DE69530026D1 - Vertikales MOS-Halbleiterbauelement - Google Patents

Vertikales MOS-Halbleiterbauelement

Info

Publication number
DE69530026D1
DE69530026D1 DE69530026T DE69530026T DE69530026D1 DE 69530026 D1 DE69530026 D1 DE 69530026D1 DE 69530026 T DE69530026 T DE 69530026T DE 69530026 T DE69530026 T DE 69530026T DE 69530026 D1 DE69530026 D1 DE 69530026D1
Authority
DE
Germany
Prior art keywords
semiconductor device
vertical mos
mos semiconductor
vertical
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530026T
Other languages
English (en)
Other versions
DE69530026T2 (de
Inventor
Tomoyuki Yamazaki
Shigeyuki Obinata
Masahito Otsuki
Seiji Momota
Tatsuhiko Fujihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of DE69530026D1 publication Critical patent/DE69530026D1/de
Application granted granted Critical
Publication of DE69530026T2 publication Critical patent/DE69530026T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395—Vertical transistors, e.g. vertical IGBT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7815—Vertical DMOS transistors, i.e. VDMOS transistors with voltage or current sensing structure, e.g. emulator section, overcurrent sensing cell

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Light Receiving Elements (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
DE69530026T 1994-06-22 1995-06-19 Vertikales MOS-Halbleiterbauelement Expired - Lifetime DE69530026T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13974894 1994-06-22
JP13974894A JP3226075B2 (ja) 1994-06-22 1994-06-22 たて型ｍｏｓ半導体装置

Publications (2)

Publication Number Publication Date
DE69530026D1 true DE69530026D1 (de) 2003-04-30
DE69530026T2 DE69530026T2 (de) 2004-03-04

Family

ID=15252470

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530026T Expired - Lifetime DE69530026T2 (de) 1994-06-22 1995-06-19 Vertikales MOS-Halbleiterbauelement

Country Status (3)

Country Link
EP (2) EP1209745B1 (de)
JP (1) JP3226075B2 (de)
DE (1) DE69530026T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004319861A (ja) * 2003-04-18 2004-11-11 Renesas Technology Corp 半導体装置
JP4921730B2 (ja) * 2005-06-20 2012-04-25 株式会社東芝 半導体装置
JP2007287988A (ja) * 2006-04-18 2007-11-01 Toyota Motor Corp 半導体装置
JP5298521B2 (ja) * 2007-10-15 2013-09-25 富士電機株式会社 半導体装置
JP4748149B2 (ja) 2007-12-24 2011-08-17 株式会社デンソー 半導体装置
WO2009096412A1 (ja) * 2008-01-29 2009-08-06 Fuji Electric Device Technology Co., Ltd. 半導体装置
JP5900627B2 (ja) 2012-08-30 2016-04-06 富士電機株式会社 イグナイタ、イグナイタの制御方法および内燃機関用点火装置
JP6320808B2 (ja) 2014-03-19 2018-05-09 富士電機株式会社 トレンチｍｏｓ型半導体装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2876694B2 (ja) * 1990-03-20 1999-03-31 富士電機株式会社 電流検出端子を備えたｍｏｓ型半導体装置
JP2973588B2 (ja) 1991-06-10 1999-11-08 富士電機株式会社 Ｍｏｓ型半導体装置
US5563437A (en) * 1992-02-21 1996-10-08 Motorola, Inc. Semiconductor device having a large sense voltage
JP3175852B2 (ja) * 1992-03-30 2001-06-11 株式会社デンソー 半導体装置及びその製造方法
US5453390A (en) * 1992-03-30 1995-09-26 Nippondenso Co., Ltd. Method of producing semiconductor device with current detecting function
JPH07146722A (ja) * 1993-10-01 1995-06-06 Fuji Electric Co Ltd トランジスタ用過電流保護装置
EP0625797B1 (de) * 1993-05-19 1999-08-11 Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno Integrierte Struktur eines Strom-Fühlwiderstandes für Leistungs-MOSFET-Vorrichtungen, insbesondere für Leistungs-MOSFET-Vorrichtungen mit einer Überstrom-Selbst-Schutzschaltung

Also Published As

Publication number Publication date
EP0691687A2 (de) 1996-01-10
JPH088422A (ja) 1996-01-12
EP1209745B1 (de) 2011-06-08
EP0691687A3 (de) 1997-10-15
EP1209745A2 (de) 2002-05-29
DE69530026T2 (de) 2004-03-04
EP1209745A3 (de) 2005-06-29
JP3226075B2 (ja) 2001-11-05
EP0691687B1 (de) 2003-03-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8327 Change in the person/name/address of the patent owner

Owner name: FUJI ELECTRIC SYSTEMS CO., LTD., TOKYO/TOKIO, JP