DE69616481T2 - Gerät zur Herstellung einer Halbleitervorrichtung mit Vakuumsystem - Google Patents

Gerät zur Herstellung einer Halbleitervorrichtung mit Vakuumsystem

Info

Publication number
DE69616481T2
DE69616481T2 DE69616481T DE69616481T DE69616481T2 DE 69616481 T2 DE69616481 T2 DE 69616481T2 DE 69616481 T DE69616481 T DE 69616481T DE 69616481 T DE69616481 T DE 69616481T DE 69616481 T2 DE69616481 T2 DE 69616481T2
Authority
DE
Germany
Prior art keywords
manufacturing
semiconductor device
chamber
valves
load lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69616481T
Other languages
German (de)
English (en)
Other versions
DE69616481D1 (de
Inventor
Seung-Ki Chae
Jae-Sun Jeon
Won-Yeong Kim
Yun-Mo Yang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of DE69616481D1 publication Critical patent/DE69616481D1/de
Publication of DE69616481T2 publication Critical patent/DE69616481T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/01—Manufacture or treatment
    • H10D48/04—Manufacture or treatment of devices having bodies comprising selenium or tellurium in uncombined form
    • H10D48/042—Preparation of foundation plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3306—Horizontal transfer of a single workpiece
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32743—Means for moving the material to be treated for introducing the material into processing chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0466—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the load-lock chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/184—Vacuum locks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69616481T 1995-11-21 1996-06-07 Gerät zur Herstellung einer Halbleitervorrichtung mit Vakuumsystem Expired - Lifetime DE69616481T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950042623A KR100189981B1 (ko) 1995-11-21 1995-11-21 진공 시스템을 구비한 반도체 소자 제조장치

Publications (2)

Publication Number Publication Date
DE69616481D1 DE69616481D1 (de) 2001-12-06
DE69616481T2 true DE69616481T2 (de) 2002-07-11

Family

ID=19435018

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69616481T Expired - Lifetime DE69616481T2 (de) 1995-11-21 1996-06-07 Gerät zur Herstellung einer Halbleitervorrichtung mit Vakuumsystem

Country Status (7)

Country Link
US (2) US5833425A (enExample)
EP (2) EP0776026B1 (enExample)
JP (1) JP4008515B2 (enExample)
KR (1) KR100189981B1 (enExample)
CN (2) CN1165637C (enExample)
DE (1) DE69616481T2 (enExample)
TW (1) TW308705B (enExample)

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DE4117969C2 (de) * 1991-05-31 2000-11-09 Balzers Ag Liechtenstein Vakuumkammer
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US6161311A (en) * 1998-07-10 2000-12-19 Asm America, Inc. System and method for reducing particles in epitaxial reactors
US6016611A (en) * 1998-07-13 2000-01-25 Applied Komatsu Technology, Inc. Gas flow control in a substrate processing system
US6238514B1 (en) * 1999-02-18 2001-05-29 Mks Instruments, Inc. Apparatus and method for removing condensable aluminum vapor from aluminum etch effluent
US6197119B1 (en) 1999-02-18 2001-03-06 Mks Instruments, Inc. Method and apparatus for controlling polymerized teos build-up in vacuum pump lines
KR100740905B1 (ko) * 2000-03-16 2007-07-19 엘지.필립스 엘시디 주식회사 고진공 스퍼터 장치
FR2807951B1 (fr) * 2000-04-20 2003-05-16 Cit Alcatel Procede et systeme de pompage des chambres de transfert d'equipement de semi-conducteur
US6568896B2 (en) 2001-03-21 2003-05-27 Applied Materials, Inc. Transfer chamber with side wall port
US6488745B2 (en) 2001-03-23 2002-12-03 Mks Instruments, Inc. Trap apparatus and method for condensable by-products of deposition reactions
US6701972B2 (en) 2002-01-11 2004-03-09 The Boc Group, Inc. Vacuum load lock, system including vacuum load lock, and associated methods
JP2005191494A (ja) * 2003-12-26 2005-07-14 Canon Inc 露光装置、デバイスの製造方法
CN100520503C (zh) * 2004-03-08 2009-07-29 周星工程股份有限公司 抽真空系统及其驱动方法、具有此系统的装置和使用此系统转移基板的方法
US7253107B2 (en) * 2004-06-17 2007-08-07 Asm International N.V. Pressure control system
JP4335085B2 (ja) * 2004-07-05 2009-09-30 シーケーディ株式会社 真空圧力制御システム
JP4581602B2 (ja) * 2004-09-29 2010-11-17 株式会社島津製作所 真空処理装置
JP2006342688A (ja) * 2005-06-07 2006-12-21 Ebara Corp 真空排気システム
CN100468629C (zh) * 2005-07-20 2009-03-11 台达电子工业股份有限公司 真空控制系统
KR101121419B1 (ko) * 2005-08-30 2012-03-15 주성엔지니어링(주) 기판제조장치 및 이에 이용되는 진공펌핑방법과 벤팅방법
KR100665855B1 (ko) * 2006-02-01 2007-01-09 삼성전자주식회사 반도체 디바이스 제조설비의 진공장치 및 이를 이용한진공방법
WO2007116676A1 (ja) * 2006-03-31 2007-10-18 Kuraray Kuraflex Co., Ltd. 不織繊維構造を有する成形体
US7989173B2 (en) * 2006-12-27 2011-08-02 The Johns Hopkins University Detection and diagnosis of inflammatory disorders
KR101359401B1 (ko) * 2007-06-21 2014-02-10 주성엔지니어링(주) 고효율 박막 태양전지와 그 제조방법 및 제조장치
JP2009252953A (ja) * 2008-04-04 2009-10-29 Hitachi High-Technologies Corp 真空処理装置
JP2010153737A (ja) * 2008-12-26 2010-07-08 Hitachi High-Technologies Corp 真空処理装置
US8623141B2 (en) * 2009-05-18 2014-01-07 Taiwan Semiconductor Manufacturing Co., Ltd. Piping system and control for semiconductor processing
JP5899209B2 (ja) * 2010-05-28 2016-04-06 アクセリス テクノロジーズ， インコーポレイテッド ワークピース上の結露を防ぐためのアクティブ露点検出およびロードロック通気
EP2546300A1 (en) 2011-07-14 2013-01-16 Cytec Surface Specialties, S.A. Radiation curable aqueous dispersions
US20140116336A1 (en) * 2012-10-26 2014-05-01 Applied Materials, Inc. Substrate process chamber exhaust
KR102343637B1 (ko) * 2019-06-13 2021-12-28 세메스 주식회사 기판 처리 장치 및 방법
US12523380B2 (en) 2021-08-16 2026-01-13 Applied Materials, Inc. Prevention of contamination of substrates during pressure changes in processing systems
US12278124B2 (en) * 2021-10-28 2025-04-15 Applied Materials, Inc. Model-based controlled load lock pumping scheme
CN119650456B (zh) * 2023-09-15 2025-12-12 北京北方华创微电子装备有限公司 负载锁定组件及半导体工艺设备

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JPH02185974A (ja) * 1989-01-13 1990-07-20 Tokyo Electron Ltd 金属シリサイド膜の減圧ｃｖｄ装置
US4987933A (en) * 1989-03-03 1991-01-29 Eaton Corporation Fluid flow control method and apparatus for minimizing particle contamination
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JP3149206B2 (ja) * 1991-05-30 2001-03-26 東京エレクトロン株式会社 熱処理装置
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JPH0536618A (ja) * 1991-08-02 1993-02-12 Mitsubishi Electric Corp 半導体製造装置
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Also Published As

Publication number Publication date
KR100189981B1 (ko) 1999-06-01
US5833425A (en) 1998-11-10
EP0776026B1 (en) 2001-10-31
CN1501445A (zh) 2004-06-02
JPH09148265A (ja) 1997-06-06
EP0776026A1 (en) 1997-05-28
EP1017085A2 (en) 2000-07-05
EP1017085A3 (en) 2002-09-25
JP4008515B2 (ja) 2007-11-14
CN1242456C (zh) 2006-02-15
TW308705B (enExample) 1997-06-21
DE69616481D1 (de) 2001-12-06
CN1152626A (zh) 1997-06-25
US6071350A (en) 2000-06-06
KR970030243A (ko) 1997-06-26
CN1165637C (zh) 2004-09-08

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Legal Events

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8364 No opposition during term of opposition