DE69315323D1 - Optische sensor und verfahren zu seiner herstellung - Google Patents

Optische sensor und verfahren zu seiner herstellung

Info

Publication number
DE69315323D1
DE69315323D1 DE69315323T DE69315323T DE69315323D1 DE 69315323 D1 DE69315323 D1 DE 69315323D1 DE 69315323 T DE69315323 T DE 69315323T DE 69315323 T DE69315323 T DE 69315323T DE 69315323 D1 DE69315323 D1 DE 69315323D1
Authority
DE
Germany
Prior art keywords
production
optical sensor
optical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69315323T
Other languages
English (en)
Other versions
DE69315323T2 (de
Inventor
Manabu Yamada
Yutaka Maeda
Masaya Nakamura
Tomotsugu Terada
Makoto Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Application granted granted Critical
Publication of DE69315323D1 publication Critical patent/DE69315323D1/de
Publication of DE69315323T2 publication Critical patent/DE69315323T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/02—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by astronomical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/02016—Circuit arrangements of general character for the devices
    • H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02024—Position sensitive and lateral effect photodetectors; Quadrant photodiodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H01L31/02164—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Astronomy & Astrophysics (AREA)
  • Automation & Control Theory (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Optical Transform (AREA)
DE69315323T 1992-08-21 1993-08-19 Optische sensor und verfahren zu seiner herstellung Expired - Fee Related DE69315323T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP22303892A JPH0669536A (ja) 1992-08-21 1992-08-21 光位置検出装置の製造方法
PCT/JP1993/001165 WO1994005044A1 (en) 1992-08-21 1993-08-19 Optical sensor and method of its manufacture

Publications (2)

Publication Number Publication Date
DE69315323D1 true DE69315323D1 (de) 1998-01-02
DE69315323T2 DE69315323T2 (de) 1998-04-02

Family

ID=16791873

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69315323T Expired - Fee Related DE69315323T2 (de) 1992-08-21 1993-08-19 Optische sensor und verfahren zu seiner herstellung

Country Status (5)

Country Link
US (1) US5517017A (de)
EP (1) EP0613183B1 (de)
JP (1) JPH0669536A (de)
DE (1) DE69315323T2 (de)
WO (1) WO1994005044A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5602384A (en) * 1992-11-06 1997-02-11 Nippondenso Co., Ltd. Sunlight sensor that detects a distrubition and amount of thermal load
US7145121B1 (en) * 2000-08-11 2006-12-05 Cook Jr Koy B Monolithic silicon integrated circuit for detecting azimuth and elevation of incident radiation and method for using same
US20040217258A1 (en) * 2003-04-30 2004-11-04 Clugston P. Edward Solar sensor including reflective element to transform the angular response
US7585068B2 (en) * 2004-12-03 2009-09-08 Dynamic Eye, Inc. Method and apparatus for calibrating glare-shielding glasses
WO2007111507A2 (en) * 2006-03-24 2007-10-04 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Light sensor
US8619249B2 (en) * 2007-10-26 2013-12-31 Koninklijke Philips N.V. Light angle selecting light detector device
CN104247018B (zh) * 2012-03-29 2016-11-23 旭化成微电子株式会社 受光器件
JP6051399B2 (ja) * 2014-07-17 2016-12-27 関根　弘一 固体撮像装置及びその製造方法
CN106791086B (zh) * 2016-12-19 2020-01-14 维沃移动通信有限公司 一种移动终端的控制方法及移动终端
JP6842169B2 (ja) * 2017-07-11 2021-03-17 国立研究開発法人宇宙航空研究開発機構 シート状構造体、形状推定方法、及び宇宙機

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4018532A (en) * 1975-09-24 1977-04-19 Nasa Sun direction detection system
JPS5664611A (en) * 1979-10-31 1981-06-01 Nec Corp Device for measuring solar angle
JPS5688364A (en) * 1979-12-20 1981-07-17 Seiko Epson Corp Semiconductor device
JPS57173256A (en) * 1981-04-20 1982-10-25 Nippon Telegr & Teleph Corp <Ntt> Image sensor
JPS59104084U (ja) * 1982-12-28 1984-07-13 横河電機株式会社 多点電流計測装置の検査回路
JPS6057780A (ja) * 1983-09-07 1985-04-03 Toshiba Corp 固体撮像装置およびその製造方法
US4727407A (en) * 1984-07-13 1988-02-23 Fuji Xerox Co., Ltd. Image sensor
JPS61250601A (ja) * 1985-04-30 1986-11-07 Toray Ind Inc 反射防止性を有する光学材料およびその製造方法
JP2566910B2 (ja) * 1985-08-19 1996-12-25 鐘淵化学工業株式会社 平面センサ−
JPS6271713A (ja) * 1985-09-26 1987-04-02 Diesel Kiki Co Ltd 自動車用空調装置の日射方向検出装置
JPS62140407A (ja) * 1985-12-16 1987-06-24 Canon Electronics Inc ロ−タリ−トランス
JPS62211506A (ja) * 1986-03-12 1987-09-17 Toshiba Corp デジタル太陽センサ
JPH0640023B2 (ja) * 1986-09-25 1994-05-25 株式会社神戸製鋼所 光入力の位置・分散検出方法および装置
US4879470A (en) * 1987-01-16 1989-11-07 Canon Kabushiki Kaisha Photoelectric converting apparatus having carrier eliminating means
JPS63278284A (ja) * 1987-05-09 1988-11-15 Fujitsu Ltd 二次元光位置検出装置
JP2554119B2 (ja) * 1988-02-26 1996-11-13 株式会社日立製作所 自動車空調用日射センサー
JPS6419107A (en) * 1988-04-02 1989-01-23 Sanshin Kogyo Kk Separated lubricating device for outboard motor
SE462665B (sv) * 1988-12-22 1990-08-06 Saab Scania Ab Givare till en klimatanlaeggning foer fordon
GB2253516B (en) * 1991-02-26 1995-07-12 Nippon Denso Co Device for detecting position and intensity of light and position detecting element to be employed therein
JP3123172B2 (ja) * 1991-02-26 2001-01-09 株式会社デンソー 光の位置と強さを検出する装置
JPH04343276A (ja) * 1991-05-20 1992-11-30 Nippondenso Co Ltd 光位置検出装置

Also Published As

Publication number Publication date
EP0613183A4 (de) 1994-11-17
EP0613183A1 (de) 1994-08-31
US5517017A (en) 1996-05-14
EP0613183B1 (de) 1997-11-19
DE69315323T2 (de) 1998-04-02
WO1994005044A1 (en) 1994-03-03
JPH0669536A (ja) 1994-03-11

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee