DE69606747T2 - Beschleunigungssensor - Google Patents

Beschleunigungssensor

Info

Publication number
DE69606747T2
DE69606747T2 DE69606747T DE69606747T DE69606747T2 DE 69606747 T2 DE69606747 T2 DE 69606747T2 DE 69606747 T DE69606747 T DE 69606747T DE 69606747 T DE69606747 T DE 69606747T DE 69606747 T2 DE69606747 T2 DE 69606747T2
Authority
DE
Germany
Prior art keywords
acceleration sensor
acceleration
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69606747T
Other languages
English (en)
Other versions
DE69606747D1 (de
Inventor
Takayuki Kaneko
Takeshi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69606747D1 publication Critical patent/DE69606747D1/de
Application granted granted Critical
Publication of DE69606747T2 publication Critical patent/DE69606747T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE69606747T 1995-09-11 1996-08-30 Beschleunigungssensor Expired - Lifetime DE69606747T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07232935A JP3119135B2 (ja) 1995-09-11 1995-09-11 加速度センサ

Publications (2)

Publication Number Publication Date
DE69606747D1 DE69606747D1 (de) 2000-03-30
DE69606747T2 true DE69606747T2 (de) 2000-07-06

Family

ID=16947162

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69606747T Expired - Lifetime DE69606747T2 (de) 1995-09-11 1996-08-30 Beschleunigungssensor

Country Status (4)

Country Link
US (1) US5792953A (de)
EP (1) EP0764850B1 (de)
JP (1) JP3119135B2 (de)
DE (1) DE69606747T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5969249A (en) * 1997-05-07 1999-10-19 The Regents Of The University Of California Resonant accelerometer with flexural lever leverage system
JP3545269B2 (ja) * 1998-09-04 2004-07-21 日本碍子株式会社 質量センサ及び質量検出方法
JP2000097707A (ja) * 1998-09-18 2000-04-07 Fujitsu Ltd 加速度センサ
JP2000180250A (ja) 1998-10-09 2000-06-30 Ngk Insulators Ltd 質量センサ及び質量検出方法
JP4779423B2 (ja) * 2005-04-26 2011-09-28 パナソニック株式会社 振動型圧電加速度センサ素子とこれを用いた振動型圧電加速度センサ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2606886B1 (fr) * 1979-09-14 1990-03-16 Onera (Off Nat Aerospatiale) Dispositif resonateur a frequence variable
US4321500A (en) * 1979-12-17 1982-03-23 Paroscientific, Inc. Longitudinal isolation system for flexurally vibrating force transducers
US4658174A (en) * 1986-03-20 1987-04-14 The Singer Company-Kearfott Division Vibrating beam force transducer with angled isolator springs
FR2606288A1 (fr) * 1986-11-06 1988-05-13 Raulin Herve Systeme de retour automatique des balles sur une aire d'entrainement de golf
IL80550A0 (en) * 1986-11-07 1987-02-27 Israel Aircraft Ind Ltd Resonant element force transducer for acceleration sensing
JP3158176B2 (ja) * 1991-06-10 2001-04-23 日本航空電子工業株式会社 振動子型加速度計
DE69423667T2 (de) * 1993-03-01 2000-11-23 Murata Manufacturing Co Piezoelektrischer Vibrator und diesen verwendenden Beschleunigungssensor
JPH06314948A (ja) * 1993-04-28 1994-11-08 Murata Mfg Co Ltd 圧電振動子

Also Published As

Publication number Publication date
EP0764850A1 (de) 1997-03-26
DE69606747D1 (de) 2000-03-30
JP3119135B2 (ja) 2000-12-18
EP0764850B1 (de) 2000-02-23
JPH0980069A (ja) 1997-03-28
US5792953A (en) 1998-08-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition