JP5955300B2 - 貫通電極を用いた多層基板の製造方法 - Google Patents
貫通電極を用いた多層基板の製造方法 Download PDFInfo
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- JP5955300B2 JP5955300B2 JP2013234562A JP2013234562A JP5955300B2 JP 5955300 B2 JP5955300 B2 JP 5955300B2 JP 2013234562 A JP2013234562 A JP 2013234562A JP 2013234562 A JP2013234562 A JP 2013234562A JP 5955300 B2 JP5955300 B2 JP 5955300B2
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- 239000000758 substrate Substances 0.000 title claims description 91
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 124
- 239000002184 metal Substances 0.000 claims description 124
- 239000000843 powder Substances 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 27
- 230000035515 penetration Effects 0.000 claims description 26
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 16
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 14
- 238000005245 sintering Methods 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 8
- 229910052697 platinum Inorganic materials 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- 229910052763 palladium Inorganic materials 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 7
- 239000004332 silver Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 229910001080 W alloy Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 description 23
- 230000008569 process Effects 0.000 description 14
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- 238000004544 sputter deposition Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
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- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
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- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical compound ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
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- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000010665 pine oil Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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- 229940116411 terpineol Drugs 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00301—Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/007—Interconnections between the MEMS and external electrical signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/09—Packages
- B81B2207/091—Arrangements for connecting external electrical signals to mechanical structures inside the package
- B81B2207/094—Feed-through, via
- B81B2207/095—Feed-through, via through the lid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/033—Thermal bonding
- B81C2203/037—Thermal bonding techniques not provided for in B81C2203/035 - B81C2203/036
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Geometry (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Micromachines (AREA)
Description
Claims (3)
- 貫通電極を備える基板と、他の基板とを接合することで多層基板を製造する方法であって、
前記貫通電極は、
基板に設けられた貫通孔を貫通する貫通部と、
前記貫通部の少なくとも一方の端部に形成され、貫通電極よりも幅広の凸状バンプ部と、
前記凸状バンプ部の前記基板との接触面上に形成される少なくとも1層の金属膜と、からなるものであり、
前記貫通電極部及び前記凸状バンプ部は、純度が99.9重量%以上であり、平均粒径が0.005μm〜1.0μmである金、銀、パラジウム、白金から選択される一種以上の金属粉末が焼結してなる焼結体より形成されたものであり、
前記金属膜は、純度が99.9重量%以上の金、銀、パラジウム、白金のいずれかよりなり、
前記金属膜の厚さを、0.005〜2.0μmとし、
前記他の基板と前記基板とを重ねて配置し、80〜300℃に加熱しながら、一方向又は双方向から30〜300MPaで加圧し、前記貫通電極を緻密化させる多層基板の製造方法。 - 凸状バンプ部の直径を、貫通部に対して1.5〜10倍とする請求項1記載の多層基板の製造方法。
- 金属膜と基板との間に、チタン、クロム、タングステン、チタン−タングステン合金、ニッケルのいずれかよりなる下地膜を備える請求項1又は請求項2記載の多層基板の製造方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013234562A JP5955300B2 (ja) | 2013-11-13 | 2013-11-13 | 貫通電極を用いた多層基板の製造方法 |
TW103138152A TWI541949B (zh) | 2013-11-13 | 2014-11-04 | 貫穿電極及使用該貫穿電極的多層基板的製造方法 |
PCT/JP2014/079710 WO2015072422A1 (ja) | 2013-11-13 | 2014-11-10 | 貫通電極及び該貫通電極を用いた多層基板の製造方法 |
ES14861471T ES2698621T3 (es) | 2013-11-13 | 2014-11-10 | Electrodo pasante y método para producir un sustrato multicapa utilizando el electrodo pasante |
CN201480061896.2A CN105723506B (zh) | 2013-11-13 | 2014-11-10 | 使用贯通电极的多层基板的制造方法 |
US15/035,882 US20160272488A1 (en) | 2013-11-13 | 2014-11-10 | Through electrode and method for producing multilayer substrate using through electrode |
KR1020167013369A KR101832639B1 (ko) | 2013-11-13 | 2014-11-10 | 관통 전극 및 당해 관통 전극을 사용한 다층 기판의 제조 방법 |
EP14861471.2A EP3070738B1 (en) | 2013-11-13 | 2014-11-10 | Through electrode and method for producing multilayer substrate using through electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013234562A JP5955300B2 (ja) | 2013-11-13 | 2013-11-13 | 貫通電極を用いた多層基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2015095572A JP2015095572A (ja) | 2015-05-18 |
JP5955300B2 true JP5955300B2 (ja) | 2016-07-20 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013234562A Active JP5955300B2 (ja) | 2013-11-13 | 2013-11-13 | 貫通電極を用いた多層基板の製造方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20160272488A1 (ja) |
EP (1) | EP3070738B1 (ja) |
JP (1) | JP5955300B2 (ja) |
KR (1) | KR101832639B1 (ja) |
CN (1) | CN105723506B (ja) |
ES (1) | ES2698621T3 (ja) |
TW (1) | TWI541949B (ja) |
WO (1) | WO2015072422A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6682235B2 (ja) * | 2014-12-24 | 2020-04-15 | 日東電工株式会社 | 加熱接合用シート、及び、ダイシングテープ付き加熱接合用シート |
JP6630053B2 (ja) * | 2015-03-25 | 2020-01-15 | スタンレー電気株式会社 | 電子デバイスの製造方法 |
JP6491032B2 (ja) | 2015-04-24 | 2019-03-27 | スタンレー電気株式会社 | 抵抗器の製造方法、および、抵抗器 |
JP6348534B2 (ja) * | 2016-04-21 | 2018-06-27 | 田中貴金属工業株式会社 | 貫通孔の封止構造及び封止方法、並びに、貫通孔を封止するための転写基板 |
JP6738760B2 (ja) * | 2017-04-13 | 2020-08-12 | 田中貴金属工業株式会社 | 貫通孔の封止構造及び封止方法、並びに、貫通孔を封止するための転写基板 |
CN109524483B (zh) * | 2018-11-26 | 2021-05-28 | 西安交通大学 | 多粒径复合导电银浆电极的高频微振网络化密实方法 |
JP7314515B2 (ja) * | 2019-01-28 | 2023-07-26 | 株式会社レゾナック | 電子部品装置を製造する方法 |
JP2022101851A (ja) * | 2020-12-25 | 2022-07-07 | 田中貴金属工業株式会社 | インターポーザ基板及び該インターポーザ基板を用いたデバイスの製造方法 |
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JPH06350376A (ja) * | 1993-01-25 | 1994-12-22 | Matsushita Electric Ind Co Ltd | 気密封止された圧電デバイスおよび気密封止パッケージ |
JP2001102756A (ja) * | 1999-09-28 | 2001-04-13 | Kyocera Corp | 多層配線基板及びその製造方法 |
JP2001102766A (ja) * | 1999-09-30 | 2001-04-13 | Oki Electric Ind Co Ltd | ストッパ機構 |
JP2005109515A (ja) | 2004-11-10 | 2005-04-21 | Fujikura Ltd | 微細孔金属充填基板 |
JP2009152496A (ja) * | 2007-12-21 | 2009-07-09 | Fujikura Ltd | プリント配線板の製造方法 |
JP5400543B2 (ja) * | 2009-09-24 | 2014-01-29 | 田中貴金属工業株式会社 | 回路基板の貫通電極の形成方法 |
JP4795488B1 (ja) | 2011-01-18 | 2011-10-19 | パナソニック株式会社 | 配線基板、配線基板の製造方法、及びビアペースト |
JP2013206765A (ja) * | 2012-03-29 | 2013-10-07 | Tanaka Kikinzoku Kogyo Kk | ダイボンド用導電性ペースト及び該導電性ペーストによるダイボンド方法 |
JP6003194B2 (ja) * | 2012-04-27 | 2016-10-05 | セイコーエプソン株式会社 | ベース基板、電子デバイスおよびベース基板の製造方法 |
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CN105723506A (zh) | 2016-06-29 |
WO2015072422A1 (ja) | 2015-05-21 |
TWI541949B (zh) | 2016-07-11 |
EP3070738A1 (en) | 2016-09-21 |
KR101832639B1 (ko) | 2018-02-26 |
EP3070738A4 (en) | 2017-06-21 |
ES2698621T3 (es) | 2019-02-05 |
US20160272488A1 (en) | 2016-09-22 |
TW201535628A (zh) | 2015-09-16 |
CN105723506B (zh) | 2018-09-14 |
EP3070738B1 (en) | 2018-11-07 |
JP2015095572A (ja) | 2015-05-18 |
KR20160074001A (ko) | 2016-06-27 |
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