DE69421422D1 - Piezoelektrische Vorrichtung und ein Gehäuse - Google Patents

Piezoelektrische Vorrichtung und ein Gehäuse

Info

Publication number
DE69421422D1
DE69421422D1 DE69421422T DE69421422T DE69421422D1 DE 69421422 D1 DE69421422 D1 DE 69421422D1 DE 69421422 T DE69421422 T DE 69421422T DE 69421422 T DE69421422 T DE 69421422T DE 69421422 D1 DE69421422 D1 DE 69421422D1
Authority
DE
Germany
Prior art keywords
housing
piezoelectric device
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69421422T
Other languages
English (en)
Other versions
DE69421422T2 (de
Inventor
Yuki Satoh
Toshio Ishizaki
Tsuyoshi Sakaue
Koji Hashimoto
Tohru Yamada
Tomoki Uwano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69421422D1 publication Critical patent/DE69421422D1/de
Publication of DE69421422T2 publication Critical patent/DE69421422T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1071—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the SAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Casings For Electric Apparatus (AREA)
  • Details Of Resistors (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE69421422T 1993-01-25 1994-01-25 Piezoelektrische Vorrichtung und ein Gehäuse Expired - Lifetime DE69421422T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP1012593 1993-01-25
JP7144093 1993-03-30
JP8961193 1993-04-16
JP8961093 1993-04-16

Publications (2)

Publication Number Publication Date
DE69421422D1 true DE69421422D1 (de) 1999-12-09
DE69421422T2 DE69421422T2 (de) 2000-05-11

Family

ID=27455329

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69421422T Expired - Lifetime DE69421422T2 (de) 1993-01-25 1994-01-25 Piezoelektrische Vorrichtung und ein Gehäuse

Country Status (4)

Country Link
US (2) US5589724A (de)
EP (2) EP0608827B1 (de)
JP (1) JPH06350376A (de)
DE (1) DE69421422T2 (de)

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US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
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JP5139766B2 (ja) * 2007-10-15 2013-02-06 日本電波工業株式会社 圧電デバイス及び圧電デバイスの製造方法
US8151640B1 (en) 2008-02-05 2012-04-10 Hrl Laboratories, Llc MEMS on-chip inertial navigation system with error correction
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US9679779B2 (en) * 2011-03-30 2017-06-13 The Aerospace Corporation Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same
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US9250074B1 (en) 2013-04-12 2016-02-02 Hrl Laboratories, Llc Resonator assembly comprising a silicon resonator and a quartz resonator
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
JP5955300B2 (ja) * 2013-11-13 2016-07-20 田中貴金属工業株式会社 貫通電極を用いた多層基板の製造方法
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
US10291200B2 (en) * 2014-07-02 2019-05-14 The Royal Institution For The Advancement Of Learning / Mcgill University Methods and devices for microelectromechanical resonators
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
JP6455587B2 (ja) * 2015-02-26 2019-01-23 株式会社大真空 圧電振動デバイス
US10110198B1 (en) 2015-12-17 2018-10-23 Hrl Laboratories, Llc Integrated quartz MEMS tuning fork resonator/oscillator
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
US20170330855A1 (en) * 2016-05-13 2017-11-16 Taiwan Semiconductor Manufacturing Company, Ltd. System and Method for Immersion Bonding
JP6822380B2 (ja) * 2017-11-02 2021-01-27 Tdk株式会社 振動デバイス
WO2021003755A1 (zh) * 2019-07-09 2021-01-14 成都泰美克晶体技术有限公司 一种边缘具有凸台结构的抛光石英晶体频率片
CN114536158B (zh) * 2022-01-19 2023-03-31 宁波云德半导体材料有限公司 一种刻蚀机反应腔的石英窗的加工方法

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Also Published As

Publication number Publication date
EP0930659A3 (de) 1999-12-01
DE69421422T2 (de) 2000-05-11
EP0930659A2 (de) 1999-07-21
EP0608827B1 (de) 1999-11-03
EP0608827A3 (de) 1996-02-21
JPH06350376A (ja) 1994-12-22
EP0608827A2 (de) 1994-08-03
US5847489A (en) 1998-12-08
US5589724A (en) 1996-12-31

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8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP