IL115539A - Structure for sealing the inner peripheral part of a metal diaphragm - Google Patents

Structure for sealing the inner peripheral part of a metal diaphragm

Info

Publication number
IL115539A
IL115539A IL11553995A IL11553995A IL115539A IL 115539 A IL115539 A IL 115539A IL 11553995 A IL11553995 A IL 11553995A IL 11553995 A IL11553995 A IL 11553995A IL 115539 A IL115539 A IL 115539A
Authority
IL
Israel
Prior art keywords
metallic
diaphragm
inner peripheral
peripheral portion
welding fitting
Prior art date
Application number
IL11553995A
Other languages
English (en)
Hebrew (he)
Other versions
IL115539A0 (en
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of IL115539A0 publication Critical patent/IL115539A0/xx
Publication of IL115539A publication Critical patent/IL115539A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/04—Sealings between relatively-stationary surfaces without packing between the surfaces, e.g. with ground surfaces, with cutting edge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Diaphragms And Bellows (AREA)
  • Details Of Valves (AREA)
IL11553995A 1994-10-17 1995-10-06 Structure for sealing the inner peripheral part of a metal diaphragm IL115539A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25025694A JP3469331B2 (ja) 1994-10-17 1994-10-17 金属製ダイヤフラムの内周縁部のシール構造

Publications (2)

Publication Number Publication Date
IL115539A0 IL115539A0 (en) 1996-01-19
IL115539A true IL115539A (en) 1998-12-27

Family

ID=17205182

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11553995A IL115539A (en) 1994-10-17 1995-10-06 Structure for sealing the inner peripheral part of a metal diaphragm

Country Status (8)

Country Link
US (1) US5624102A (de)
EP (1) EP0708286B1 (de)
JP (1) JP3469331B2 (de)
KR (1) KR0173531B1 (de)
CA (1) CA2160335C (de)
DE (1) DE69508882T2 (de)
IL (1) IL115539A (de)
TW (1) TW310079U (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3291152B2 (ja) * 1995-02-15 2002-06-10 株式会社フジキン ダイヤフラム弁
JP3825517B2 (ja) * 1996-12-17 2006-09-27 独立行政法人産業技術総合研究所 薄膜製造装置用噴霧ノズル弁
US5865423A (en) * 1997-07-11 1999-02-02 Parker Intangibles, Inc. High flow diaphragm valve
US5881997A (en) * 1997-11-24 1999-03-16 Fujikin Incorporated Metal diaphragm type valve
JP3764574B2 (ja) * 1997-12-10 2006-04-12 株式会社フジキン 金属ダイヤフラム型バルブ
FI104854B (fi) * 1998-09-17 2000-04-14 Valmet Automation Inc Läpivientikalvorakenne
EP1579331A4 (de) * 2002-10-07 2007-05-23 Commvault Systems Inc System und verfahren zur verwaltung gespeicherter daten
US6907897B2 (en) * 2003-06-26 2005-06-21 Planar Systems, Inc. Diaphragm valve for high-temperature precursor supply in atomic layer deposition
US7021330B2 (en) * 2003-06-26 2006-04-04 Planar Systems, Inc. Diaphragm valve with reliability enhancements for atomic layer deposition
US6941963B2 (en) * 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition
JP2008032113A (ja) * 2006-07-28 2008-02-14 Koda:Kk ダイヤフラム式バルブ
JP5417317B2 (ja) * 2008-03-14 2014-02-12 株式会社タクミナ 金属製ダイヤフラム
DE102009023011A1 (de) * 2009-05-28 2010-12-02 G.S. Anderson Gmbh Membranventilkörper
US9157534B2 (en) 2012-07-20 2015-10-13 Itt Manufacturing Enterprises Llc. Two-stud diaphragm for diaphragm valves
US9016307B2 (en) 2012-07-20 2015-04-28 Itt Manufacturing Enterprises Llc. Quick connect, post energized flanged joint for a diaphragm valve
US9322482B2 (en) 2012-07-20 2016-04-26 Itt Manufacturing Enterprises Llc. Temperature compensating flanged joint for a teflon diaphragm valve
JP6335926B2 (ja) 2013-02-01 2018-05-30 スウエイジロク・カンパニー 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁
KR102331560B1 (ko) * 2016-09-29 2021-11-26 히타치 긴조쿠 가부시키가이샤 유량 제어 밸브 및 그것을 사용한 질량 유량 제어 장치
CN106704677B (zh) * 2016-12-06 2023-05-30 西安航天动力研究所 一种高强度可变刚度膜片组件
JP7220830B1 (ja) * 2022-09-12 2023-02-10 イハラサイエンス株式会社 ダイヤフラム弁

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1662291A (en) * 1928-03-13 of chicago
DE507717C (de) * 1926-10-15 1930-09-19 Siemens Schuckertwerke Akt Ges Vakuumventil fuer Grossgleichrichter mit einer die Ventilkammer abschliessenden Membran
US2051350A (en) * 1932-07-28 1936-08-18 Union Carbide & Carbon Corp Valve
FR1555586A (de) * 1967-07-31 1969-01-31
US4671490A (en) * 1986-05-16 1987-06-09 Nupro Co. Diaphragm valve
US4750709A (en) 1986-05-16 1988-06-14 Nupro Company Diaphragm valve

Also Published As

Publication number Publication date
DE69508882D1 (de) 1999-05-12
CA2160335C (en) 1998-08-18
EP0708286A1 (de) 1996-04-24
TW310079U (en) 1997-07-01
EP0708286B1 (de) 1999-04-07
KR960014730A (ko) 1996-05-22
US5624102A (en) 1997-04-29
JPH08114265A (ja) 1996-05-07
DE69508882T2 (de) 1999-11-04
CA2160335A1 (en) 1996-04-18
IL115539A0 (en) 1996-01-19
KR0173531B1 (ko) 1999-04-01
JP3469331B2 (ja) 2003-11-25

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Legal Events

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