DE3884435T2 - Verfahren zur Erzeugung hochreinen Wassers und Verfahren zur Verwendung dieses Wassers. - Google Patents

Verfahren zur Erzeugung hochreinen Wassers und Verfahren zur Verwendung dieses Wassers.

Info

Publication number
DE3884435T2
DE3884435T2 DE88104672T DE3884435T DE3884435T2 DE 3884435 T2 DE3884435 T2 DE 3884435T2 DE 88104672 T DE88104672 T DE 88104672T DE 3884435 T DE3884435 T DE 3884435T DE 3884435 T2 DE3884435 T2 DE 3884435T2
Authority
DE
Germany
Prior art keywords
water
processes
producing high
purity
purity water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88104672T
Other languages
English (en)
Other versions
DE3884435D1 (de
Inventor
Hideaki Kurokawa
Akira Yamada
Yasuo Koseki
Harumi Matsuzaki
Katsuya Ebara
Sankichi Takahashi
Hiroaki Yoda
Nobuatsu Hayashi
Isao Okouchi
Yukio Hishinuma
Naohiro Momma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62068893A external-priority patent/JPS63236333A/ja
Priority claimed from JP62139782A external-priority patent/JPS63305917A/ja
Priority claimed from JP62201718A external-priority patent/JPS6445130A/ja
Priority claimed from JP20998987A external-priority patent/JPH0779994B2/ja
Priority claimed from JP62233399A external-priority patent/JPS6476726A/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3884435D1 publication Critical patent/DE3884435D1/de
Publication of DE3884435T2 publication Critical patent/DE3884435T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/36—Pervaporation; Membrane distillation; Liquid permeation
    • B01D61/364—Membrane distillation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/06—Flash distillation
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/02—Treatment of water, waste water, or sewage by heating
    • C02F1/04—Treatment of water, waste water, or sewage by heating by distillation or evaporation
    • C02F1/045—Treatment of water, waste water, or sewage by heating by distillation or evaporation for obtaining ultra-pure water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/90—Ultra pure water, e.g. conductivity water
DE88104672T 1987-03-25 1988-03-23 Verfahren zur Erzeugung hochreinen Wassers und Verfahren zur Verwendung dieses Wassers. Expired - Fee Related DE3884435T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP62068893A JPS63236333A (ja) 1987-03-25 1987-03-25 基板の洗浄乾燥方法
JP62139782A JPS63305917A (ja) 1987-06-05 1987-06-05 超純水製造方法及びその製造装置
JP62201718A JPS6445130A (en) 1987-08-14 1987-08-14 Underwater oxidation of semiconductor wafer
JP20998987A JPH0779994B2 (ja) 1987-08-24 1987-08-24 超純水製造方法
JP62233399A JPS6476726A (en) 1987-09-17 1987-09-17 Manufacture of semiconductor

Publications (2)

Publication Number Publication Date
DE3884435D1 DE3884435D1 (de) 1993-11-04
DE3884435T2 true DE3884435T2 (de) 1994-02-17

Family

ID=27524143

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88104672T Expired - Fee Related DE3884435T2 (de) 1987-03-25 1988-03-23 Verfahren zur Erzeugung hochreinen Wassers und Verfahren zur Verwendung dieses Wassers.

Country Status (4)

Country Link
US (1) US4879041A (de)
EP (1) EP0284052B1 (de)
KR (1) KR960003543B1 (de)
DE (1) DE3884435T2 (de)

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5105556A (en) * 1987-08-12 1992-04-21 Hitachi, Ltd. Vapor washing process and apparatus
JPH0630764B2 (ja) * 1989-03-06 1994-04-27 森田化学工業株式会社 超純水ラインの滅菌方法
PL161105B1 (pl) * 1989-06-09 1993-05-31 Sposób wzbogacania wody naturalnej w tlen-18 PL
PL161104B1 (pl) * 1989-06-09 1993-05-31 Sposób wzbogacania wody w skladniki wody ciezkiej PL
US5063609A (en) * 1989-10-11 1991-11-05 Applied Materials, Inc. Steam generator
US4978550A (en) * 1990-04-03 1990-12-18 Eastman Kodak Company Reverse osmosis water purification system for producing carbonated water
US5102550A (en) * 1990-11-01 1992-04-07 The United States Of America As Represented By The Secretary Of The Navy Apparatus and process for desalination of seawater
US5242468A (en) * 1991-03-19 1993-09-07 Startec Ventures, Inc. Manufacture of high precision electronic components with ultra-high purity liquids
JPH05136114A (ja) * 1991-11-08 1993-06-01 Tadahiro Omi 超純水供給装置及び基体洗浄方法並びに超純水製造装置及び超純水製造方法
KR960016302B1 (ko) * 1992-05-15 1996-12-09 마쯔시다덴기산교 가부시기가이샤 순수(純水)의 제조장치 및 순수의 제조방법
DE69415736T2 (de) * 1993-02-03 1999-05-20 Kurita Water Ind Ltd Verfahren zur herstellung von reinem wasser
US5376281A (en) * 1993-07-21 1994-12-27 Safta; Eugen Water purification system
US5525237A (en) * 1993-12-23 1996-06-11 United Technologies Corporation Process for removing free and dissolved CO2 from aqueous solutions
US5518626A (en) * 1993-12-23 1996-05-21 United Technologies Corporation Process employing thermally sterilizable aqueous polishing agents
CA2116089C (en) * 1994-02-21 2004-05-04 Fuelmaker Corporation Method and apparatus for dewatering gas stream resulting in a clean water effluent
US5518624A (en) * 1994-05-06 1996-05-21 Illinois Water Treatment, Inc. Ultra pure water filtration
AU684210B2 (en) * 1994-08-19 1997-12-04 Water Research Commission A water purification device
JP2606156B2 (ja) * 1994-10-14 1997-04-30 栗田工業株式会社 研磨剤粒子の回収方法
JPH11506431A (ja) * 1995-05-15 1999-06-08 インテグレイテッド プロセス エクイプメイント コーポレイション（アイ ピー イー シー） イソプロピルアルコールの無水化及び純粋化
US5766479A (en) * 1995-08-07 1998-06-16 Zenon Environmental Inc. Production of high purity water using reverse osmosis
US5695545A (en) * 1996-05-10 1997-12-09 Hoechst Celanese Corporation Degassing liquids: apparatus and method
WO1997043117A1 (en) * 1996-05-16 1997-11-20 Lockheed Martin Energy Systems, Inc. Low temperature material bonding technique
US20020153319A1 (en) 1997-08-12 2002-10-24 Debasish Mukhopadhyay Method and apparatus for high efficiency reverse osmosis operation
US8758720B2 (en) * 1996-08-12 2014-06-24 Debasish Mukhopadhyay High purity water produced by reverse osmosis
JP3171807B2 (ja) 1997-01-24 2001-06-04 東京エレクトロン株式会社 洗浄装置及び洗浄方法
WO1998051394A1 (en) * 1997-05-16 1998-11-19 Pure Water, Inc. Water distiller system for medical applications
US5997745A (en) * 1998-04-08 1999-12-07 Zenon Environmental Inc. Method for producing high purity water using triple pass reverse osmosis (TPRO)
US6120689A (en) * 1997-08-22 2000-09-19 Zenon Environmental, Inc. High purity water using triple pass reverse osmosis (TPRO)
FI103106B (fi) * 1997-11-12 1999-04-30 Steris Europe Inc Menetelmä ja laite puhtaan veden tuottamiseksi
US6663778B1 (en) 1999-10-12 2003-12-16 Mansour S. Bader Process for the treatment of aqueous streams containing inorganics
US6365051B1 (en) 1999-10-12 2002-04-02 Mansour S. Bader Precipitation-membrane distillation hybrid system for the treatment of aqueous streams
US6652972B1 (en) 1999-11-01 2003-11-25 Schott Glass Technologies Inc. Low temperature joining of phosphate glass
US7364625B2 (en) * 2000-05-30 2008-04-29 Fsi International, Inc. Rinsing processes and equipment
US6733637B1 (en) * 2000-06-02 2004-05-11 Exxonmobil Chemical Patents Inc. Process for producing ultra-high purity isopropanol
WO2001098225A1 (en) 2000-06-20 2001-12-27 Schott Glass Technologies, Inc. Glass ceramic composites
US6927176B2 (en) * 2000-06-26 2005-08-09 Applied Materials, Inc. Cleaning method and solution for cleaning a wafer in a single wafer process
US6464880B1 (en) * 2000-09-19 2002-10-15 University Of Chicago Microporous ionomeric materials and methods of preparation
US6882782B2 (en) * 2000-11-01 2005-04-19 Schott Glas Photonic devices for optical and optoelectronic information processing
US6842998B2 (en) * 2001-04-06 2005-01-18 Akrion Llc Membrane dryer
US7318894B2 (en) * 2001-08-29 2008-01-15 Graham John Gibson Juby Method and system for treating wastewater
JP2003077993A (ja) * 2001-08-30 2003-03-14 Nec Yamagata Ltd ウェーハ用ホルダ、及び、ウェーハの吸着解放方法
US7180035B2 (en) * 2002-06-25 2007-02-20 Tokyo Electron Limited Substrate processing device
JP4291034B2 (ja) * 2003-04-25 2009-07-08 大日本スクリーン製造株式会社 洗浄装置および基板処理装置
US20040238343A1 (en) * 2003-05-28 2004-12-02 Joseph Kuo Membrane distillation method
US8722160B2 (en) * 2003-10-31 2014-05-13 Aeris Capital Sustainable Ip Ltd. Inorganic/organic hybrid nanolaminate barrier film
US7198717B2 (en) * 2004-08-26 2007-04-03 Graham John Gibson Juby Anoxic biological reduction system
US7399344B1 (en) * 2005-01-28 2008-07-15 Uop Llc Hydrogen peroxide recovery with hydrophobic membrane
US8926731B2 (en) * 2005-09-13 2015-01-06 Rasirc Methods and devices for producing high purity steam
US8282708B2 (en) * 2005-09-13 2012-10-09 Rasirc Method of producing high purity steam
US7892321B2 (en) * 2006-02-01 2011-02-22 Intelligent Energy, Inc. Integrated heated prevaporation module
US7837877B2 (en) * 2006-06-09 2010-11-23 Air Products And Chemicals, Inc. Process for separating components of a multi-component feed stream
EP1925355A1 (de) * 2006-10-31 2008-05-28 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Membrandestillationsverfahren zur Reinigung einer Flüssigkeit
JP2011509760A (ja) * 2008-01-18 2011-03-31 エックスコーポリアル、 インコーポレイテッド 透析装置の流体回路からの二酸化炭素ガス除去
US9346021B2 (en) * 2008-12-02 2016-05-24 Membrane Distillation Desalination Ltd., Co. Composite membranes for membrane distillation and related methods of manufacture
WO2010081077A2 (en) * 2009-01-09 2010-07-15 Massachusetts Institute Of Technology Liquid filtration using pressure difference across a hydrophobic membrane
EP2445617A4 (de) * 2009-06-23 2014-07-02 Ceramatec Inc Hochtemperatur-dampfselektive membran
CN102398895B (zh) * 2010-09-16 2014-09-24 上海化学试剂研究所 一种超纯电子级化学试剂的生产方法
CN102399140B (zh) * 2010-09-17 2015-04-15 联仕(上海)电子化学材料有限公司 一种超纯电子级醋酸的生产方法
NL2009613C2 (en) * 2012-10-11 2014-04-15 Aquaver B V Membrane distillation system, method of starting such a system and use thereof.
GB2509721A (en) * 2013-01-09 2014-07-16 Univ Swansea Membrane distillation process
US9358508B2 (en) * 2013-04-25 2016-06-07 Lockheed Martin Corporation Dryer and water recovery/purification unit employing graphene oxide or perforated graphene monolayer membranes
US9200800B2 (en) * 2014-01-17 2015-12-01 General Electric Company Method and system for steam generation and purification
KR101564759B1 (ko) * 2014-02-04 2015-11-02 한국과학기술연구원 막 증류 수처리 용 분리막
KR101656569B1 (ko) * 2014-09-02 2016-09-23 한양대학교 에리카산학협력단 에너지 생산 장치
US11434150B2 (en) * 2015-04-23 2022-09-06 Aquatech International, Llc Method and apparatus for advanced vacuum membrane distillation
EP3195915A1 (de) * 2016-01-20 2017-07-26 Sulzer Chemtech AG System zur reinigung eines organischen lösungsmittels und verfahren zur verwendung davon
US10239770B2 (en) * 2016-04-29 2019-03-26 Kookmin University Industry Academy Cooperation Foundation Multi-stage submerged membrane distillation water treatment apparatus
CN111051247B (zh) * 2017-09-07 2022-11-04 旭化成株式会社 使用多孔膜的过滤方法
WO2019126428A1 (en) * 2017-12-20 2019-06-27 Evoqua Water Technologies Llc Hot water cart conditioning system and method
CN112292564A (zh) * 2018-05-04 2021-01-29 唐纳森公司 用于从蒸汽中去除有机化合物的系统和方法
EP3801845A1 (de) 2018-06-08 2021-04-14 EvCon GmbH Modulares strömungssystem mit verbesserter dampf- und/oder flüssigkeitskanalkonfiguration
US11857928B2 (en) 2018-06-08 2024-01-02 Evcon Gmbh Multistage membrane distillation apparatus
WO2019233607A1 (en) 2018-06-08 2019-12-12 Evcon Gmbh Modular flow system with internal strut members
WO2019233611A1 (en) * 2018-06-08 2019-12-12 Evcon Gmbh Membrane distillation apparatus for producing water
US11833473B2 (en) 2018-06-08 2023-12-05 Evcon Gmbh Modular flow system with asymmetric or discontinuous liquid passage
US11649178B2 (en) 2019-10-15 2023-05-16 Donaldson Company, Inc. Systems and methods for removing organic compounds from water used to generate steam
WO2022187910A1 (en) * 2021-03-11 2022-09-15 Ellen Medical Devices Pty Ltd System, method and device for treating a liquid
CN114804263A (zh) * 2022-04-24 2022-07-29 扬州大学 一种利用电磁感应加热的自热膜蒸馏净水系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2893926A (en) * 1957-06-13 1959-07-07 Bethlehem Steel Corp Combined flash type distilling plant and back-pressure turbo-generator
GB988023A (en) * 1962-03-09 1965-03-31 Texas Instruments Inc Method of providing protection for a pn junction formed in a silicon body
US3418214A (en) * 1967-02-16 1968-12-24 Westinghouse Electric Corp Integral make-up deaerator for flash evaporator
DE1642833A1 (de) * 1967-03-16 1971-04-29 Yves Henderyckx Verfahren und Vorrichtung zum Abtrennen eines oder mehrerer Bestandteile aus einer Loesung
JPS60166040A (ja) * 1984-02-08 1985-08-29 Hitachi Ltd イオン交換樹脂の調整法
US4725359A (en) * 1985-02-25 1988-02-16 Bend Research, Inc. Potable water from internal combustion engines
EP0226216B1 (de) * 1985-12-18 1992-05-06 Hitachi, Ltd. Destilliervorrichtung

Also Published As

Publication number Publication date
EP0284052B1 (de) 1993-09-29
EP0284052A3 (en) 1990-07-25
DE3884435D1 (de) 1993-11-04
EP0284052A2 (de) 1988-09-28
US4879041A (en) 1989-11-07
KR890000135A (ko) 1989-03-11
KR960003543B1 (ko) 1996-03-15

Similar Documents

Publication Publication Date Title
DE3884435T2 (de) Verfahren zur Erzeugung hochreinen Wassers und Verfahren zur Verwendung dieses Wassers.
DE3688209D1 (de) Verfahren zur herstellung von kohlenstoffilamenten und durch dieses verfahren erhaltene kohlenstoffilamente.
DE3688775T2 (de) Verfahren zur Herstellung von Tonerdepulvern zur Erzeugung polykristalliner Körper.
DE69104461T2 (de) Verfahren zur Erzeugung von hochreinem Wasserstoff.
DE3480721D1 (de) Verfahren und vorrichtung zur herstellung von einkristallen.
DE3871175D1 (de) Verfahren zur herstellung von perovskit und abo3-typ-oxyden.
DE3583896D1 (de) Verfahren und vorrichtung zur herstellung von weissen zementklinkern.
ATE81339T1 (de) Verfahren zur herstellung von zyklischen sulfaten.
DE3583209D1 (de) Kontinuierliches verfahren zur herstellung von phosphorsaeure und von calciumsulfat.
DE3776857D1 (de) Aequoringen-varianten und verfahren zur herstellung von entsprechenden aequorinproteinen.
DE3872551D1 (de) Verfahren zur herstellung von znse-einkristall.
DE3777516D1 (de) Verfahren zur erzeugung von kohlendioxyd und wasserstoff.
DE68927606D1 (de) Verfahren zur Produktion von Halbtondaten
DE3768191D1 (de) Verfahren zur erzeugung von ozon.
DE68919707D1 (de) Verfahren zur erzeugung von unterchloriger säure.
AT375681B (de) Verfahren zur herstellung von silicium- und kohlenstoffhaltigen rohstoff-formlingen
DE3863948D1 (de) Verfahren zur herstellung von chlorpolysilanen.
ATA333487A (de) Verfahren und vorrichtung zur herstellung von roheisen
DE3876917D1 (de) Verfahren zur erzeugung von dimethylnaphthalenen.
DE68908603D1 (de) Elektrolytischer Ozonisator und Verfahren zur Zerlegung von Ozonenthaltendem Abgas unter Verwertung dieses Ozonisators.
DE3585633D1 (de) Verfahren und vorrichtung zur herstellung von kalziniertem koks hoher qualitaet.
DE69008424D1 (de) Verfahren zur Erzeugung von Nitrobenzolen.
DE69014042D1 (de) Verfahren zur Herstellung von menschlichem Osteocalcin.
DE3775659D1 (de) Verfahren und vorrichtung zur erzeugung von synthesegas.
DE3689562D1 (de) Verfahren zur Erzeugung des menschlichen Wachstumhormons.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee