DE69408709D1 - Photoempfindliche Harzzusammensetzung - Google Patents

Photoempfindliche Harzzusammensetzung

Info

Publication number
DE69408709D1
DE69408709D1 DE69408709T DE69408709T DE69408709D1 DE 69408709 D1 DE69408709 D1 DE 69408709D1 DE 69408709 T DE69408709 T DE 69408709T DE 69408709 T DE69408709 T DE 69408709T DE 69408709 D1 DE69408709 D1 DE 69408709D1
Authority
DE
Germany
Prior art keywords
resin composition
photosensitive resin
photosensitive
composition
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69408709T
Other languages
English (en)
Other versions
DE69408709T2 (de
Inventor
Hideo Hagiwara
Makoto Kaji
Yasunori Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Application granted granted Critical
Publication of DE69408709D1 publication Critical patent/DE69408709D1/de
Publication of DE69408709T2 publication Critical patent/DE69408709T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/12—Nitrogen compound containing
DE69408709T 1993-04-28 1994-03-28 Photoempfindliche Harzzusammensetzung Expired - Fee Related DE69408709T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10248293 1993-04-28

Publications (2)

Publication Number Publication Date
DE69408709D1 true DE69408709D1 (de) 1998-04-09
DE69408709T2 DE69408709T2 (de) 1998-10-01

Family

ID=14328677

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69408709T Expired - Fee Related DE69408709T2 (de) 1993-04-28 1994-03-28 Photoempfindliche Harzzusammensetzung

Country Status (4)

Country Link
US (1) US6197475B1 (de)
EP (1) EP0622682B1 (de)
KR (1) KR100246113B1 (de)
DE (1) DE69408709T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101150593B1 (ko) * 2004-03-12 2012-06-01 도레이 카부시키가이샤 포지티브형 감광성 수지 조성물, 이를 이용한 릴리프 패턴, 및 고체 촬상 소자
EP1637927A1 (de) 2004-09-02 2006-03-22 Fuji Photo Film Co., Ltd. Positiv arbeitende Resistzusammensetzung und Verfahren zur Herstellung von Mustern unter Verwendung dieser Zusammensetzung
JP4580841B2 (ja) 2005-08-16 2010-11-17 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4905786B2 (ja) 2007-02-14 2012-03-28 富士フイルム株式会社 レジスト組成物及びそれを用いたパターン形成方法
US7592118B2 (en) 2007-03-27 2009-09-22 Fujifilm Corporation Positive resist composition and pattern forming method using the same
US8182975B2 (en) 2007-03-28 2012-05-22 Fujifilm Corporation Positive resist composition and pattern forming method using the same
JP5039622B2 (ja) 2007-03-30 2012-10-03 富士フイルム株式会社 ポジ型レジスト組成物及びこれを用いたパターン形成方法
JP4982228B2 (ja) 2007-03-30 2012-07-25 富士フイルム株式会社 ポジ型レジスト組成物及びこれを用いたパターン形成方法
JP4547448B2 (ja) 2007-08-10 2010-09-22 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4911469B2 (ja) 2007-09-28 2012-04-04 富士フイルム株式会社 レジスト組成物及びこれを用いたパターン形成方法
JP5397017B2 (ja) * 2009-05-25 2014-01-22 株式会社リコー ポリアミド酸及びポリイミド
CN111562720B (zh) 2014-02-21 2023-09-29 东京毅力科创株式会社 光增感化学放大型抗蚀剂材料、图案形成方法、半导体器件、光刻用掩模、纳米压印用模板
JP6774814B2 (ja) 2015-08-20 2020-10-28 国立大学法人大阪大学 化学増幅型レジスト材料及びパターン形成方法
JP6809843B2 (ja) 2015-08-20 2021-01-06 国立大学法人大阪大学 パターン形成方法
JP6512994B2 (ja) 2015-08-20 2019-05-15 国立大学法人大阪大学 化学増幅型レジスト材料
JP6507958B2 (ja) 2015-09-10 2019-05-08 Jsr株式会社 化学増幅型レジスト材料及びレジストパターン形成方法
KR20170031053A (ko) 2015-09-10 2017-03-20 제이에스알 가부시끼가이샤 레지스트 패턴 형성 방법
US9989849B2 (en) 2015-11-09 2018-06-05 Jsr Corporation Chemically amplified resist material and resist pattern-forming method
US10018911B2 (en) 2015-11-09 2018-07-10 Jsr Corporation Chemically amplified resist material and resist pattern-forming method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515887A (en) * 1983-08-29 1985-05-07 General Electric Company Photopatternable dielectric compositions, method for making and use
JPH03136054A (ja) * 1989-10-23 1991-06-10 Sony Corp ネガ型フォトレジスト組成物
US5650261A (en) * 1989-10-27 1997-07-22 Rohm And Haas Company Positive acting photoresist comprising a photoacid, a photobase and a film forming acid-hardening resin system
DE69030643T2 (de) * 1989-11-30 1997-09-25 Sumitomo Bakelite Co Lichtempfindliche Harzzusammensetzung und ihre Verwendung zur Herstellung eines Halbleiterapparats
US5114826A (en) * 1989-12-28 1992-05-19 Ibm Corporation Photosensitive polyimide compositions
DE69222203T2 (de) * 1991-03-05 1998-01-15 Nitto Denko Corp Hitzebeständige, positiv arbeitende Photoresistzusammensetzung, lichtempfindliches Substrat, und Verfahren zur Herstellung eines hitzebeständigen positiven Musters
US5206117A (en) * 1991-08-14 1993-04-27 Labadie Jeffrey W Photosensitive polyamic alkyl ester composition and process for its use
DE69324942T2 (de) * 1992-02-14 1999-10-07 Shipley Co Strahlungsempfindliche Zusammensetzungen und Verfahren

Also Published As

Publication number Publication date
DE69408709T2 (de) 1998-10-01
KR100246113B1 (ko) 2000-06-01
EP0622682B1 (de) 1998-03-04
US6197475B1 (en) 2001-03-06
EP0622682A1 (de) 1994-11-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee