DE69624981T2 - Solarzelle und Verfahren zu ihrer Herstellung - Google Patents
Solarzelle und Verfahren zu ihrer HerstellungInfo
- Publication number
- DE69624981T2 DE69624981T2 DE69624981T DE69624981T DE69624981T2 DE 69624981 T2 DE69624981 T2 DE 69624981T2 DE 69624981 T DE69624981 T DE 69624981T DE 69624981 T DE69624981 T DE 69624981T DE 69624981 T2 DE69624981 T2 DE 69624981T2
- Authority
- DE
- Germany
- Prior art keywords
- production
- solar cell
- solar
- cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
- H01L31/077—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells the devices comprising monocrystalline or polycrystalline materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/1812—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table including only AIVBIV alloys, e.g. SiGe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13821895 | 1995-06-05 | ||
JP06642196A JP3223102B2 (ja) | 1995-06-05 | 1996-03-22 | 太陽電池セルおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69624981D1 DE69624981D1 (de) | 2003-01-09 |
DE69624981T2 true DE69624981T2 (de) | 2003-07-24 |
Family
ID=26407622
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69624981T Expired - Lifetime DE69624981T2 (de) | 1995-06-05 | 1996-06-05 | Solarzelle und Verfahren zu ihrer Herstellung |
DE69636605T Expired - Lifetime DE69636605T2 (de) | 1995-06-05 | 1996-06-05 | Solarzelle und ihr Herstellungsverfahren |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69636605T Expired - Lifetime DE69636605T2 (de) | 1995-06-05 | 1996-06-05 | Solarzelle und ihr Herstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US5738732A (de) |
EP (2) | EP1231648B1 (de) |
JP (1) | JP3223102B2 (de) |
DE (2) | DE69624981T2 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3468670B2 (ja) * | 1997-04-28 | 2003-11-17 | シャープ株式会社 | 太陽電池セルおよびその製造方法 |
DE19743692A1 (de) * | 1997-10-02 | 1999-04-08 | Zae Bayern | Multifunktionsschicht zur Verbesserung des Wirkungsgrades von kristallinen Dünnschicht Silizium Solarzellen |
JP4244549B2 (ja) | 2001-11-13 | 2009-03-25 | トヨタ自動車株式会社 | 光電変換素子及びその製造方法 |
US6660928B1 (en) | 2002-04-02 | 2003-12-09 | Essential Research, Inc. | Multi-junction photovoltaic cell |
US7790574B2 (en) | 2004-12-20 | 2010-09-07 | Georgia Tech Research Corporation | Boron diffusion in silicon devices |
US7501331B2 (en) * | 2006-03-31 | 2009-03-10 | Sandisk 3D Llc | Low-temperature metal-induced crystallization of silicon-germanium films |
US7655542B2 (en) * | 2006-06-23 | 2010-02-02 | Applied Materials, Inc. | Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device |
FR2910711B1 (fr) * | 2006-12-20 | 2018-06-29 | Centre Nat Rech Scient | Heterojonction a interface intrinsequement amorphe |
US20080223440A1 (en) * | 2007-01-18 | 2008-09-18 | Shuran Sheng | Multi-junction solar cells and methods and apparatuses for forming the same |
US7582515B2 (en) * | 2007-01-18 | 2009-09-01 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US8203071B2 (en) * | 2007-01-18 | 2012-06-19 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US20080173350A1 (en) * | 2007-01-18 | 2008-07-24 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US20080245414A1 (en) * | 2007-04-09 | 2008-10-09 | Shuran Sheng | Methods for forming a photovoltaic device with low contact resistance |
WO2008141863A2 (en) * | 2007-05-24 | 2008-11-27 | International Business Machines Corporation | Backside contacting on thin layer photovoltaic cells |
US7875486B2 (en) * | 2007-07-10 | 2011-01-25 | Applied Materials, Inc. | Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning |
US20090104733A1 (en) * | 2007-10-22 | 2009-04-23 | Yong Kee Chae | Microcrystalline silicon deposition for thin film solar applications |
WO2009059240A1 (en) * | 2007-11-02 | 2009-05-07 | Applied Materials, Inc. | Intrinsic amorphous silicon layer |
WO2009059238A1 (en) * | 2007-11-02 | 2009-05-07 | Applied Materials, Inc. | Plasma treatment between deposition processes |
DE102008030693A1 (de) * | 2008-07-01 | 2010-01-14 | Institut Für Solarenergieforschung Gmbh | Heterojunction-Solarzelle mit Absorber mit integriertem Dotierprofil |
US8895842B2 (en) * | 2008-08-29 | 2014-11-25 | Applied Materials, Inc. | High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells |
US20100059110A1 (en) * | 2008-09-11 | 2010-03-11 | Applied Materials, Inc. | Microcrystalline silicon alloys for thin film and wafer based solar applications |
US20110114177A1 (en) * | 2009-07-23 | 2011-05-19 | Applied Materials, Inc. | Mixed silicon phase film for high efficiency thin film silicon solar cells |
WO2011046664A2 (en) * | 2009-10-15 | 2011-04-21 | Applied Materials, Inc. | A barrier layer disposed between a substrate and a transparent conductive oxide layer for thin film silicon solar cells |
TWI411116B (zh) * | 2009-11-17 | 2013-10-01 | Epistar Corp | 一種高效率太陽能電池 |
US20110126875A1 (en) * | 2009-12-01 | 2011-06-02 | Hien-Minh Huu Le | Conductive contact layer formed on a transparent conductive layer by a reactive sputter deposition |
CN102097499B (zh) * | 2009-12-14 | 2015-02-18 | 晶元光电股份有限公司 | 太阳能电池 |
JP5484950B2 (ja) * | 2010-02-23 | 2014-05-07 | 三洋電機株式会社 | 太陽電池 |
US20110232753A1 (en) * | 2010-03-23 | 2011-09-29 | Applied Materials, Inc. | Methods of forming a thin-film solar energy device |
CN102054890B (zh) * | 2010-10-29 | 2013-01-02 | 中国科学院半导体研究所 | 一种单晶薄膜异质结太阳电池及其制备方法 |
US10043934B2 (en) * | 2011-06-08 | 2018-08-07 | International Business Machines Corporation | Silicon-containing heterojunction photovoltaic element and device |
KR101788163B1 (ko) * | 2016-02-12 | 2017-11-15 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
KR101772432B1 (ko) * | 2016-02-15 | 2017-08-30 | 규 현 최 | 다중밴드 Si-Ge 박막 단결정을 이용한 태양전지 및 그의 효율 개선방법 |
JP2019159273A (ja) * | 2018-03-16 | 2019-09-19 | 日本電気株式会社 | 電界吸収型光変調器 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3615855A (en) * | 1969-04-03 | 1971-10-26 | Gen Motors Corp | Radiant energy photovoltalic device |
US3990101A (en) * | 1975-10-20 | 1976-11-02 | Rca Corporation | Solar cell device having two heterojunctions |
US4158577A (en) * | 1978-07-05 | 1979-06-19 | Milnes Arthur G | High output solar cells |
DE3237338A1 (de) * | 1982-10-08 | 1984-04-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Ausgangsmaterial fuer epitaxiale silizium-solarzellen |
JPS6063968A (ja) * | 1984-04-02 | 1985-04-12 | Nippon Telegr & Teleph Corp <Ntt> | 太陽電池 |
JPS61188927A (ja) * | 1985-02-15 | 1986-08-22 | Sharp Corp | 化合物半導体装置 |
JPH04168769A (ja) * | 1990-10-31 | 1992-06-16 | Sanyo Electric Co Ltd | 光起電力素子の製造方法 |
JPH04249374A (ja) * | 1991-02-05 | 1992-09-04 | Sharp Corp | 光電変換素子 |
JPH0582812A (ja) * | 1991-09-25 | 1993-04-02 | Matsushita Electric Ind Co Ltd | 太陽電池 |
JP3048732B2 (ja) * | 1991-11-25 | 2000-06-05 | 三洋電機株式会社 | 光起電力装置 |
JPH05259075A (ja) * | 1992-03-12 | 1993-10-08 | Hitachi Ltd | 半導体装置の製造方法 |
-
1996
- 1996-03-22 JP JP06642196A patent/JP3223102B2/ja not_active Expired - Fee Related
- 1996-06-04 US US08/657,289 patent/US5738732A/en not_active Expired - Lifetime
- 1996-06-05 DE DE69624981T patent/DE69624981T2/de not_active Expired - Lifetime
- 1996-06-05 EP EP02076531A patent/EP1231648B1/de not_active Expired - Lifetime
- 1996-06-05 DE DE69636605T patent/DE69636605T2/de not_active Expired - Lifetime
- 1996-06-05 EP EP96304097A patent/EP0747972B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1231648A2 (de) | 2002-08-14 |
DE69636605D1 (de) | 2006-11-16 |
US5738732A (en) | 1998-04-14 |
EP1231648A3 (de) | 2004-12-08 |
EP0747972B1 (de) | 2002-11-27 |
DE69636605T2 (de) | 2007-08-16 |
JP3223102B2 (ja) | 2001-10-29 |
EP0747972A2 (de) | 1996-12-11 |
DE69624981D1 (de) | 2003-01-09 |
EP0747972A3 (de) | 1997-11-19 |
EP1231648B1 (de) | 2006-10-04 |
JPH0955521A (ja) | 1997-02-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69624981T2 (de) | Solarzelle und Verfahren zu ihrer Herstellung | |
DE69024481T2 (de) | Solarzelle und Verfahren zu ihrer Herstellung | |
DE69827319D1 (de) | Solarzelle und Verfahren zu deren Herstellung | |
DE69224965T2 (de) | Verbesserte solarzelle und verfahren zu ihrer herstellung | |
DE69637084D1 (de) | Lithium-zelle und verfahren zu deren herstellung | |
DE19882366T1 (de) | Solarzelle und Verfahren zu ihrer Herstellung | |
DE69824786D1 (de) | Solarzellenmodul und Verfahren zu dessen Herstellung | |
DE59606535D1 (de) | Furnacerusse und Verfahren zu ihrer Herstellung | |
ATE236161T1 (de) | Purinderivate und verfahren zu ihrer herstellung | |
DE59610908D1 (de) | Speicherzellenanordnung und Verfahren zu deren Herstellung | |
DE59705610D1 (de) | Offenzellige Sinterschäume und kontinuierliches Verfahren zu ihrer Herstellung | |
DE59814170D1 (de) | Speicherzellenanordnung und Verfahren zu deren Herstellung | |
DE59602652D1 (de) | Zahnbürste und verfahren zu ihrer herstellung | |
DE69735159D1 (de) | Sonnenzelle und Verfahren für seine Herstellung | |
DE19780768T1 (de) | Solarzelle und Verfahren zu deren Herstellung | |
DE69116597T2 (de) | Proteinase-resistente Cellulase, sie produzierender Mikroorganismus und Verfahren zu ihrer Herstellung | |
DE59603578D1 (de) | Flachdichtung und verfahren zu ihrer herstellung | |
DE59602880D1 (de) | Festwertspeicherzellenanordnung und verfahren zu deren herstellung | |
DE69517003T2 (de) | Bleiakkumotor und Verfahren zu ihrer Herstellung | |
DE59603494D1 (de) | Polymerelektrolyte und verfahren zu deren herstellung | |
DE69527220D1 (de) | Verbesserte Dachbahn und Verfahren zu dessen Herstellung | |
DE69603515D1 (de) | Aktivkohle und Verfahren zu ihrer Herstellung | |
DE59209042D1 (de) | Dünne Solarzelle und Verfahren zu ihrer Herstellung | |
DE59602872D1 (de) | Festwert-speicherzellenanordnung und verfahren zu deren herstellung | |
DE69614524D1 (de) | Etherverbindungen und verfahren zu ihrer herstellung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |