DE69601586D1 - Strahlungsempfindliche Harzzusammensetzung - Google Patents

Strahlungsempfindliche Harzzusammensetzung

Info

Publication number
DE69601586D1
DE69601586D1 DE69601586T DE69601586T DE69601586D1 DE 69601586 D1 DE69601586 D1 DE 69601586D1 DE 69601586 T DE69601586 T DE 69601586T DE 69601586 T DE69601586 T DE 69601586T DE 69601586 D1 DE69601586 D1 DE 69601586D1
Authority
DE
Germany
Prior art keywords
resin composition
sensitive resin
radiation sensitive
radiation
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69601586T
Other languages
English (en)
Other versions
DE69601586T2 (de
Inventor
Katsumi Inomata
Masahiro Akiyama
Toshiyuki Ota
Akira Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JSR Corp filed Critical JSR Corp
Publication of DE69601586D1 publication Critical patent/DE69601586D1/de
Application granted granted Critical
Publication of DE69601586T2 publication Critical patent/DE69601586T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69601586T 1995-03-31 1996-03-28 Strahlungsempfindliche Harzzusammensetzung Expired - Lifetime DE69601586T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7578595 1995-03-31

Publications (2)

Publication Number Publication Date
DE69601586D1 true DE69601586D1 (de) 1999-04-08
DE69601586T2 DE69601586T2 (de) 1999-10-14

Family

ID=13586223

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69601586T Expired - Lifetime DE69601586T2 (de) 1995-03-31 1996-03-28 Strahlungsempfindliche Harzzusammensetzung

Country Status (3)

Country Link
US (1) US5672459A (de)
EP (1) EP0735423B1 (de)
DE (1) DE69601586T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3492109B2 (ja) * 1996-09-26 2004-02-03 キヤノン株式会社 プロセスカートリッジ及び電子写真画像形成装置
JP3633179B2 (ja) * 1997-01-27 2005-03-30 Ｊｓｒ株式会社 ポジ型フォトレジスト組成物
JP4213366B2 (ja) * 2001-06-12 2009-01-21 Ａｚエレクトロニックマテリアルズ株式会社 厚膜レジストパターンの形成方法
CN101517487B (zh) * 2006-09-25 2012-08-08 日立化成工业株式会社 放射线敏感性组合物、二氧化硅系覆膜的形成方法、二氧化硅系覆膜、具有二氧化硅系覆膜的装置和部件以及绝缘膜用感光剂

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2700918B2 (ja) * 1989-04-26 1998-01-21 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
JP2571136B2 (ja) * 1989-11-17 1997-01-16 日本ゼオン株式会社 ポジ型レジスト組成物
JPH04284454A (ja) 1991-03-14 1992-10-09 Sumitomo Chem Co Ltd ポジ型レジスト組成物
JP3000705B2 (ja) 1991-03-20 2000-01-17 日本ゼオン株式会社 ポジ型レジスト組成物
JPH04328555A (ja) * 1991-04-26 1992-11-17 Fuji Photo Film Co Ltd ポジ型フオトレジスト組成物
JPH05257274A (ja) 1992-03-11 1993-10-08 Sumitomo Chem Co Ltd ポジ型レジスト組成物
US5278021A (en) * 1993-04-05 1994-01-11 Ocg Microelectronic Materials, Inc. O-naphthoquinone diazide sulfonyl esters of 4-(4-hydroxyphenyl)cyclohexanone phenolic derivatives with associated radiation sensitive mixtures and articles
JP3024694B2 (ja) * 1993-11-29 2000-03-21 東京応化工業株式会社 ポジ型ホトレジスト組成物

Also Published As

Publication number Publication date
EP0735423A1 (de) 1996-10-02
DE69601586T2 (de) 1999-10-14
EP0735423B1 (de) 1999-03-03
US5672459A (en) 1997-09-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition