ガラスの製造方法及び合成石英ガラス体 |
JP4370581B2 (ja) * | 2003-02-17 | 2009-11-25 | 株式会社ニコン | 露光装置及び露光装置用光学部材 |
JP2011168485A (ja) * | 2003-04-03 | 2011-09-01 | Asahi Glass Co Ltd | TiO2を含有するシリカガラスおよびその製造法 |
JP4792705B2 (ja) | 2003-04-03 | 2011-10-12 | 旭硝子株式会社 | TiO2を含有するシリカガラスおよびその製造法 |
US7534733B2 (en) * | 2004-02-23 | 2009-05-19 | Corning Incorporated | Synthetic silica glass optical material having high resistance to laser induced damage |
JP2005255423A (ja) | 2004-03-09 | 2005-09-22 | Asahi Glass Co Ltd | 合成石英ガラス製フォトマスク基板およびフォトマスク |
WO2005105685A1 (en) * | 2004-04-28 | 2005-11-10 | Asahi Glass Company, Limited | Optical member made of synthetic quartz glass, and process for its production |
US7275397B2 (en) * | 2004-05-21 | 2007-10-02 | Corning Incorporated | Method of molding a silica article |
US7506522B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High refractive index homogeneity fused silica glass and method of making same |
US7506521B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High transmission synthetic silica glass and method of making same |
US7589039B2 (en) * | 2004-12-29 | 2009-09-15 | Corning Incorporated | Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same |
DE102005017739B4 (de) * | 2005-04-15 | 2009-11-05 | Heraeus Quarzglas Gmbh & Co. Kg | Halter aus Quarzglas für die Prozessierung von Halbleiterwafern und Verfahren zur Herstellung des Halters |
US20060281623A1 (en) * | 2005-06-10 | 2006-12-14 | General Electric Company | Free-formed quartz glass ingots and method for making the same |
US7928026B2 (en) * | 2005-06-30 | 2011-04-19 | Corning Incorporated | Synthetic silica material with low fluence-dependent-transmission and method of making the same |
US20070059533A1 (en) * | 2005-09-12 | 2007-03-15 | Burdette Steven R | Thermal reflow of glass and fused silica body |
DE102006043368B4 (de) | 2005-09-16 | 2019-01-10 | Corning Inc. | Synthetisches Kieselsäureglas und Verfahren zur Herstellung desselben |
TW200940472A (en) * | 2007-12-27 | 2009-10-01 | Asahi Glass Co Ltd | TiO2-containing silica glass |
UY33001A (es) | 2009-11-06 | 2011-05-31 | Boehringer Ingelheim Int | Derivados arilo y heteroarilcarbonilo de hexahidroindenopiridina y octahidrobenzoquinolina |
DE102011120412B4 (de) | 2011-12-08 | 2018-03-08 | Heraeus Quarzglas Gmbh & Co. Kg | Excimerlampe mit Emissionsfenster aus Quarzglas mit einem bestimmten Gehalt an Hydroxylgruppen, Wasserstoff und Chlor |
DE102013107435B4 (de) * | 2013-07-12 | 2015-01-29 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines Quarzglas-Großrohres |
US10032620B2 (en) | 2014-04-30 | 2018-07-24 | Kla-Tencor Corporation | Broadband light source including transparent portion with high hydroxide content |
JP6536185B2 (ja) * | 2014-06-13 | 2019-07-03 | 信越化学工業株式会社 | 合成石英ガラス基板の製造方法 |
JP6679585B2 (ja) * | 2014-10-07 | 2020-04-15 | ショット アクチエンゲゼルシャフトSchott AG | 高められた強度を有する合わせガラス |
US11236002B2 (en) | 2015-12-18 | 2022-02-01 | Heraeus Quarzglas Gmbh & Co. Kg | Preparation of an opaque quartz glass body |
KR20180095618A (ko) | 2015-12-18 | 2018-08-27 | 헤래우스 크바르츠글라스 게엠베하 & 컴파니 케이지 | 다중-챔버 가열로에서 실리카 유리체의 제조 |
JP6940236B2 (ja) | 2015-12-18 | 2021-09-22 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 溶融炉内での露点監視による石英ガラス体の調製 |
EP3390304B1 (de) | 2015-12-18 | 2023-09-13 | Heraeus Quarzglas GmbH & Co. KG | Sprühgranulieren von siliziumdioxid bei der herstellung von quarzglas |
TWI794150B (zh) | 2015-12-18 | 2023-03-01 | 德商何瑞斯廓格拉斯公司 | 自二氧化矽顆粒製備石英玻璃體 |
US11299417B2 (en) | 2015-12-18 | 2022-04-12 | Heraeus Quarzglas Gmbh & Co. Kg | Preparation of a quartz glass body in a melting crucible of refractory metal |
WO2017103131A1 (de) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Verringern des erdalkalimetallgehalts von siliziumdioxidgranulat durch behandlung von kohlenstoffdotiertem siliziumdioxidgranulat bei hoher temperatur |
EP3390308A1 (de) | 2015-12-18 | 2018-10-24 | Heraeus Quarzglas GmbH & Co. KG | Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt |
WO2017103120A1 (de) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Herstellung einer synthetischen quarzglaskörnung |
WO2017103124A2 (de) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Erhöhen des siliziumgehalts bei der herstellung von quarzglas |
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US5616159A (en) * | 1995-04-14 | 1997-04-01 | Corning Incorporated | Method of forming high purity fused silica having high resistance to optical damage |
JP3274954B2 (ja) * | 1995-08-18 | 2002-04-15 | 住友金属工業株式会社 | 光学用合成石英ガラス材及びその製造方法 |
EP0850201B1 (de) * | 1995-09-12 | 2003-07-16 | Corning Incorporated | Topf zum herstellen von silikaglas |
JP3674793B2 (ja) * | 1995-10-31 | 2005-07-20 | 信越石英株式会社 | 紫外線レーザ用石英ガラス光学部材の製造方法 |
-
1998
- 1998-05-20 WO PCT/EP1998/002965 patent/WO1998052879A1/en active IP Right Grant
- 1998-05-20 US US09/214,894 patent/US6143676A/en not_active Expired - Lifetime
- 1998-05-20 EP EP98928299A patent/EP0917523B1/de not_active Expired - Lifetime
- 1998-05-20 DE DE69816758T patent/DE69816758T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1998052879A1 (en) | 1998-11-26 |
US6143676A (en) | 2000-11-07 |
DE69816758T2 (de) | 2004-06-03 |
EP0917523A1 (de) | 1999-05-26 |
EP0917523B1 (de) | 2003-07-30 |
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