DE69629040D1 - Gassensor und verfahren zu dessen herstellung - Google Patents

Gassensor und verfahren zu dessen herstellung

Info

Publication number
DE69629040D1
DE69629040D1 DE69629040T DE69629040T DE69629040D1 DE 69629040 D1 DE69629040 D1 DE 69629040D1 DE 69629040 T DE69629040 T DE 69629040T DE 69629040 T DE69629040 T DE 69629040T DE 69629040 D1 DE69629040 D1 DE 69629040D1
Authority
DE
Germany
Prior art keywords
production
gas sensor
sensor
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69629040T
Other languages
English (en)
Other versions
DE69629040T2 (de
Inventor
Masao Maki
Takashi Niwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69629040D1 publication Critical patent/DE69629040D1/de
Publication of DE69629040T2 publication Critical patent/DE69629040T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/13—Digital output to plotter ; Cooperation and interconnection of the plotter with other functional units
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073—Composition or fabrication of the solid electrolyte
    • G01N27/4074—Composition or fabrication of the solid electrolyte for detection of gases other than oxygen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/497—Physical analysis of biological material of gaseous biological material, e.g. breath

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Theoretical Computer Science (AREA)
  • Biomedical Technology (AREA)
  • General Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Biophysics (AREA)
  • Hematology (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
DE69629040T 1995-09-29 1996-09-27 Gassensor und verfahren zu dessen herstellung Expired - Lifetime DE69629040T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP25320095 1995-09-29
JP7253200A JPH0996622A (ja) 1995-09-29 1995-09-29 ガスセンサおよびその製造方法
PCT/JP1996/002802 WO1997013147A1 (en) 1995-09-29 1996-09-27 Gas sensor and manufacturing process thereof

Publications (2)

Publication Number Publication Date
DE69629040D1 true DE69629040D1 (de) 2003-08-14
DE69629040T2 DE69629040T2 (de) 2004-04-22

Family

ID=17247951

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69629040T Expired - Lifetime DE69629040T2 (de) 1995-09-29 1996-09-27 Gassensor und verfahren zu dessen herstellung

Country Status (9)

Country Link
US (1) US6165336A (de)
EP (1) EP0853762B1 (de)
JP (1) JPH0996622A (de)
KR (1) KR100355318B1 (de)
CN (1) CN1131430C (de)
DE (1) DE69629040T2 (de)
HK (1) HK1010910A1 (de)
MY (1) MY119265A (de)
WO (1) WO1997013147A1 (de)

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DE19905776A1 (de) * 1999-02-12 2000-08-17 Bosch Gmbh Robert Schutzschicht
JP3953677B2 (ja) * 1999-03-12 2007-08-08 日本特殊陶業株式会社 ガスセンサ
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US6616821B2 (en) * 1999-06-08 2003-09-09 Broadley Technologies Corporation Reference electrode having a microfluidic flowing liquid junction
US7943026B2 (en) * 1999-06-08 2011-05-17 Broadley Technologies Corporation Reference electrode having a flowing liquid junction and filter members
US7344627B2 (en) * 1999-06-08 2008-03-18 Broadley-James Corporation Reference electrode having a flowing liquid junction and filter members
DE19928103A1 (de) * 1999-06-19 2001-01-25 Xcellsis Gmbh Vorrichtung zur Messung von Kohlenmonoxid
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JP3871501B2 (ja) * 2000-08-07 2007-01-24 株式会社ノリタケカンパニーリミテド ゼオライト膜とその製造方法と膜リアクター
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DE10144873A1 (de) * 2001-09-12 2003-03-27 Bosch Gmbh Robert Mikromechanischer Wärmeleitfähigkeitssensor mit poröser Abdeckung
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US7198839B2 (en) * 2002-08-16 2007-04-03 The Boeing Company Ceramic fiber insulation impregnated with an infra-red retardant coating and method for production thereof
EP1568990B1 (de) 2002-11-27 2016-06-22 NGK Spark Plug Co., Ltd. Sensor für oxidierendes gas
US7677082B2 (en) * 2003-05-20 2010-03-16 The University Of Akron Solid state gas sensors based on tunnel junction geometry
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US7306965B2 (en) * 2004-02-25 2007-12-11 Matsushita Electric Industrial Co., Ltd. Oxygen ion conductor device, method for fabricating oxygen ion conductor device, and oxygen concentration control system
US7231810B2 (en) * 2004-08-26 2007-06-19 Humboldt-Universitaet Zu Berlin Semiconductor type hydrogen sensor, detection method and hydrogen detecting device
US20060070890A1 (en) * 2004-09-28 2006-04-06 Tdk Corporation Gas concentration measurement method gas sensor
DE102005003050B3 (de) * 2005-01-22 2006-06-29 Dräger Safety AG & Co. KGaA Gassensor
DE102005059594A1 (de) * 2005-12-14 2007-06-21 Robert Bosch Gmbh Sensorelement sowie Verfahren und Mittel zu dessen Herstellung
EP2057009A4 (de) * 2006-08-24 2014-03-05 Univ North Carolina Stickoxid-mikrosensoren mit fluorsilan-basierten xerogel-membranen
JP2010507088A (ja) * 2006-10-19 2010-03-04 ソシエテ ド シミ イノルガニク エ オルガニク アン アブレジェ “ソシノール” 燃焼ガスセンサ
WO2008134066A1 (en) * 2007-04-30 2008-11-06 Ut-Battelee, Llc Device and method for detecting sulfur dioxide at high temperatures
US7956106B2 (en) * 2007-10-30 2011-06-07 Chung Shan Institute Of Science And Technology, Armaments Bureau, M.N.D. Organic siloxane composite material containing polyaniline/carbon black and preparation method thereof
JP5662945B2 (ja) * 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
DE102009000820A1 (de) 2009-02-12 2010-08-19 Robert Bosch Gmbh Sensorelement eines Gassensors und Verfahren zum Betrieb desselben
WO2011093975A2 (en) * 2010-01-29 2011-08-04 Fosaaen Technologies, Llc Method for producing a subminiature "micro-chip" oxygen sensor for control of internal combustion engines or other combustion processes, oxygen sensor and an exhaust safety switch
US8900344B2 (en) 2010-03-22 2014-12-02 T3 Scientific Llc Hydrogen selective protective coating, coated article and method
JP5179545B2 (ja) * 2010-07-06 2013-04-10 日本特殊陶業株式会社 ガスセンサ
GB2486637A (en) * 2010-12-14 2012-06-27 Expro North Sea Ltd Downhole water level detecting apparatus and method
KR101246529B1 (ko) * 2011-03-09 2013-03-26 한국과학기술원 다층 구조를 갖는 금속산화물 튜브를 이용한 가스센서 및 그 제조방법
DE102011110084B4 (de) * 2011-08-12 2015-10-29 Hanomag Härtecenter GmbH Messeinrichtung zur Bestimmung des Kohlenstoffgehalts mit zugehörigem Verfahren
US9568448B2 (en) * 2011-08-25 2017-02-14 Georgia Tech Research Corporation Gas sensors and methods of preparation thereof
NL2008632C2 (nl) * 2012-04-12 2013-10-16 Consultatie Implementatie Tech Beheer B V Mobiele inrichting en werkwijze voor het analyseren van ademmonsters.
CN102662002A (zh) * 2012-04-25 2012-09-12 中国科学院微电子研究所 半导体薄膜、气体传感器及其制作方法
DE102012108997A1 (de) * 2012-09-24 2014-03-27 Heinrich-Heine-Universität Düsseldorf Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung
CN103926277B (zh) * 2013-01-11 2017-02-15 深圳市深安旭传感技术有限公司 一氧化碳传感器及其电极的制作方法
DE102013112823B3 (de) * 2013-11-20 2015-03-26 Maschinenfabrik Reinhausen Gmbh Vorrichtung und Verfahren zur Detektion von Gas
CN104062344B (zh) * 2014-07-02 2016-10-12 武汉工程大学 氢气选择性气敏元件
US10161899B2 (en) * 2014-09-30 2018-12-25 Rosemount Inc. Oxygen sensor with electrochemical protection mode
DE102014223778A1 (de) * 2014-11-21 2016-05-25 Robert Bosch Gmbh Vorrichtung zum Erfassen zumindest eines gasförmigen Analyten und Verfahren zum Herstellen derselben
DE102014018681B3 (de) 2014-12-18 2015-10-29 Dräger Safety AG & Co. KGaA Gassensor und Verfahren zur Herstellung eines Messelementes
CN104569062B (zh) * 2015-01-30 2018-02-02 东北电力大学 基于分子筛过滤的电子鼻气室
DE102015121807A1 (de) * 2015-12-15 2017-06-22 Endress+Hauser Conducta Gmbh+Co. Kg Verfahren zum automatisierten Herstellen eines mindestens ein Diaphragma aufweisenden Werkstücks
DE102016201193A1 (de) * 2016-01-27 2017-07-27 Technische Universität München Gedruckte Sensorvorrichtung zum Detektieren von Medien
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DE102016216373A1 (de) 2016-08-31 2018-03-01 Robert Bosch Gmbh Schutzvorrichtung für einen Sensor und Sensor zum Erfassen einer Konzentration von Kohlenstoffdioxid in Luft
US11204346B2 (en) * 2016-09-21 2021-12-21 Sensirion Ag Gas sensor with filter
US11209384B2 (en) * 2016-10-18 2021-12-28 Carrier Corporation Electrochemical sensor containing an internal reference cell
CN108426921B (zh) * 2017-02-13 2021-04-06 华邦电子股份有限公司 气体传感器
EP3470835B1 (de) * 2017-10-13 2023-03-22 BoydSense, Inc. Fluidmessvorrichtung für eine tragbare elektronische vorrichtung
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DE112019006637T5 (de) * 2019-01-10 2021-11-11 Ngk Insulators, Ltd. Gassensor
CN109970022B (zh) * 2019-04-01 2024-07-16 深圳邺诚科技有限公司 一种mems催化燃烧传感器及其加工方法
US11478596B2 (en) * 2019-07-18 2022-10-25 Covidien Lp System and method for high flow oxygen therapy
CN115135982A (zh) * 2020-02-27 2022-09-30 松下知识产权经营株式会社 气体检测系统和气体检测系统的控制方法
CN113737149A (zh) * 2020-05-28 2021-12-03 宝山钢铁股份有限公司 一种用于金属带材上的连续真空镀膜密封锁
JP7458944B2 (ja) * 2020-09-08 2024-04-01 ローム株式会社 限界電流式ガスセンサ及びその製造方法
CN114349508B (zh) * 2022-01-14 2022-11-29 中国科学院青岛生物能源与过程研究所 一种具有氧化物薄层的多层陶瓷膜制备方法和应用
CN115541665B (zh) * 2022-11-28 2023-03-31 南方电网数字电网研究院有限公司 氧气气敏材料及其制备方法与应用
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CN117054618B (zh) * 2023-10-13 2024-01-09 比亚迪股份有限公司 气体检测元件、排气系统和车辆

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Also Published As

Publication number Publication date
DE69629040T2 (de) 2004-04-22
WO1997013147A1 (en) 1997-04-10
JPH0996622A (ja) 1997-04-08
CN1131430C (zh) 2003-12-17
US6165336A (en) 2000-12-26
KR100355318B1 (ko) 2003-06-19
HK1010910A1 (en) 1999-07-02
KR19990063785A (ko) 1999-07-26
CN1198213A (zh) 1998-11-04
MY119265A (en) 2005-04-30
EP0853762A1 (de) 1998-07-22
EP0853762B1 (de) 2003-07-09

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Legal Events

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8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8320 Willingness to grant licences declared (paragraph 23)