ATE369620T1 - Verfahren zur herstellung einer elektronenemittierende vorrichtung, einer elektronenquelle, und eines bilderzeugungsgerätes - Google Patents

Verfahren zur herstellung einer elektronenemittierende vorrichtung, einer elektronenquelle, und eines bilderzeugungsgerätes

Info

Publication number
ATE369620T1
ATE369620T1 AT95306857T AT95306857T ATE369620T1 AT E369620 T1 ATE369620 T1 AT E369620T1 AT 95306857 T AT95306857 T AT 95306857T AT 95306857 T AT95306857 T AT 95306857T AT E369620 T1 ATE369620 T1 AT E369620T1
Authority
AT
Austria
Prior art keywords
electron
image
emitting
emitting device
emitting region
Prior art date
Application number
AT95306857T
Other languages
English (en)
Inventor
Sotomitsu Ikeda
Masato Yamanobe
Ichiro Nomura
Hidetoshi Suzuki
Yoshikazu Banno
Takeo Tsukamoto
Shinichi Kawate
Toshihiko Takeda
Keisuke Yamamoto
Kazuhiro Sando
Yasuhiro Hamamoto
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP25907594A external-priority patent/JP2872591B2/ja
Priority claimed from JP6321157A external-priority patent/JP2903291B2/ja
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE369620T1 publication Critical patent/ATE369620T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165—Surface conduction emission type cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Nitrogen Condensed Heterocyclic Rings (AREA)
AT95306857T 1994-09-29 1995-09-28 Verfahren zur herstellung einer elektronenemittierende vorrichtung, einer elektronenquelle, und eines bilderzeugungsgerätes ATE369620T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25907594A JP2872591B2 (ja) 1994-09-29 1994-09-29 電子放出素子、電子源、及びそれを用いた画像形成装置と、それらの製造方法
JP6321157A JP2903291B2 (ja) 1994-12-01 1994-12-01 電子放出素子、電子源、及びそれを用いた画像形成装置と、それらの製造方法

Publications (1)

Publication Number Publication Date
ATE369620T1 true ATE369620T1 (de) 2007-08-15

Family

ID=26543951

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95306857T ATE369620T1 (de) 1994-09-29 1995-09-28 Verfahren zur herstellung einer elektronenemittierende vorrichtung, einer elektronenquelle, und eines bilderzeugungsgerätes

Country Status (8)

Country Link
US (1) US5861227A (de)
EP (1) EP0704875B1 (de)
KR (1) KR100220135B1 (de)
CN (1) CN1115706C (de)
AT (1) ATE369620T1 (de)
AU (1) AU710589B2 (de)
CA (1) CA2159292C (de)
DE (1) DE69535550T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3241251B2 (ja) * 1994-12-16 2001-12-25 キヤノン株式会社 電子放出素子の製造方法及び電子源基板の製造方法
KR100220133B1 (ko) * 1995-03-13 1999-09-01 미따라이 하지메 전자 방출 소자, 전자원 및 화상 형성 장치와 그 제조방법
JPH10308166A (ja) * 1997-03-04 1998-11-17 Pioneer Electron Corp 電子放出素子及びこれを用いた表示装置
JP3352385B2 (ja) 1997-03-21 2002-12-03 キヤノン株式会社 電子源基板およびそれを用いた電子装置の製造方法
JP2000306496A (ja) 1999-02-17 2000-11-02 Canon Inc 電子放出素子、電子源、画像形成装置及びそれらの製造方法
JP3518854B2 (ja) * 1999-02-24 2004-04-12 キヤノン株式会社 電子源および画像形成装置の製造方法、ならびにそれらの製造装置
JP3768908B2 (ja) * 2001-03-27 2006-04-19 キヤノン株式会社 電子放出素子、電子源、画像形成装置
JP3647436B2 (ja) * 2001-12-25 2005-05-11 キヤノン株式会社 電子放出素子、電子源、画像表示装置、及び電子放出素子の製造方法
US7335879B2 (en) * 2004-08-16 2008-02-26 Hermes-Microvision, Inc. System and method for sample charge control
JP2009076240A (ja) * 2007-09-19 2009-04-09 Canon Inc 電子放出装置及びこれを用いた画像表示装置
JP5620846B2 (ja) * 2011-02-16 2014-11-05 スタンレー電気株式会社 半導体発光装置およびその製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3735186A (en) * 1971-03-10 1973-05-22 Philips Corp Field emission cathode
US4324854A (en) * 1980-03-03 1982-04-13 California Institute Of Technology Deposition of metal films and clusters by reactions of compounds with low energy electrons on surfaces
DE3752249T2 (de) * 1986-07-04 1999-07-08 Canon Kk Elektronen emittierende Vorrichtung
US5066883A (en) * 1987-07-15 1991-11-19 Canon Kabushiki Kaisha Electron-emitting device with electron-emitting region insulated from electrodes
JP2614048B2 (ja) * 1987-07-15 1997-05-28 キヤノン株式会社 電子放出素子の製造方法およびその製造装置
JPS6431332A (en) * 1987-07-28 1989-02-01 Canon Kk Electron beam generating apparatus and its driving method
JP2715312B2 (ja) * 1988-01-18 1998-02-18 キヤノン株式会社 電子放出素子及びその製造方法、及び該電子放出素子を用いた画像表示装置
JP2678757B2 (ja) * 1988-01-18 1997-11-17 キヤノン株式会社 電子放出素子およびその製造方法
US5023110A (en) * 1988-05-02 1991-06-11 Canon Kabushiki Kaisha Process for producing electron emission device
JP2610160B2 (ja) * 1988-05-10 1997-05-14 キヤノン株式会社 画像表示装置
JP2782224B2 (ja) * 1989-03-30 1998-07-30 キヤノン株式会社 画像形成装置の駆動方法
US5320703A (en) * 1991-05-09 1994-06-14 Canon Kabushiki Kaisha Process for forming gold crystal film
CA2137721C (en) * 1993-12-14 2000-10-17 Hidetoshi Suzuki Electron source and production thereof, and image-forming apparatus and production thereof

Also Published As

Publication number Publication date
CA2159292C (en) 2000-12-12
KR960012181A (ko) 1996-04-20
AU3294295A (en) 1996-04-18
KR100220135B1 (ko) 1999-09-01
CA2159292A1 (en) 1996-03-30
CN1115706C (zh) 2003-07-23
DE69535550T2 (de) 2008-04-30
CN1126367A (zh) 1996-07-10
EP0704875A1 (de) 1996-04-03
US5861227A (en) 1999-01-19
DE69535550D1 (de) 2007-09-20
AU710589B2 (en) 1999-09-23
EP0704875B1 (de) 2007-08-08

Similar Documents

Publication Publication Date Title
DE69532690D1 (de) Verfahren zur Herstellung einer Elektronen-emittierenden Einrichtung sowie einer Elektronenquelle und eines Bilderzeugungsgerätes mit derartigen Elektronen-emittierenden Einrichtungen
ATE181620T1 (de) Verfahren zur herstellung einer elektronen- emittierenden vorrichtung und elektronenquelle sowie einer bilderzeugungsvorrichtung
ATE369620T1 (de) Verfahren zur herstellung einer elektronenemittierende vorrichtung, einer elektronenquelle, und eines bilderzeugungsgerätes
ATE171562T1 (de) Elektronenquelle und bilderzeugungsvorrichtung und verfahren zur herstellung
DE69233508D1 (de) Bilderzeugungsgerät und -Verfahren zur Herstellung von Mikrovorrichtungen
DE69425230D1 (de) Herstellungsverfahren einer Elektronen emittierenden Vorrichtung, einer Elektronenquelle und eine Bilderzeugungsvorrichtung
ATE179276T1 (de) Herstellungsverfahren einer elektronemittierenden vorrichtung
ATE196814T1 (de) Bilderzeugungsgerät
DE69414898D1 (de) Licht emittierende Vorrichtung und Verfahren zu ihrer Herstellung
DE69622261T2 (de) Verfahren zur herstellung einer struktur unter verwendung von wiederablagerung
ATE171563T1 (de) Bilderzeugungsgerät
JP2005100919A (ja) カーボンナノチューブ電子放出源の製造方法
EP0719649A3 (de) Bilderzeugungsgerät mit einer Vorrichtung wobei die lichtemittierende Fläche einstellbar sind
TW223697B (en) Process of making thin film magnetic head
JPH0617550Y2 (ja) 発光ダイオードプリントヘッド
JPS60154268A (ja) 画像記録方法
GB2185653A (en) Image recording method
TW353770B (en) Electric conductive polymeric material for electron beam photolithography techniques
CA2282898A1 (en) Electron-emitting device and method of manufacturing the same as well as electron source and image forming apparatus comprising such electron-emitting devices
JPS60154267A (ja) 画像記録方法
JPS6357265A (ja) Ｌｅｄアレイヘツドによる光書込み方法
KR980005151A (ko) 이중노광장치에 의한 녹색 형광체 노광방법
JPS63249671A (ja) 画像光露光装置
JPS61256548A (ja) カラ−ブラウン管用シヤドウマスク

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties