DE69403926T2 - Verfahren und Vorrichtung zur selektiven Elektroplattierung von gelochtem Metall oder metallisierten Gegenständen - Google Patents

Verfahren und Vorrichtung zur selektiven Elektroplattierung von gelochtem Metall oder metallisierten Gegenständen

Info

Publication number
DE69403926T2
DE69403926T2 DE69403926T DE69403926T DE69403926T2 DE 69403926 T2 DE69403926 T2 DE 69403926T2 DE 69403926 T DE69403926 T DE 69403926T DE 69403926 T DE69403926 T DE 69403926T DE 69403926 T2 DE69403926 T2 DE 69403926T2
Authority
DE
Germany
Prior art keywords
products
photoresist layer
electroplating
perforated metal
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69403926T
Other languages
English (en)
Other versions
DE69403926D1 (de
Inventor
Joerg Werner Rischke
Sprang Wilhelmus Gijsbertu Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meco Equipment Engineers BV
Original Assignee
Meco Equipment Engineers BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meco Equipment Engineers BV filed Critical Meco Equipment Engineers BV
Publication of DE69403926D1 publication Critical patent/DE69403926D1/de
Application granted granted Critical
Publication of DE69403926T2 publication Critical patent/DE69403926T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • C25D5/022Electroplating of selected surface areas using masking means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/243Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D13/00Electrophoretic coating characterised by the process
    • C25D13/22Servicing or operating apparatus or multistep processes
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/46Electroplating: Baths therefor from solutions of silver
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10742Details of leads
    • H05K2201/10886Other details
    • H05K2201/10924Leads formed from a punched metal foil
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/13Moulding and encapsulation; Deposition techniques; Protective layers
    • H05K2203/1333Deposition techniques, e.g. coating
    • H05K2203/135Electrophoretic deposition of insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0091Apparatus for coating printed circuits using liquid non-metallic coating compositions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/202Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using self-supporting metal foil pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/241Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • ing And Chemical Polishing (AREA)
  • Lead Frames For Integrated Circuits (AREA)
DE69403926T 1993-01-28 1994-01-17 Verfahren und Vorrichtung zur selektiven Elektroplattierung von gelochtem Metall oder metallisierten Gegenständen Expired - Lifetime DE69403926T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL9300174A NL9300174A (nl) 1993-01-28 1993-01-28 Werkwijze en inrichting voor het langs electrolytische weg plaatselijk aanbrengen van metaalbedekkingen op van openingen voorziene metalen of gemetalliseerde producten.

Publications (2)

Publication Number Publication Date
DE69403926D1 DE69403926D1 (de) 1997-07-31
DE69403926T2 true DE69403926T2 (de) 1998-01-02

Family

ID=19861992

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69403926T Expired - Lifetime DE69403926T2 (de) 1993-01-28 1994-01-17 Verfahren und Vorrichtung zur selektiven Elektroplattierung von gelochtem Metall oder metallisierten Gegenständen

Country Status (11)

Country Link
US (2) US5512154A (de)
EP (1) EP0616052B1 (de)
JP (1) JP2780920B2 (de)
KR (1) KR100314946B1 (de)
AT (1) ATE154835T1 (de)
DE (1) DE69403926T2 (de)
HK (1) HK1000135A1 (de)
MY (1) MY110836A (de)
NL (1) NL9300174A (de)
SG (1) SG48345A1 (de)
TW (1) TW410818U (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005031948B3 (de) * 2005-07-08 2006-06-14 Höllmüller Maschinenbau GmbH Vorrichtungen und Verfahren zur elektrolytischen Behandlung von Folien von Rolle zu Rolle
EP1409772B2 (de) 2001-07-20 2008-08-13 Imo Ingo Müller E.K. Verfahren zur selektiven galvanisierung eines bandartigen, metallischen trägermaterials

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US5609995A (en) * 1995-08-30 1997-03-11 Micron Technology, Inc. Method for forming a thin uniform layer of resist for lithography
US5925410A (en) * 1997-05-06 1999-07-20 Micron Technology, Inc. Vibration-enhanced spin-on film techniques for semiconductor device processing
US5985123A (en) * 1997-07-09 1999-11-16 Koon; Kam Kwan Continuous vertical plating system and method of plating
TW522455B (en) * 1998-11-09 2003-03-01 Ebara Corp Plating method and apparatus therefor
EP1071000A1 (de) * 1999-07-23 2001-01-24 Damian Rickenbach Verfahren zur Oberflächengestaltung von Uhrwerkteilen
US7147765B2 (en) * 2001-08-31 2006-12-12 Semitool, Inc. Apparatus and method for deposition of an electrophoretic emulsion
US20040055893A1 (en) * 2002-09-23 2004-03-25 Applied Materials, Inc. Wafer backside electrical contact for electrochemical deposition and electrochemical mechanical polishing
JP4836628B2 (ja) * 2006-03-27 2011-12-14 株式会社中央製作所 長尺シートのめっき方法及び装置
US7887687B2 (en) * 2006-08-22 2011-02-15 Deere & Company Method and system for coating a workpiece
DE102007009671A1 (de) * 2007-02-28 2008-09-04 Hirschmann Automotive Gmbh Verfahren zum Ummanteln von mehreren Stanzgittern
NL1035265C2 (nl) * 2008-04-07 2009-10-08 Meco Equip Eng Werkwijze en inrichting voor het elektrolytisch galvaniseren van niet-metallische glasachtige substraten.
KR101268297B1 (ko) * 2011-07-12 2013-05-28 주식회사 에이에스티젯텍 스트립 형태 부품의 이송용 벨트
KR101288347B1 (ko) * 2011-09-29 2013-07-22 주식회사 에이에스티젯텍 스트립 형태 부품의 이송용 벨트
JP6736395B2 (ja) * 2016-07-12 2020-08-05 ヒロセ電機株式会社 端子製造方法、コネクタ製造方法、端子製造装置およびコネクタ製造装置
US20180088628A1 (en) * 2016-09-28 2018-03-29 Intel Corporation Leadframe for surface mounted contact fingers
JP2021021126A (ja) * 2019-07-30 2021-02-18 三共株式会社 メッキ治具及びメッキ方法
CN111455438B (zh) * 2020-03-11 2022-07-15 贵州振华群英电器有限公司(国营第八九一厂) 一种继电器基座局部电镀夹具
CN113652733A (zh) * 2021-08-18 2021-11-16 刘智 一种用于集成电路生产可节省电镀材料的电路板镀银设备

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US3471389A (en) * 1966-08-26 1969-10-07 Du Pont Electrocoating process wherein the initial amperage surge is controlled
NL170027C (nl) * 1971-05-25 1982-09-16 Galentan Ag Verbetering van een om een vaste as draaibare elektrolyt-verdeelinrichting.
US3879277A (en) * 1973-04-27 1975-04-22 Armco Steel Corp Method and apparatus for electropainting small articles
DE2324834C2 (de) * 1973-05-17 1978-09-07 Dr. Eugen Duerrwaechter Doduco, 7530 Pforzheim Vorrichtung zum kontinuierlichen selektiven Bandgalvanisieren
JPS5648198A (en) * 1979-09-26 1981-05-01 Matsushita Electric Ind Co Ltd Method of manufacturing flexible printed circuit board
EP0055130B1 (de) * 1980-12-23 1984-07-25 S.G. Owen Limited Verfahren zum selektiven Galvanisieren
NL8101106A (nl) * 1981-03-07 1982-10-01 Galentan Ag Inrichting voor het galvanisch aanbrengen van vlekvormige bedekkingen.
US4376017A (en) * 1982-01-04 1983-03-08 Western Electric Co., Inc. Methods of electrolytically treating portions of digitated strips and treating cell
US4404079A (en) * 1982-02-08 1983-09-13 National Semiconductor Corporation Plating mask support
DE3230660C1 (de) * 1982-08-02 1984-01-26 Basf Farben + Fasern Ag, 2000 Hamburg Verfahren und Vorrichtung zur Durchfuehrung einer Elektrotauchlackierung sowie Anwendung
US4600491A (en) * 1984-05-17 1986-07-15 Urquhart Thomas N Workpiece drying apparatus
JPH0660440B2 (ja) * 1986-07-22 1994-08-10 トヨタ自動車株式会社 電着塗装方法
NL8900229A (nl) * 1989-01-31 1990-08-16 Meco Equip Eng Inrichting voor het behandelen van strookvormige elementen.
JPH0774475B2 (ja) * 1989-09-20 1995-08-09 株式会社ジャパンエナジー 銀めっきの前処理液
JPH03229893A (ja) * 1990-02-02 1991-10-11 Seiko Epson Corp 電着塗装方法
JPH04206957A (ja) * 1990-11-30 1992-07-28 Toppan Printing Co Ltd リードフレームの製造方法
US5183724A (en) * 1990-12-18 1993-02-02 Amkor Electronics, Inc. Method of producing a strip of lead frames for integrated circuit dies in a continuous system
US5202222A (en) * 1991-03-01 1993-04-13 Shipley Company Inc. Selective and precise etching and plating of conductive substrates

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1409772B2 (de) 2001-07-20 2008-08-13 Imo Ingo Müller E.K. Verfahren zur selektiven galvanisierung eines bandartigen, metallischen trägermaterials
DE102005031948B3 (de) * 2005-07-08 2006-06-14 Höllmüller Maschinenbau GmbH Vorrichtungen und Verfahren zur elektrolytischen Behandlung von Folien von Rolle zu Rolle
EP1741806A1 (de) 2005-07-08 2007-01-10 Höllmüller Maschinenbau GmbH Vorrichtungen und Verfahren zur elektrolytischen Behandlung von Folien von Rolle zu Rolle

Also Published As

Publication number Publication date
ATE154835T1 (de) 1997-07-15
EP0616052A1 (de) 1994-09-21
JPH0774300A (ja) 1995-03-17
US5512154A (en) 1996-04-30
NL9300174A (nl) 1994-08-16
KR940018487A (ko) 1994-08-18
SG48345A1 (en) 1998-04-17
JP2780920B2 (ja) 1998-07-30
DE69403926D1 (de) 1997-07-31
HK1000135A1 (en) 1997-12-19
EP0616052B1 (de) 1997-06-25
US5702583A (en) 1997-12-30
MY110836A (en) 1999-05-31
KR100314946B1 (ko) 2002-02-19
TW410818U (en) 2000-11-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BESI PLATING B.V., DRUNEN, NL

8327 Change in the person/name/address of the patent owner

Owner name: MECO EQUIPMENT ENGINEERS B.V., DRUNEN, NL