DE69416654T2 - Vibrationskreisel - Google Patents

Vibrationskreisel

Info

Publication number
DE69416654T2
DE69416654T2 DE69416654T DE69416654T DE69416654T2 DE 69416654 T2 DE69416654 T2 DE 69416654T2 DE 69416654 T DE69416654 T DE 69416654T DE 69416654 T DE69416654 T DE 69416654T DE 69416654 T2 DE69416654 T2 DE 69416654T2
Authority
DE
Germany
Prior art keywords
vibratory gyroscope
vibratory
gyroscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69416654T
Other languages
English (en)
Other versions
DE69416654D1 (de
Inventor
Kiyoshi Iwai
Jyunichi Hashimoto
Takeshi Nakamura
Yoshiaki Heinouchi
Akira Kumada
Yoshio Kawai
Tsuguji Kanbayashi
Atushi Morikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5321843A external-priority patent/JPH07174567A/ja
Priority claimed from JP6060250A external-priority patent/JPH07243857A/ja
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69416654D1 publication Critical patent/DE69416654D1/de
Publication of DE69416654T2 publication Critical patent/DE69416654T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69416654T 1993-12-21 1994-12-21 Vibrationskreisel Expired - Fee Related DE69416654T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5321843A JPH07174567A (ja) 1993-12-21 1993-12-21 振動ジャイロ
JP6060250A JPH07243857A (ja) 1994-03-04 1994-03-04 振動ジャイロ

Publications (2)

Publication Number Publication Date
DE69416654D1 DE69416654D1 (de) 1999-04-01
DE69416654T2 true DE69416654T2 (de) 1999-09-16

Family

ID=26401321

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69423014T Expired - Fee Related DE69423014T2 (de) 1993-12-21 1994-12-21 Vibrationskreisel
DE69416654T Expired - Fee Related DE69416654T2 (de) 1993-12-21 1994-12-21 Vibrationskreisel

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69423014T Expired - Fee Related DE69423014T2 (de) 1993-12-21 1994-12-21 Vibrationskreisel

Country Status (3)

Country Link
US (1) US5668316A (de)
EP (2) EP0660081B1 (de)
DE (2) DE69423014T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3045053B2 (ja) * 1995-10-11 2000-05-22 株式会社村田製作所 振動ジャイロ
US6367326B1 (en) 1996-07-10 2002-04-09 Wacoh Corporation Angular velocity sensor
EP1132712A4 (de) * 1999-09-10 2006-05-17 Matsushita Electric Ind Co Ltd Drehgeschwindigkeitssensor
JP4654480B2 (ja) * 2000-03-17 2011-03-23 パナソニック株式会社 角速度センサ
JP4701505B2 (ja) 2001-01-29 2011-06-15 パナソニック株式会社 慣性トランスデューサ
US20040129078A1 (en) * 2001-06-18 2004-07-08 Kicher Thomas P. Acceleration transducer and method
US6880399B1 (en) * 2001-11-29 2005-04-19 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
EP2947422B1 (de) * 2001-11-29 2018-07-11 Panasonic Intellectual Property Management Co., Ltd. Winkelgeschwindigkeitsmesser
US6711951B2 (en) * 2002-03-22 2004-03-30 Kicher & Co. Acceleration measurement system and method
DE10241512A1 (de) * 2002-04-30 2003-11-13 Continental Teves Ag & Co Ohg Halteelement für Fahrzeugsensoren
JP4590853B2 (ja) * 2003-10-17 2010-12-01 パナソニック株式会社 回転率センサおよび多軸検出型回転率センサ
JP2005214878A (ja) * 2004-01-30 2005-08-11 Sony Corp 角速度センサ
JP2005331258A (ja) * 2004-05-18 2005-12-02 Denso Corp 振動型角速度センサ
US20060061035A1 (en) * 2004-09-21 2006-03-23 Hasbro, Inc. Board game with gyroscopic top timer
JP4492432B2 (ja) * 2005-05-13 2010-06-30 株式会社デンソー 物理量センサ装置の製造方法
JP4919750B2 (ja) * 2006-09-27 2012-04-18 富士通株式会社 マイクロ構造体製造方法およびマイクロ構造体
JP2008256570A (ja) * 2007-04-05 2008-10-23 Fujitsu Media Device Kk 角速度センサ
US20080285250A1 (en) 2007-05-15 2008-11-20 Honeywell International, Inc. Packaging assembly for an optical chip in a gyroscopic unit
CN100439864C (zh) * 2007-06-01 2008-12-03 北京沃尔康科技有限责任公司 一种新型硅微机械陀螺
DE102010001023A1 (de) * 2010-01-19 2011-07-21 Robert Bosch GmbH, 70469 Sensorvorrichtung
JP5737848B2 (ja) * 2010-03-01 2015-06-17 セイコーエプソン株式会社 センサーデバイス、センサーデバイスの製造方法、モーションセンサー及びモーションセンサーの製造方法
WO2012005062A1 (ja) 2010-07-06 2012-01-12 日立オートモーティブシステムズ株式会社 慣性センサ
US8693204B2 (en) 2011-01-10 2014-04-08 Apple Inc. Electronic devices having multi-purpose cowling structures and a compass mounted on a flex circuit
CN102278983B (zh) * 2011-07-22 2014-03-26 上海交通大学 具有三角形振子的硅微陀螺仪及其制作方法
CN102980584B (zh) 2011-09-02 2017-12-19 深圳市大疆创新科技有限公司 一种无人飞行器惯性测量模块
WO2016161562A1 (en) 2015-04-07 2016-10-13 SZ DJI Technology Co., Ltd. System and method for providing a simple and reliable inertia measurement unit (imu)
JP6545918B1 (ja) * 2019-05-22 2019-07-17 Imv株式会社 加速度センサコアユニット、加速度センサを載置する基板のたわみを防止する方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH057835Y2 (de) * 1986-06-10 1993-02-26
US5130600A (en) * 1989-06-02 1992-07-14 Mitsubishi Petrochemical Co., Ltd. Acceleration sensor
US5345822A (en) * 1991-06-28 1994-09-13 Murata Manufacturing Co., Ltd. Vibratory gyroscope having a support member
JP3036145B2 (ja) * 1991-08-12 2000-04-24 株式会社村田製作所 振動ジャイロ
JPH05164775A (ja) * 1991-12-17 1993-06-29 Atsugi Unisia Corp 加速度センサ

Also Published As

Publication number Publication date
US5668316A (en) 1997-09-16
EP0807802B1 (de) 2000-02-09
EP0807802A1 (de) 1997-11-19
DE69423014T2 (de) 2000-08-31
EP0660081B1 (de) 1999-02-24
DE69416654D1 (de) 1999-04-01
EP0660081A1 (de) 1995-06-28
DE69423014D1 (de) 2000-03-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee