DE69401855D1 - Piezoelektrische Anordnung - Google Patents

Piezoelektrische Anordnung

Info

Publication number
DE69401855D1
DE69401855D1 DE69401855T DE69401855T DE69401855D1 DE 69401855 D1 DE69401855 D1 DE 69401855D1 DE 69401855 T DE69401855 T DE 69401855T DE 69401855 T DE69401855 T DE 69401855T DE 69401855 D1 DE69401855 D1 DE 69401855D1
Authority
DE
Germany
Prior art keywords
piezoelectric arrangement
piezoelectric
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69401855T
Other languages
English (en)
Other versions
DE69401855T2 (de
Inventor
Natsumi Shimogawa
Koji Kimura
Yukihisa Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Seiko Epson Corp
Original Assignee
NGK Insulators Ltd
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd, Seiko Epson Corp filed Critical NGK Insulators Ltd
Publication of DE69401855D1 publication Critical patent/DE69401855D1/de
Application granted granted Critical
Publication of DE69401855T2 publication Critical patent/DE69401855T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
DE69401855T 1993-06-08 1994-06-08 Piezoelektrische Anordnung Expired - Lifetime DE69401855T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16394593A JP3318687B2 (ja) 1993-06-08 1993-06-08 圧電／電歪膜型素子及びその製造方法

Publications (2)

Publication Number Publication Date
DE69401855D1 true DE69401855D1 (de) 1997-04-10
DE69401855T2 DE69401855T2 (de) 1997-07-31

Family

ID=15783811

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69401855T Expired - Lifetime DE69401855T2 (de) 1993-06-08 1994-06-08 Piezoelektrische Anordnung

Country Status (6)

Country Link
US (1) US6584660B1 (de)
EP (1) EP0629007B1 (de)
JP (1) JP3318687B2 (de)
DE (1) DE69401855T2 (de)
HK (1) HK117197A (de)
SG (1) SG66279A1 (de)

Families Citing this family (79)

* Cited by examiner, † Cited by third party
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JP3501860B2 (ja) * 1994-12-21 2004-03-02 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
FR2730362A1 (fr) * 1995-02-06 1996-08-09 Thomson Csf Transducteur en materiau a transformation electromecanique, application a des microactionneurs et procede de realisation
JP3439570B2 (ja) * 1995-05-08 2003-08-25 日本碍子株式会社 ダイヤフラム構造体
JP3465427B2 (ja) * 1995-07-28 2003-11-10 ソニー株式会社 圧電アクチュエーター及びその製造方法
JP3432974B2 (ja) * 1995-10-13 2003-08-04 日本碍子株式会社 圧電／電歪膜型素子
JPH11191645A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 圧電／電歪膜型アクチュエータ
US6335586B1 (en) * 1998-12-28 2002-01-01 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
JP2000348321A (ja) 1999-06-03 2000-12-15 Nec Corp 磁気ディスク装置，磁気ヘッド，磁気ヘッドの製造方法および磁気ディスク装置の製造方法
US6915547B2 (en) 1999-10-01 2005-07-12 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
US7164221B1 (en) 1999-10-01 2007-01-16 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
EP1089355B1 (de) * 1999-10-01 2006-11-22 Ngk Insulators, Ltd. Piezoelektrisches/elektrostriktives Bauelement
JP4032283B2 (ja) * 2000-03-27 2008-01-16 富士フイルム株式会社 マルチノズルインクジェットヘッド及びその製造方法
JP3768789B2 (ja) * 2000-09-07 2006-04-19 アルプス電気株式会社 超音波振動子及びウエット処理用ノズル並びにウエット処理装置
JP3465675B2 (ja) * 2000-09-11 2003-11-10 日本碍子株式会社 圧電／電歪膜型素子
WO2002037073A1 (fr) * 2000-11-06 2002-05-10 Toyoda Koki Kabushiki Kaisha Capteur de grandeur mecanique, capteur de charge, capteur d'acceleration et capteur de pression
WO2002073710A1 (fr) 2001-03-12 2002-09-19 Ngk Insulators,Ltd. Actionneur a films piezo-electriques/electrostrictifs et son procede de fabrication
US6794723B2 (en) * 2001-09-12 2004-09-21 Ngk Insulators, Ltd. Matrix type piezoelectric/electrostrictive device and manufacturing method thereof
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JP2004064067A (ja) * 2002-07-26 2004-02-26 Ngk Insulators Ltd 圧電／電歪膜型素子
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JP4422973B2 (ja) * 2002-08-27 2010-03-03 京セラ株式会社 積層圧電体、アクチュエータ及び印刷ヘッド
US6987348B2 (en) * 2002-12-13 2006-01-17 Palo Alto Research Center Inc. Piezoelectric transducers
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WO2004063689A1 (ja) * 2003-01-16 2004-07-29 Matsushita Electric Industrial Co., Ltd. 感圧センサ及び物体検出装置
US7270404B2 (en) * 2003-09-24 2007-09-18 Fujifilm Corporation Inkjet recording head, inkjet recording apparatus and method for manufacturing inkjet recording head
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JP2005104038A (ja) * 2003-09-30 2005-04-21 Fuji Photo Film Co Ltd 吐出ヘッド及び液吐出装置
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US7449816B2 (en) * 2005-03-25 2008-11-11 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator, liquid transporting apparatus, and method for producing piezoelectric actuator and method for producing liquid transporting apparatus
JP4630998B2 (ja) * 2005-05-31 2011-02-09 独立行政法人産業技術総合研究所 スピーカ装置又はマイクロフォン装置
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JP2007276479A (ja) * 2006-04-06 2007-10-25 Oce Technol Bv プリントヘッド及びこれを含むインクジェットプリンタ
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US7608983B2 (en) * 2006-07-18 2009-10-27 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator, liquid transporting apparatus, and liquid-droplet jetting apparatus
JP5223255B2 (ja) * 2006-07-18 2013-06-26 ブラザー工業株式会社 圧電アクチュエータ、液体移送装置、及び、液滴噴射装置
US7950782B2 (en) * 2006-12-21 2011-05-31 Seiko Epson Corporation Droplet discharging head, energy converter, piezoelectric device, MEMS structure, cantilever actuator, piezoelectric sensor, and piezoelectric linear motor
US7851970B2 (en) * 2006-12-22 2010-12-14 The Charles Stark Draper Laboratory, Inc. Structures for crystal packaging including flexible membranes
US20080246367A1 (en) * 2006-12-29 2008-10-09 Adaptivenergy, Llc Tuned laminated piezoelectric elements and methods of tuning same
US7786653B2 (en) * 2007-07-03 2010-08-31 Northrop Grumman Systems Corporation MEMS piezoelectric switch
US7854497B2 (en) 2007-10-30 2010-12-21 Hewlett-Packard Development Company, L.P. Fluid ejection device
US8379888B2 (en) * 2008-01-18 2013-02-19 National Taiwan University Flexible piezoelectric sound-generating devices
WO2009119707A1 (ja) * 2008-03-26 2009-10-01 日本碍子株式会社 液滴吐出装置及び液滴吐出装置の製造方法
EP2342083B1 (de) * 2008-09-30 2019-05-22 Fujifilm Dimatix, Inc. Steuerung von geschwindigkeit durch eine düse
US20110242168A1 (en) * 2008-09-30 2011-10-06 Fujifilm Corporation Method for Nozzle Velocity Control
JP2010143205A (ja) * 2008-12-22 2010-07-01 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びにアクチュエータ装置
US8525279B2 (en) * 2009-06-04 2013-09-03 University Of Louisville Research Foundation, Inc. Single element three terminal piezoresistive pressure sensor
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US8484823B2 (en) * 2009-08-28 2013-07-16 The Charles Stark Draper Laboratory, Inc. Methods and apparatus for mounting a crystal
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JP5677780B2 (ja) * 2010-07-28 2015-02-25 日本セラミック株式会社 超音波送受信器
KR20120080882A (ko) * 2011-01-10 2012-07-18 삼성전자주식회사 음향 변환기 및 그 구동방법
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US20130342488A1 (en) * 2012-06-26 2013-12-26 Kent Displays Incorporated Cholesteric liquid crystal writing tablet erased by a piezoelectric transducer
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WO2015131083A1 (en) * 2014-02-28 2015-09-03 The Regents Of The University Of California Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut)
JP2016033970A (ja) 2014-07-31 2016-03-10 セイコーエプソン株式会社 超音波デバイスおよびその製造方法並びにプローブおよび電子機器
JP2017019168A (ja) * 2015-07-09 2017-01-26 東芝テック株式会社 インクジェットヘッドとその製造方法
US10888897B2 (en) 2016-10-27 2021-01-12 Cts Corporation Transducer, transducer array, and method of making the same
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
WO2018207578A1 (ja) * 2017-05-09 2018-11-15 富士フイルム株式会社 圧電マイクロフォンチップおよび圧電マイクロフォン
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
US10699741B1 (en) * 2019-01-08 2020-06-30 International Business Machines Corporation Multi-channel magnetic recording head having compliantly encapsulated transducers
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JP2022047304A (ja) * 2020-09-11 2022-03-24 株式会社リコー 液体吐出ヘッドおよび液体を吐出する装置
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Also Published As

Publication number Publication date
US6584660B1 (en) 2003-07-01
EP0629007A1 (de) 1994-12-14
EP0629007B1 (de) 1997-03-05
DE69401855T2 (de) 1997-07-31
JPH06350155A (ja) 1994-12-22
HK117197A (en) 1997-09-05
SG66279A1 (en) 1999-07-20
JP3318687B2 (ja) 2002-08-26

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