DE69606168T2 - Verfahren zur strukturierung eines substates unter verwendung eines strukturierten schleifartikels - Google Patents

Verfahren zur strukturierung eines substates unter verwendung eines strukturierten schleifartikels

Info

Publication number
DE69606168T2
DE69606168T2 DE69606168T DE69606168T DE69606168T2 DE 69606168 T2 DE69606168 T2 DE 69606168T2 DE 69606168 T DE69606168 T DE 69606168T DE 69606168 T DE69606168 T DE 69606168T DE 69606168 T2 DE69606168 T2 DE 69606168T2
Authority
DE
Germany
Prior art keywords
substate
structuring
abrasive article
structured abrasive
structured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69606168T
Other languages
English (en)
Other versions
DE69606168D1 (de
Inventor
Michihiro Ohishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE69606168D1 publication Critical patent/DE69606168D1/de
Application granted granted Critical
Publication of DE69606168T2 publication Critical patent/DE69606168T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
DE69606168T 1995-03-02 1996-01-26 Verfahren zur strukturierung eines substates unter verwendung eines strukturierten schleifartikels Expired - Fee Related DE69606168T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39819895A 1995-03-02 1995-03-02
PCT/US1996/001089 WO1996027189A1 (en) 1995-03-02 1996-01-26 Method of texturing a substrate using a structured abrasive article

Publications (2)

Publication Number Publication Date
DE69606168D1 DE69606168D1 (de) 2000-02-17
DE69606168T2 true DE69606168T2 (de) 2000-09-28

Family

ID=23574392

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69606168T Expired - Fee Related DE69606168T2 (de) 1995-03-02 1996-01-26 Verfahren zur strukturierung eines substates unter verwendung eines strukturierten schleifartikels

Country Status (8)

Country Link
US (1) US5733178A (de)
EP (1) EP0812456B1 (de)
JP (1) JPH11501439A (de)
KR (1) KR19980702613A (de)
CA (1) CA2212359A1 (de)
DE (1) DE69606168T2 (de)
TW (1) TW283668B (de)
WO (1) WO1996027189A1 (de)

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EP1276593B1 (de) * 2000-04-28 2005-08-17 3M Innovative Properties Company Schleifmittel und verfahren zum schleifen von glas
US6520833B1 (en) * 2000-06-30 2003-02-18 Lam Research Corporation Oscillating fixed abrasive CMP system and methods for implementing the same
US20020083760A1 (en) * 2000-08-31 2002-07-04 Standard Heater Tube, Inc. Heater tube
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US6821189B1 (en) * 2000-10-13 2004-11-23 3M Innovative Properties Company Abrasive article comprising a structured diamond-like carbon coating and method of using same to mechanically treat a substrate
CN1315972C (zh) * 2000-10-16 2007-05-16 3M创新有限公司 制造团聚颗粒的方法
US6620214B2 (en) 2000-10-16 2003-09-16 3M Innovative Properties Company Method of making ceramic aggregate particles
US6645624B2 (en) 2000-11-10 2003-11-11 3M Innovative Properties Company Composite abrasive particles and method of manufacture
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US6632129B2 (en) * 2001-02-15 2003-10-14 3M Innovative Properties Company Fixed abrasive article for use in modifying a semiconductor wafer
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US7625509B2 (en) * 2001-08-02 2009-12-01 3M Innovative Properties Company Method of making ceramic articles
US7507268B2 (en) * 2001-08-02 2009-03-24 3M Innovative Properties Company Al2O3-Y2O3-ZrO2/HfO2 materials, and methods of making and using the same
DE60223550T2 (de) 2001-08-02 2008-10-23 3M Innovative Properties Co., St. Paul Verfahren zur herstellung von gegenständen aus glas sowie so hergestellte glaskeramikgegenstände
KR100912306B1 (ko) * 2001-08-02 2009-08-14 쓰리엠 이노베이티브 프로퍼티즈 컴파니 무정질 물질 및 세라믹의 제조 방법
JP4194489B2 (ja) * 2001-08-02 2008-12-10 スリーエム イノベイティブ プロパティズ カンパニー 研磨粒子、ならびにその製造および使用方法
US7198550B2 (en) 2002-02-08 2007-04-03 3M Innovative Properties Company Process for finish-abrading optical-fiber-connector end-surface
US7179526B2 (en) * 2002-08-02 2007-02-20 3M Innovative Properties Company Plasma spraying
US8056370B2 (en) * 2002-08-02 2011-11-15 3M Innovative Properties Company Method of making amorphous and ceramics via melt spinning
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US7811496B2 (en) * 2003-02-05 2010-10-12 3M Innovative Properties Company Methods of making ceramic particles
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US7141523B2 (en) * 2003-09-18 2006-11-28 3M Innovative Properties Company Ceramics comprising Al2O3, REO, ZrO2 and/or HfO2, and Nb2O5 and/or Ta2O5 and methods of making the same
US7141522B2 (en) * 2003-09-18 2006-11-28 3M Innovative Properties Company Ceramics comprising Al2O3, Y2O3, ZrO2 and/or HfO2, and Nb2O5 and/or Ta2O5 and methods of making the same
US7297171B2 (en) * 2003-09-18 2007-11-20 3M Innovative Properties Company Methods of making ceramics comprising Al2O3, REO, ZrO2 and/or HfO2 and Nb205 and/or Ta2O5
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US7404756B2 (en) * 2004-10-29 2008-07-29 3M Innovative Properties Company Process for manufacturing optical and semiconductor elements
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US20070151166A1 (en) * 2005-12-30 2007-07-05 3M Innovative Properties Company Method of making abrasive articles, cutting tools, and cutting tool inserts
US7281970B2 (en) * 2005-12-30 2007-10-16 3M Innovative Properties Company Composite articles and methods of making the same
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Also Published As

Publication number Publication date
DE69606168D1 (de) 2000-02-17
WO1996027189A1 (en) 1996-09-06
EP0812456A1 (de) 1997-12-17
US5733178A (en) 1998-03-31
TW283668B (de) 1996-08-21
CA2212359A1 (en) 1996-09-06
KR19980702613A (ko) 1998-08-05
JPH11501439A (ja) 1999-02-02
EP0812456B1 (de) 2000-01-12

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