DE69508882T2 - Struktur zum Abdichten des Innenumfangs einer Metallmembran - Google Patents

Struktur zum Abdichten des Innenumfangs einer Metallmembran

Info

Publication number
DE69508882T2
DE69508882T2 DE69508882T DE69508882T DE69508882T2 DE 69508882 T2 DE69508882 T2 DE 69508882T2 DE 69508882 T DE69508882 T DE 69508882T DE 69508882 T DE69508882 T DE 69508882T DE 69508882 T2 DE69508882 T2 DE 69508882T2
Authority
DE
Germany
Prior art keywords
sealing
inner circumference
metal membrane
membrane
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69508882T
Other languages
English (en)
Other versions
DE69508882D1 (de
Inventor
Ryutaro Nishimura
Michio Yamaji
Kenji Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Application granted granted Critical
Publication of DE69508882D1 publication Critical patent/DE69508882D1/de
Publication of DE69508882T2 publication Critical patent/DE69508882T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/04—Sealings between relatively-stationary surfaces without packing between the surfaces, e.g. with ground surfaces, with cutting edge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Diaphragms And Bellows (AREA)
  • Details Of Valves (AREA)
DE69508882T 1994-10-17 1995-10-03 Struktur zum Abdichten des Innenumfangs einer Metallmembran Expired - Fee Related DE69508882T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25025694A JP3469331B2 (ja) 1994-10-17 1994-10-17 金属製ダイヤフラムの内周縁部のシール構造

Publications (2)

Publication Number Publication Date
DE69508882D1 DE69508882D1 (de) 1999-05-12
DE69508882T2 true DE69508882T2 (de) 1999-11-04

Family

ID=17205182

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69508882T Expired - Fee Related DE69508882T2 (de) 1994-10-17 1995-10-03 Struktur zum Abdichten des Innenumfangs einer Metallmembran

Country Status (8)

Country Link
US (1) US5624102A (de)
EP (1) EP0708286B1 (de)
JP (1) JP3469331B2 (de)
KR (1) KR0173531B1 (de)
CA (1) CA2160335C (de)
DE (1) DE69508882T2 (de)
IL (1) IL115539A (de)
TW (1) TW310079U (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3291152B2 (ja) * 1995-02-15 2002-06-10 株式会社フジキン ダイヤフラム弁
JP3825517B2 (ja) * 1996-12-17 2006-09-27 独立行政法人産業技術総合研究所 薄膜製造装置用噴霧ノズル弁
US5865423A (en) * 1997-07-11 1999-02-02 Parker Intangibles, Inc. High flow diaphragm valve
US5881997A (en) * 1997-11-24 1999-03-16 Fujikin Incorporated Metal diaphragm type valve
JP3764574B2 (ja) * 1997-12-10 2006-04-12 株式会社フジキン 金属ダイヤフラム型バルブ
FI104854B (fi) * 1998-09-17 2000-04-14 Valmet Automation Inc Läpivientikalvorakenne
AU2003279847A1 (en) * 2002-10-07 2004-05-04 Commvault Systems, Inc. System and method for managing stored data
US7021330B2 (en) * 2003-06-26 2006-04-04 Planar Systems, Inc. Diaphragm valve with reliability enhancements for atomic layer deposition
US6941963B2 (en) * 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition
US6907897B2 (en) * 2003-06-26 2005-06-21 Planar Systems, Inc. Diaphragm valve for high-temperature precursor supply in atomic layer deposition
JP2008032113A (ja) * 2006-07-28 2008-02-14 Koda:Kk ダイヤフラム式バルブ
WO2009113666A1 (ja) * 2008-03-14 2009-09-17 株式会社タクミナ 金属製ダイヤフラム
DE102009023011A1 (de) * 2009-05-28 2010-12-02 G.S. Anderson Gmbh Membranventilkörper
US9157534B2 (en) 2012-07-20 2015-10-13 Itt Manufacturing Enterprises Llc. Two-stud diaphragm for diaphragm valves
US9016307B2 (en) 2012-07-20 2015-04-28 Itt Manufacturing Enterprises Llc. Quick connect, post energized flanged joint for a diaphragm valve
US9322482B2 (en) 2012-07-20 2016-04-26 Itt Manufacturing Enterprises Llc. Temperature compensating flanged joint for a teflon diaphragm valve
KR102207127B1 (ko) 2013-02-01 2021-01-22 스와겔로크 컴패니 용접된 다이어프램 시트 캐리어를 갖는 다이어프램 밸브
US10851898B2 (en) * 2016-09-29 2020-12-01 Hitachi Metals, Ltd. Flow control valve and mass flow controller using the same
CN106704677B (zh) * 2016-12-06 2023-05-30 西安航天动力研究所 一种高强度可变刚度膜片组件
JP7220830B1 (ja) * 2022-09-12 2023-02-10 イハラサイエンス株式会社 ダイヤフラム弁

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1662291A (en) * 1928-03-13 of chicago
DE507717C (de) * 1926-10-15 1930-09-19 Siemens Schuckertwerke Akt Ges Vakuumventil fuer Grossgleichrichter mit einer die Ventilkammer abschliessenden Membran
US2051350A (en) * 1932-07-28 1936-08-18 Union Carbide & Carbon Corp Valve
FR1555586A (de) * 1967-07-31 1969-01-31
US4750709A (en) 1986-05-16 1988-06-14 Nupro Company Diaphragm valve
US4671490A (en) * 1986-05-16 1987-06-09 Nupro Co. Diaphragm valve

Also Published As

Publication number Publication date
EP0708286B1 (de) 1999-04-07
EP0708286A1 (de) 1996-04-24
KR960014730A (ko) 1996-05-22
CA2160335C (en) 1998-08-18
JPH08114265A (ja) 1996-05-07
CA2160335A1 (en) 1996-04-18
IL115539A (en) 1998-12-27
TW310079U (en) 1997-07-01
IL115539A0 (en) 1996-01-19
KR0173531B1 (ko) 1999-04-01
JP3469331B2 (ja) 2003-11-25
DE69508882D1 (de) 1999-05-12
US5624102A (en) 1997-04-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee