DE69529858D1 - Oberflächenbehandlung für Halbleitersubstrat - Google Patents
Oberflächenbehandlung für HalbleitersubstratInfo
- Publication number
- DE69529858D1 DE69529858D1 DE69529858T DE69529858T DE69529858D1 DE 69529858 D1 DE69529858 D1 DE 69529858D1 DE 69529858 T DE69529858 T DE 69529858T DE 69529858 T DE69529858 T DE 69529858T DE 69529858 D1 DE69529858 D1 DE 69529858D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor substrate
- surface treatment
- treatment
- semiconductor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
- 238000004381 surface treatment Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02071—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a delineation, e.g. RIE, of conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
- H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32138—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only pre- or post-treatments, e.g. anti-corrosion processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/963—Removing process residues from vertical substrate surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Detergent Compositions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8251894 | 1994-03-28 | ||
JP06082518A JP3074634B2 (ja) | 1994-03-28 | 1994-03-28 | フォトレジスト用剥離液及び配線パターンの形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69529858D1 true DE69529858D1 (de) | 2003-04-17 |
DE69529858T2 DE69529858T2 (de) | 2004-02-12 |
Family
ID=13776765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69529858T Expired - Lifetime DE69529858T2 (de) | 1994-03-28 | 1995-03-27 | Oberflächenbehandlung für Halbleitersubstrat |
Country Status (5)
Country | Link |
---|---|
US (1) | US5630904A (de) |
EP (1) | EP0680078B1 (de) |
JP (1) | JP3074634B2 (de) |
KR (1) | KR100242144B1 (de) |
DE (1) | DE69529858T2 (de) |
Families Citing this family (75)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3200528B2 (ja) * | 1995-01-19 | 2001-08-20 | 三菱電機株式会社 | ドライエッチングの後処理方法 |
US5767018A (en) * | 1995-11-08 | 1998-06-16 | Advanced Micro Devices, Inc. | Method of etching a polysilicon pattern |
JP3236220B2 (ja) * | 1995-11-13 | 2001-12-10 | 東京応化工業株式会社 | レジスト用剥離液組成物 |
US5648324A (en) * | 1996-01-23 | 1997-07-15 | Ocg Microelectronic Materials, Inc. | Photoresist stripping composition |
US5665688A (en) * | 1996-01-23 | 1997-09-09 | Olin Microelectronics Chemicals, Inc. | Photoresist stripping composition |
US5911836A (en) * | 1996-02-05 | 1999-06-15 | Mitsubishi Gas Chemical Company, Inc. | Method of producing semiconductor device and rinse for cleaning semiconductor device |
JP3755776B2 (ja) * | 1996-07-11 | 2006-03-15 | 東京応化工業株式会社 | リソグラフィー用リンス液組成物及びそれを用いた基板の処理方法 |
JPH1055993A (ja) * | 1996-08-09 | 1998-02-24 | Hitachi Ltd | 半導体素子製造用洗浄液及びそれを用いた半導体素子の製造方法 |
US6030932A (en) * | 1996-09-06 | 2000-02-29 | Olin Microelectronic Chemicals | Cleaning composition and method for removing residues |
US5759973A (en) * | 1996-09-06 | 1998-06-02 | Olin Microelectronic Chemicals, Inc. | Photoresist stripping and cleaning compositions |
US5780406A (en) * | 1996-09-06 | 1998-07-14 | Honda; Kenji | Non-corrosive cleaning composition for removing plasma etching residues |
US5817610A (en) * | 1996-09-06 | 1998-10-06 | Olin Microelectronic Chemicals, Inc. | Non-corrosive cleaning composition for removing plasma etching residues |
US5698503A (en) * | 1996-11-08 | 1997-12-16 | Ashland Inc. | Stripping and cleaning composition |
WO1998022568A1 (en) * | 1996-11-22 | 1998-05-28 | Advanced Chemical Systems International, Inc. | Stripping formulation including catechol, hydroxylamine, non-alkanolamine, water for post plasma ashed wafer cleaning |
JPH10154712A (ja) * | 1996-11-25 | 1998-06-09 | Fujitsu Ltd | 半導体装置の製造方法 |
US6140243A (en) * | 1996-12-12 | 2000-10-31 | Texas Instruments Incorporated | Low temperature process for post-etch defluoridation of metals |
JP4386968B2 (ja) * | 1996-12-24 | 2009-12-16 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | 半導体基板から残留物をストリッピングするための1,3−ジカルボニル化合物キレート剤を含む処方物 |
US5968848A (en) * | 1996-12-27 | 1999-10-19 | Tokyo Ohka Kogyo Co., Ltd. | Process for treating a lithographic substrate and a rinse solution for the treatment |
US6755989B2 (en) | 1997-01-09 | 2004-06-29 | Advanced Technology Materials, Inc. | Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate |
US6896826B2 (en) * | 1997-01-09 | 2005-05-24 | Advanced Technology Materials, Inc. | Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate |
JP2001508239A (ja) * | 1997-01-09 | 2001-06-19 | アドバンスド ケミカル システムズ インターナショナル,インコーポレイテッド | 水性フッ化アンモニウムおよびアミンを用いた、半導体ウエハ洗浄組成物および方法 |
US5882425A (en) * | 1997-01-23 | 1999-03-16 | Semitool, Inc. | Composition and method for passivation of a metallization layer of a semiconductor circuit after metallization etching |
JPH10223615A (ja) * | 1997-02-12 | 1998-08-21 | Nitto Denko Corp | レジスト材と側壁保護膜との一括除去方法 |
SG85093A1 (en) * | 1997-03-07 | 2001-12-19 | Chartered Semiconductor Mfg | Apparatus and method for polymer removal after metal etching in a plasma reactor |
JPH1167632A (ja) * | 1997-08-18 | 1999-03-09 | Mitsubishi Gas Chem Co Inc | 半導体装置用洗浄剤 |
US6012469A (en) * | 1997-09-17 | 2000-01-11 | Micron Technology, Inc. | Etch residue clean |
US6165956A (en) * | 1997-10-21 | 2000-12-26 | Lam Research Corporation | Methods and apparatus for cleaning semiconductor substrates after polishing of copper film |
US6593282B1 (en) * | 1997-10-21 | 2003-07-15 | Lam Research Corporation | Cleaning solutions for semiconductor substrates after polishing of copper film |
US6479443B1 (en) | 1997-10-21 | 2002-11-12 | Lam Research Corporation | Cleaning solution and method for cleaning semiconductor substrates after polishing of copper film |
US6303551B1 (en) | 1997-10-21 | 2001-10-16 | Lam Research Corporation | Cleaning solution and method for cleaning semiconductor substrates after polishing of cooper film |
KR19990059076A (ko) * | 1997-12-30 | 1999-07-26 | 김영환 | 반도체 소자의 금속 배선 부식 방지 방법 |
JP3161521B2 (ja) * | 1998-03-13 | 2001-04-25 | 日本電気株式会社 | 半導体装置の製造方法および洗浄装置 |
US6009888A (en) * | 1998-05-07 | 2000-01-04 | Chartered Semiconductor Manufacturing Company, Ltd. | Photoresist and polymer removal by UV laser aqueous oxidant |
US6310020B1 (en) * | 1998-11-13 | 2001-10-30 | Kao Corporation | Stripping composition for resist |
US6627553B1 (en) | 1998-11-27 | 2003-09-30 | Showa Denko K.K. | Composition for removing side wall and method of removing side wall |
AU1410200A (en) * | 1998-11-27 | 2000-06-19 | Showa Denko Kabushiki Kaisha | Composition for removing sidewall and method of removing sidewall |
GB2349984A (en) * | 1999-03-04 | 2000-11-15 | Ibm | Decontamination of electronic cards from copper salts |
US6287972B1 (en) * | 1999-03-04 | 2001-09-11 | Philips Semiconductor, Inc. | System and method for residue entrapment utilizing a polish and sacrificial fill for semiconductor fabrication |
US6355576B1 (en) * | 1999-04-26 | 2002-03-12 | Vlsi Technology Inc. | Method for cleaning integrated circuit bonding pads |
US6248704B1 (en) | 1999-05-03 | 2001-06-19 | Ekc Technology, Inc. | Compositions for cleaning organic and plasma etched residues for semiconductors devices |
US6344432B1 (en) * | 1999-08-20 | 2002-02-05 | Advanced Technology Materials, Inc. | Formulations including a 1,3-dicarbonyl compound chelating agent and copper corrosion inhibiting agents for stripping residues from semiconductor substrates containing copper structures |
JP3410403B2 (ja) | 1999-09-10 | 2003-05-26 | 東京応化工業株式会社 | ホトレジスト用剥離液およびこれを用いたホトレジスト剥離方法 |
US6413923B2 (en) | 1999-11-15 | 2002-07-02 | Arch Specialty Chemicals, Inc. | Non-corrosive cleaning composition for removing plasma etching residues |
US6207565B1 (en) * | 2000-01-13 | 2001-03-27 | Vlsi Technology, Inc | Integrated process for ashing resist and treating silicon after masked spacer etch |
US6194326B1 (en) * | 2000-04-06 | 2001-02-27 | Micron Technology, In. | Low temperature rinse of etching agents |
WO2002004233A1 (en) | 2000-07-10 | 2002-01-17 | Ekc Technology, Inc. | Compositions for cleaning organic and plasma etched residues for semiconductor devices |
US7456140B2 (en) * | 2000-07-10 | 2008-11-25 | Ekc Technology, Inc. | Compositions for cleaning organic and plasma etched residues for semiconductor devices |
US6566315B2 (en) | 2000-12-08 | 2003-05-20 | Advanced Technology Materials, Inc. | Formulations including a 1,3-dicarbonyl compound chelating agent and copper corrosion inhibiting agents for stripping residues from semiconductor substrates containing copper structures |
US6425956B1 (en) * | 2001-01-05 | 2002-07-30 | International Business Machines Corporation | Process for removing chemical mechanical polishing residual slurry |
US20030022800A1 (en) * | 2001-06-14 | 2003-01-30 | Peters Darryl W. | Aqueous buffered fluoride-containing etch residue removers and cleaners |
KR100399354B1 (ko) * | 2001-08-14 | 2003-09-26 | 삼성전자주식회사 | 금속 배선을 갖는 반도체 소자의 애싱 방법 |
KR20030046868A (ko) * | 2001-12-07 | 2003-06-18 | 주식회사 덕성 | 유기막 제거용 시너 |
KR100536044B1 (ko) * | 2001-12-14 | 2005-12-12 | 삼성전자주식회사 | 신너 조성물 및 이를 사용한 포토레지스트의 스트립핑 방법 |
US20030171239A1 (en) * | 2002-01-28 | 2003-09-11 | Patel Bakul P. | Methods and compositions for chemically treating a substrate using foam technology |
WO2003091376A1 (en) * | 2002-04-24 | 2003-11-06 | Ekc Technology, Inc. | Oxalic acid as a cleaning product for aluminium, copper and dielectric surfaces |
US7252718B2 (en) * | 2002-05-31 | 2007-08-07 | Ekc Technology, Inc. | Forming a passivating aluminum fluoride layer and removing same for use in semiconductor manufacture |
US6849200B2 (en) * | 2002-07-23 | 2005-02-01 | Advanced Technology Materials, Inc. | Composition and process for wet stripping removal of sacrificial anti-reflective material |
US20050089489A1 (en) * | 2003-10-22 | 2005-04-28 | Carter Melvin K. | Composition for exfoliation agent effective in removing resist residues |
US7045455B2 (en) * | 2003-10-23 | 2006-05-16 | Chartered Semiconductor Manufacturing Ltd. | Via electromigration improvement by changing the via bottom geometric profile |
US7192910B2 (en) | 2003-10-28 | 2007-03-20 | Sachem, Inc. | Cleaning solutions and etchants and methods for using same |
KR20070007172A (ko) * | 2004-03-31 | 2007-01-12 | 다다히로 오미 | 회로 기판, 회로 기판의 제조방법 및 회로 기판을 갖춘표시 장치 |
KR100604853B1 (ko) * | 2004-05-15 | 2006-07-26 | 삼성전자주식회사 | 산화막 제거용 식각액 및 그 제조 방법과 반도체 소자의제조 방법 |
JP2005347587A (ja) * | 2004-06-04 | 2005-12-15 | Sony Corp | ドライエッチング後の洗浄液組成物および半導体装置の製造方法 |
US20050279453A1 (en) * | 2004-06-17 | 2005-12-22 | Uvtech Systems, Inc. | System and methods for surface cleaning |
US7682458B2 (en) | 2005-02-03 | 2010-03-23 | Air Products And Chemicals, Inc. | Aqueous based residue removers comprising fluoride |
US7888302B2 (en) * | 2005-02-03 | 2011-02-15 | Air Products And Chemicals, Inc. | Aqueous based residue removers comprising fluoride |
KR100690347B1 (ko) * | 2005-04-09 | 2007-03-09 | 주식회사 엘지화학 | 박리액 조성물, 이를 이용한 박리 방법 및 그 박리 장치 |
TWI622639B (zh) * | 2005-06-07 | 2018-05-01 | 恩特葛瑞斯股份有限公司 | 金屬及介電相容犠牲抗反射塗層清洗及移除組成物 |
TWI339780B (en) * | 2005-07-28 | 2011-04-01 | Rohm & Haas Elect Mat | Stripper |
US8021490B2 (en) * | 2007-01-04 | 2011-09-20 | Eastman Chemical Company | Substrate cleaning processes through the use of solvents and systems |
JP5646882B2 (ja) | 2009-09-30 | 2014-12-24 | 富士フイルム株式会社 | 洗浄組成物、洗浄方法、及び半導体装置の製造方法 |
KR101771978B1 (ko) | 2009-10-20 | 2017-08-28 | 코넬 유니버시티 | 불소 함유 중합체 재료의 패턴형성된 구조를 만드는 방법 및 불소 함유 중합체 |
JP2012255909A (ja) * | 2011-06-09 | 2012-12-27 | Tosoh Corp | レジスト剥離剤及びそれを用いた剥離方法 |
KR20170002933A (ko) | 2015-06-30 | 2017-01-09 | 동우 화인켐 주식회사 | 스트리퍼 조성액 |
CN112310121A (zh) * | 2020-10-22 | 2021-02-02 | Tcl华星光电技术有限公司 | 阵列基板及其制备方法、显示面板 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE405886T1 (de) * | 1989-06-26 | 1991-08-14 | Hashimoto Chemical Industries Co., Ltd., Sakai, Osaka | Oberflaechenbehandlungsmittel fuer praezisionsoberflaechenbehandlung. |
JP2906590B2 (ja) * | 1990-06-14 | 1999-06-21 | 三菱瓦斯化学株式会社 | アルミニウム配線半導体基板の表面処理剤 |
US5244539A (en) * | 1992-01-27 | 1993-09-14 | Ardrox, Inc. | Composition and method for stripping films from printed circuit boards |
JP3048207B2 (ja) * | 1992-07-09 | 2000-06-05 | イー.ケー.シー.テクノロジー.インコーポレイテッド | 還元及び酸化電位を有する求核アミン化合物を含む洗浄剤組成物およびこれを使用した基板の洗浄方法 |
US5378312A (en) * | 1993-12-07 | 1995-01-03 | International Business Machines Corporation | Process for fabricating a semiconductor structure having sidewalls |
-
1994
- 1994-03-28 JP JP06082518A patent/JP3074634B2/ja not_active Expired - Lifetime
-
1995
- 1995-03-27 US US08/410,726 patent/US5630904A/en not_active Expired - Lifetime
- 1995-03-27 EP EP95104508A patent/EP0680078B1/de not_active Expired - Lifetime
- 1995-03-27 DE DE69529858T patent/DE69529858T2/de not_active Expired - Lifetime
- 1995-03-28 KR KR1019950006793A patent/KR100242144B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0680078A2 (de) | 1995-11-02 |
JPH07271056A (ja) | 1995-10-20 |
JP3074634B2 (ja) | 2000-08-07 |
EP0680078B1 (de) | 2003-03-12 |
KR100242144B1 (ko) | 2000-02-01 |
DE69529858T2 (de) | 2004-02-12 |
EP0680078A3 (de) | 1997-10-22 |
KR950034568A (ko) | 1995-12-28 |
US5630904A (en) | 1997-05-20 |
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