JP7314515B2 - 電子部品装置を製造する方法 - Google Patents
電子部品装置を製造する方法 Download PDFInfo
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- JP7314515B2 JP7314515B2 JP2019012401A JP2019012401A JP7314515B2 JP 7314515 B2 JP7314515 B2 JP 7314515B2 JP 2019012401 A JP2019012401 A JP 2019012401A JP 2019012401 A JP2019012401 A JP 2019012401A JP 7314515 B2 JP7314515 B2 JP 7314515B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 6
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- 239000002184 metal Substances 0.000 claims description 50
- 239000002923 metal particle Substances 0.000 claims description 37
- 239000002243 precursor Substances 0.000 claims description 33
- 238000005245 sintering Methods 0.000 claims description 20
- 239000007791 liquid phase Substances 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 15
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- 230000007704 transition Effects 0.000 claims description 10
- 239000011230 binding agent Substances 0.000 claims description 8
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- 238000011049 filling Methods 0.000 claims description 3
- 238000002844 melting Methods 0.000 description 17
- 230000008018 melting Effects 0.000 description 17
- 239000002904 solvent Substances 0.000 description 11
- -1 copper-tin metal compound Chemical class 0.000 description 10
- 239000003822 epoxy resin Substances 0.000 description 10
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 10
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- 239000002245 particle Substances 0.000 description 7
- 238000007639 printing Methods 0.000 description 7
- 229910052718 tin Inorganic materials 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
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- 239000007864 aqueous solution Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 239000003566 sealing material Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 229930185605 Bisphenol Natural products 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
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- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 230000000930 thermomechanical effect Effects 0.000 description 3
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- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 2
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- ZEYHEAKUIGZSGI-UHFFFAOYSA-N 4-methoxybenzoic acid Chemical compound COC1=CC=C(C(O)=O)C=C1 ZEYHEAKUIGZSGI-UHFFFAOYSA-N 0.000 description 2
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- CPUBMKFFRRFXIP-YPAXQUSRSA-N (9z,33z)-dotetraconta-9,33-dienediamide Chemical compound NC(=O)CCCCCCC\C=C/CCCCCCCCCCCCCCCCCCCCCC\C=C/CCCCCCCC(N)=O CPUBMKFFRRFXIP-YPAXQUSRSA-N 0.000 description 1
- LAVARTIQQDZFNT-UHFFFAOYSA-N 1-(1-methoxypropan-2-yloxy)propan-2-yl acetate Chemical compound COCC(C)OCC(C)OC(C)=O LAVARTIQQDZFNT-UHFFFAOYSA-N 0.000 description 1
- BNHGVULTSGNVIX-UHFFFAOYSA-N 1-(2-ethoxyethoxy)ethanol Chemical compound CCOCCOC(C)O BNHGVULTSGNVIX-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- IBLKWZIFZMJLFL-UHFFFAOYSA-N 1-phenoxypropan-2-ol Chemical compound CC(O)COC1=CC=CC=C1 IBLKWZIFZMJLFL-UHFFFAOYSA-N 0.000 description 1
- 229940114072 12-hydroxystearic acid Drugs 0.000 description 1
- WCOXQTXVACYMLM-UHFFFAOYSA-N 2,3-bis(12-hydroxyoctadecanoyloxy)propyl 12-hydroxyoctadecanoate Chemical compound CCCCCCC(O)CCCCCCCCCCC(=O)OCC(OC(=O)CCCCCCCCCCC(O)CCCCCC)COC(=O)CCCCCCCCCCC(O)CCCCCC WCOXQTXVACYMLM-UHFFFAOYSA-N 0.000 description 1
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- WMDZKDKPYCNCDZ-UHFFFAOYSA-N 2-(2-butoxypropoxy)propan-1-ol Chemical compound CCCCOC(C)COC(C)CO WMDZKDKPYCNCDZ-UHFFFAOYSA-N 0.000 description 1
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- GZMAAYIALGURDQ-UHFFFAOYSA-N 2-(2-hexoxyethoxy)ethanol Chemical compound CCCCCCOCCOCCO GZMAAYIALGURDQ-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- XYVAYAJYLWYJJN-UHFFFAOYSA-N 2-(2-propoxypropoxy)propan-1-ol Chemical compound CCCOC(C)COC(C)CO XYVAYAJYLWYJJN-UHFFFAOYSA-N 0.000 description 1
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- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 description 1
- JINGUCXQUOKWKH-UHFFFAOYSA-N 2-aminodecanoic acid Chemical compound CCCCCCCCC(N)C(O)=O JINGUCXQUOKWKH-UHFFFAOYSA-N 0.000 description 1
- WBJWXIQDBDZMAW-UHFFFAOYSA-N 2-hydroxynaphthalene-1-carbonyl chloride Chemical compound C1=CC=CC2=C(C(Cl)=O)C(O)=CC=C21 WBJWXIQDBDZMAW-UHFFFAOYSA-N 0.000 description 1
- ORVCATCRRUXRCE-UHFFFAOYSA-N 2-iodooxybenzoic acid Chemical compound OC(=O)C1=CC=CC=C1OI ORVCATCRRUXRCE-UHFFFAOYSA-N 0.000 description 1
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- NFWKVWVWBFBAOV-UHFFFAOYSA-N Dehydroabietic acid Natural products OC(=O)C1(C)CCCC2(C)C3=CC=C(C(C)C)C=C3CCC21 NFWKVWVWBFBAOV-UHFFFAOYSA-N 0.000 description 1
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Description
Claims (2)
- 開口を有するマスクレジストを回路部材上に形成する工程と、
前記開口に、複数の金属粒子及び該複数の金属粒子が分散した有機バインダーを含有するピラー前駆体を充填する工程と、
前記ピラー前駆体を焼結し、それにより金属ピラーを形成する工程と、
前記マスクレジストを除去する工程と、
をこの順に備え、
前記金属ピラーのアスペクト比h/wが2以上10以下であり、hが前記金属ピラーの高さで、wが前記金属ピラーの最大幅であり、wが5~50μmであり、
前記ピラー前駆体が焼結されたときに、前記複数の金属粒子が、遷移的液相焼結により金属焼結体を形成し、それにより前記金属焼結体を含む前記金属ピラーが形成され、
前記有機バインダーが熱可塑性樹脂を含み、前記熱可塑性樹脂が、前記複数の金属粒子の液相転移温度よりも低い軟化点を有する、
電子部品装置を製造する方法。 - 前記ピラー前駆体を200~300℃に加熱することによって焼結する、請求項1に記載の方法。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006302929A (ja) | 2005-04-15 | 2006-11-02 | Matsushita Electric Ind Co Ltd | 電子部品接続用突起電極とそれを用いた電子部品実装体およびそれらの製造方法 |
JP2008140834A (ja) | 2006-11-30 | 2008-06-19 | Matsushita Electric Ind Co Ltd | 導電性バンプとその形成方法およびそれを用いた半導体装置 |
JP2012124427A (ja) | 2010-12-10 | 2012-06-28 | Panasonic Corp | 電子部品の製造方法および半導体装置の製造方法 |
WO2015072422A1 (ja) | 2013-11-13 | 2015-05-21 | 田中貴金属工業株式会社 | 貫通電極及び該貫通電極を用いた多層基板の製造方法 |
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