DE69418062D1 - Herstellungsverfahren einer elektronemittierenden Vorrichtung - Google Patents

Herstellungsverfahren einer elektronemittierenden Vorrichtung

Info

Publication number
DE69418062D1
DE69418062D1 DE69418062T DE69418062T DE69418062D1 DE 69418062 D1 DE69418062 D1 DE 69418062D1 DE 69418062 T DE69418062 T DE 69418062T DE 69418062 T DE69418062 T DE 69418062T DE 69418062 D1 DE69418062 D1 DE 69418062D1
Authority
DE
Germany
Prior art keywords
electron
manufacturing
emitting device
electroconductive film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69418062T
Other languages
English (en)
Other versions
DE69418062T2 (de
Inventor
Yoshinori Tomida
Hisaaki Kawade
Masahito Niibe
Toshikazu Ohnishi
Yoshimasa Okamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP34547793A external-priority patent/JP2961485B2/ja
Priority claimed from JP34547893A external-priority patent/JP3185080B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69418062D1 publication Critical patent/DE69418062D1/de
Application granted granted Critical
Publication of DE69418062T2 publication Critical patent/DE69418062T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165—Surface conduction emission type cathodes
DE69418062T 1993-12-22 1994-12-21 Herstellungsverfahren einer elektronemittierenden Vorrichtung Expired - Lifetime DE69418062T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP34547793A JP2961485B2 (ja) 1993-12-22 1993-12-22 電子放出素子及び画像形成装置の製造方法並びに電子放出素子の製造に用いる転写体
JP34547893A JP3185080B2 (ja) 1993-12-22 1993-12-22 電子放出素子、電子源及びそれを用いた画像形成装置の製造方法

Publications (2)

Publication Number Publication Date
DE69418062D1 true DE69418062D1 (de) 1999-05-27
DE69418062T2 DE69418062T2 (de) 1999-12-09

Family

ID=26578029

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69427340T Expired - Lifetime DE69427340T2 (de) 1993-12-22 1994-12-21 Herstellungsverfahren einer oberflächenleitenden elektronenemittierenden Vorrichtung und Bilderzeugungsgerät
DE69418062T Expired - Lifetime DE69418062T2 (de) 1993-12-22 1994-12-21 Herstellungsverfahren einer elektronemittierenden Vorrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69427340T Expired - Lifetime DE69427340T2 (de) 1993-12-22 1994-12-21 Herstellungsverfahren einer oberflächenleitenden elektronenemittierenden Vorrichtung und Bilderzeugungsgerät

Country Status (5)

Country Link
US (1) US6063453A (de)
EP (2) EP0740324B1 (de)
AT (2) ATE201791T1 (de)
CA (1) CA2138736C (de)
DE (2) DE69427340T2 (de)

Families Citing this family (21)

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US5831387A (en) 1994-05-20 1998-11-03 Canon Kabushiki Kaisha Image forming apparatus and a method for manufacturing the same
JP3267464B2 (ja) * 1994-05-20 2002-03-18 キヤノン株式会社 画像形成装置
EP0736890B1 (de) * 1995-04-04 2002-07-31 Canon Kabushiki Kaisha Metallenthaltende Zusammensetzung zum Bilden einer elektronenemittierenden Vorrichtung und Verfahren zur Herstellung einer elektronenemittierenden Vorrichtung, einer Elektronenquelle und eines Bilderzeugungsgerätes
EP1124247A1 (de) * 1995-04-04 2001-08-16 Canon Kabushiki Kaisha Metallenthaltende Zusammensetzung zum Erzeugen einer elektronenemittierenden Vorrichtung und Verfahren zur Herstellung einer elektronenemittierenden Vorrichtung, einer Elektronenquelle und eines Bilderzeugungsgerätes
JP3302278B2 (ja) 1995-12-12 2002-07-15 キヤノン株式会社 電子放出素子の製造方法並びに該製造方法を用いた電子源及び画像形成装置の製造方法
CN1115708C (zh) * 1996-04-26 2003-07-23 佳能株式会社 电子发射器件、电子源和图像形成装置的制造方法
US5810980A (en) * 1996-11-06 1998-09-22 Borealis Technical Limited Low work-function electrode
CN1161814C (zh) 1997-09-16 2004-08-11 佳能株式会社 电子源与图象形成装置的制造方法,以及电子源制造装置
EP0908916B1 (de) * 1997-09-16 2004-01-07 Canon Kabushiki Kaisha Verfahren zur Herstellung einer Elektronenquelle und Vorrichtung zur Herstellung einer Elektronenquelle
JP2000309734A (ja) 1999-02-17 2000-11-07 Canon Inc インクジェット用インク、導電性膜、電子放出素子、電子源および画像形成装置の製造方法
JP3437519B2 (ja) 1999-02-25 2003-08-18 キヤノン株式会社 電子放出素子の製造方法および調整方法
TW476073B (en) * 1999-12-09 2002-02-11 Ebara Corp Solution containing metal component, method of and apparatus for forming thin metal film
KR100448663B1 (ko) * 2000-03-16 2004-09-13 캐논 가부시끼가이샤 화상표시장치의 제조방법 및 제조장치
US6743395B2 (en) * 2000-03-22 2004-06-01 Ebara Corporation Composite metallic ultrafine particles and process for producing the same
JP5290488B2 (ja) 2000-09-28 2013-09-18 プレジデント アンド フェロウズ オブ ハーバード カレッジ 酸化物、ケイ酸塩及びリン酸塩の気相成長
JP3703448B2 (ja) * 2001-09-27 2005-10-05 キヤノン株式会社 電子放出素子、電子源基板、表示装置及び電子放出素子の製造方法
JP2003109494A (ja) 2001-09-28 2003-04-11 Canon Inc 電子源の製造方法
JP3902998B2 (ja) * 2001-10-26 2007-04-11 キヤノン株式会社 電子源及び画像形成装置の製造方法
US7138157B2 (en) * 2002-07-30 2006-11-21 Canon Kabushiki Kaisha Electron emitting device manufacture method and image display apparatus manufacture method
US7858145B2 (en) * 2004-08-31 2010-12-28 Canon Kabushiki Kaisha Method of manufacturing electroconductive member pattern, and methods of manufacturing electron source and image displaying apparatus each using the same
CN102466822B (zh) * 2010-11-04 2013-09-04 中国石油天然气集团公司 一种海洋电磁勘探四极互组合布极方法

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FR2083740A5 (en) * 1970-03-20 1971-12-17 Thomson Csf Laser applied surface film
US3978247A (en) * 1974-01-28 1976-08-31 Rca Corporation Transfer recording process
US4543270A (en) * 1984-06-20 1985-09-24 Gould Inc. Method for depositing a micron-size metallic film on a transparent substrate utilizing a visible laser
US4957851A (en) * 1985-04-16 1990-09-18 Canon Kabushiki Kaisha Image recording medium comprising a diacetylene derivative compound film and a radiation absorbing layer
US4743463A (en) * 1986-02-21 1988-05-10 Eastman Kodak Company Method for forming patterns on a substrate or support
JPS6382788A (ja) * 1986-09-26 1988-04-13 Matsushita Electric Ind Co Ltd 通電転写記録体
US4970196A (en) * 1987-01-15 1990-11-13 The Johns Hopkins University Method and apparatus for the thin film deposition of materials with a high power pulsed laser
US4948623A (en) * 1987-06-30 1990-08-14 International Business Machines Corporation Method of chemical vapor deposition of copper, silver, and gold using a cyclopentadienyl/metal complex
US5136212A (en) * 1988-02-18 1992-08-04 Canon Kabushiki Kaisha Electron emitting device, electron generator employing said electron emitting device, and method for driving said generator
JP2630988B2 (ja) * 1988-05-26 1997-07-16 キヤノン株式会社 電子線発生装置
JP2805326B2 (ja) * 1989-03-22 1998-09-30 キヤノン株式会社 電子源及びそれを用いた画像形成装置
JP3000467B2 (ja) * 1990-03-09 2000-01-17 キヤノン株式会社 マルチ電子源及び画像形成装置
US4987006A (en) * 1990-03-26 1991-01-22 Amp Incorporated Laser transfer deposition
JPH0465050A (ja) * 1990-07-03 1992-03-02 Canon Inc 表面伝導形電子放出素子の製造方法
JPH04147888A (ja) * 1990-10-11 1992-05-21 Fuji Xerox Co Ltd 通電昇華型記録媒体及び記録方法
US5139818A (en) * 1991-06-06 1992-08-18 General Motors Corporation Method for applying metal catalyst patterns onto ceramic for electroless copper deposition
GB9118721D0 (en) * 1991-09-02 1991-10-16 Era Patents Ltd Production of fine points
JPH0799791B2 (ja) * 1992-04-15 1995-10-25 インターナショナル・ビジネス・マシーンズ・コーポレイション 透明基板上の回路ライン接続方法
US5376409B1 (en) * 1992-12-21 1997-06-03 Univ New York State Res Found Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials

Also Published As

Publication number Publication date
ATE201791T1 (de) 2001-06-15
ATE179276T1 (de) 1999-05-15
EP0740324A3 (de) 1996-11-06
EP0740324B1 (de) 1999-04-21
US6063453A (en) 2000-05-16
DE69418062T2 (de) 1999-12-09
DE69427340T2 (de) 2001-10-31
EP0660359B1 (de) 2001-05-30
CA2138736C (en) 2000-05-23
EP0660359A3 (de) 1995-07-26
EP0740324A2 (de) 1996-10-30
DE69427340D1 (de) 2001-07-05
CA2138736A1 (en) 1995-06-23
EP0660359A2 (de) 1995-06-28

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