DE69621372T2 - Vibrationskreisel - Google Patents

Vibrationskreisel

Info

Publication number
DE69621372T2
DE69621372T2 DE69621372T DE69621372T DE69621372T2 DE 69621372 T2 DE69621372 T2 DE 69621372T2 DE 69621372 T DE69621372 T DE 69621372T DE 69621372 T DE69621372 T DE 69621372T DE 69621372 T2 DE69621372 T2 DE 69621372T2
Authority
DE
Germany
Prior art keywords
vibration gyro
gyro
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69621372T
Other languages
English (en)
Other versions
DE69621372D1 (de
Inventor
Akira Kumada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69621372D1 publication Critical patent/DE69621372D1/de
Publication of DE69621372T2 publication Critical patent/DE69621372T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
DE69621372T 1995-04-03 1996-03-27 Vibrationskreisel Expired - Lifetime DE69621372T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7103003A JPH08278146A (ja) 1995-04-03 1995-04-03 振動ジャイロ

Publications (2)

Publication Number Publication Date
DE69621372D1 DE69621372D1 (de) 2002-07-04
DE69621372T2 true DE69621372T2 (de) 2002-10-17

Family

ID=14342497

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69621372T Expired - Lifetime DE69621372T2 (de) 1995-04-03 1996-03-27 Vibrationskreisel

Country Status (4)

Country Link
US (1) US5912528A (de)
EP (1) EP0744593B1 (de)
JP (1) JPH08278146A (de)
DE (1) DE69621372T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6192756B1 (en) * 1998-02-12 2001-02-27 Ngk Insulators, Ltd. Vibrators vibratory gyroscopes a method of detecting a turning angular rate and a linear accelerometer
JP2000009469A (ja) * 1998-06-18 2000-01-14 Fujitsu Ltd 圧電ジャイロおよびその駆動方法
US6457358B1 (en) 1999-03-18 2002-10-01 Board Of Regents Of The University Of Nebraska Tubular coriolis force driven piezoelectric gyroscope system, and method of use
US6777857B1 (en) 1999-03-18 2004-08-17 Board Of Regents Of The University Of Nebraska Piezoelectric gyroscope system, and method of use
JP2002228449A (ja) * 2001-01-29 2002-08-14 Murata Mfg Co Ltd 振動ジャイロの製造方法
US7639104B1 (en) * 2007-03-09 2009-12-29 Silicon Clocks, Inc. Method for temperature compensation in MEMS resonators with isolated regions of distinct material
US7956517B1 (en) 2007-05-10 2011-06-07 Silicon Laboratories MEMS structure having a stress inverter temperature-compensated resonator member
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
US7944124B1 (en) * 2008-08-29 2011-05-17 Silicon Laboratories Inc. MEMS structure having a stress-inducer temperature-compensated resonator member
WO2012081457A1 (ja) * 2010-12-15 2012-06-21 株式会社村田製作所 振動ジャイロ
US9000656B2 (en) * 2011-03-15 2015-04-07 Qualcomm Mems Technologies, Inc. Microelectromechanical system device including a metal proof mass and a piezoelectric component
WO2013039125A1 (ja) * 2011-09-12 2013-03-21 日本電気株式会社 圧電振動センサ

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2271200A (en) * 1939-07-19 1942-01-27 Bell Telephone Labor Inc Wave filter
US2412438A (en) * 1943-10-12 1946-12-10 Premier Crystal Lab Inc Piezo-crystal holder
US2438708A (en) * 1945-09-14 1948-03-30 Walter E Kuenstler Crystal holder
US3520195A (en) * 1965-10-11 1970-07-14 Gen Electric Solid state angular velocity sensing device
US4431935A (en) * 1981-09-15 1984-02-14 Rockwell International Corporation Sensor structure incorporating multiple piezoelectric generators
US4799385A (en) * 1987-07-10 1989-01-24 Sundstrand Data Control, Inc. Angular rate sensor with phase shift correction
US5012174A (en) * 1988-06-20 1991-04-30 Sperry Marine Inc. Method and apparatus for countering vibrations of a platform
US5349857A (en) * 1988-08-12 1994-09-27 Murata Manufacturing Co., Ltd. Vibratory gyroscope
US5117148A (en) * 1989-11-07 1992-05-26 Murata Manufacturing Co., Ltd. Vibrator
ES2056580T3 (es) * 1990-05-18 1994-10-01 British Aerospace Sensores inerciales.
EP0692698B1 (de) * 1991-06-07 1998-05-13 Mitsubishi Electric Corporation Schwingungssteuerungsgerät
EP0520468B1 (de) * 1991-06-26 1996-06-05 Murata Manufacturing Co., Ltd. Vibrationskreisel
US5345822A (en) * 1991-06-28 1994-09-13 Murata Manufacturing Co., Ltd. Vibratory gyroscope having a support member
JP2643686B2 (ja) * 1991-10-09 1997-08-20 赤井電機株式会社 振動ジャイロ
JP3151927B2 (ja) * 1992-04-10 2001-04-03 株式会社村田製作所 加速度センサ
JPH05312579A (ja) * 1992-05-08 1993-11-22 Murata Mfg Co Ltd ジャイロコンパス
EP0579974B1 (de) * 1992-06-29 1996-09-04 Murata Manufacturing Co., Ltd. Driftunterdrückungsschaltung für Gyrometer
JPH06147902A (ja) * 1992-11-04 1994-05-27 Murata Mfg Co Ltd 振動ジャイロ
JPH06147899A (ja) * 1992-11-06 1994-05-27 Toyota Central Res & Dev Lab Inc 角速度検出装置
JP3016986B2 (ja) * 1993-02-17 2000-03-06 三菱電機株式会社 振動ジャイロ用検出回路
JPH06300567A (ja) * 1993-02-22 1994-10-28 Murata Mfg Co Ltd ジャイロ出力検出方法
JPH0762616B2 (ja) * 1993-03-08 1995-07-05 株式会社村田製作所 振動ジャイロ
US5430342A (en) * 1993-04-27 1995-07-04 Watson Industries, Inc. Single bar type vibrating element angular rate sensor system
US5400269A (en) * 1993-09-20 1995-03-21 Rockwell International Corporation Closed-loop baseband controller for a rebalance loop of a quartz angular rate sensor
JP2819493B2 (ja) * 1993-10-04 1998-10-30 僖良 中村 圧電デバイス
JP3170977B2 (ja) * 1993-10-12 2001-05-28 株式会社村田製作所 振動子の駆動検出回路

Also Published As

Publication number Publication date
EP0744593B1 (de) 2002-05-29
JPH08278146A (ja) 1996-10-22
US5912528A (en) 1999-06-15
EP0744593A2 (de) 1996-11-27
DE69621372D1 (de) 2002-07-04
EP0744593A3 (de) 1997-08-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition