DE69609627D1 - Beschleunigungssensor und verfahren zu seiner herstellung - Google Patents

Beschleunigungssensor und verfahren zu seiner herstellung

Info

Publication number
DE69609627D1
DE69609627D1 DE69609627T DE69609627T DE69609627D1 DE 69609627 D1 DE69609627 D1 DE 69609627D1 DE 69609627 T DE69609627 T DE 69609627T DE 69609627 T DE69609627 T DE 69609627T DE 69609627 D1 DE69609627 D1 DE 69609627D1
Authority
DE
Germany
Prior art keywords
production
acceleration sensor
acceleration
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69609627T
Other languages
English (en)
Inventor
Olivier Lefort
Sylvie Pedraza-Ramos
Rene Presset
Pierre Giroud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Application granted granted Critical
Publication of DE69609627D1 publication Critical patent/DE69609627D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Pressure Sensors (AREA)
DE69609627T 1995-12-12 1996-12-10 Beschleunigungssensor und verfahren zu seiner herstellung Expired - Lifetime DE69609627D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9514686A FR2742230B1 (fr) 1995-12-12 1995-12-12 Accelerometre et procede de fabrication
PCT/FR1996/001968 WO1997022010A1 (fr) 1995-12-12 1996-12-10 Accelerometre et procede de fabrication

Publications (1)

Publication Number Publication Date
DE69609627D1 true DE69609627D1 (de) 2000-09-07

Family

ID=9485396

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609627T Expired - Lifetime DE69609627D1 (de) 1995-12-12 1996-12-10 Beschleunigungssensor und verfahren zu seiner herstellung

Country Status (10)

Country Link
US (1) US6089093A (de)
EP (1) EP0866972B1 (de)
JP (1) JP2000502441A (de)
AU (1) AU706765B2 (de)
BR (1) BR9612776A (de)
CA (1) CA2239106A1 (de)
DE (1) DE69609627D1 (de)
FR (1) FR2742230B1 (de)
NO (1) NO982667L (de)
WO (1) WO1997022010A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2788163B1 (fr) 1998-12-30 2001-03-16 Sextant Avionique Actionneur electromagnetique equipe de moyens d'ajustement de la position de son element polaire mobile
GB9912407D0 (en) * 1999-05-28 1999-09-15 Fisher Tortolano Systems Limit Navigation apparatus and method
US6672168B2 (en) 2001-09-24 2004-01-06 Andrew Braugh Multi-level machine vibration tester marker pen
JP2003172745A (ja) * 2001-09-26 2003-06-20 Hitachi Metals Ltd 半導体加速度センサ
US7185542B2 (en) * 2001-12-06 2007-03-06 Microfabrica Inc. Complex microdevices and apparatus and methods for fabricating such devices
US7372616B2 (en) * 2001-12-06 2008-05-13 Microfabrica, Inc. Complex microdevices and apparatus and methods for fabricating such devices
US20070121423A1 (en) * 2001-12-20 2007-05-31 Daniel Rioux Head-mounted display apparatus for profiling system
FR2834055B1 (fr) * 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
CA2366030A1 (en) 2001-12-20 2003-06-20 Global E Bang Inc. Profiling system
JP2003232803A (ja) * 2002-02-12 2003-08-22 Hitachi Metals Ltd 半導体型加速度センサ
FR2838423B1 (fr) * 2002-04-12 2005-06-24 Thales Sa Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondante
JP2004198280A (ja) * 2002-12-19 2004-07-15 Hitachi Metals Ltd 加速度センサ
FR2856789B1 (fr) * 2003-06-27 2005-08-26 Thales Sa Gyrometre a masse vibrante
KR101454123B1 (ko) * 2013-08-29 2014-10-22 삼성전기주식회사 가속도 센서

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5000817A (en) * 1984-10-24 1991-03-19 Aine Harry E Batch method of making miniature structures assembled in wafer form
DE3740688A1 (de) * 1987-12-01 1989-06-15 Messerschmitt Boelkow Blohm Mikromechanischer beschleunigungssensor mit hoher achsenselektivitaet
US5121633A (en) * 1987-12-18 1992-06-16 Nissan Motor Co., Ltd. Semiconductor accelerometer
US4882933A (en) * 1988-06-03 1989-11-28 Novasensor Accelerometer with integral bidirectional shock protection and controllable viscous damping
US5060504A (en) * 1988-09-23 1991-10-29 Automotive Systems Laboratory, Inc. Self-calibrating accelerometer
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
DE4027046A1 (de) * 1989-09-29 1991-04-11 Siemens Ag Vorrichtung zum pruefen der funktionsfaehigkeit und/oder eichen eines beschleunigungs-sensors, insbesondere eines aufprall-sensors fuer ein kraftfahrzeug, und verfahren zum betrieb der vorrichtung
DE4016472A1 (de) * 1990-05-22 1991-11-28 Bosch Gmbh Robert Verfahren zur herstellung von mikromechanischen sensoren mit ueberlastsicherung
FR2706634B1 (fr) * 1993-06-11 1995-07-21 Sextant Avionique Dispositif optique compact pour la vision nocturne et son application à des lunettes.
US5503285A (en) * 1993-07-26 1996-04-02 Litton Systems, Inc. Method for forming an electrostatically force balanced silicon accelerometer
FR2713449B1 (fr) * 1993-12-10 1996-01-05 Sextant Avionique Visière d'équipement de tête à transmission variable.
KR0139506B1 (ko) * 1994-10-07 1998-07-15 전성원 자체진단 기능을 구비한 대칭질량형 가속도계 및 그 제조방법

Also Published As

Publication number Publication date
FR2742230A1 (fr) 1997-06-13
EP0866972B1 (de) 2000-08-02
AU1101597A (en) 1997-07-03
US6089093A (en) 2000-07-18
JP2000502441A (ja) 2000-02-29
NO982667D0 (no) 1998-06-10
EP0866972A1 (de) 1998-09-30
CA2239106A1 (fr) 1997-06-19
BR9612776A (pt) 2001-01-02
NO982667L (no) 1998-08-11
FR2742230B1 (fr) 1998-01-09
AU706765B2 (en) 1999-06-24
WO1997022010A1 (fr) 1997-06-19

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Legal Events

Date Code Title Description
8332 No legal effect for de